| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
|---|
| 07/11/2012 | CN102566254A Methods for performing model-based lithography guided layout design |
| 07/11/2012 | CN102566136A Color liquid crystal display device |
| 07/11/2012 | CN102566134A Method for manufacturing substrate with colored film and manufacturing device |
| 07/11/2012 | CN102566011A Projection optical system |
| 07/11/2012 | CN102565983A Axial fine-adjustment device for movable mirror |
| 07/11/2012 | CN102565905A Preparation method for convex-surface double-blazed grating |
| 07/11/2012 | CN102565904A Method for preparing large-size grating by utilizing grating imaging scan lithography |
| 07/11/2012 | CN102565903A Method for preparing random dammann grating |
| 07/11/2012 | CN102564303A Measuring apparatus and measuring method |
| 07/11/2012 | CN102563330A Safety protection device of workpiece table |
| 07/11/2012 | CN102558523A Polymer, method for producing the same, and resist composition containing the same |
| 07/11/2012 | CN102558510A Radiation curable resin composition and rapid three dimensional imaging process using the same |
| 07/11/2012 | CN102558202A Dipyrromethene metal complex compound, and colored composition, ink sheet for recording heat-sensitive transfer, color toner, inkjet recording ink and color filter containing the dipyrromethene metal complex compound |
| 07/11/2012 | CN102557945A Novel Phenol Compounds and Positive Photosensitive Resin Composition Including the Same |
| 07/11/2012 | CN102555419A Method for wax printing by carving and printing of iron roller and method for processing iron roller |
| 07/11/2012 | CN102553506A Method for directly forming pattern on polydimethylsiloxane (PDMS) through photoetching |
| 07/11/2012 | CN102033425B Method for manufacturing micromechanical shutter |
| 07/11/2012 | CN101928489B Pigment dispersion, pigment photoresist and color filter |
| 07/11/2012 | CN101923295B Rotary label and method for monitoring photolithographic quality using same |
| 07/11/2012 | CN101894751B Method of removing photoresist |
| 07/11/2012 | CN101807004B Method for manufacturing working printing plate for production of color kinescope screen printing plate |
| 07/11/2012 | CN101608944B Optical fiber vibration sensing head and manufacturing method thereof |
| 07/11/2012 | CN101592864B Single-component water-emulsion type rotary screen stenciling sensitive material |
| 07/11/2012 | CN101479665B Optical imaging device with thermal attenuation |
| 07/11/2012 | CN101313249B Photosensitive transfer material, partition wall and method for forming same, optical device and method for producing same, and display |
| 07/11/2012 | CN101295132B Method of forming a thin film pattern and method of fabricating a liquid crystal display device |
| 07/11/2012 | CN101285959B Color filter substrate for liquid crystal display and method of fabricating the same |
| 07/10/2012 | US8218852 System and method for repairing composite parts |
| 07/10/2012 | US8218127 Exposure apparatus and device manufacturing method |
| 07/10/2012 | US8218125 Immersion lithographic apparatus with a projection system having an isolated or movable part |
| 07/10/2012 | US8217095 Active energy ray-curable ink-jet printing ink |
| 07/10/2012 | US8216775 Anti-reflection film forming material, and method for forming resist pattern using the same |
| 07/10/2012 | US8216774 Patterning process |
| 07/10/2012 | US8216773 Broadband plasma light sources for substrate processing |
| 07/10/2012 | US8216772 Method for manufacturing mechanical shutter blades using beryllium-copper alloy substrate |
| 07/10/2012 | US8216771 Method for making a lithographic printing plate |
| 07/10/2012 | US8216769 Negative working, heat sensitive lithographic printing plate precursor |
| 07/10/2012 | US8216768 Photoacid generator and photoreactive composition |
| 07/10/2012 | US8216767 Patterning process and chemical amplified photoresist with a photodegradable base |
| 07/10/2012 | US8216766 Polymer, polymer preparation method, resist composition and patterning process |
| 07/10/2012 | US8216765 Reimageable and reusable medium and method of producing and using the reimageable and reusable medium |
| 07/10/2012 | US8216764 Positive resist composition and method of forming resist pattern |
| 07/10/2012 | US8216763 Photosensitive resin composition and method of forming pattern |
| 07/10/2012 | US8216749 Curable composition, negative type color filter and method of producing the same |
| 07/10/2012 | CA2652294C New materials for lithographic plates coatings, lithographic plates and coatings containing same, methods of preparation and use |
| 07/05/2012 | WO2012091977A1 Simultaneous measurement of multiple overlay errors |
| 07/05/2012 | WO2012091453A1 Photosensitive resin composition, overcoat layer and electronic device using the same |
| 07/05/2012 | WO2012091401A2 Photosensitive resin composition for resin black matrix |
| 07/05/2012 | WO2012091271A2 Method for manufacturing nano-imprint mould, method for manufacturing light-emitting diode using the nano imprint mould manufactured thereby, and light-emitting diode manufactured thereby |
| 07/05/2012 | WO2012091224A1 Photosensitive resin composition for color filter and color filter using same |
| 07/05/2012 | WO2012091163A1 Liquid immersion member, immersion exposure apparatus, exposing method, device fabricating method, program, and storage medium |
| 07/05/2012 | WO2012091162A1 Liquid immersion member and cleaning method |
| 07/05/2012 | WO2012090965A1 Photosensitive phenol resin composition for alkaline development, cured relief pattern, method for producing semiconductor, and biphenyl-diyl-trihydroxybenzene resin |
