| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 09/16/1999 | DE19906067A1 Semiconductor sensor detecting and measuring e.g. acceleration, yaw rate or vibration |
| 09/14/1999 | US5951304 Fanout interconnection pad arrays |
| 09/07/1999 | US5948689 On one substrate forming heat generators on one surface, forming channels/fins on other surface; on another substrate forming channels/fins on surface; interleaving fins forming thermoconductive path to heat sink |
| 09/01/1999 | EP0772756B1 Microcomponent sheet architecture |
| 08/25/1999 | EP0937962A2 Method and device for micro-mechanically examining the adhesion of surface micro-particles |
| 08/17/1999 | US5939785 Micromechanical device including time-release passivant |
| 08/10/1999 | US5936758 Method of passivating a micromechanical device within a hermetic package |
| 08/04/1999 | EP0933012A1 Method and device for positioning and retaining micro-building-blocks |
| 07/29/1999 | WO1999037995A1 Micromachined gas-filled chambers and method of microfabrication |
| 07/27/1999 | US5929497 Batch processed multi-lead vacuum packaging for integrated sensors and circuits |
| 07/15/1999 | WO1999035477A1 Micromechanical component |
| 07/15/1999 | DE19800574A1 Mikromechanisches Bauelement Micromechanical component |
| 07/14/1999 | EP0928446A1 Miniature connector array |
| 07/13/1999 | US5923995 Methods and apparatuses for singulation of microelectromechanical systems |
| 07/08/1999 | WO1999034656A1 Molded electronic package, method of preparation and method of shielding |
| 07/06/1999 | US5919364 Microfabricated filter and shell constructed with a permeable membrane |
| 06/24/1999 | DE19821841C1 Micro-device manufacture involving transfer of micro-structured layer from production substrate to another substrate |
| 06/23/1999 | EP0924763A2 Self-assembling micro-mechanical device |
| 06/22/1999 | US5915168 Method for packaging individual die at the wafer level |
| 06/22/1999 | US5914521 Semiconductor device |
| 06/17/1999 | WO1999030410A1 Electrostatic microactuators, active three-dimensional microcatheters using same and method for making same |
| 06/16/1999 | EP0923099A1 Micro-relay and method for manufacturing the same |
| 06/09/1999 | EP0671024B1 Method for fabricating microlenses |
| 05/20/1999 | WO1999024783A1 Microelectromechanical positioning apparatus |
| 05/20/1999 | WO1999024744A1 Micromachined parylene membrane valve and pump |
| 05/20/1999 | CA2304723A1 Microelectromechanical positioning apparatus |
| 05/06/1999 | EP0912223A1 Microfabricated filter and shell constructed with a permeable membrane |
| 04/22/1999 | WO1998053311A9 Devices and methods for using centripetal acceleration to drive fluid movement in a microfluidics system |
| 04/14/1999 | CN1213778A Semiconductor device and method for making the same |
| 04/08/1999 | DE19581457C1 Handling procedure and handling tool e.g. for equipping circuit boards with micro-sized components |
| 04/06/1999 | US5891751 Hermetically sealed transducers and methods for producing the same |
| 04/01/1999 | WO1999016129A1 Sensor package arrangement |
| 03/30/1999 | US5889311 Semiconductor acceleration sensor |
| 03/25/1999 | WO1999014404A1 Method of making a structure with improved material properties by moderate heat treatment of a metal deposit |
| 03/17/1999 | EP0901578A1 Valveless liquid microswitch |
| 03/09/1999 | US5879963 Method of making a sub-ground plane for a micromachined device |
| 02/23/1999 | US5874798 Micro-turbo generator device |
| 02/18/1999 | WO1998053311A3 Devices and methods for using centripetal acceleration to drive fluid movement in a microfluidics system |
| 02/16/1999 | US5872024 Method for manufacturing a mechanical force sensing semiconductor device |
| 02/09/1999 | US5867888 Magnetic head/silicon chip integration method |
| 02/04/1999 | WO1999005589A1 Miniature connector array |
| 02/04/1999 | DE19830476A1 Semiconductor device for accelerometer |
| 02/04/1999 | CA2266406A1 Miniature connector array |
| 02/02/1999 | US5866469 Method of anodic wafer bonding |
| 12/17/1998 | WO1998057529A1 Microfabricated high aspect ratio device with electrical isolation and interconnections |
| 12/10/1998 | WO1998055876A1 Nonstick layer for a micromechanical component |
| 12/10/1998 | DE19817310A1 Micro-mechanical component |
| 12/09/1998 | EP0882965A1 Semiconductor pressure sensor device and its manufacturing method |
| 12/02/1998 | EP0881719A2 Electrical connection between a movable electrical component and a flexible, elastic strip conductor carrier |
