| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 12/04/1997 | WO1997045644A1 Valveless liquid microswitch |
| 11/04/1997 | US5683919 Transistor and circuit incorporating same |
| 10/09/1997 | DE19613516A1 Suction grip for micro-system technology |
| 09/24/1997 | CN1160206A 半导体加速度传感器 Semiconductor acceleration sensor |
| 09/10/1997 | EP0794558A1 Hermetic seal for an electronic component having a secondary chamber |
| 09/09/1997 | US5666272 Detachable module/ball grid array package |
| 09/03/1997 | EP0793103A2 Semiconductor acceleration sensor |
| 08/12/1997 | US5656776 Semiconductor sensor with sealed package |
| 07/23/1997 | EP0784847A2 A memory device |
| 07/15/1997 | US5648300 Method of manufacturing cantilever drive mechanism and probe drive mechanism |
| 07/08/1997 | US5645564 Microfabricated therapeutic actuator mechanisms |
| 06/17/1997 | US5639542 Sub-ground plane for micromachined device |
| 05/14/1997 | EP0772756A1 Microcomponent sheet architecture |
| 05/06/1997 | US5627318 Mechanical force sensing semiconductor device |
| 03/18/1997 | US5611214 Microcomponent sheet architecture |
| 02/06/1997 | WO1997004451A1 Microelectromechanical structure and process of making same |
| 02/05/1997 | EP0757431A2 Machine structures fabricated of multiple microstructure layers |
| 01/22/1997 | EP0754084A1 Integrated chemical synthesizers |
| 01/07/1997 | US5591679 Sealed cavity arrangement method |
| 12/05/1996 | WO1996038092A1 Microfabricated therapeutic actuator mechanisms |
| 12/05/1996 | CA2220883A1 Microfabricated therapeutic actuator mechanisms |
| 12/03/1996 | US5580523 Integrated chemical synthesizers |
| 11/28/1996 | DE19547783C1 Semiconductor sensor, e.g. for pressure measurement etc. |
| 11/13/1996 | EP0742581A2 Sealed cavity arrangement |
| 10/17/1996 | WO1996032650A1 Methods for planarization and encapsulation of micromechanical devices in semiconductor processes |
| 09/18/1996 | EP0732594A1 Micromechanical semiconductor device |
| 08/15/1996 | WO1996011472A3 A memory device |
| 07/04/1996 | WO1996020583A1 Process for manipulating microcomponents or lightweight components and device to carry out the process |
| 05/15/1996 | DE4446489C1 Verfahren zum Manipulieren von Mikrobauteilen und Vorrichtung zur Durchführung des Verfahrens A method of manipulating micro-components and apparatus for carrying out the method |
| 04/30/1996 | US5511428 Backside contact of sensor microstructures |
| 04/18/1996 | WO1996011472A2 A memory device |
| 04/02/1996 | US5504026 Methods for planarization and encapsulation of micromechanical devices in semiconductor processes |
| 03/05/1996 | US5497269 Dispersive microlens |
| 02/15/1996 | WO1996004516A1 Microcomponent sheet architecture |
| 02/14/1996 | EP0696497A1 Micro gripper |
| 01/09/1996 | US5482800 Mulitlayer element for photoresists masking with apertures |
| 01/02/1996 | US5480764 Gray scale microfabrication for integrated optical devices |
| 11/29/1995 | EP0683902A1 Process for producing micro-structure components on a substrate |
| 11/28/1995 | US5471345 Wavefront corrector for scanning microlens arrays |
| 10/31/1995 | US5463498 Internally cooled large aperture microlens array with monolithically integrated microscanner |
| 10/31/1995 | US5461916 Mechanical force sensing semiconductor device |
| 10/12/1995 | WO1995026796A1 Integrated chemical synthesizers |
| 09/13/1995 | EP0671024A1 Method and apparatus for fabricating microlenses |
| 09/12/1995 | US5450241 Wavefront corrector for scanning microlens arrays |
| 08/22/1995 | US5444572 Wavefront corrector for scanning microlens arrays |
