Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
08/2011
08/03/2011CN101142252B (meth)acryloyl group-containing aromatic isocyanate compound and production process thereof
08/03/2011CN101027610B Antireflective compositions for photoresists
08/02/2011USRE42593 Photo-curable resin composition used for photo-fabrication of three-dimensional object
08/02/2011USRE42588 Control system for a two chamber gas discharge laser system
08/02/2011US7990517 Immersion exposure apparatus and device manufacturing method with residual liquid detector
08/02/2011US7990516 Immersion exposure apparatus and device manufacturing method with liquid detection apparatus
08/02/2011US7989156 Substrate treatment method and substrate treatment apparatus
08/02/2011US7989155 Lithographic method
08/02/2011US7989154 Polymer or resist pattern, and metal film pattern, metal pattern and plastic mold using the same, and fabrication methods thereof
08/02/2011US7989153 Method and apparatus for selectively patterning free standing quantum DOT (FSQDT) polymer composites
08/02/2011US7989150 Manufacturing method of optical waveguide
08/02/2011US7989149 Mold core and method for fabricating mold core
08/02/2011US7989148 Method for forming photoelectric composite board
08/02/2011US7989147 Method for fabricating liquid crystal display device
08/02/2011US7989146 Component fabrication using thermal resist materials
08/02/2011US7989145 Method for forming fine pattern of semiconductor device
08/02/2011US7989144 Antireflective coating composition
08/02/2011US7989143 Method of manufacturing a semiconductor device having an organic thin film transistor
08/02/2011US7989140 Curable composition, image forming material, and planographic printing plate precursor
08/02/2011US7989138 Fluorine-containing compound, resist composition for immersion exposure, and method of forming resist pattern
08/02/2011US7989137 Resist composition and pattern-forming method using the same
08/02/2011US7989136 Photoresist composition and method of forming a photoresist pattern using the same
08/02/2011US7989122 Photomask blank, photomask, and methods of manufacturing the same
08/02/2011US7989032 UV-photopolymerizable composition for producing organic conductive layers, patterns or prints
08/02/2011US7988818 Device for liquid treatment of wafer-shaped articles
08/02/2011US7988136 Stage device for a vacuum chamber
08/02/2011US7987977 Hearing aid package
07/2011
07/28/2011WO2011091228A1 Liquid radiation curable resins capable of curing into layers with selective visual effects and methods for the use thereof
07/28/2011WO2011090233A1 Method for fabricating a porous carbon structure using optical interference lithography, and porous carbon structure fabricated by same
07/28/2011WO2011090217A1 Black curable composition for wafer-level lens, and wafer-level lens
07/28/2011WO2011090114A1 Developing solution for photoresist on substrate including conductive polymer, and method for forming pattern
07/28/2011WO2011089967A1 Photosensitive resin composition, cured film, method for forming cured film, organic el display device, and liquid crystal display device
07/28/2011WO2011089895A1 Light-sensitive polymer composition, method for producing pattern, and electronic component
07/28/2011WO2011089894A1 Light-sensitive polymer composition, method for producing pattern, and electronic component
07/28/2011WO2011089877A1 Positive photosensitive resin composition, method for producing patterned cured film and electronic component
07/28/2011WO2011089867A1 Rendering device and rendering method
07/28/2011WO2011089828A1 Light irradiation device, light irradiation method and liquid crystal panel manufacturing method
07/28/2011WO2011089772A1 Exposure apparatus, liquid crystal display device, and method for manufacturing liquid crystal display device
07/28/2011WO2011089368A1 System and method for assessing inhomogeneous deformations in multilayer plates
07/28/2011WO2011089033A1 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same
07/28/2011WO2011020690A3 Method for producing a mirror having at least two mirror surfaces, mirror of a projection exposure apparatus for microlithography, and projection exposure apparatus
07/28/2011US20110184139 Metal compositions and methods of making same
07/28/2011US20110183273 Water Mark Defect Prevention for Immersion Lithography
07/28/2011US20110183272 Method for fabricating microbeads and microbeads
07/28/2011US20110183271 Method of manufacturing mask for depositing thin film
07/28/2011US20110183270 Method for forming three-dimensional pattern
07/28/2011US20110183269 Methods Of Forming Patterns, And Methods For Trimming Photoresist Features
07/28/2011US20110183268 Process for making contained layers and devices made with same
07/28/2011US20110183267 Method of producing multilayer printed wiring board and photosensitive dry film used therefor
07/28/2011US20110183266 Semiconductor Device Manufacturing Methods
07/28/2011US20110183265 Polymer-based long life fusers and their methods of making
07/28/2011US20110183264 Resist processing method and use of positive type resist composition
