| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 02/02/2005 | CN1572715A Micromachine production method |
| 02/01/2005 | US6850365 Optical multilayer structure and its production method, optical switching device, and image display |
| 02/01/2005 | US6849471 Barrier layers for microelectromechanical systems |
| 02/01/2005 | US6848306 Semiconductor dynamic sensor |
| 01/27/2005 | US20050018864 Silicon condenser microphone and manufacturing method |
| 01/27/2005 | US20050018318 Optical system for reinforcing optical tweezers capturing force |
| 01/27/2005 | US20050017348 Manufacture of mountable capped chips |
| 01/27/2005 | US20050017334 Micromachine package and method for manufacturing the same |
| 01/27/2005 | US20050017329 Multiple internal seal ring micro-electro-mechanical system vacuum package |
| 01/27/2005 | US20050017313 System and method of fabricating micro cavities |
| 01/27/2005 | US20050017175 Infrared sensor package |
| 01/27/2005 | US20050016851 Microreactor for synthesizing colloidal nanoparticles: inlet channel; a micromixing block, an aging section downstream from the micromixing block channel and outlet channel; Synthesis and coating are in series and in-situ; coating nanoparticles using an electrophoretic switch |
| 01/27/2005 | US20050016271 Microstructure with movable mass |
| 01/26/2005 | EP1500314A1 Electrically insulating body, and electronic device |
| 01/26/2005 | EP1499855A2 Passive temperature compensation technique for mems devices |
| 01/26/2005 | EP1499560A1 Device for protecting a chip and method for operating a chip |
| 01/26/2005 | CN1571183A 半导体压力传感器 The semiconductor pressure sensor |
| 01/26/2005 | CN1571182A Capacitor type semiconductor pressure sensor |
| 01/26/2005 | CN1571180A Multilayer film piezoelectric element for fine positioning micro-actuator and method for making same |
| 01/26/2005 | CN1186248C Electrochemical micro-driver based on hydrogen absorbing alloy film and preparation method thereof |
| 01/26/2005 | CN1186247C Carbon nano tube film micromechanical infrared detector |
| 01/26/2005 | CN1186246C Static driven large-displacement micro structure |
| 01/25/2005 | US6847756 Optical switching matrix and method of fabricating such a matrix |
| 01/25/2005 | US6847114 Micro-scale interconnect device with internal heat spreader and method for fabricating same |
| 01/25/2005 | US6846725 Wafer-level package for micro-electro-mechanical systems |
| 01/25/2005 | US6846724 Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned bridge |
| 01/25/2005 | US6846690 Integrated circuit comprising an auxiliary component, for example a passive component or a microelectromechanical system, placed above an electronic chip, and the corresponding fabrication process |
| 01/25/2005 | US6846682 Chemically synthesized and assembled electronic devices |
| 01/25/2005 | US6846423 Wafer-level seal for non-silicon-based devices |
| 01/25/2005 | US6846088 Shock protectors for micro-mechanical systems |
| 01/25/2005 | CA2375712C Micro-fabricated shielded conductors |
| 01/20/2005 | WO2005006432A2 Electronic component and method for production thereof |
| 01/20/2005 | WO2005005554A2 Moisture-resistant nano-particle material and its applications |
| 01/20/2005 | WO2004094298A3 Microdevice assembly having a fine grain getter layer for maintaining vacuum |
| 01/20/2005 | US20050013533 Micro mirror arrays and microstructures with solderable connection sites |
| 01/20/2005 | US20050013455 MEMS digital-to-acoustic transducer with error cancellation |
| 01/20/2005 | US20050012197 Fluidic MEMS device |
| 01/20/2005 | US20050012188 Device for the hermetic encapsulation of a component that must be protected against all stresses |
| 01/20/2005 | US20050012169 Semiconductor device and manufacturing method of the same |
| 01/20/2005 | US20050012165 Semiconductor device |
| 01/19/2005 | EP1498764A2 Micro mirror arrays and microstructures with solderable connection sites |
| 01/19/2005 | EP1498385A2 Fluidic MEMS device |
| 01/19/2005 | EP1497616A2 Increasing the dynamic range of a mems gyroscope |
| 01/19/2005 | CN1567021A Micromirror array for projection tv |
| 01/19/2005 | CN1567020A Projection display and packaged micromirror array for the projection display |
| 01/19/2005 | CN1567019A Projection TV with improved micromirror array |
| 01/19/2005 | CN1567018A Micromirror with micromirror element arrays |
| 01/18/2005 | US6844959 Spatial light modulators with light absorbing areas |
| 01/18/2005 | US6844623 Temporary coatings for protection of microelectronic devices during packaging |
| 01/13/2005 | WO2004051744A3 Mems control chip integration |
| 01/13/2005 | US20050009316 Method for producing a protective cover for a device |
| 01/13/2005 | US20050009315 Method for manufacturing micro electro-mechanical systems using solder balls |
