| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 09/15/2004 | CN1166554C Miniature manipulate with piezoelectric-type flexible drive and adjustable range |
| 09/14/2004 | US6792173 Device and method for switching optical signals |
| 09/14/2004 | US6791162 Unit cell architecture for electrical interconnects |
| 09/10/2004 | WO2004077523A2 Micromachined assembly with a multi-layer cap defining cavity |
| 09/09/2004 | US20040173913 Capacitive semiconductor sensor |
| 09/09/2004 | US20040173886 Micromachined assembly with a multi-layer cap defining a cavity |
| 09/09/2004 | US20040173862 Optical device having micro lens array and method for manufacturing the same |
| 09/09/2004 | US20040173751 Electronic device and method for manufacturing the same |
| 09/09/2004 | DE10308050A1 Connecting tubes to channels in carrier member e.g. for measuring device, by providing channel with support surface and guide for connecting tube |
| 09/08/2004 | EP1454349A2 Trilayered beam mems device and related methods |
| 09/08/2004 | EP1454333A1 Mems device having a trilayered beam and related methods |
| 09/07/2004 | US6787969 Damped micromechanical device |
| 09/07/2004 | US6787897 Wafer-level package with silicon gasket |
| 09/02/2004 | WO2004075247A2 Electronic components comprising adjustable-capacitance micro-electro-mechanical capacitors |
| 09/02/2004 | WO2004074168A2 Packaged microchip with thermal stress relief |
| 09/02/2004 | US20040171206 Electrically isolated support for overlying MEM structure |
| 09/02/2004 | US20040171186 Method of protecting microfabricated devices with protective caps |
| 09/02/2004 | US20040171185 Particle filter for partially enclosed microelectromechanical systems |
| 09/02/2004 | US20040169244 Miniature 3-dimensional package for MEMS sensors |
| 09/01/2004 | EP1452481A2 Fabrication of advanced silicon-based MEMS devices |
| 08/31/2004 | US6784020 Package structure and method for making the same |
| 08/31/2004 | US6782748 High-G acceleration protection by caging |
| 08/26/2004 | WO2004071943A2 Electronic device and its manufacturing method device |
| 08/26/2004 | WO2004049017A3 Spatial light modulators with light absorbing areas |
| 08/26/2004 | WO2004037712A3 Method for producing a packaged integrated circuit with a microcavity |
| 08/26/2004 | WO2003079752A3 Unit cell architecture for electrical interconnects |
| 08/26/2004 | US20040166688 Method of fabricating microstructures and devices made therefrom |
| 08/26/2004 | US20040166662 MEMS wafer level chip scale package |
| 08/26/2004 | US20040166606 Low temperature wafer-level micro-encapsulation |
| 08/26/2004 | US20040163717 MEMS device assembly |
| 08/26/2004 | US20040163472 Acceleration sensor formed on surface of semiconductor substrate |
| 08/25/2004 | EP1449810A2 Method for manufacturing micro-electro-mechanical system using solder balls |
| 08/25/2004 | CN1522950A Method for manufacturing a housing for a chip having a micromechanical structure |
| 08/24/2004 | US6781231 Microelectromechanical system package with environmental and interference shield |
| 08/24/2004 | US6780672 Micro eletro-mechanical component and system architecture |
| 08/19/2004 | WO2004059250A3 Methods and systems for decelarating proof mass movements within mems structures |
| 08/19/2004 | WO2004058628A3 Encapsulated microstructure and method of producing one such microstructure |
| 08/19/2004 | WO2003086956A3 Method for producing a housing for a chip having a micromechanical structure |
| 08/19/2004 | WO2003076330A3 Silicon carbide microelectromechanical devices with electronic circuitry |
| 08/19/2004 | US20040161870 Integrated micro electromechanical system encapsulation component and fabrication process of the component |
| 08/19/2004 | US20040161530 Covering with sheet of radiation transparent material; adhesion og metal frame to sheet; spraying, fusion metal particles |
| 08/18/2004 | EP1447875A1 Multi-bit phase shifter and manufacturing method thereof |
| 08/18/2004 | EP1183566B1 Micromachined electrostatic actuator with air gap |
| 08/18/2004 | EP0933012B1 Device for positioning and retaining micro-building-blocks |
| 08/18/2004 | CN1521889A Multi-bit phase shifter and manufacturing method thereof |
| 08/17/2004 | US6778046 Latching micro magnetic relay packages and methods of packaging |
| 08/17/2004 | US6777767 Methods for producing packaged integrated circuit devices & packaged integrated circuit devices produced thereby |
| 08/17/2004 | US6777259 Accelerometer protected by caps applied at the wafer scale |
| 08/12/2004 | WO2004068189A2 Hermetic window assemblies and frames |
| 08/12/2004 | WO2004068094A2 Integrated pressure and acceleration measurement device and a method of manufacture thereof |
| 08/12/2004 | WO2004067770A1 Active dna nanocompartment and its preparation |
| 08/12/2004 | WO2004038916A3 Micro-electromechanical varactor with enhanced tuning range |
| 08/12/2004 | US20040157426 Fabrication of advanced silicon-based MEMS devices |
