Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
08/2012
08/01/2012CN102621808A Colored photosensitive resin composition
08/01/2012CN102621807A Resist composition and method of forming resist pattern
08/01/2012CN102621806A Lactone photoacid generators and resins and photoresists comprising same
08/01/2012CN102621805A Method for preparing micro-nano-channels based on liquid-gas equilibrium polymer nano-channels self-building mechanism
08/01/2012CN102621804A Method for forming metal microstructure
08/01/2012CN102621803A Manufacturing method of wedge-shaped super-lens
08/01/2012CN102621668A Projection optical system
08/01/2012CN102621624A Light guide sheet including optical micro structure and making method
08/01/2012CN102621609A Etching device and etching method for any apodised fiber bragg grating
08/01/2012CN102621604A Preparation method of submicron scale spherical/cylindrical micro lens array
08/01/2012CN102621601A Manufacturing method for planar image field super-resolution imaging lens
08/01/2012CN102618898A Local gilding technology for commemorative coin (badge)
08/01/2012CN102617790A Polymers, photoresist compositions and methods of forming photolithographic patterns
08/01/2012CN102617789A Polymers, photoresist compositions and methods of forming photolithographic patterns
08/01/2012CN102617445A Photosensitive compositions, curable compositions, novel compounds, photopolymerizable compositions, color filters, and planographic printing plate precursors
08/01/2012CN102617430A Photoacid generators
08/01/2012CN102617375A Photo-initiation/halogen-free flame retardant and preparation method and application thereof
08/01/2012CN102616083A Surface treatment pattern vacuum deplating process (PPVD)
08/01/2012CN102616049A Lithographic printing plate support and presensitized plate
08/01/2012CN102087477B Wafer exposure method
08/01/2012CN102034685B Method for using post-epitaxial photoetching to align zero-level marks
08/01/2012CN101989047B Method for detecting pattern topography of maskplate by dual exposure method
08/01/2012CN101604121B Colored photoresist with gold nanoparticles and colored filter formed by same
07/2012
07/31/2012USRE43560 Positive photosensitive compositions
07/31/2012US8233133 Exposure method, exposure apparatus, and method for producing device
07/31/2012US8232540 Lithographic apparatus and substrate edge seal
07/31/2012US8232366 Transparent, highly heat-resistant polyimide precursor and photosensitive polyimide composition thereof
07/31/2012US8232043 Coating hydrophilic support with thermoplastic resin; photopolymerization using photoinitiator; exposure, heating, development; applying gum to remove unexposed material
07/31/2012US8232041 Positive resist composition, method of forming resist pattern, and polymeric compound
07/31/2012US8232040 Positive resist composition and method of forming resist pattern
07/31/2012US8232039 Polymer and resist composition comprising the same
07/31/2012US8231959 Photosensitive polymer composition, method of producing pattern and electronic parts
07/31/2012US8231931 Method and apparatus for accurately applying structures to a substrate
07/31/2012US8231733 Aqueous stripping and cleaning composition
07/31/2012US8231285 Substrate processing method and apparatus
07/31/2012CA2502204C Curable resin composition and flexographic plate material using the same
07/31/2012CA2358215C Methods utilizing scanning probe microscope tips and products therefor or produced thereby
07/26/2012WO2012099787A1 Systems and methods for micro-contact stamping
07/26/2012WO2012099366A2 Photosensitive resin composition, and photosensitive material comprising same
07/26/2012WO2012099294A1 Method for manufacturing photoaligning integrated large area metallic stamp, and method for manufacturing polymer optical device using same
07/26/2012WO2012099263A1 Nanoimprinting method
07/26/2012WO2012099106A1 Abnormality determination system of processing device and abnormality determination method of same
07/26/2012WO2012099003A1 Original plate for direct-pattern waterless planographic printing plate
07/26/2012WO2012098952A1 Vinylsulfonic acid ester derivative, polymer and photoresist composition
07/26/2012WO2012098828A1 Low molecular weight compound, radiation-sensitive composition, and method for forming resist pattern
07/26/2012WO2012098822A1 Chemical amplification resist composition, resist film using the composition, resist-coated mask blanks, resist pattern forming method, photomask and polymer compound
07/26/2012WO2012097833A1 Method of operating a projection exposure tool
07/26/2012WO2012041519A3 Photocrosslinking elastomers for rapid prototyping
07/26/2012US20120189964 Method of controlling the states and vortex chirality in hexagonal ring structures comprising nanoscale magnetic elements
07/26/2012US20120189963 Water-soluble resin composition and method of forming fine patterns by using the same
07/26/2012US20120189962 Method for manufacturing stamper for injection molding
07/26/2012US20120189961 Photosensitive resin composition and photosensitive material comprising the same
07/26/2012US20120189960 Hydrophilic Monomer, Hydrophilic Photoresist Composition Containing the same, and Resist Pattern Formation Method
