H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2002
11/26/2002	US6487712 Method of manufacturing mask for conductive wirings in semiconductor device
11/26/2002	US6487711 Method of analyzing factor responsible for errors in wafer pattern, and apparatus for producing photolithographic mask
11/26/2002	US6487707 Layout design system of semiconductor ic device, layout design method of semiconductor ic device and computer-readable recording medium on which programs for allowing computer to execute respective means in the system or respective steps in the method are recorded
11/26/2002	US6487688 Method for testing circuits with tri-state drivers and circuit for use therewith
11/26/2002	US6487511 Method and apparatus for measuring cumulative defects
11/26/2002	US6487503 Method of estimating shape of chemically amplified resist
11/26/2002	US6487472 Semiconductor device manufacturing facility with a diagnosis system
11/26/2002	US6487142 Synchronous dynamic random access memory
11/26/2002	US6487130 Semiconductor integrated circuit device
11/26/2002	US6487122 Multi-value semiconductor memory device with write verify circuit
11/26/2002	US6487120 Boosted voltage generating circuit and semiconductor memory device having the same
11/26/2002	US6487119 Non-volatile read only memory and its manufacturing method
11/26/2002	US6487118 Semiconductor integrated circuit device, method of investigating cause of failure occurring in semiconductor integrated circuit device and method of verifying operation of semiconductor integrated circuit device
11/26/2002	US6487117 Method for programming NAND-type flash memory device using bulk bias
11/26/2002	US6487110 Nonvolatile solid-state memory device using magnetoresistive effect and recording and reproducing method of the same
11/26/2002	US6487108 MRAM configuration
11/26/2002	US6487107 Retention time of memory cells by reducing leakage current
11/26/2002	US6487104 Semiconductor memory device
11/26/2002	US6487100 Semiconductor integrated circuit device and contactless electronic device
11/26/2002	US6487063 Electrostatic wafer chuck, and charged-particle-beam microlithography apparatus and methods comprising same
11/26/2002	US6487060 Oxide protection for a booster circuit
11/26/2002	US6486965 Apparatus for measuring depth and gradient of trench in semiconductor device and method thereof
11/26/2002	US6486954 Overlay alignment measurement mark
11/26/2002	US6486941 Guideless stage
11/26/2002	US6486940 High numerical aperture catadioptric lens
11/26/2002	US6486929 Bonded layer semiconductor device
11/26/2002	US6486917 Image-pickup apparatus, fabrication method thereof, and camera system
11/26/2002	US6486829 Integrated electronic circuit comprising an oscillator with passive circuit elements
11/26/2002	US6486796 Relative-displacement detecting unit
11/26/2002	US6486765 Transformer
11/26/2002	US6486729 Potential detector and semiconductor integrated circuit
11/26/2002	US6486705 Signal distribution scheme in field programmable gate array (FPGA) or field programmable system chip (FPSC) including cycle stealing units
11/26/2002	US6486688 Semiconductor device testing apparatus having a contact sheet and probe for testing high frequency characteristics
11/26/2002	US6486687 Wafer probe station having environment control enclosure
11/26/2002	US6486686 Apparatus for testing a bare-chip LSI mounting on a printed board
11/26/2002	US6486565 Semiconductor device
11/26/2002	US6486564 Heat dissipation module for a BGA IC
11/26/2002	US6486563 Wafer scale packaging scheme
11/26/2002	US6486562 Circuit device with bonding strength improved and method of manufacturing the same
11/26/2002	US6486560 Semiconductor device fabricated by a method of reducing electromigration in copper lines by forming an interim layer of calcium-doped copper seed layer in a chemical solution
11/26/2002	US6486559 Copper wiring structure comprising a copper material buried in a hollow of an insulating film and a carbon layer between the hollow and the copper material in semiconductor device and method of fabricating the same
11/26/2002	US6486558 Semiconductor device having a dummy pattern
11/26/2002	US6486557 Hybrid dielectric structure for improving the stiffness of back end of the line structures
11/26/2002	US6486555 Semiconductor device having a contact structure using aluminum
11/26/2002	US6486554 Molded body for PBGA and chip-scale packages
11/26/2002	US6486551 Wired board and method of producing the same
11/26/2002	US6486550 Locking mechanism for detachably securing a wafer carrier to a conveyor
11/26/2002	US6486549 Semiconductor module with encapsulant base
11/26/2002	US6486544 Semiconductor device and method manufacturing the same, circuit board, and electronic instrument
