| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 08/08/2002 | WO2002060810A2 Micro-element substrate interconnection |
| 08/08/2002 | WO2002006152B1 System and method for constraining totally released microcomponents |
| 08/08/2002 | WO2001029529A9 Integrated packaging of micromechanical sensors and control circuits |
| 08/08/2002 | US20020106862 Glass frit wafer bonding process and packages formed thereby |
| 08/08/2002 | US20020106314 Levitating-particle device in which magnetic microparticles and/or effectors are levitated adjacent a diamagnetic surface, with controlled movement laterally to different stations on a planar substrate |
| 08/08/2002 | US20020104990 Across-wafer optical MEMS device and protective lid having across-wafer light-transmissive portions |
| 08/08/2002 | US20020104823 Fabrication integration of micro-components |
| 08/07/2002 | EP1228998A2 Micromechanical device and process for the manufacture of a micromechanical device |
| 08/06/2002 | US6429511 Microcap wafer-level package |
| 08/06/2002 | US6428173 Moveable microelectromechanical mirror structures and associated methods |
| 08/01/2002 | WO2002059680A1 Integrated mirror array and circuit device with improved electrode configuration |
| 08/01/2002 | WO2002059679A1 Integrated mirror array and circuit device |
| 08/01/2002 | WO2002022492A3 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
| 08/01/2002 | US20020102202 Carbon microrod and method of producing the same |
| 08/01/2002 | US20020102090 Variable optical attenuator |
| 08/01/2002 | US20020102004 Miniature silicon condenser microphone and method for producing same |
| 08/01/2002 | US20020101129 Damped micromechanical device and method for making same |
| 08/01/2002 | US20020100919 Semiconductor device and microrelay |
| 07/31/2002 | EP1226089A1 Electromechanical component and method for producing said component |
| 07/31/2002 | EP0754084B1 Microreactor for a modular system |
| 07/31/2002 | CN1361720A Method and apparatus for the manipulation of particles by means of dielectrophoresis |
| 07/25/2002 | WO2002058111A2 Silicon-based mems and treatment of silicon-based surfaces to reduce surface charging |
| 07/25/2002 | WO2002057824A2 Across-wafer optical mems device and protective lid having across-wafer light-transmissive portions |
| 07/25/2002 | WO2001001025A9 Microfabricated elastomeric valve and pump systems |
| 07/25/2002 | US20020098610 Reduced surface charging in silicon-based devices |
| 07/25/2002 | US20020097977 Variable optical attenuator |
| 07/25/2002 | US20020096743 Method and device for protecting micro electromechanical systems structures during dicing of a wafer |
| 07/25/2002 | US20020096421 MEMS device with integral packaging |
| 07/23/2002 | US6422078 Semiconductor mechanical sensor |
| 07/23/2002 | US6422011 Thermal out-of-plane buckle-beam actuator |
| 07/18/2002 | WO2002056375A1 Molding of protective caps |
| 07/18/2002 | WO2002056372A1 Use of infrared radiation in molding of protective caps |
| 07/18/2002 | WO2002056367A1 Wafer scale molding of protective caps |
| 07/18/2002 | WO2002056366A1 Use of protective caps as masks at a wafer scale |
| 07/18/2002 | WO2002056362A1 Wafer scale fiber optic termination |
| 07/18/2002 | WO2002056360A1 Inkjet device encapsulated at the wafer scale |
| 07/18/2002 | WO2002056061A2 Optical mems device and package having a light-transmissive opening or window |
| 07/18/2002 | WO2002056031A1 Accelerometer protected by caps applied at the wafer scale |
| 07/18/2002 | WO2002055431A2 Wafer level interconnection |
| 07/18/2002 | WO2002055430A1 Hermetic mems package with interlocking layers |
| 07/18/2002 | WO2002055429A1 Mems package with flexible circuit interconnect |
| 07/18/2002 | WO2002055428A1 Hermetic package for mems devices with integrated carrier |
| 07/18/2002 | WO2001091902A3 Methods and devices for sealing microchip reservoir devices |
| 07/18/2002 | US20020094662 Method and device for protecting micro electromechanical systems structures during dicing of a wafer |
| 07/18/2002 | US20020093722 Driver and method of operating a micro-electromechanical system device |
| 07/18/2002 | US20020093025 Laminated micromirror package |
| 07/17/2002 | EP1223665A1 Improvements in or relating to micro-machines |
| 07/17/2002 | EP1223453A2 Electrostatically actuated micro-electro-mechanical system (MEMS) device |
| 07/17/2002 | EP1222142A1 Electro-mechanical component and method for producing the same |
| 07/17/2002 | EP1222031A1 Method and device for moving and placing liquid drops in a controlled manner |