07/28/2011US20110183263 Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition
07/28/2011US20110183262 Positive resist compositions and patterning process
07/28/2011US20110183261 Developer composition
07/28/2011US20110183260 Flexographic processing solution and use
07/28/2011US20110183259 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same
07/28/2011US20110183258 Positive resist composition, pattern forming method using the composition, and compound for use in the composition
07/28/2011US20110183257 Lithographic apparatus and device manufacturing method
07/28/2011US20110183115 Positive typed photosensitive composition
07/28/2011US20110181859 Lithographic apparatus and device manufacturing method
07/28/2011US20110181823 Production method of liquid crystal display including scanning exposure
07/28/2011US20110180097 Thermal isolation assemblies for wafer transport apparatus and methods of use thereof
07/28/2011DE112005003585B4 Verfahren und System für die Fotolithografie A method and system for lithography
07/28/2011DE10333248B4 Verwendung einer zweiten Belichtung zum Unterstützen einer PSM-Belichtung beim Drucken eines engen Bereichs angrenzend an eine grosse Struktur Using a second exposure for supporting PSM exposure when printing a narrow range adjacent to a large structure
07/28/2011DE102010056555A1 Colled spider and method for grazing-incidence collectors Colled spider and method for grazing-incidence collectors
07/28/2011DE102010000169A1 Photosensitive Substanz mit Thioxanthonen als photodeaktivierbarem Photoinitiator zur Herstellung von kleinen Strukturen The photosensitive substance thioxanthones as photodeaktivierbarem photoinitiator for the production of small structures
07/28/2011DE102008050446B4 Verfahren und Vorrichtungen zur Ansteuerung von Mikrospiegeln Methods and devices for the control of micromirrors
07/28/2011DE102006017938B4 Fokusüberwachungsverfahren, Photomaske und photolithographisches System Focus monitoring method, photomask and photolithography system
07/28/2011DE102006017336B4 Beleuchtungssystem mit Zoomobjektiv Lighting system with zoom lens
07/27/2011EP2348514A1 Method for producing substrate having patterned conductive polymer film and substrate having patterned conductive polymer film
07/27/2011EP2348361A1 Negative-type dye-containing curable composition, color filter and method for production thereof both utilizing the composition, and solid imaging element
07/27/2011EP2348360A1 Photoresist comprising nitrogen-containing compound
07/27/2011EP2348359A1 Roller type nano-imprint device, mold roll for the roller type nano-imprint device, fixed roll for the roller type nano-imprint device, and nano-imprint sheet manufacturing method
07/27/2011EP2347892A2 Method for producing very wide defect-free micro-optical light diverter elements
07/27/2011EP2347305A1 A method and installation for writing large gratings
07/27/2011EP2347304A1 Methods for performing photolithography using barcs having graded optical properties
07/27/2011EP2347303A1 Surface patterning with functional polymers
07/27/2011EP2347302A1 Composition for producing optical elements having gradient structure
07/27/2011EP2347036A1 Heterogenous liga method
07/27/2011EP2346672A1 System and resin for rapid prototyping
07/27/2011EP2346671A1 Improvements for rapid prototyping apparatus
07/27/2011EP1930382B1 Coating materials consisting of low- or medium-molecular organic compounds
07/27/2011EP1860477B1 Projection optical system, exposure equipment and device manufacturing method
07/27/2011EP1700341B1 Wafer with optical control modules in ic fields
07/27/2011EP1470207B1 Aqueous stripping and cleaning composition
07/27/2011EP1177479B1 Streamlined ic mask layout optical and process correction through correction reuse
07/27/2011CN1983025B Fabrication method for photomask, fabrication method for device and monitoring method for photomask
07/27/2011CN1719338B Ultraviolet ray solidification cation type etching glue for nano embossing
07/27/2011CN102138201A Method for optical proximity correction, design and manufacturing of a reticle using variable shaped beam lithography
07/27/2011CN102138106A Method for optical proximity correction, design and manufacturing of a reticle using character projection lithography
07/27/2011CN102138105A Detection of contaminating substances in an EUV lithography apparatus
07/27/2011CN102138104A Photosensitive resin composition for protective film of printed wiring board for semiconductor package
07/27/2011CN102136484A Indium columns for face-down bonding interconnection of infrared focal plane and preparation method thereof
07/27/2011CN102136447A Method of manufacturing semiconductor integrated circuit device
07/27/2011CN102136415A Method for improving roughness of line edge of photoetching pattern in semiconductor process
07/27/2011CN102135735A Microelectronic cleaning and arc remover compositions
07/27/2011CN102135734A Photoresistance removing method
07/27/2011CN102135733A Method for removing photoresistance
07/27/2011CN102135732A Light irradiation device