Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 7 - Micro-structural systems
Patents for B81B 7 - Micro-structural systems (8,983)
07/2003
07/15/2003US6592128 Integrated pneumatic o-ring gasket for mems devices
07/10/2003WO2003055652A1 Sampling and gripper device
07/10/2003US20030129824 Method of making a micromechanical device
07/10/2003US20030127698 Cantilever having step-up structure and method for manufacturing the same
07/09/2003EP1325886A1 Method of reinforcing a mechanical microstructure
07/08/2003US6590850 Packaging for storage devices using electron emissions
07/08/2003US6590267 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
07/08/2003US6589625 Hermetic seal and method to create the same
07/03/2003WO2003054927A2 Structure and process for packaging rf mems and other devices
07/03/2003WO2003054925A2 Method and system for locally sealing a vacuum microcavity, methods and systems for monitoring and controlling pressure and method and system for trimming resonant frequency of a microstructure therein
07/03/2003US20030124829 Interconnection method entailing protuberances formed by melting metal over contact areas
07/03/2003US20030122448 Generator for use in a microelectromechanical system
07/03/2003US20030122227 Accelerometer protected by caps applied at the wafer scale
07/03/2003US20030122206 Multi-chip module integrating MEMS mirror array with electronics
07/03/2003US20030121644 Heat transport device
07/02/2003EP1323668A2 Generator for use in a microelectromechanical system
07/02/2003CN1427742A Devices and methods for carrying out chemical reactions using photogenerated reagents
07/01/2003US6586831 Vacuum package fabrication of integrated circuit components
06/2003
06/26/2003US20030119221 Trilayered beam MEMS device and related methods
06/26/2003US20030119219 Integrated circuit comprising an auxiliary component, for example a passive component or a microelectromechanical system, placed above an electronic chip, and the corresponding fabrication process
06/26/2003US20030117257 Electrothermal self-latching MEMS switch and method
06/26/2003US20030116851 Micro-scale interconnect device with internal heat spreader and method for fabricating same
06/26/2003US20030116848 MEMS device having a trilayered beam and related methods
06/26/2003US20030116825 Wafer-level package with silicon gasket
06/26/2003US20030116417 MEMS device having contact and standoff bumps and related methods
06/25/2003EP1321430A1 Integrated circuit containing an auxiliary device, e. g. a passive device or a microelectromechanical system, placed on an electronic chip, and method for its manufacture
06/25/2003CN1426352A Method for attaching micromechanical device to manifold, and fluid control system produced thereby
06/25/2003CN1425777A Active gene molecule nano cabin and its preparing method
06/24/2003US6583524 Micro-mover with balanced dynamics
06/19/2003WO2003050588A1 Optical system for reinforcing optical tweezers capturing force
06/19/2003US20030111603 Infrared light detection array and method of producing the same
06/19/2003US20030111441 Miniature microdevice package and process for making thereof
06/18/2003CN1424245A Electrochemical micro-driver based on hydrogen absorbing alloy film and production thereof
06/18/2003CN1112085C Method and device for positioning and retaining micro-building-blocks
06/17/2003US6580858 Micro-opto-electro-mechanical system (MOEMS)
06/12/2003US20030109183 Process for bonding and electrically connecting microsystems integrated in several distinct substrates
06/12/2003US20030107137 Micromechanical device contact terminals free of particle generation
06/11/2003EP1317399A2 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
06/05/2003WO2003045838A1 Nano gripper and method of manufacturing the nano gripper
06/05/2003WO2002101352A3 Electronic and opto-electronic devices fabricated from nanostructured high surface to volume ratio thin films
06/05/2003US20030104651 Low temperature hermetic sealing method having passivation layer
06/05/2003US20030104649 Method for making CMOS-based monolithic micro electromechanical system (MEMS) integrated circuits and integrated circuits made thereby
06/05/2003US20030103717 Electrostatically actuated micro-electro-mechanical system (mems) device
06/05/2003US20030102603 Molding of protective caps
06/05/2003US20030102552 In-situ cap and method of fabricating same for an integrated circuit device
06/05/2003US20030101814 Microgyroscope with electronic alignment and tuning
06/04/2003EP1315993A2 Micromirror elements, package for the micromirror elements, and protection system therefor
06/03/2003US6574026 Magnetically-packaged optical MEMs device
06/03/2003US6573157 Method of manufacturing semiconductor device, narrow pitch connector, electrostatic actuator, piezoelectric actuator, ink jet head, ink jet printer, micromachine, liquid crystal panel, and electronic device
