H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2002
11/13/2002	EP0846334B1 Procedure for drying substrates
11/13/2002	EP0706715B1 Electrical charge transfer apparatus
11/13/2002	EP0626099B1 Method of manufacturing a high density electronic circuit module
11/13/2002	EP0263876B1 Ion beam scanning method and apparatus
11/13/2002	CN2520566Y Contact pin type integrated circuit joining device
11/13/2002	CN1379968A Production of dense mist of micrometric droplets in particular for extreme UV lithography
11/13/2002	CN1379915A Integrated circuit with at least capacitor and method for producing same
11/13/2002	CN1379913A Static random access memory (SRAM)
11/13/2002	CN1379866A Beam positioning in microlithographic writing
11/13/2002	CN1379803A Improved CMP products
11/13/2002	CN1379616A Multi layer circuit board and its manufacturing method
11/13/2002	CN1379513A Contactor device
11/13/2002	CN1379485A Cladding read out conducting wire for dynamic pinning soft reference layer
11/13/2002	CN1379482A Semiconductor device and active matrix type dispaly apparatus
11/13/2002	CN1379481A MOS package and its making method
11/13/2002	CN1379480A Semiconductor device and its manufacturing method
11/13/2002	CN1379479A Electric semiconductor device
11/13/2002	CN1379478A Semiconductor device
11/13/2002	CN1379477A Structure of silicon on insulating layer with substrate contact
11/13/2002	CN1379476A Non-volatile memory with improved coupling rate and its making method
11/13/2002	CN1379473A Semiconductor storage device
11/13/2002	CN1379472A Semiconductor storage device
11/13/2002	CN1379471A Semiconductor apparatus and its design method
11/13/2002	CN1379467A Semiconductor package
11/13/2002	CN1379466A Connecting pad with insulation intensifying structure and its making method
11/13/2002	CN1379464A Semiconductor crystal plate and its manufacturing method and semiconductor device and its manufacturing method
11/13/2002	CN1379463A Process for preparing electrically erasable and programmable ROM unit
11/13/2002	CN1379462A Process for preparing flash memory
11/13/2002	CN1379461A Double-embedding technology for internal connection line structure
11/13/2002	CN1379460A Method for orientation controlling growth of high-Tc ferroelectric film and prototype device of ferroelectric memory
11/13/2002	CN1379459A Apparatus used for evaluating polycrystalline silicon film
11/13/2002	CN1379458A Frequency modulation endpoint detecting method and programming device using it
11/13/2002	CN1379457A Process for finding out unity coupling coefficient of flash memory by GIDL method
11/13/2002	CN1379456A Intelligent tester
11/13/2002	CN1379455A Film carrying belt for electron spare parts assembling and its making method
11/13/2002	CN1379454A Method for preventing generation of metal wire phenomenon
11/13/2002	CN1379453A Method suitable for growing zinc sulfide (selenide)-manganese film of broad-band semiconductor
11/13/2002	CN1379452A Film transistor and its manufacturing method
11/13/2002	CN1379451A Method for forming electric conducting layer with less residuals of metal etching
11/13/2002	CN1379450A Formation method of insulating film and manufacturing method of semiconductor device
11/13/2002	CN1379449A Ion implantation method for generating window on dielectric layer
11/13/2002	CN1379448A Method for controlling adsorption state of particles adsorbed on surface of polished silicon substrate for integrated circuit
11/13/2002	CN1379447A Chip washing equipment preventing blocking of pipe wall
11/13/2002	CN1379446A Chemicomechanical grinding method combined with rotary coating
11/13/2002	CN1379445A Miniaturization process for reducing size of contact window
11/13/2002	CN1379444A Manufacturing method of semiconductor device and semiconductor device
11/13/2002	CN1379443A Manufacturing method of mask, manufacturing method of mask and semiconductor device using said mask
11/13/2002	CN1379442A Miniaturization process for multi-layer thin photoresist
11/13/2002	CN1379441A Method for decreasing side lobes of miniaturization process
11/13/2002	CN1379440A Apparatus for diagnosing failure of device based on signal of related device
11/13/2002	CN1379439A Plasma treatment
11/13/2002	CN1379438A Method of making semiconductor device
11/13/2002	CN1379437A Manufacturing method of semiconductor device, manufacturing equipment and control method of semiconductor device and control apparatus and semiconductor device