| 07/11/2002 | WO2002016255A3 System and method for coupling microcomponents utilizing a pressure fitting receptacle |
| 07/11/2002 | WO2002006152A3 System and method for constraining totally released microcomponents |
| 07/11/2002 | WO2000065641A9 Microwave bonding of mems component |
| 07/11/2002 | US20020090749 Hermetic package for mems devices with integrated carrier |
| 07/11/2002 | US20020090180 Wafer scale fiber optic termination |
| 07/11/2002 | US20020089835 Mems package with flexible circuit interconnect |
| 07/11/2002 | US20020089569 Inkjet device encapsulated at the wafer scale |
| 07/11/2002 | US20020089097 Molding of protective caps |
| 07/11/2002 | US20020089096 Use of infrared radiation in molding of protective caps |
| 07/11/2002 | US20020089044 Hermetic mems package with interlocking layers |
| 07/11/2002 | US20020088537 Wafer scale molding of protective caps |
| 07/11/2002 | US20020088224 Resonant thermal out-of-plane buckle-beam actuator |
| 07/10/2002 | EP1221428A2 Self-aligned electrical interconnect for two assembled perpendicular semiconductor chips |
| 07/09/2002 | US6416831 Evacuated package and a method of producing the same |
| 07/09/2002 | US6415505 Micromachine package fabrication method |
| 07/04/2002 | WO2002052329A2 Triple electrode moems tunable filter and fabrication process therefor |
| 07/04/2002 | WO2001085599B1 System and method for coupling microcomponents |
| 07/04/2002 | US20020086456 Bulk micromachining process for fabricating an optical MEMS device with integrated optical aperture |
| 07/04/2002 | US20020085796 Self-aligned electrical interconnect for two assembled perpendicular semiconductor chips |
| 07/04/2002 | CA2366618A1 Self-aligned electrical interconnect for two assembled perpendicular semiconductor chips |
| 07/03/2002 | EP1218790A2 Microelectromechanical device with moving element |
| 06/27/2002 | WO2002050874A2 Mems device having an actuator with curved electrodes |
| 06/27/2002 | WO2002002227A3 Devices and methods for carrying out chemical reactions using photogenerated reagents |
| 06/27/2002 | WO2001068256A3 Microlaboratory devices and methods |
| 06/27/2002 | US20020081816 Method and device for protecting micro electromechanical systems structures during dicing of a wafer |
| 06/27/2002 | US20020080504 Triple electrode MOEMS tunable filter and fabrication process therefor |
| 06/27/2002 | US20020079219 Microfluidic chip having integrated electrodes |
| 06/26/2002 | EP1216602A2 Mems digital-to-acoustic transducer with error cancellation |
| 06/25/2002 | US6408878 Microfabricated elastomeric valve and pump systems |
| 06/20/2002 | US20020076910 High density electronic interconnection |
| 06/20/2002 | US20020076873 Method and device for protecting micro electromechanical systems structures during dicing of a wafer |
| 06/20/2002 | US20020076848 Method and device for protecting micro electromechanical systems structures during dicing of a wafer |
| 06/20/2002 | US20020075551 Enclosure for MEMS apparatus and method of using the same |
| 06/20/2002 | US20020074529 Method for dynamic manipulation of a position of a module in an optical system |
| 06/19/2002 | EP1215518A1 Mirror rocking member for optical deflector |
| 06/19/2002 | EP1215168A1 Magnetically packaged optical mems device and method for making the same |
| 06/18/2002 | US6407482 Micro-relay and method for manufacturing the same |
| 06/13/2002 | WO2002016089A3 Fabrication and application of nano-manipulators with induced growth |
| 06/13/2002 | US20020072163 Module and method of making same |
| 06/13/2002 | US20020071788 Dimensions and shape of the flow pass determines the relative timing for each fluid supplied from each supply unit to reach the common unit. |
| 06/13/2002 | US20020071166 Magnetically packaged optical MEMs device and method for making the same |
| 06/12/2002 | CN1353082A Cavitated meta-lattice net |
| 06/11/2002 | US6401545 Micro electro-mechanical system sensor with selective encapsulation and method therefor |
| 06/11/2002 | US6401544 Micromechanical component protected from environmental influences |
| 06/06/2002 | WO2002045463A2 Miniature silicon condenser microphone and method for producing same |
| 06/06/2002 | WO2002044033A2 Mems device with integral packaging |
| 06/06/2002 | WO2002023251A9 Scanner apparatus having optical elements coupled to mems acuators |
| 06/06/2002 | WO2001092842A3 Manufacture of mems structures in sealed cavity using dry-release mems device encapsulation |
| 06/06/2002 | US20020067559 Micromirror actuator |
| 06/06/2002 | US20020067104 Micromirror actuator |