| 07/05/2012 | WO2012090959A1 Radiation-sensitive resin composition and compound |
| 07/05/2012 | WO2012090896A1 Photosensitive resin laminate |
| 07/05/2012 | WO2012090752A1 Photocurable resin composition |
| 07/05/2012 | WO2012090639A1 Planographic printing plate precursor and planographic printing method |
| 07/05/2012 | WO2012090532A1 Photocurable resin composition, dry film and cured object obtained therefrom, and printed wiring board obtained using these |
| 07/05/2012 | WO2012090408A1 Aromatic hydrocarbon resin, composition for forming lithographic underlayer film, and method for forming multilayer resist pattern |
| 07/05/2012 | WO2012089934A1 Process for fabricating high-precision objects by high-resolution lithography and dry deposition and objects thus obtained |
| 07/05/2012 | WO2012089224A1 Illumination system of a microlithographic projection exposure apparatus |
| 07/05/2012 | WO2012089072A1 Infrared sensitive and chemical treatment free photosensitive composition and lithographic plate fabricated by using same |
| 07/05/2012 | WO2012089002A1 Large view field projection lithography objective |
| 07/05/2012 | WO2012046233A3 Global landmark method for critical dimension uniformity reconstruction |
| 07/05/2012 | US20120172557 Photosensitive resin composition containing copolymer |
| 07/05/2012 | US20120172274 Resist remover composition and method for removing resist using the composition |
| 07/05/2012 | US20120171866 Substrate structure including functional region and method for transferring functional region |
| 07/05/2012 | US20120171865 Method for fabricating fine patterns |
| 07/05/2012 | US20120171627 Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing method |
| 07/05/2012 | US20120171626 Compositions comprising base-reactive component and processes for photolithography |
| 07/05/2012 | US20120171625 Immersion exposure apparatus and method of operating thereof |
| 07/05/2012 | US20120171624 Printed circuit board for optical waveguide and method of manufacturing the same |
| 07/05/2012 | US20120171623 Fabrication of a high fill ratio silicon spatial light modulator |
| 07/05/2012 | US20120171622 Filter, exposure apparatus, and method of manufacturing device |
| 07/05/2012 | US20120171621 Method for manufacturing electronic device and electronic device |
| 07/05/2012 | US20120171620 Method of Improving Print Performance in Flexographic Printing Plates |
| 07/05/2012 | US20120171619 Method of studying chirality controlled artificial kagome spin ice building blocks |
| 07/05/2012 | US20120171618 Actinic-ray- or radiation-sensitive resin composition and method of forming a pattern using the same |
| 07/05/2012 | US20120171617 Polymers, photoresist compositions and methods of forming photolithographic patterns |
| 07/05/2012 | US20120171616 Polymerizable photoacid generators |
| 07/05/2012 | US20120171615 Cyclic compound, process for production of the cyclic compound, radiation-sensitive composition, and method for formation of resist pattern |
| 07/05/2012 | US20120171614 Positive Photosensitive Resin Composition, Photosensitive Resin Film Prepared by Using the Same, and Semiconductor Device Including the Photosensitive Resin Film |
| 07/05/2012 | US20120171613 Upper layer film-forming composition and method of forming photoresist pattern |
| 07/05/2012 | US20120171612 Radiation-sensitive resin composition, resist pattern formation method, and polymer |
| 07/05/2012 | US20120171611 Aromatic hydrocarbon resin and composition for forming underlayer film for lithography |
| 07/05/2012 | US20120171610 Positive Photosensitive Resin Composition, Photosensitive Resin Film Prepared by Using the Same, and Semiconductor Device Including the Photosensitive Resin Film |
| 07/05/2012 | US20120171609 Positive Photosensitive Resin Composition, Photosensitive Resin Layer Prepared by Using the Same, and Semiconductor Device Including the Photosensitive Resin Layer |
| 07/05/2012 | US20120171600 Time Differential Reticle Inspection |
| 07/05/2012 | US20120171433 Fluorinated coating and phototools made therewith |
| 07/05/2012 | US20120170044 Polymer Analysis Chip |
| 07/05/2012 | US20120168841 Multiple Patterning Method |
| 07/05/2012 | US20120168210 Methods and Structures Involving Terminal Connections |
| 07/05/2012 | US20120168203 Integrated circuit system with ultra-low k dielectric and method of manufacture thereof |
| 07/05/2012 | DE112010003331T5 Nahinfrarot absorbierende Dünnschichtzusammensetzungen Near infrared absorbing thin film compositions |
| 07/05/2012 | DE102011090192A1 Spiegel, Verfahren zu dessen Herstellung, Belichtungsgerät, und Vorrichtungsherstellungsverfahren Mirror, process for its preparation, exposure apparatus and device manufacturing method |
| 07/05/2012 | DE102011090191A1 Optisches Beleuchtungssystem, Belichtungsvorrichtung und Verfahren zur Herstellung eines Bauteils An illumination optical system, exposure apparatus and method for producing a component |
| 07/05/2012 | DE102011080919A1 Microlithographic projection exposure system i.e. vacuum projection exposure system, operating method, involves changing bandwidth of projection light produced by light sources of system while exposing regions on photosensitive layer |
| 07/05/2012 | DE102005034386B4 Tiefe Justiermarken auf Rand-Chips zum anschließenden Ausrichten von opaken Schichten Depth marks on edge chips for subsequent alignment of opaque layers |
| 07/04/2012 | EP2472655A1 Negative electrode base member |
| 07/04/2012 | EP2472332A1 Exposure apparatus and device fabricating method |