| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 01/23/2003 | WO2002042716A3 Wafer eutectic bonding of mems gyros |
| 01/23/2003 | US20030015729 Structure and method for fabricating dielectric resonators on a compliant substrate |
| 01/21/2003 | US6510222 Miniature connector array |
| 01/16/2003 | WO2003004403A2 Micromechanical cap structure and a corresponding production method |
| 01/16/2003 | WO2001087765A3 Micromechanical component and method for producing the same |
| 01/16/2003 | US20030010131 Grain growth of electrical interconnection for microelectromechanical systems (mems) |
| 01/15/2003 | EP1276152A2 Passive devices and modules for transceiver and manufacturing method thereof |
| 01/15/2003 | EP1276126A1 Microelectromechanical device |
| 01/15/2003 | EP1275030A1 Device for homogeneous heating of an object |
| 01/15/2003 | EP1274647A1 Micromechanical component and corresponding production method |
| 01/15/2003 | CN1391281A Multi-layer integrated circuit for join of substrates with wide gaps |
| 01/15/2003 | CN1391280A Electronic device and manufacture thereof |
| 01/15/2003 | CN1390774A Micro ion pumps used for low-pressure miniature devices |
| 01/14/2003 | US6507103 Semiconductor device |
| 01/14/2003 | US6507082 Flip-chip assembly of protected micromechanical devices |
| 01/09/2003 | US20030006502 Hermetically sealed microstructure package |
| 01/08/2003 | EP1272422A2 Vacuum package fabrication of microelectromechanical system devices with integrated circuit components |
| 01/07/2003 | US6504643 Structure for an optical switch on a substrate |
| 01/07/2003 | US6504641 Driver and method of operating a micro-electromechanical system device |
| 01/07/2003 | US6504292 Field emitting device comprising metallized nanostructures and method for making the same |
| 01/03/2003 | WO2003001217A1 Acceleration sensor and method of manufacture thereof |
| 01/03/2003 | WO2003000422A1 Microfabricated two-pin liquid sample dispensing system |
| 01/03/2003 | WO2001089681A3 Modular chemical production system incorporating a microreactor |
| 01/03/2003 | CA2451201A1 Microfabricated two-pin liquid sample dispensing system |
| 01/02/2003 | US20030002782 Imaging technique for use with optical MEMS devices |
| 01/02/2003 | US20030002447 Distributed actuation allocation for large assemblies of implementation units |
| 01/02/2003 | US20030002265 Mems package with flexible circuit interconnect |
| 01/02/2003 | US20030001251 Wafer level interconnection |
| 01/02/2003 | US20030001221 Micromechanical component as well as a method for producing a micromechanical component |
| 01/02/2003 | US20030000737 Masking layer in substrate cavity |
| 01/02/2003 | EP1271200A1 Imaging technique and optical switch using optical MEMS devices |
| 01/02/2003 | EP1270507A2 Passivation of anodic bonding regions in microelectromechanical systems |
| 01/02/2003 | EP1268121A1 Method for assembling cassette-loaded microcomponents |
| 01/02/2003 | CA2389820A1 Microelectromechanical component |
| 12/31/2002 | US6501107 Addressable fuse array for circuits and mechanical devices |
| 12/31/2002 | US6500760 Gold-based electrical interconnections for microelectronic devices |
| 12/31/2002 | US6499515 Gas cushion proportioning microsystem |
| 12/31/2002 | US6499297 Micromachined parylene membrane valve and pump |
| 12/19/2002 | WO2002101352A2 Electronic and opto-electronic devices fabricated from nanostructured high surface to volume ratio thin films |
| 12/19/2002 | WO2002100770A2 Wafer assembly and a method for producing a wafer assembly |
| 12/19/2002 | WO2002100769A2 A circuit encapsulation technique utilizing electroplating |
| 12/19/2002 | US20020192920 Passive devices and modules for transceiver and manufacturing method thereof |
| 12/19/2002 | US20020191893 Device and method for switching optical signals |
| 12/19/2002 | DE10127960A1 Wafer arrangement used in combinatorial analysis comprises chips arranged on a wafer, electrical connections between the chips, and a control unit coupled to and for controlling a part of the chips |
| 12/18/2002 | EP1267399A2 Electronic device having a cap body sealed to a substrate and method for manufacturing the same |
| 12/18/2002 | EP1267385A1 Micro ion pump for a low-pressure microdevice microenclosure |
| 12/18/2002 | EP1266863A2 Multi-level integrated circuit for wide-gap substrate bonding |
| 12/18/2002 | EP1265708A1 Microreactor |
| 12/18/2002 | CN1385359A Carbon nano tube film micromechanical infrared detector |
| 12/17/2002 | US6495895 Bi-level multilayered microelectronic device package with an integral window |
| 12/12/2002 | WO2002044033A3 Mems device with integral packaging |