| 11/26/1998 | WO1998053311A2 Devices and methods for using centripetal acceleration to drive fluid movement in a microfluidics system |
| 11/24/1998 | US5839722 Fluid flow transport system for moving a flexible object |
| 11/17/1998 | US5838065 Integrated thermal coupling for heat generating device |
| 11/17/1998 | US5837935 Hermetic seal for an electronic component having a secondary chamber |
| 11/10/1998 | US5834332 Micromechanical semiconductor components and manufacturing method therefor |
| 11/10/1998 | US5832585 Method of separating micro-devices formed on a substrate |
| 10/22/1998 | DE19745387A1 Semiconductor acceleration detector |
| 10/20/1998 | US5825091 Sensor assembly mounted to a leadframe with adhesive deposits at separate locations |
| 09/24/1998 | DE19709977A1 Halbleiterschaltungsvorrichtung und Halbleitersensorvorrichtung A semiconductor circuit device and semiconductor sensor device |
| 09/17/1998 | WO1998040712A1 Semiconductor device |
| 08/26/1998 | EP0683902B1 Process for producing micro-structure components on a substrate |
| 08/25/1998 | US5798557 Packaged integrated circuit |
| 08/25/1998 | US5798283 Method for integrating microelectromechanical devices with electronic circuitry |
| 08/19/1998 | CN1190788A Method of fabricating integrated microstructures of semiconductor material |
| 07/30/1998 | WO1998032595A1 Flexible skin incorporating mems technology |
| 07/21/1998 | US5783340 Method for photolithographic definition of recessed features on a semiconductor wafer utilizing auto-focusing alignment |
| 07/16/1998 | WO1998030878A1 Housing for semiconductor sensor arrangement and process for producing the same |
| 07/16/1998 | DE19700393A1 Gehäuse für Halbleiter-Sensoranordnung und Verfahren zu dessen Herstellung Enclosure for semiconductor sensor arrangement and method of producing the |
| 07/08/1998 | EP0754084A4 Integrated chemical synthesizers |
| 07/01/1998 | EP0851492A2 Surface-mounted substrate structure and method |
| 06/24/1998 | EP0849578A1 Evacuatable package and a method of producing the same |
| 06/17/1998 | EP0847543A1 Dark field, photon tunneling imaging systems and methods |
| 06/10/1998 | EP0846875A2 Conduit system for a valve array |
| 06/09/1998 | US5763318 Method of making a machine structures fabricated of mutiple microstructure layers |
| 06/03/1998 | EP0845728A2 Printed dielectric substrate for microelectromechanical systems |
| 06/03/1998 | EP0845430A2 Paper handling system having embedded control structures |
| 06/02/1998 | US5760455 Micromechanical semiconductor component and manufacturing method therefor |
| 06/02/1998 | US5759616 Integrated circuit |
| 05/28/1998 | DE19751708A1 Mechanical component with functional coating |
| 05/27/1998 | EP0844469A1 Coated high-performance structural elements or components, method of manufacturing such elements or components and device for carrying out this method |
| 04/30/1998 | WO1998018304A1 Method and device for positioning and retaining micro-building-blocks |
| 04/30/1998 | CA2269523A1 Method and device for positioning and retaining micro-building-blocks |
| 04/08/1998 | EP0833589A1 Microfabricated therapeutic actuator mechanisms |
| 04/02/1998 | DE19639946A1 Micromechanical component with single-piece surface structure for acceleration sensor |
| 03/11/1998 | EP0828346A2 Lid wafer bond packaging and micromachining |
| 03/10/1998 | US5726404 Valveless liquid microswitch |
| 03/10/1998 | US5725729 Semiconductors |
| 03/05/1998 | WO1998009312A1 Micro-relay and method for manufacturing the same |
| 02/19/1998 | DE19735041A1 Integrated circuit microcomponents separating method, e.g. for microphone, pressure sensor transducer |
| 02/12/1998 | WO1998005935A1 Method for packaging microsensors |
| 02/12/1998 | DE19734530A1 Semiconductor acceleration sensor for motor vehicle |
| 02/10/1998 | US5717631 Microelectromechanical structure and process of making same |
| 02/04/1998 | EP0822579A1 Method of fabricating integrated microstructures of semiconductor material |
| 02/03/1998 | US5715059 Dark field, photon tunneling imaging systems and methods |
| 01/28/1998 | EP0820599A1 Methods for planarization and encapsulation of micromechanical devices in semiconductor processes |
| 01/28/1998 | CN1171855A 存储器设备 Memory device |
| 01/08/1998 | WO1998000744A1 Dark field, photon tunneling imaging systems and methods |
| 12/31/1997 | WO1997049475A1 Microfabricated filter and shell constructed with a permeable membrane |
| 12/30/1997 | US5702384 Apparatus for gene therapy |
| 12/24/1997 | CN1168472A 半导体加速度传感器 Semiconductor acceleration sensor |
| 12/17/1997 | EP0647326A4 Dispersive microlens. |