| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 06/05/2002 | EP1211726A1 Single-crystal-silicon flexible ribbon for micro-mirror and MEMS assembly on silicon-on-insulator (SOI) material |
| 06/05/2002 | EP1211218A2 Micro-device assembly with electrical capabilities |
| 06/05/2002 | EP0647326B1 Dispersive microlens |
| 06/04/2002 | US6400009 Hermatic firewall for MEMS packaging in flip-chip bonded geometry |
| 06/04/2002 | US6399406 Encapsulated MEMS band-pass filter for integrated circuits and method of fabrication thereof |
| 06/04/2002 | US6399361 Devices and methods for using centripetal acceleration to drive fluid movement in a microfluidics system |
| 06/04/2002 | US6397880 Microvalve battery |
| 05/30/2002 | WO2002042716A2 Wafer eutectic bonding of mems gyros |
| 05/30/2002 | WO2001036320A3 Micromachine package |
| 05/30/2002 | US20020064647 Single-crystal-silicon ribbon hinges for micro-mirror and mems assembly on SOI material |
| 05/30/2002 | US20020063339 Micro-device assembly with electrical capabilities |
| 05/30/2002 | US20020063322 Micromechanical getter anchor |
| 05/30/2002 | US20020062645 Micromachined parylene mambrane valve and pump |
| 05/29/2002 | EP1209502A2 Method for the dynamic adjustment of the position of an element in an optical system |
| 05/28/2002 | US6396711 Interconnecting micromechanical devices |
| 05/28/2002 | US6393685 Microjoinery methods and devices |
| 05/23/2002 | WO2001048532A9 Integrated planar optical waveguide and shutter |
| 05/23/2002 | US20020061662 Fabrication and application of nano-manipulators with induced growth |
| 05/23/2002 | DE10056782A1 Method for dynamic manipulation and/or adjustment in the position of a subassembly in an optical system in a sub-mm range, uses actuators with motion detectors and interconnected sensors to move the subassembly |
| 05/23/2002 | DE10056716A1 Microstructured component used as a micromechanical sensor element comprises a microstructure with a layer system consisting of a hermetically sealed layer and a polymer layer |
| 05/22/2002 | EP1207378A1 Semiconductor pressure sensor and pressure sensing device |
| 05/21/2002 | US6392221 Micro-electro-mechanical optical device |
| 05/21/2002 | US6392144 Micromechanical die attachment surcharge |
| 05/21/2002 | US6391741 Fabrication process for microstructure protection systems related to hard disk reading unit |
| 05/21/2002 | US6391674 Process for fabricating single crystal resonant devices that are compatible with integrated circuit processing |
| 05/21/2002 | US6391673 Method of fabricating micro electro mechanical system structure which can be vacuum-packed at wafer level |
| 05/16/2002 | WO2002038492A1 Microstructure component |
| 05/16/2002 | WO2002038442A2 Microfabricated translational stages for control of aerodynamic loading |
| 05/16/2002 | US20020057041 Piezoelectric/electrostrictive device and method of manufacturing same |
| 05/16/2002 | US20020056900 Electro-optical package with drop-in aperture |
| 05/16/2002 | US20020056898 Package with environmental control material carrier |
| 05/16/2002 | US20020056560 MEMS enclosure |
| 05/16/2002 | DE10055081A1 Micro-component used as a sensor element comprises a glass body provided with an electrically conducting coating on its side facing a microstructure |
| 05/16/2002 | DE10052419A1 Production of micromechanical component comprises applying auxiliary layer and membrane layer on substrate, applying spacer layer, back-etching spacer layer, etching auxiliary layer and applying sealing layer |
| 05/15/2002 | EP1205781A1 Optical add drop multiplexer |
| 05/15/2002 | EP1029353A4 Sensor package arrangement |
| 05/14/2002 | US6387723 Heating under vacuum; cooling; passivation |
| 05/10/2002 | WO2002037911A1 Method and arrangement relating to providing a substrate with cavities |
| 05/10/2002 | WO2002037661A1 Electrostatic/pneumatic actuators for active surfaces |
| 05/10/2002 | WO2001085599A3 System and method for coupling microcomponents |
| 05/10/2002 | CA2427822A1 Electrostatic/pneumatic actuators for active surfaces |
| 05/08/2002 | EP1204191A2 Wireless power supply method |
| 05/08/2002 | EP1203954A2 Chemical reactions using a nanoscale reaction system |
| 05/08/2002 | EP1203748A1 Microdevice and its production method |
| 05/08/2002 | DE10053326A1 Micro-mechanical component for sensing dew point contains membrane and porous material thermal insulating zone membrane support |
| 05/07/2002 | US6384473 Microelectronic device package with an integral window |
| 05/07/2002 | US6384353 Micro-electromechanical system device |
| 05/02/2002 | US20020051053 Induction charge mirror |
| 05/02/2002 | EP1201603A2 Method to remove metal and silicon oxide during gas-phase sacrificial oxide etch |
| 05/02/2002 | EP1201602A2 Thermal out-of-plane buckle-beam actuator |