| 12/12/2002 | US20020187509 Methods for detecting interaction between a test moiety and a plurality of target moieties |
| 12/12/2002 | US20020185947 Micro ion pump for a low-pressure microdevice microenclosure |
| 12/12/2002 | US20020185737 Multi-level integrated circuit for wide-gap substrate bonding |
| 12/12/2002 | US20020185712 Circuit encapsulation technique utilizing electroplating |
| 12/11/2002 | EP1263532A2 Microlaboratory devices and methods |
| 12/05/2002 | WO2002097767A2 Fabrication integration of micro-components |
| 12/05/2002 | US20020181838 Optical MEMS device and package having a light-transmissive opening or window |
| 12/05/2002 | US20020180031 Semiconductor device |
| 12/05/2002 | US20020179986 MEMS wafer level package |
| 12/05/2002 | US20020179921 Compliant hermetic package |
| 12/03/2002 | US6489670 Sealed symmetric multilayered microelectronic device package with integral windows |
| 12/03/2002 | US6489178 Method of fabricating a molded package for micromechanical devices |
| 11/28/2002 | US20020176649 Optically controlled switches |
| 11/21/2002 | WO2002093122A2 Sensor arrangement, in particular micro-mechanical sensor arrangement |
| 11/21/2002 | WO2002082101A8 Micromechanical capacitive acceleration sensor |
| 11/21/2002 | US20020173080 Microelectromechanical system device package and packaging method |
| 11/21/2002 | US20020173067 Method of forming patterned metalization on patterned semiconductor wafers |
| 11/21/2002 | US20020172639 Applying carbon nanotubes to low-viscosity dispersion medium to obtain a high-viscosity dispersing liquid which includes carbon nanotubes; forming a network of carbon nanotubes having electrical and/or magnetic connections by removing |
| 11/21/2002 | US20020171121 Integrated electromechanical switch and tunable capacitor and method of making the same |
| 11/21/2002 | US20020170175 Method for producing micromechanical structures |
| 11/21/2002 | DE10123039A1 Sensor arrangement used as a micromechanical sensor comprises a sensor section to deliver sensor signals, and a covering section arranged on the sensor section to form a hermetically sealed sensor inner chamber |
| 11/19/2002 | US6483160 Micromechanical enclosure |
| 11/14/2002 | WO2002091464A1 Optical cross-connect system |
| 11/14/2002 | WO2002091439A1 Fabrication of a microelectromechanical system (mems) device |
| 11/14/2002 | WO2002075794A3 A method for making a micromechanical device by using a sacrificial substrate |
| 11/14/2002 | US20020168144 Micro-opto-electro-mechanical system (MOEMS) |
| 11/14/2002 | US20020167712 Optical-electrical MEMS devices and method |
| 11/14/2002 | US20020167135 Integrated pneumatic o-ring gasket for mems devices |
| 11/13/2002 | EP1255642A1 Method for attaching a micromechanical device to a manifold, and fluid control system produced thereby |
| 11/12/2002 | US6479320 Vacuum package fabrication of microelectromechanical system devices with integrated circuit components |
| 11/12/2002 | US6478974 Microfabricated filter and shell constructed with a permeable membrane |
| 11/07/2002 | US20020163055 Flip-chip assembly of protected micromechanical devices |
| 11/06/2002 | EP1255149A2 A micro-opto-electro-mechanical system (MOEMS) |
| 11/06/2002 | CN1378224A Electronic parts |
| 11/05/2002 | US6476971 Method of manufacturing a microlens array mold and a microlens array |
| 10/31/2002 | WO2002058111A3 Silicon-based mems and treatment of silicon-based surfaces to reduce surface charging |
| 10/31/2002 | US20020159218 Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap |
| 10/31/2002 | US20020158480 Nanotweezers and nanomanipulator |
| 10/30/2002 | EP1252028A2 Temporary bridge for micro machined structures |
| 10/30/2002 | CN1376631A Miniature manipulate with piezoelectric-type flexible drive and adjustable range |
| 10/29/2002 | US6472739 Encapsulated microelectromechanical (MEMS) devices |
| 10/24/2002 | WO2002084335A2 Light transmissive substrate for an optical mems device |
| 10/23/2002 | EP1251546A2 Electronic device sealed under vacuum containing a getter and method of operation |
| 10/22/2002 | US6469909 MEMS package with flexible circuit interconnect |
| 10/22/2002 | US6467348 Microgyroscope with two resonant plates |
| 10/17/2002 | WO2002082101A1 Micromechanical capacitive acceleration sensor |
| 10/17/2002 | US20020152006 Programmable smart membranes and methods therefor |
| 10/17/2002 | US20020151776 Methods and devices for sealing microchip reservoir devices |
| 10/17/2002 | US20020149096 Electronic device sealed under vacuum containing a getter and method of operation |