| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 09/08/1998 | US5805334 Catadioptric projection systems |
| 09/08/1998 | US5805290 Method of optical metrology of unresolved pattern arrays |
| 09/08/1998 | US5805278 Particle detection method and apparatus |
| 09/08/1998 | US5805273 Projection exposure apparatus and microdevice manufacturing method |
| 09/08/1998 | US5805198 Laser drawing apparatus and method for adjusting the same |
| 09/08/1998 | US5804922 Power source; fill excitation means; discharge bulb containing a fill not including mercury; variable cooling means to condense a controlled portion of fill material |
| 09/08/1998 | US5804474 Method for forming a V-shaped gate electrode in a semiconductor device, and the structure of the electrode |
| 09/08/1998 | US5804355 Producing a contone image by sequentially exposing a thermo-sensitive imaging material by means of a set of radiation beams |
| 09/08/1998 | US5804339 Exposing a photoresist with an activating agent utilizing a predetermined exposure pattern with a first exposure dosage followed by exposure using a correction exposure pattern |
| 09/08/1998 | US5804338 Irradiating a microelectronic wafer |
| 09/08/1998 | US5804310 Patterned fibers |
| 09/08/1998 | US5804257 Polysilane compositions |
| 09/08/1998 | US5804256 Method and device for coating printed-circuit boards |
| 09/08/1998 | US5804088 Intermediate layer lithography |
| 09/08/1998 | US5803970 Method of forming a coating film and coating apparatus |
| 09/03/1998 | WO1998038597A2 Data-conversion method for a multibeam laser writer for very complex microlithographic patterns |
| 09/03/1998 | WO1998038550A1 Developing solution for photosensitive resin plate |
| 09/03/1998 | WO1998038549A1 Optical proximity correction method for intermediate-pitch features using sub-resolution scattering bars |
| 09/03/1998 | WO1998038535A1 Method for creating a color filter layer on a flat panel display screen structure |
| 09/03/1998 | WO1998038508A1 System for detecting amine and other basic molecular contamination in a gas |
| 09/03/1998 | WO1998037979A1 Method and apparatus for temperature controlled spin-coating systems |
| 09/03/1998 | DE19707093A1 Manufacturing method for integrated, planar, optical structures |
| 09/02/1998 | EP0862089A2 Method of determining movement sequence and apparatus for realizing it |
| 09/02/1998 | EP0861855A1 Light-absorbing polymer, method for synthesizing the same, and film-forming composition and antireflection film prepared using said polymer |
| 09/02/1998 | EP0861457A1 Method of monitoring a photolithographic process |
| 09/02/1998 | CN1191993A Radiation sensitive composition adapted for roller coating |
| 09/02/1998 | CN1191992A Radiation-sensitive composition adapted for roller coating |
| 09/02/1998 | CN1191891A Rinsing solution |
| 09/01/1998 | US5802094 Narrow band excimer laser |
| 09/01/1998 | US5801870 Light exposure and illuminating apparatus |
| 09/01/1998 | US5801835 Surface position detection apparatus and method |
| 09/01/1998 | US5801833 Method of producing master and working pattern plates for etching and photolithographic apparatus therefor |
| 09/01/1998 | US5801832 Method of and device for repetitively imaging a mask pattern on a substrate using five measuring axes |
| 09/01/1998 | US5801821 Of a stepper field exposure tool |
| 09/01/1998 | US5801816 Projection exposure apparatus |
| 09/01/1998 | US5801815 Projection exposure apparatus |
| 09/01/1998 | US5801740 Image recording apparatus capable of adjusting an image recording speed |
| 09/01/1998 | US5801399 Semiconductor device with antireflection film |
| 09/01/1998 | US5801315 Developer flow check system and method thereof |
| 09/01/1998 | US5801212 Photopolymerizable composition containing a sensitizing dye and a titanocene compound |
| 09/01/1998 | US5801088 Method of forming a gate electrode for an IGFET |
| 09/01/1998 | US5800992 Method of detecting nucleic acids |
| 09/01/1998 | US5800968 Method for heat developing photosensitive material and apparatus therefor |
| 09/01/1998 | US5800967 Method for fabricating a planar thin film structure |
| 09/01/1998 | US5800966 Positive photoresist composition |
| 09/01/1998 | US5800965 Light sensitive lithographic plates and addition polymerizable monomers and phosphoric acid derivatives |
| 09/01/1998 | US5800964 Photoresist composition |
| 09/01/1998 | US5800963 Polymeric dyes for antireflective coatings |
| 09/01/1998 | US5800962 Temporary support film for transferring white pigment layer |
| 09/01/1998 | US5800961 Imaging element and method for making a lithographic printing plate according to the silver salt diffusion transfer process |
| 09/01/1998 | US5800952 Photopolymerizable composition for a color filter, color filter and liquid display device |
| 09/01/1998 | US5800951 Exposure method and exposure mask with monitoring patterns |