05/2003
05/27/2003US6569754 Method for making a module including a microplatform
05/27/2003US6569701 Method for fabricating an isolated microelectromechanical system device
05/22/2003WO2003043044A1 Mems device having a trilayered beam and related methods
05/22/2003WO2003043042A1 Mems device having electrothermal actuation and release and method for fabricating
05/22/2003WO2003043038A2 Mems device having contact and standoff bumps and related methods
05/22/2003WO2003042721A2 Trilayered beam mems device and related methods
05/22/2003WO2003042094A2 Multi-chip module integrating mems mirror array with electronics
05/22/2003US20030094881 Micromechanical device with damped microactuator
05/21/2003EP1312580A1 Process for sealing devices incorporating microstructures
05/21/2003CN1419661A Device for homogeneous heating of an object
05/20/2003US6567448 Scanning III-V compound light emitters integrated with Si-based actuators
05/20/2003US6566617 Micromachine switch and its production method
05/20/2003US6566170 Method for forming a device having a cavity with controlled atmosphere
05/15/2003WO2003041163A1 Device for the hermetic encapsulation of a component that must be protected against all stresses
05/15/2003WO2003041133A2 Electrothermal self-latching mems switch and method
05/15/2003WO2003040338A2 Micro-scale interconnect device with internal heat spreader and method for fabricating same
05/15/2003WO2002045463A3 Miniature silicon condenser microphone and method for producing same
05/15/2003US20030092245 Wafer scale molding of protective caps
05/15/2003US20030092229 Use of protective caps as masks at a wafer scale
05/15/2003US20030091476 Comprises microscopic vessels; for microarrays of DNA and RNA oligonucleotides, peptides, oligosacchrides, and phospholipids; genetic mapping; drug screening
05/15/2003US20030090040 Use of infrared radiation in molding of protective caps
05/15/2003US20030089394 Plugging a device having an access passageway communicating the vacuum microcavity with ambient
05/14/2003EP1310380A1 A micro-mechanical device and method for producing the same
05/14/2003CN1417105A Micromechanism and its manufacture
05/13/2003US6562278 Methods of fabricating housing structures and micromachines incorporating such structures
05/13/2003US6561725 System and method for coupling microcomponents utilizing a pressure fitting receptacle
05/08/2003US20030087469 Method of fabricating an integrated circuit that seals a MEMS device within a cavity
05/08/2003US20030085438 Micro-mechanical device and method for producing the same
05/06/2003US6559530 Method of integrating MEMS device with low-resistivity silicon substrates
05/06/2003US6559487 Signal processing circuitry connected with flip chip; detecting inertial angular velocity
05/06/2003US6557978 Inkjet device encapsulated at the wafer scale
05/02/2003EP1306704A1 Piezoelectrically driven, liquid-actuated optical cross-bar switch
05/01/2003WO2003036767A2 Parallel, individually addressable probes for nanolithography
05/01/2003WO2003036672A2 A multi-layer 3d device and method of manufacturing
05/01/2003US20030082928 Method for fabricating an isolated microelectromechanical system device
05/01/2003US20030080425 Compliant relief wafer level packaging
04/2003
04/29/2003US6555904 Electrically shielded glass lid for a packaged device
04/29/2003US6555901 Semiconductor device including eutectic bonding portion and method for manufacturing the same
04/29/2003US6555417 Method and device for protecting micro electromechanical system structures during dicing of a wafer
04/24/2003US20030077023 Piezoelectrically driven, liquid-actuated optical cross-bar switch
04/24/2003US20030075794 Miniaturized device to protect the mechanical and electrical components of the Micro-Electromechanical System
04/22/2003US6550331 Semiconductor mechanical sensor
04/17/2003US20030073292 Hermetic chip scale packaging means and method including self test
04/17/2003US20030072646 Process for manipulating components, a microtool for implementing the process, and a process for manufacturing the microtool or microtool parts
04/16/2003EP1301346A1 Buckle resistant thermal bend actuators
04/16/2003EP1301344A1 Ink jet printhead having a moving nozzle with an externally arranged actuator
04/16/2003EP1301268A2 Devices and methods for carrying out chemical reactions using photogenerated reagents
04/15/2003US6548788 Devices and methods for using centripetal acceleration to drive fluid movement in a microfluidics system
04/15/2003US6548322 Micromachined gas-filled chambers and method of microfabrication
04/10/2003WO2003030252A2 Process for producing interconnects
04/10/2003WO2003010574A3 Packaged optical micro-mechanical device
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