07/26/2012US20120189959 Lithographic printing original plate
07/26/2012US20120189947 Color filter substrate, electronic apparatus and manufacturing method thereof
07/26/2012US20120188525 Catoptric objectives and systems using catoptric objectives
07/26/2012US20120187351 Colorant multimer, colored curable composition, color filter and method for producing the same, and solid-state image sensor, image display device, liquid crystal display device and organic el display with the color filter
07/26/2012US20120186862 Carrier tape for tab-package and manufacturing method thereof
07/26/2012DE102011086915A1 Illumination system for microlithographic projection exposure system, has LED for generating illumination radiation in UV range at specific wavelength
07/26/2012DE102011003077A1 Verfahren zur Herstellung eines Substrates für ein reflektives optisches Element für die EUV-Lithographie A process for producing a substrate for a reflective optical element for EUV lithography
07/26/2012CA2825274A1 Systems and methods for micro-contact stamping
07/25/2012EP2479616A1 The use of surfactants having at least three short-chain perfluorinated groups Rf for manufacturing integrated circuits having patterns with line-space dimensions below 50 nm
07/25/2012EP2479615A1 Silicon-containing composition having sulfonamide group for forming resist underlayer film
07/25/2012EP2479614A1 Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound
07/25/2012EP2479613A1 Photopolymerizable composition, color filter, method for producing same, solid-state image pickup element, liquid crystal display device, lithographic printing original plate, and novel compound
07/25/2012EP2479612A1 Photosensitive resin composition containing copolymer
07/25/2012EP2479611A2 Chemically amplified positive resist composition and patterning process
07/25/2012EP2479198A1 Aromatic hydrocarbon resin and composition for forming underlayer film for lithography
07/25/2012EP2478418A2 Laser ablation tooling via distributed patterned masks
07/25/2012EP2478417A1 Foil trap device with improved heat resistance
07/25/2012EP2478416A2 Spectral purity filter, lithographic apparatus, method for manufacturing a spectral purity filter and method of manufacturing a device using lithographic apparatus
07/25/2012EP2478415A1 Actinic-ray- or radiation-sensitive resin composition and method of forming a pattern using the same
07/25/2012EP2478414A1 Actinic-ray- or radiation-sensitive resin composition and method of forming a pattern using the same
07/25/2012EP2478413A1 Colored curable composition, color filter, and method for producing color filter
07/25/2012EP2478034A1 Fluorinated coating and phototools made therewith
07/25/2012EP2478033A1 Fluorinated coating and phototools made therewith
07/25/2012EP2478020A2 Copolymers, polymeric particles comprising said copolymers and copolymeric binders for radiation-sensitive coating compositions for negative-working radiation-sensitive lithographic printing plates
07/25/2012EP2324477B1 Data storage medium
07/25/2012EP2273314B1 Photosensitive resin composition, film for photosensitive resin spacer, and semiconductor device
07/25/2012EP2077471B1 Volume hologram optical recording medium, composition for volume hologram recording layer formation, and volume hologram recording material
07/25/2012EP1580606B1 Rinse liquid for lithography and method for forming resist pattern using same
07/25/2012EP1484366B1 Treated pigment, use thereof, and compound for treating pigment
07/25/2012EP1405120B1 Compact imaging head and high speed multi-head laser imaging assembly and method
07/25/2012CN1983028B Mask blank and method for manufacturing transfer mask
07/25/2012CN102612669A Exposure method, exposure apparatus, pattern forming method, and device manufacturing method
07/25/2012CN102612668A Multilayer mirror
07/25/2012CN102612667A Lithographic apparatus and device manufacturing method
07/25/2012CN102612666A Photosensitive composition, photosensitive solder resist composition, photosensitive solder resist film, and permanent pattern, method for forming same, and printed substrate
07/25/2012CN102610518A Slimming method of carbon-containing thin film and oxidation apparatus
07/25/2012CN102610498A Method for forming photoresist layer
07/25/2012CN102610496A Photoresist removing method of structure with large height-width ratio
07/25/2012CN102610490A Method for manufacturing trench of super junction
07/25/2012CN102608879A Method for aligning exposure in engineering photoetching by photoetching machine
07/25/2012CN102608878A Developing liquid discharge processing method in manufacturing process of color filter
07/25/2012CN102608877A Photoetching nesting method and photoetching method
07/25/2012CN102608876A Photolithography device and method for manufacturing the same
07/25/2012CN102608875A Glass substrate carved number repairing method and glass substrate carved number repairing device based on repairing cabinet
07/25/2012CN102608874A Method for increasing data transmission speed of digital micromirror array by photoetching machine under scanning work mode
07/25/2012CN102608873A Workbench and exposure apparatus using the same
07/25/2012CN102608872A Absorption stage, placing stage and exposure apparatus