11/26/2002	US6486543 Packaged semiconductor device having bent leads
11/26/2002	US6486542 Semiconductor-supporting devices, processes for the production of the same, joined bodies and processes for the production of the same
11/26/2002	US6486541 Semiconductor device and fabrication method
11/26/2002	US6486537 Semiconductor package with warpage resistant substrate
11/26/2002	US6486536 U-shape tape for BOC FBGA package to improve moldability
11/26/2002	US6486533 Metallization structures for microelectronic applications and process for forming the structures
11/26/2002	US6486531 Contact structure with a lower interconnection having t-shaped portion in cross section and method for forming the same
11/26/2002	US6486530 Integration of anodized metal capacitors and high temperature deposition capacitors
11/26/2002	US6486529 Structure of merged vertical capacitor inside spiral conductor for RF and mixed-signal applications
11/26/2002	US6486528 Silicon segment programming apparatus and three terminal fuse configuration
11/26/2002	US6486526 Crack stop between neighboring fuses for protection from fuse blow damage
11/26/2002	US6486525 Deep trench isolation for reducing soft errors in integrated circuits
11/26/2002	US6486520 Structure and method for a large-permittivity gate using a germanium layer
11/26/2002	US6486519 Semiconductor memory device with reduce coupling capacitance
11/26/2002	US6486518 Structures and method with bitline self-aligned to vertical connection
11/26/2002	US6486517 Semiconductor device having shallow trench isolation structure and manufacturing method thereof
11/26/2002	US6486516 Semiconductor device and a method of producing the same
11/26/2002	US6486515 ESD protection network used for SOI technology
11/26/2002	US6486514 Wiring line assembly for thin film transistor array substrate and a method for fabricating the same
11/26/2002	US6486513 Semiconductor device
11/26/2002	US6486511 Solid state RF switch with high cutoff frequency
11/26/2002	US6486510 Reduction of reverse short channel effects by implantation of neutral dopants
11/26/2002	US6486509 Non-volatile memory cell
11/26/2002	US6486508 Non-volatile semiconductor memory devices with control gates overlapping pairs of floating gates
11/26/2002	US6486507 Split gate type memory cell having gate insulating layers appropriately regulated in thickness and process of fabrication thereof
11/26/2002	US6486506 Flash memory with less susceptibility to charge gain and charge loss
11/26/2002	US6486505 Semiconductor contact and method of forming the same
11/26/2002	US6486502 Nitride based transistors on semi-insulating silicon carbide substrates
11/26/2002	US6486500 Led structure having a schottky contact and manufacturing method
11/26/2002	US6486497 Liquid crystal device, projection type display device and driving circuit
11/26/2002	US6486496 Polysilicon thin film transistor structure
11/26/2002	US6486495 Method for manufacturing a semiconductor device
11/26/2002	US6486494 Composition for a wiring, a wiring using the composition, manufacturing method thereof, a display using the wiring and a manufacturing method thereof
11/26/2002	US6486492 Integrated critical dimension control for semiconductor device manufacturing
11/26/2002	US6486489 Transistor
11/26/2002	US6486478 Gas cluster ion beam smoother apparatus
11/26/2002	US6486472 Inspecting system using electron beam and inspecting method using same
11/26/2002	US6486444 Load-lock with external staging area
11/26/2002	US6486437 Apparatus for transforming semiconducting thin layer
11/26/2002	US6486431 Toroidal low-field reactive gas source
11/26/2002	US6486415 Compliant layer for encapsulated columns
11/26/2002	US6486283 Organic anti-reflective coating polymer, anti-reflective coating composition methods of preparation thereof
11/26/2002	US6486085 Aluminum nitride sintered bodies and semiconductor-producing members including same
11/26/2002	US6486083 Semiconductor device manufacturing method and semiconductor manufacturing apparatus
11/26/2002	US6486082 CVD plasma assisted lower dielectric constant sicoh film
11/26/2002	US6486081 Gas distribution system for a CVD processing chamber
11/26/2002	US6486080 Chemical vapor deposition; reacting a precursor such as metal alkoxide, metal alkoxide containing halogen, metal beta-diketonate, metal oxoacid, metal acetate, or metal alkene with oxidant gas, annealing for densification
11/26/2002	US6486079 Method for stabilizing low dielectric constant materials
11/26/2002	US6486078 Super critical drying of low k materials
11/26/2002	US6486077 Silicon nitride film, semiconductor device, and method for fabricating semiconductor device
11/26/2002	US6486076 Thin film deposition apparatus

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