| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 10/17/2002 | DE10117257A1 Mikromechanischer kapazitiver Beschleunigungssensor The micromechanical capacitive acceleration sensor |
| 10/15/2002 | US6466358 Analog pulse width modulation cell for digital micromechanical device |
| 10/15/2002 | US6465856 Micro-fabricated shielded conductors |
| 10/15/2002 | US6465854 Micromechanical component |
| 10/15/2002 | US6465280 In-situ cap and method of fabricating same for an integrated circuit device |
| 10/15/2002 | US6463803 Semiconductor mechanical sensor |
| 10/10/2002 | WO2002079814A2 Method for fabricating a through-wafer optical mems device having an anti-reflective coating |
| 10/10/2002 | US20020146919 Micromachined springs for strain relieved electrical connections to IC chips |
| 10/09/2002 | EP1248166A2 Distributed actuation allocation for large assemblies of implementation units |
| 10/09/2002 | EP1247293A1 Methods for producing packaged integrated circuit devices & packaged integrated circuit devices produced thereby |
| 10/09/2002 | CN1373476A Packing of memory device using electron emitting |
| 10/09/2002 | CN1373471A Micro driving unit having balanced dynamic characteristic |
| 10/08/2002 | US6462392 Micromechanical cap structure and the respective manufacturing method |
| 10/08/2002 | US6461337 Electrostatic microactuators, active three-dimensional microcatheters using same and method for making same |
| 10/03/2002 | WO2002076879A1 A unitary flexible and mechanically and chemically robust microsystem and a method for producing same |
| 10/03/2002 | WO2001095237A3 Microchannel device for heat or mass transfer |
| 10/03/2002 | US20020139171 Micromechanical component and manufacturing method |
| 10/02/2002 | EP1245528A1 A unitary flexible microsystem and a method for producing same |
| 10/02/2002 | EP1244900A1 Grain growth of electrical interconnection for microelectromechanical systems (mems) |
| 10/02/2002 | CN1371860A Electromagnetic microdriver drivne glimmer switch |
| 10/02/2002 | CN1091925C 存储器设备 Memory device |
| 10/01/2002 | US6459957 Programmable smart membranes and methods therefor |
| 10/01/2002 | US6459095 Chemically synthesized and assembled electronics devices |
| 10/01/2002 | US6458615 Method of fabricating micromachined structures and devices formed therefrom |
| 10/01/2002 | US6458513 Forming cavities, masking and etching silicon substrate to form three dimensional structure |
| 09/26/2002 | WO2002075794A2 A method for making a micromechanical device by using a sacrificial substrate |
| 09/26/2002 | WO2002075775A1 A microfluidic system (edi) |
| 09/26/2002 | WO2002074686A2 A method and device for protecting micro electromechanical systems structures during dicing of a wafer |
| 09/26/2002 | WO2002057824A3 Across-wafer optical mems device and protective lid having across-wafer light-transmissive portions |
| 09/26/2002 | WO2002056061A3 Optical mems device and package having a light-transmissive opening or window |
| 09/26/2002 | CA2442342A1 A microfluidic system (edi) |
| 09/25/2002 | EP1243550A2 Micro-fabricated shielded conductors |
| 09/24/2002 | US6455927 Micromirror device package |
| 09/24/2002 | US6454160 Method for hermetically encapsulating microsystems in situ |
| 09/19/2002 | WO2002073691A1 In-situ cap and method of fabricating same for an integrated circuit device |
| 09/19/2002 | US20020132391 Microelectromechanical system device package and packaging method |
| 09/19/2002 | US20020132389 Method for making a micromechanical device by using a sacrificial substrate |
| 09/19/2002 | US20020132113 Method and system for making a micromachine device with a gas permeable enclosure |
| 09/19/2002 | US20020131146 Integrated mirror array and circuit device |
| 09/19/2002 | US20020130916 Micro-fabricated shielded conductors |
| 09/18/2002 | EP1241508A2 Electrostatically controlled optical microshutter and microshutter matrix with simplified control |
| 09/18/2002 | EP1241507A2 An electrostatically-controlled optical micro-shutter with non-transparent fixed electrode |
| 09/18/2002 | EP1240529A2 Method for producing micromechanical structures |
| 09/17/2002 | US6452238 MEMS wafer level package |
| 09/17/2002 | US6450702 Micro actuator having clamping parts |
| 09/12/2002 | WO2002071371A2 Fabrication integration of micro-components |
| 09/12/2002 | US20020126615 Packaging for storage devices using electron emissions |
| 09/12/2002 | US20020126455 Tiled microelectromechanical device modules and fabrication methods |
| 09/12/2002 | US20020125790 MEMS actuator with lower power consumption and lower cost simplified fabrication |
| 09/12/2002 | US20020125789 Micro-mover with balanced dynamics |
| 09/12/2002 | US20020125138 Useful for the stable levitation and independent motion of neutral particles in a liquid suspension medium and their precise displacement by means of an electronically programmed apparatus adapted to receive such solution |