| 09/01/1998 | US5800949 Mask, method of producing a device using the mask and aligner with the mask |
| 09/01/1998 | US5800285 Method of fabricating golf club parts carrying artwork etched after fabrication and parts with such artwork |
| 08/27/1998 | WO1998037459A1 Method of manufacturing a metal plate for a screen printing |
| 08/27/1998 | WO1998037458A1 Resist composition |
| 08/27/1998 | WO1998037457A1 Chemical microreactors and method for producing same |
| 08/27/1998 | WO1998036827A1 Method for producing structured, self-organized molecular monolayers of individual molecular species |
| 08/26/1998 | EP0860743A2 Pattern forming method and semiconductor processing method |
| 08/26/1998 | EP0860742A1 Flexible, flame-retardant, photoimageable composition for coating printing circuits |
| 08/26/1998 | EP0860741A1 Photopolymerizable composition |
| 08/26/1998 | EP0860740A1 Pattern forming material and pattern forming method |
| 08/26/1998 | EP0860726A1 Probe with tip having micro aperture for detecting or irradiating light, near-field optical microscope, recording/reproduction apparatus, and exposure apparatus using the probe, and method of manufacturing the probe |
| 08/26/1998 | EP0860401A1 Processing waste washout liquid containing photopolymer from printing plate manufacture |
| 08/26/1998 | EP0860294A2 Intaglio printing method, intaglio printer and touch panel |
| 08/26/1998 | EP0860267A2 Stereolithographic beam profiling |
| 08/26/1998 | EP0859797A1 Photoinitiator |
| 08/26/1998 | EP0859685A1 Laser processing chamber with cassette cell |
| 08/26/1998 | EP0859684A1 Laser stripping improvement by modified gas composition |
| 08/26/1998 | EP0859682A1 Process and apparatus for oblique beam revolution, for the effective laser stripping of sidewalls |
| 08/26/1998 | EP0821813A4 Modified poly(maleic anhydride-co-styrene) and related polymers as a base for color filters |
| 08/26/1998 | EP0683902B1 Process for producing micro-structure components on a substrate |
| 08/26/1998 | CN1191614A Heterogeneous photo-initiators, photopolymerisable compositions and their use |
| 08/26/1998 | CN1191333A Method and device using ArF photoresist |
| 08/25/1998 | US5798947 Methods, apparatus and computer program products for self-calibrating two-dimensional metrology stages |
| 08/25/1998 | US5798838 Projection exposure apparatus having function of detecting intensity distribution of spatial image, and method of detecting the same |
| 08/25/1998 | US5798824 Exposure apparatus correcting illuminance distribution |
| 08/25/1998 | US5798823 Illumination optical apparatus and projection exposure apparatus using it |
| 08/25/1998 | US5798822 Exposure apparatus |
| 08/25/1998 | US5798784 Laser drawing apparatus featuring a beam separator supported by an adjusting means swingable about a rotating shaft |
| 08/25/1998 | US5798611 Bulb is filled with sulfur or selenium which emit molecular radiation of selected wavelength by changing the fill density |
| 08/25/1998 | US5798543 Semiconductor element structure with stepped portion for formation of element patterns |
| 08/25/1998 | US5798530 Method and apparatus for aligning a mask and a set of substrates to be exposed |
| 08/25/1998 | US5798422 Aromatic hydroxycarboxylic acid resins and their use |
| 08/25/1998 | US5798397 Photocurable acrylic or methacrylic esters or amides containing tetraalkyl ammonium group; curing |
| 08/25/1998 | US5798323 Solvents, an alkanolamine, water and corrosion inhibitors |
| 08/25/1998 | US5798292 Method of forming wafer alignment patterns |
| 08/25/1998 | US5798283 Method for integrating microelectromechanical devices with electronic circuitry |
| 08/25/1998 | US5798203 Phase shift mask includes an attenuator; changing an exposed portion of positive resist layer to be resistant to developer |
| 08/25/1998 | US5798201 Radiation sensitive resin composition |
| 08/25/1998 | US5798196 Pattern transfer method utilizing distribution condition evaluation by charged particle beam |
| 08/25/1998 | US5798195 Stepping accuracy measuring method |
| 08/25/1998 | US5798194 Masks for charged-particle beam microlithography |
| 08/25/1998 | US5798193 Test pattern is used to calibrate the coordinate system of each processing machine on which the photomask is mounted |
| 08/25/1998 | US5798140 Applying coating liquid, oscillating and spinning surface until coating is evenly spread |
| 08/25/1998 | US5798042 Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters |
| 08/25/1998 | US5798019 Flexographic printing plates |
| 08/25/1998 | US5797674 Illumination optical system, alignment apparatus, and projection exposure apparatus using the same |
| 08/25/1998 | US5797317 Universal chuck for holding plates of various sizes |
| 08/25/1998 | CA2081642C X-ray exposure apparatus and semiconductor-device manufacturing method |