| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 02/05/2004 | US20040020676 Hermetically sealed micro-device package with window |
| 02/05/2004 | US20040020173 Low temperature anodic bonding method using focused energy for assembly of micromachined systems |
| 02/05/2004 | DE10232190A1 Verfahren zur Herstellung eines Bauelements mit tiefliegenden Anschlußflächen Method for manufacturing a device with deep pads |
| 02/04/2004 | EP1386347A2 Microelectromechanical system (mens) device |
| 02/04/2004 | EP1386343A1 A microfluidic system (edi) |
| 02/04/2004 | CN1472133A Bridge for microelectromechanical structure |
| 02/03/2004 | US6686653 Miniature microdevice package and process for making thereof |
| 02/03/2004 | US6686642 Micro-machined system comprising logic circuitry or electron emitter array; second surface with gradual incline; evacuation, hermetic sealing |
| 02/03/2004 | US6684699 Micromechanical device |
| 02/03/2004 | US6684469 Electrostatic activators comprising multilayer sheets having electroconductive thin films, dielectrics and electrodes, bonded at spacings using adhesives to form three-dimensional microstructure cells |
| 01/29/2004 | WO2004010739A1 Microwave bonding on thin film metal coated substrates |
| 01/29/2004 | WO2004009492A2 Diamondoid-based components in nanoscale construction |
| 01/29/2004 | US20040017419 Method of forming a through-substrate interconnect |
| 01/29/2004 | US20040017078 Connectors for microfluidic devices |
| 01/29/2004 | US20040016995 MEMS control chip integration |
| 01/29/2004 | US20040016397 Diamondoid-based components in nanoscale construction |
| 01/28/2004 | EP1383708A1 Printed circuit board integrated switch |
| 01/22/2004 | WO2004008522A2 Method for producing a component having submerged connecting areas |
| 01/22/2004 | WO2003030252A3 Process for producing interconnects |
| 01/22/2004 | US20040012298 MEMS device having electrothermal actuation and release and method for fabricating |
| 01/22/2004 | US20040012087 Method and apparatus for forming a DMD window frame with molded glass |
| 01/22/2004 | US20040012057 Monolithic integration of a MOSFET with a MEMS device |
| 01/22/2004 | US20040011783 Microwave bonding of thin film metal coated substrates |
| 01/22/2004 | DE10326555A1 Brücken für mikroelektromechanische Strukturen Bridges for microelectromechanical structures |
| 01/22/2004 | DE10231730A1 Mikrostrukturbauelement und Verfahren zu dessen Herstellung Microstructure component and process for its preparation |
| 01/15/2004 | WO2003057618A3 Method for producing a protective covering for a component |
| 01/15/2004 | WO2002091439A9 Fabrication of a microelectromechanical system (mems) device |
| 01/15/2004 | US20040007970 Micro electro mechanical system controlled organic LED and pixel arrays and method of using and of manufacturing same |
| 01/15/2004 | US20040007750 Integrated sensor and electronics package |
| 01/13/2004 | US6678458 System and method for precise positioning of microcomponents |
| 01/13/2004 | US6677709 Micro electromechanical system controlled organic led and pixel arrays and method of using and of manufacturing same |
| 01/13/2004 | US6677227 Metal contactor flanges; connecting circuits |
| 01/13/2004 | US6677225 System and method for constraining totally released microcomponents |
| 01/13/2004 | US6675671 Planar-constructed spatial micro-stage |
| 01/13/2004 | US6675630 Microgyroscope with electronic alignment and tuning |
| 01/08/2004 | WO2004003965A2 Mems capping method and apparatus |
| 01/08/2004 | WO2004003619A1 Mems structure with mechanical overdeflection limiter |
| 01/08/2004 | US20040005734 Dicing method for micro electro mechanical system chip |
| 01/08/2004 | US20040005114 Electrostatic drive mirror apparatus |
| 01/08/2004 | US20040004592 MEMS element, GLV device, and laser display |
| 01/08/2004 | US20040004364 Diode-type nanotweezers and nanomanipulator device using the same |
| 01/08/2004 | DE10122133B4 Integriertes Mikrosystem Integrated Microsystems |
| 01/07/2004 | EP1377517A1 A unitary flexible and mechanically and chemically robust microsystem and a method for producing same |
| 01/07/2004 | CN1465520A Method for making low friction factor microelectronic mechanical mould adopting electroforming |
| 01/06/2004 | US6674159 Bi-level microelectronic device package with an integral window |
| 01/06/2004 | US6673697 Packaging microelectromechanical structures |
| 01/06/2004 | US6673254 Methods for fabricating a micro heat barrier |
| 01/06/2004 | US6672795 System and method for coupling microcomponents |
| 01/02/2004 | EP1377140A2 Improved film cooling for microcircuits |
| 01/02/2004 | EP1375417A2 Bridges for microelectromechanical structures |