| 09/11/2002 | EP1239580A2 Micro-mover system |
| 09/11/2002 | EP1239469A2 Information storage units |
| 09/11/2002 | CN1369039A Microfabricated elastomeric valve and pump systems |
| 09/10/2002 | US6448624 Semiconductor acceleration sensor |
| 09/10/2002 | US6448109 Wafer level method of capping multiple MEMS elements |
| 09/06/2002 | WO2002068320A2 Devices having substrates with openings passing through the substrates and conductors in the openings, and methods of manufacture |
| 09/06/2002 | WO2002068318A1 Heat transport device |
| 09/06/2002 | WO2002052329A3 Triple electrode moems tunable filter and fabrication process therefor |
| 09/06/2002 | WO2002012925A3 Micromirror elements, package for the micromirror elements, and protection system therefor |
| 09/05/2002 | US20020122747 Having a norbornene polymer substrate with electrically conductive components incorporated therein. |
| 09/05/2002 | US20020121529 High-performance system for the parallel and selective dispensing of micro-droplets, transportable cartridge as well as dispensing kit, and applications of such a system |
| 09/05/2002 | DE10106996A1 Einrichtung zur Verbindung von Mikrokomponenten Means for connection of microcomponents |
| 09/03/2002 | US6445842 Microelectromechanical optical cross-connect switches including mechanical actuators and methods of operating same |
| 09/03/2002 | US6443179 Packaging of electro-microfluidic devices |
| 08/29/2002 | WO2002067293A2 Microelectromechanical systems (mems) device including an analog or a digital |
| 08/29/2002 | WO2001018857A9 Process for fabrication of 3-dimensional micromechanisms |
| 08/29/2002 | WO2000067063A9 Moveable microelectromechanical mirror structures |
| 08/29/2002 | US20020119597 Process for sealing and connecting parts of electromechanical, fluid and optical microsystems and device obtained thereby |
| 08/29/2002 | US20020118429 Mirror rocking member for optical deflector |
| 08/29/2002 | US20020117937 Micro-relay and method for manufacturing the same |
| 08/29/2002 | US20020117728 Bonded wafer optical MEMS process |
| 08/29/2002 | DE10107402A1 Piezoelektrischer paralleler Mikrogreifer Piezoelectric parallel micro-gripper |
| 08/28/2002 | EP1234326A2 Integrated packaging of micromechanical sensors and associated control circuits |
| 08/27/2002 | US6441481 Hermetically sealed microstructure package |
| 08/27/2002 | US6441450 Acceleration sensor and method of manufacturing the same |
| 08/22/2002 | WO2002065186A2 Pivoting optical micromirror, array for such micromirrors and method for making same |
| 08/22/2002 | WO2002064247A1 Device for connecting microcomponents |
| 08/22/2002 | WO2002017364A3 Micromechanical multichip module and method of making same |
| 08/22/2002 | US20020115234 Devices having substrates with opening passing through the substrates and conductors in the openings, and methods of manufacture |
| 08/22/2002 | US20020114058 Light-transmissive substrate for an optical MEMS device |
| 08/22/2002 | US20020113321 Devices having substrates with opening passing through the substrates and conductors in the openings, and methods of manufacture |
| 08/22/2002 | US20020113296 Wafer level hermetic sealing method |
| 08/22/2002 | US20020113281 MEMS device having an actuator with curved electrodes |
| 08/22/2002 | DE10104868A1 Mikromechanisches Bauelement sowie ein Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component as well as a process for producing a micromechanical component |
| 08/22/2002 | CA2437965A1 Device for connecting microcomponents |
| 08/22/2002 | CA2437816A1 Pivoting optical micromirror, array for such micromirrors and method for making same |
| 08/21/2002 | EP1232411A2 Integrated planar optical waveguide and shutter |
| 08/20/2002 | US6436853 Microstructures |
| 08/20/2002 | US6435028 Acceleration sensor |
| 08/15/2002 | WO2002002794A3 Integrated microarray devices |
| 08/15/2002 | US20020110312 Integrated mirror array and circuit device with improved electrode configuration |
| 08/14/2002 | EP1230681A2 Micro electro mechanical system controlled organic led and pixel arrays and method of manufacturing same |
| 08/14/2002 | EP1230574A1 A deflectable spatial light modulator having superimposed hinge and deflectable element |
| 08/14/2002 | CN1364141A Nanotweezers and nanomanipulator |
| 08/14/2002 | CA2371413A1 Tiled microelectromechanical device modules and fabrication methods |
| 08/13/2002 | US6433411 Packaging micromechanical devices |
| 08/13/2002 | US6433401 Microfabricated structures with trench-isolation using bonded-substrates and cavities |
| 08/13/2002 | US6432737 Method for forming a flip chip pressure sensor die package |
| 08/08/2002 | WO2002061486A1 Bulk micromachining process for fabricating an optical mems device with integrated optical aperture |