| 01/13/2005 | US20050009246 Wafer bonding hermetic encapsulation |
| 01/13/2005 | US20050009233 Micro-electro mechanical systems (MEMS) device using silicon on insulator (SOI) wafer, and method of fabricating and grounding the same |
| 01/13/2005 | US20050006738 Structure and process for packaging rf mems and other devices |
| 01/13/2005 | US20050005697 Semiconductor mechanical sensor |
| 01/13/2005 | DE10157848B4 Verfahren zur Herstellung eines mikromechanischen Bauelements mit abgeschlossenem Innenraum und mikromechanisches Bauelement mit abgeschlossenem Innenraum A process for producing a micromechanical device with completed interior and micromechanical device with completed interior |
| 01/12/2005 | EP1494964A1 Method for the production of a microstructure comprising a vacuum cavity and microstructure |
| 01/11/2005 | US6841861 MEMS package |
| 01/11/2005 | US6839962 Method of producing micromechanical structures |
| 01/06/2005 | WO2005001863A1 Self-assembling mems devices having thermal actuation |
| 01/06/2005 | WO2005001859A2 Micromechanical apparatus and method of forming a micromechanical device layer |
| 01/06/2005 | WO2005000733A2 Integrated circuit on high performance chip |
| 01/06/2005 | WO2004065289A3 Micromechanical or microoptoelectronic devices with deposit of getter material and integrated heater, and support for the production thereof |
| 01/06/2005 | US20050003667 Method for fabricating optical interference display cell |
| 01/06/2005 | US20050003566 Micromachine production method |
| 01/06/2005 | US20050002084 Micro-electro-mechanical systems torsional drive |
| 01/06/2005 | US20050001828 Charge control of micro-electromechanical device |
| 01/05/2005 | EP1244900B1 Grain growth of electrical interconnection for microelectromechanical systems (mems) |
| 01/05/2005 | DE10324421A1 Manufacturing metallization surface for semiconducting component with movable structure in substrate, involves metallizing component with cover to form metal coating on cover and metallization surface |
| 01/05/2005 | DE10324139A1 Mikroelektromechanisches Bauteil und Verfahren zu seiner Herstellung The micro-electro-mechanical component and method for its preparation |
| 01/05/2005 | DE102004004539A1 Waferverbindung unter Verwendung von Reaktivfolien zum massiv parallelen Häusen mikro-elektromechanischer Systeme Wafer bonding using reactive foils for massively parallel housings micro-electro-mechanical systems |
| 01/05/2005 | CN1559882A Fork type micromechanical gyro and its manufacturing method |
| 01/04/2005 | US6838762 Water-level package with bump ring |
| 01/04/2005 | US6838175 Carbon microrod and method of producing the same |
| 01/04/2005 | US6837108 Increasing the dynamic range of a MEMS gyroscope |
| 12/30/2004 | US20040266048 Bonding for a micro-electro-mechanical system (MEMS) and MEMS based devices |
| 12/30/2004 | US20040264152 MEMS RF switch module including a vertical via |
| 12/30/2004 | US20040263937 Optical scanning apparatus, optical writing apparatus, image forming apparatus, and method of driving vibration mirror |
| 12/30/2004 | US20040263186 Capacitance type dynamic quantity sensor |
| 12/30/2004 | US20040263076 Light emitting display device with mechanical pixel switch |
| 12/30/2004 | US20040261249 Positioning device employing a platform, levering mechanism and floating actuator device |
| 12/29/2004 | WO2004028959A3 Method and micromechanical device |
| 12/29/2004 | EP1490293A2 Micro-electromechanical systems |
| 12/29/2004 | CN1558868A Nano gripper and method of manufacturing thereof |
| 12/29/2004 | CN1182257C Active gene molecule nano cabin and its preparing method |
| 12/28/2004 | US6835594 Metal wiring method for an undercut |
| 12/23/2004 | WO2004025727A8 Method for sealing a microcavity and package comprising at least one microcavity |
| 12/23/2004 | US20040259325 Wafer level chip scale hermetic package |
| 12/23/2004 | US20040256689 Apparatus and method of forming a device layer |
| 12/23/2004 | US20040256542 Optical tweezer device |
| 12/23/2004 | US20040255670 Packaged accelerometer |
| 12/22/2004 | EP1488270A1 Micro light modulator arrangement |
| 12/22/2004 | EP1487738A2 Silicon carbide microelectromechanical devices with electronic circuitry |
| 12/21/2004 | US6833944 MEMS enclosure |
| 12/21/2004 | US6833942 MEMS enclosure |
| 12/21/2004 | US6833288 Dicing method for micro electro mechnical system chip |
| 12/21/2004 | US6833112 High performance system for the parallel and selective dispensing of micro-droplets, and transportable cartridge and dispensing kit using said system |
| 12/21/2004 | US6832523 Micromechanical component and manufacturing method |
| 12/16/2004 | WO2004108588A1 Optical microelectromechanical structure |