11/13/2002	CN1379436A Substrate linkage using selenylation reaction
11/13/2002	CN1379408A Embracing layer read/wright conductor of soft reference layer fixed in operation
11/13/2002	CN1379288A Etching method and quantitative analysis method of etching liquid
11/13/2002	CN1379286A 曝光装置 Exposure device
11/13/2002	CN1379277A Manufacturing method of liquid crystal display array substrate
11/13/2002	CN1378966A Storage container of liquid high purity substance
11/13/2002	CN1094257C 半导体器件封装 The semiconductor device package
11/13/2002	CN1094256C 制造半导体器件的工艺 Manufacturing process of a semiconductor device
11/13/2002	CN1094255C 一种晶片容器 A wafer container
11/13/2002	CN1094254C 半导体芯片注胶方法 Semiconductor chip plastic injection method
11/13/2002	CN1094253C 半导体装置之金属布线制造方法 The method of manufacturing a metal wiring of a semiconductor device
11/13/2002	CN1094252C 半导体器件和制造半导体器件的方法 The method of manufacturing a semiconductor device and a semiconductor device
11/13/2002	CN1094251C 半导体存储器件 A semiconductor memory device
11/13/2002	CN1094208C 光敏正作用光敏组合物及其生产方法 Photosensitive positive working photosensitive composition and production method thereof
11/12/2002	US6481004 Circuit pattern design method, exposure method, charged-particle beam exposure system
11/12/2002	US6481002 System and method for compressing LSI mask writing data
11/12/2002	US6480997 Automatic placement and routing device and method of automatic placement and routing
11/12/2002	US6480986 IC substrate noise modeling including extracted capacitance for improved accuracy
11/12/2002	US6480979 Semiconductor integrated circuits and efficient parallel test methods
11/12/2002	US6480807 Micropattern measuring method and apparatus, and recording medium that records micropattern measuring program
11/12/2002	US6480755 Process control device and process control method permitting processing order and processing condition to be changed while manufacturing process continues
11/12/2002	US6480577 Active matrix substrate, method of manufacturing same, and flat-panel image sensor
11/12/2002	US6480518 Synthetic quartz glass member for use in ArF excimer laser lithography
11/12/2002	US6480420 Semiconductor memory device having source areas of memory cells supplied with a common voltage
11/12/2002	US6480418 Semiconductor non-volatile storage
11/12/2002	US6480415 Nonvolatile semiconductor memory device
11/12/2002	US6480412 Magnetization control method, information storage method, magnetic functional device, and information storage device
11/12/2002	US6480411 Magnetoresistance effect type memory, and method and device for reproducing information from the memory
11/12/2002	US6480407 Reduced area sense amplifier isolation layout in a dynamic RAM architecture
11/12/2002	US6480369 System for receiving and retaining a substrate
11/12/2002	US6480330 Ultraviolet polarization beam splitter for microlithography
11/12/2002	US6480324 Methods involving direct write optical lithography
11/12/2002	US6480261 Photolithographic system for exposing a wafer using a programmable mask
11/12/2002	US6480260 Mask clamping apparatus, e.g. for a lithographic apparatus
11/12/2002	US6480124 CAD data compressing method and apparatus thereof
11/12/2002	US6480092 Resistor trimming method
11/12/2002	US6480086 Inductor and transformer formed with multi-layer coil turns fabricated on an integrated circuit substrate
11/12/2002	US6480059 Method to reduce timing skews in I/O circuits and clock drivers caused by fabrication process tolerances
11/12/2002	US6480053 Semiconductor device having an internal power supply circuit
11/12/2002	US6480044 Semiconductor circuit configuration
11/12/2002	US6480028 Programmable logic device architectures with super-regions having logic regions and memory region
11/12/2002	US6480026 Multi-functional I/O buffers in a field programmable gate array (FPGA)
11/12/2002	US6480017 Evaluating pattern for measuring an erosion of a semiconductor wafer polished by a chemical mechanical polishing
11/12/2002	US6480012 Probe card device
11/12/2002	US6479991 Stage mechanism, exposure apparatus and device manufacturing method in which a coil unit of a driving mechanism is moved substantially in synchronism with a stage
11/12/2002	US6479984 Fixed guide for singulator arm of semiconductor handler
11/12/2002	US6479982 Rotator for a module integrated circuit (IC) handler

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