| 05/02/2002 | EP1201407A2 Method of manufacturing a microlens array mold and a microlens array |
| 04/30/2002 | US6379988 Pre-release plastic packaging of MEMS and IMEMS devices |
| 04/25/2002 | WO2002032806A1 Thermoelastic actuator design |
| 04/25/2002 | US20020048838 Acceleration sensor and method of manufacturing the same |
| 04/25/2002 | US20020048765 Apparatus for use as diagnostic tool in drug screening, environmental monitoring and forensic analysis |
| 04/23/2002 | US6376280 Microcap wafer-level package |
| 04/18/2002 | WO2002007482A3 Micro electro mechanical system controlled organic led and pixel arrays and method of using and of manufacturing same |
| 04/18/2002 | US20020043706 Miniature Microdevice Package and Process for Making Thereof |
| 04/11/2002 | WO2001087767A3 Micro-electrocmechamical sensor (mems) resonator |
| 04/11/2002 | WO2001048532A3 Integrated planar optical waveguide and shutter |
| 04/10/2002 | EP1194693A2 Microfabricated elastomeric valve and pump systems |
| 04/09/2002 | US6367251 Lockable microelectromechanical actuators using thermoplastic material, and methods of operating same |
| 04/04/2002 | WO2002012116A3 Bonded wafer optical mems process |
| 04/04/2002 | WO2002005413A3 Mems actuator with lower power consumption and lower cost simplified fabrication |
| 04/04/2002 | WO2001046066A3 Sensor with at least one micromechanical structure and method for the production thereof |
| 04/03/2002 | EP1193529A2 Mirror structure |
| 04/03/2002 | EP1193216A1 Nanotweezers and nanomanipulator |
| 04/03/2002 | CN1343369A IC-compatible parylene MEMS Technology and its application of integrated sensors |
| 04/03/2002 | CN1082237C Micro-relay and method for manufacturing the same |
| 03/28/2002 | WO2002024570A1 Micro electro-mechanical systems |
| 03/28/2002 | WO2002024322A2 Microfluidic chip having integrated electrodes |
| 03/28/2002 | DE10042945A1 Bauelement für Sensoren mit integrierter Elektronik und Verfahren zu seiner Herstellung, sowie Sensor mit integrierter Elektronik Component for sensors with integrated electronics and method for its production, as well as the sensor with integrated electronics |
| 03/27/2002 | CN1341546A Graphic-arts technique method of metal layer on wafer with thick layer structure |
| 03/26/2002 | US6361327 Micromachined silicon beam interconnect |
| 03/26/2002 | US6360539 Microelectromechanical actuators including driven arched beams for mechanical advantage |
| 03/21/2002 | WO2002023251A2 Scanner apparatus having optical elements coupled to mems acuators |
| 03/21/2002 | WO2002022492A2 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
| 03/21/2002 | WO2001060736A3 Methods and apparatus for a vertically-integrated sensor structure |
| 03/21/2002 | CA2421755A1 Dual position linear displacement micromechanism |
| 03/19/2002 | US6359333 Wafer-pair having deposited layer sealed chambers |
| 03/19/2002 | US6358021 Electrostatic actuators for active surfaces |
| 03/14/2002 | WO2001058804A3 Micromechanical component and corresponding production method |
| 03/14/2002 | WO2001024228A3 Temporary bridge for micro machined structures |
| 03/13/2002 | EP1186002A1 Ic-compatible parylene mems technology and its application in integrated sensors |
| 03/13/2002 | EP1185373A1 Method and apparatus for the manipulation of particles by means of dielectrophoresis |
| 03/12/2002 | US6355578 Manufacturing method for a composite device |
| 03/07/2002 | WO2001056921A3 Vacuum package fabrication of microelectromechanical system devices with integrated circuit components |
| 03/07/2002 | US20020028504 Microfluidic bioreactor; for use in resolution and analysis of microstructures |
| 03/07/2002 | US20020027390 Wireless power supply method |
| 03/07/2002 | US20020027296 Methods for producing packaged integrated circuit devices & packaged integrated circuit devices produced thereby |
| 03/07/2002 | US20020027133 Device and methods for using centripetal acceleration to drive fluid movement in a microfluidics system |
| 03/07/2002 | US20020026832 Semiconductor mechanical sensor |
| 03/06/2002 | EP1184335A2 Device for sensors with integrated electronics and its method of manufacture, and sensor with integrated electronics |
| 03/06/2002 | EP1183566A1 Micromachined electrostatic actuator with air gap |
| 03/06/2002 | EP1183102A1 The use of microfluidic systems in the electrochemical detection of target analytes |
| 02/28/2002 | WO2002017364A2 Micromechanical multichip module and method of making same |
| 02/28/2002 | WO2002016255A2 System and method for coupling microcomponents utilizing a pressure fitting receptacle |
| 02/28/2002 | WO2002016089A2 Fabrication and application of nano-manipulators with induced growth |
| 02/28/2002 | DE10041853C1 Konfigurierbares Mikroreaktornetzwerk Configurable microreactor network |
| 02/27/2002 | EP1181716A1 Microwave bonding of mems component |