| 01/01/2004 | US20040001263 MEMS structure with mechanical overdeflection limiter |
| 12/31/2003 | WO2004001481A1 Micromirror unit, method for fabricating the same and optical switch comprising it |
| 12/31/2003 | WO2004001335A2 Increasing the dynamic range of a mems gyroscope |
| 12/31/2003 | WO2004000718A2 Bridges for microelectromechanical structures |
| 12/31/2003 | CN1464986A Optical multilayer structure and its production method, optical switching device, and image display |
| 12/31/2003 | CA2483711A1 Increasing the dynamic range of a mems gyroscope |
| 12/30/2003 | US6669256 Nanotweezers and nanomanipulator |
| 12/25/2003 | US20030234703 Bridges for microelectromechanical structures |
| 12/25/2003 | US20030234594 Microelement piezoelectric feedback type picking and releasing device |
| 12/24/2003 | WO2003107397A2 Microelectromechanical system and method for determining temperature and moisture profiles within pharmaceutical packaging |
| 12/24/2003 | WO2003106927A2 Passive temperature compensation technique for mems devices |
| 12/24/2003 | WO2003106329A2 Microelectromechanical device with integrated conductive shield |
| 12/24/2003 | WO2003106328A2 Micromechanical component and corresponding production method |
| 12/24/2003 | WO2003068671A3 Method for producing a sensor or actuator arrangement, and corresponding sensor or actuator arrangement |
| 12/24/2003 | WO2003062133A3 Covered microchamber structures |
| 12/24/2003 | WO2003054927A3 Structure and process for packaging rf mems and other devices |
| 12/24/2003 | WO2003024865A8 Method for producing micro-electromechanical components |
| 12/24/2003 | CA2490393A1 Microelectromechanical device with integrated conductive shield |
| 12/24/2003 | CA2484323A1 Passive temperature compensation technique for mems devices |
| 12/23/2003 | US6667837 Method and apparatus for configuring an aperture edge |
| 12/23/2003 | US6667558 Module and method of making same |
| 12/23/2003 | CA2322122C Micro-electro-mechanical optical device |
| 12/19/2003 | CA2432490A1 Improved film cooling for microcircuits |
| 12/18/2003 | WO2003105198A1 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 12/18/2003 | WO2002071371A3 Fabrication integration of micro-components |
| 12/18/2003 | US20030230798 Wafer level MEMS packaging |
| 12/18/2003 | US20030230793 Support for microelectronic, microoptoelectronic or micromechanical devices |
| 12/18/2003 | US20030230147 Microelectromechanical device with integrated conductive shield |
| 12/17/2003 | EP1183102B1 The use of microfluidic systems in the electrochemical detection of target analytes |
| 12/16/2003 | US6664779 Package with environmental control material carrier |
| 12/16/2003 | US6664126 Process for fabrication of 3-dimensional micromechanisms |
| 12/11/2003 | WO2003103048A1 Die connected with integrated circuit component |
| 12/11/2003 | WO2003083883A3 Packaging microelectromechanical structures |
| 12/11/2003 | US20030228411 Method for integrating micro- and nanoparticles into MEMS and apparatus including the same |
| 12/11/2003 | US20030227094 Wafer level packaging of micro electromechanical device |
| 12/11/2003 | CA2483272A1 Die connected with integrated circuit component |
| 12/10/2003 | EP1369730A1 Micro mirror unit including mirror substrate and wiring substrate spaced by conductive spacer |
| 12/10/2003 | EP1075602B1 Microvalve battery |
| 12/10/2003 | CN1461420A Integrated planar optical waveguide and shutter |
| 12/10/2003 | CN1461018A Electrostatic driven micromachine changeable inductor |
| 12/09/2003 | US6661084 Single level microelectronic device package with an integral window |
| 12/09/2003 | US6661069 Micro-electromechanical varactor with enhanced tuning range |
| 12/09/2003 | US6660564 Wafer-level through-wafer packaging process for MEMS and MEMS package produced thereby |
| 12/09/2003 | US6660552 Reduced surface charging in silicon-based devices |
| 12/04/2003 | US20030224559 Micromachined structures including glass vias with internal conductive layers anodically bonded to silicon-containing substrates |
| 12/04/2003 | US20030223679 Piano MEMs micromirror |
| 12/04/2003 | US20030222337 Die connected with integrated circuit component for electrical signal passing therebetween |
| 12/04/2003 | DE10224155C1 Sensor unit has individual sensors embedded in input surface connected in sensor groups via conductor path structure on underside of input surface |
| 12/03/2003 | EP1366518A1 In-situ cap and method of fabricating same for an integrated circuit device |
| 12/03/2003 | CN1459643A Micro-mirror surface unit containing mirror surface base plate and wiring substrate isolated with conductive lining |