| 08/12/2004 | US20040157367 Hermetically packaging a microelectromechanical switch and a film bulk acoustic resonator |
| 08/12/2004 | US20040155729 Multi-bit phase shifter and manufacturing method thereof |
| 08/11/2004 | EP1445861A2 Electronic device and method of manufacturing the same |
| 08/11/2004 | EP1185373B1 Method and apparatus for the manipulation of particles by means of dielectrophoresis |
| 08/10/2004 | US6773962 Microelectromechanical system device packaging method |
| 08/05/2004 | WO2004065289A2 Micromechanical or microoptoelectronic devices with deposit of getter material and integrated heater, and support for the production thereof |
| 08/05/2004 | WO2004044518A3 High-g acceleration protection of a proof mass by electrostatical fixation |
| 08/05/2004 | WO2004035461A3 Manufacturing methods and vacuum or hermetically packaged micromachined or mems devices formed thereby having substantially vertical feedthroughs |
| 08/05/2004 | US20040152229 Manufacturing methods and vacuum or hermetically packaged micromachined or MEMS devices formed thereby having substantially vertical feedthroughs |
| 08/05/2004 | US20040150870 MEMS enclosure |
| 08/05/2004 | US20040150058 MEMS enclosure |
| 08/05/2004 | US20040149808 Method for the adhesion of two elements, in particular of an integrated circuit, for example an encapsulation of a resonator, and corresponding integrated circuit |
| 08/05/2004 | DE10304835A1 Laminated microelectromechanical component, e.g. rotation rate sensor, micro swing mirror, acceleration sensor, comprises electric conductive structure integrated in functional layer |
| 08/05/2004 | DE10303263A1 Sensor module contains sealing arrangement that acoustically isolates microphone so that detection is only possible in direction perpendicular to active surface over opening in circuit board |
| 08/05/2004 | CA2511836A1 Micromechanical or microoptoelectronic devices with deposit of getter material and integrated heater, and support for the production thereof |
| 08/04/2004 | EP1443016A2 Micro-Fabricated device and method of making same |
| 08/04/2004 | EP1442480A1 Device for the hermetic encapsulation of a component that must be protected against all stresses |
| 08/04/2004 | EP1240529B1 Method for producing micromechanical structures |
| 08/03/2004 | US6771859 Self-aligning optical micro-mechanical device package |
| 08/03/2004 | US6770569 Low temperature plasma Si or SiGe for MEMS applications |
| 08/03/2004 | US6770506 Release etch method for micromachined sensors |
| 08/03/2004 | US6770503 Integrated packaging of micromechanical sensors and associated control circuits |
| 08/03/2004 | US6769303 Multi-functional micro electromechanical silicon carbide accelerometer |
| 07/29/2004 | US20040147056 Micro-fabricated device and method of making |
| 07/29/2004 | US20040147055 Photoelectric conversion device and manufacturing mehtod therefor |
| 07/29/2004 | US20040145277 MEMS actuator with lower power consumption and lower cost simplified fabrication |
| 07/27/2004 | US6768628 Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap |
| 07/27/2004 | US6768196 Packaged microchip with isolation |
| 07/27/2004 | US6767764 Curable adhesive to bonded a release sheet to flexible package positioning within cavity |
| 07/27/2004 | US6767757 High-vacuum packaged microgyroscope and method for manufacturing the same |
| 07/22/2004 | WO2004061934A1 Selective underfill for flip chips and flip-chip assemblies |
| 07/22/2004 | WO2004037711A3 Processes for hermetically packaging wafer level microscopic structures |
| 07/22/2004 | WO2004028958A3 Electrical and/or micromechanical component and method |
| 07/22/2004 | WO2003083952A3 Device and sensor for receiving light signals and method for the production thereof |
| 07/22/2004 | US20040141682 Control apparatus and control method for optical switch using MEMS mirrors |
| 07/22/2004 | US20040140557 Wl-bga for MEMS/MOEMS devices |
| 07/22/2004 | US20040140475 3D MEMS/MOEMS package |
| 07/22/2004 | DE10300594A1 Electronic and/or micromechanical structural element with chips, a packaging, a gel, and a gel packing agent useful in stress determination |
| 07/20/2004 | US6764881 Method for manufacturing electro ceramic components |
| 07/20/2004 | US6764875 Method of and apparatus for sealing an hermetic lid to a semiconductor die |
| 07/20/2004 | US6763716 Semiconductor acceleration sensor |
| 07/15/2004 | WO2004059250A2 Methods and systems for decelarating proof mass movements within mems structures |
| 07/15/2004 | WO2004058628A2 Encapsulated microstructure and method of producing one such microstructure |
| 07/15/2004 | WO2004047148A3 Method for producing and testing a corrosion-resistant channel in a silicon device |
| 07/15/2004 | WO2004000718A3 Bridges for microelectromechanical structures |
| 07/15/2004 | WO2003106328A3 Micromechanical component and corresponding production method |
| 07/15/2004 | WO2003043038A3 Mems device having contact and standoff bumps and related methods |