| 05/30/1995 | US5420720 Internally cooled large aperture microlens array with monolithically integrated microscanner |
| 05/16/1995 | US5415727 Internally cooled large aperture microlens array with monolithically integrated microscanner |
| 04/12/1995 | EP0647326A1 Dispersive microlens |
| 04/04/1995 | US5403665 Method of applying a monolayer lubricant to micromachines |
| 03/22/1995 | EP0644586A2 Arrangement to attach a micromechanical sensor on a support by glueing |
| 03/14/1995 | US5398229 Method of manufacturing cantilever drive mechanism, method of manufacturing probe drive mechanism, cantilever drive mechanism, probe drive mechanism and electronic device which uses the same |
| 02/16/1995 | DE4345219A1 Device for connecting and holding a chip structure |
| 02/16/1995 | DE4327104A1 Device for connecting and holding a chip structure |
| 01/05/1995 | WO1995000258A1 Method of applying a monolayer lubricant to micromachines |
| 08/18/1994 | WO1994018605A1 Process for producing micro-structure components on a substrate |
| 08/02/1994 | US5334835 Probe drive mechanism and electronic device which uses the same |
| 06/09/1994 | WO1994012911A1 Method and apparatus for fabricating microlenses |
| 05/10/1994 | US5310623 As a replica in a photoresist material which is used to reproduce directly in a substrate |
| 04/19/1994 | US5304899 Energy supply system to robot within pipe |
| 01/06/1994 | WO1994000781A1 Dispersive microlens |
| 12/28/1993 | US5273939 Method of assembling micromechanical sensors |
| 09/14/1993 | US5245193 Micromechanics forming method and micromechanics |
| 09/14/1993 | US5243861 Capacitive type semiconductor accelerometer |
| 04/07/1993 | EP0535934A1 Method of manufacturing cantilever drive mechanism, method of manufacturing probe drive mechanism, cantilever drive mechanism, probe drive mechanism and electronic device which uses the same |
| 02/23/1993 | US5188983 Polysilicon resonating beam transducers and method of producing the same |
| 01/27/1993 | EP0418250B1 Micromanipulator for moving objects |
| 02/25/1992 | US5090254 Polysilicon resonating beam transducers |
| 12/03/1991 | US5070317 Miniature inductor for integrated circuits and devices |
| 10/16/1991 | EP0451992A2 Detection of vibrations of a microbeam through a shell |
| 10/15/1991 | CA1290858C Asychronous micro-machine/interface |
| 08/20/1991 | US5041900 Semiconductor device having sealed electrical feedthrough |
| 11/09/1989 | DE3814616A1 Mikromanipulator zur bewegung von objekten Micromanipulator for moving objects |
| 11/02/1989 | WO1989010241A1 Micromanipulator for moving objects |
| 07/18/1989 | US4849374 Method of sealing an electrical feedthrough in a semiconductor device |
| 02/08/1989 | EP0302654A2 Method of sealing an electrical feedthrough in a semiconductor device |
| 10/25/1988 | US4780572 Device for mounting semiconductors |
| 09/27/1988 | US4773972 Bonding a doped semiconductors |
| 03/03/1988 | DE3728495A1 Asynchrone mikro-maschinen/schnittstelle Asynchronous micro-machine / interface |
| 05/07/1985 | US4516148 Semiconductor device having improved lead attachment |
| 07/31/1984 | US4463336 Ultra-thin microelectronic pressure sensors |
| 01/24/1984 | US4426768 On silicon wafer bonding doped silicon layer, borosilicate glass and second doped silicon layer, then stripping silicon wafer |
| 06/24/1980 | US4208782 Methods of fabricating transducers employing flat bondable surfaces with buried contact areas |
| 05/13/1980 | US4202217 Semiconductor transducers employing flat bondable surfaces with buried contact areas |