| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 10/18/2001 | DE10016017A1 Verfahren zur Montage von magazinierten Mikrobauteilen Method for mounting of microcomponents collated |
| 10/18/2001 | DE10015102A1 Method of positioning and removing small objects, esp. micro-technical components, requires vibrating the gripping device at a specified amplitude and frequency, in order to loosen the object from the gripper |
| 10/16/2001 | US6303986 Method of and apparatus for sealing an hermetic lid to a semiconductor die |
| 10/16/2001 | US6302134 Device and method for using centripetal acceleration to device fluid movement on a microfluidics system |
| 10/11/2001 | WO2001074706A1 Resistor array devices including switch contacts operated by microelectromechanical actuators and methods for fabricating the same |
| 10/11/2001 | WO2001014248A3 Assembly process for delicate silicon structures |
| 10/10/2001 | EP1143467A2 Microelectromechanical actuators including driven arched beams for mechanical advantage |
| 10/10/2001 | EP1143466A1 Lockable microelectromechanical actuators using thermoplastic materials, and methods of operating same |
| 10/10/2001 | EP1143283A2 Microelectromechanical optical cross-connect switches including mechanical actuators and methods of operating same |
| 10/10/2001 | EP1141554A1 Electrostatic/pneumatic actuators for active surfaces |
| 10/10/2001 | CN1317148A Mechanical patterning of device layer |
| 10/10/2001 | CN1316666A Micro-electromechanical optical cross connecting switch with mechanical actuator and its operation method |
| 10/10/2001 | CN1316380A Micro-electromechanical actuator suitable for mechanical advantage containing driven bow beam |
| 10/10/2001 | CN1316379A Lockable miniature electromechanical actuator using thermoplastic material and its operation method |
| 10/09/2001 | US6300619 Micro-electro-mechanical optical device |
| 10/09/2001 | US6300294 Applying lubricant to micromechanical device packages, mixing and filtration ether solvent such as tetrahydrofuran or tert-butyl methyl ether. |
| 10/05/2001 | CA2340944A1 Lockable microelectromechanical actuators using thermoplastic material and methods of operating same |
| 10/05/2001 | CA2340810A1 Microelectromechanical optical cross-connect switches including mechanical actuators and methods of operating same |
| 10/05/2001 | CA2340807A1 Microelectromechanical actuators including driven arched beams for mechanical advantage |
| 10/04/2001 | WO2001072467A1 Method for assembling cassette-loaded microcomponents |
| 10/04/2001 | EP1139141A2 Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements |
| 10/04/2001 | EP1138942A2 Microelectromechanical systems including thermally actuated beams on heaters that move with the thermally actuated beams |
| 10/03/2001 | CN1316061A Structure for micro-machine optical tool and method for making and using |
| 10/02/2001 | US6297072 Method of fabrication of a microstructure having an internal cavity |
| 10/02/2001 | US6297069 Method for supporting during fabrication mechanical members of semi-conductive dies, wafers, and devices and an associated intermediate device assembly |
| 09/28/2001 | CA2334794A1 Microelectromechanical systems including thermally actuated beams on heaters that move with the thermally actuated beams |
| 09/27/2001 | US20010024711 Micromechanical component with sealed membrane openings and method of fabricating a micromechanical component |
| 09/27/2001 | CA2332219A1 Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements |
| 09/20/2001 | WO2001068257A1 Microreactor |
| 09/20/2001 | WO2001068256A2 Microlaboratory devices and methods |
| 09/20/2001 | US20010022382 Method of and apparatus for sealing an hermetic lid to a semiconductor die |
| 09/20/2001 | CA2403278A1 Microlaboratory devices and methods |
| 09/20/2001 | CA2400978A1 Microreactor |
| 09/18/2001 | US6290859 Tungsten coating for improved wear resistance and reliability of microelectromechanical devices |
| 09/13/2001 | WO2001066460A1 Nanotweezers and nanomanipulator |
| 09/13/2001 | WO2001029529A3 Integrated packaging of micromechanical sensors and control circuits |
| 09/13/2001 | US20010021570 Process for making microstructures and microstructures made thereby |
| 09/13/2001 | DE10054964A1 Acceleration sensor for e.g. airbag system, antilock braking system, navigation system in motor vehicle has acceleration detection chip that is arranged in through hole of signal processing chip |
| 09/11/2001 | US6288472 Electrostatic/pneumatic actuators for active surfaces |
| 09/06/2001 | DE10050364A1 Semiconductor element used as a semiconductor sensor comprises a sensor substrate, a substrate which lies opposite the first main surface of the sensor substrate to transfer the electrical signal from the sensor substrate |
| 09/05/2001 | EP1130442A2 Optical switches using dual axis micromirrors |
| 09/05/2001 | EP1129479A1 System for assembling substrates to bonding zones provided with cavities |
| 09/05/2001 | CN1311158A Radio frequency microelectronic mechanical single knife commutator and its producing method |
| 09/04/2001 | US6284567 Microsensor, and packaging method therefor |
| 08/30/2001 | WO2001063361A1 Device for homogeneous heating of an object |
| 08/30/2001 | US20010018236 Methods for producing packaged integrated circuit devices & packaged integrated circuit devices produced thereby |
| 08/30/2001 | US20010017287 Kneading sic powder, compacting, calcining, purifying, impregnating with silicon in sealed vessel provided in heating furnace body |
| 08/29/2001 | EP1127838A2 Flip-chip assembly of protected micromechanical devices |
| 08/29/2001 | EP1127375A1 Dimpled contacts for metal-to-semiconductor connections, and methods for fabricating same |
| 08/23/2001 | WO2001060736A2 Methods and apparatus for a vertically-integrated sensor structure |
| 08/23/2001 | WO2001060614A1 Method for attaching a micromechanical device to a manifold, and fluid control system produced thereby |
| 08/23/2001 | US20010016367 Process for fabricating single crystal resonant devices that are compatible with integrated circuit processing |
| 08/16/2001 | WO2001058804A2 Micromechanical component and corresponding production method |
| 08/16/2001 | US20010014438 Micromachined parylene membrane valve and pump |
| 08/16/2001 | DE10005555A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 08/14/2001 | US6272866 Micro cooling engine array system |
| 08/09/2001 | WO2001056921A2 Vacuum package fabrication of microelectromechanical system devices with integrated circuit components |
| 08/09/2001 | WO2001056920A2 Micro-electromechanical system device |
| 08/09/2001 | DE10004964A1 Micromechanical cap structure comprises substrate in the form of wafer with a cavern having a base surface and parallel side wall sections lying opposite each other with stabilizing wall sections connected to the side wall sections |
| 08/07/2001 | US6271145 Method for making a micromachine |
| 08/02/2001 | WO2001056067A1 Micro electro-mechanical component and system architecture |
| 08/02/2001 | WO2001055769A1 A deflectable spatial light modulator having superimposed hinge and deflectable element |
| 08/01/2001 | CN1305944A Air tight method for packing micro system in-situ |
| 07/31/2001 | US6268232 Method for fabricating a micromechanical component |
| 07/26/2001 | WO2001053194A1 Microdevice and its production method |
| 07/26/2001 | US20010009724 Depositing coating on elongate member to give a coated elongate member, coating comprising at least one metal and at least one additive, the additive capable of codepositing with the metal, heat treating; electronics packaging |
| 07/26/2001 | US20010009110 Semiconductor mechanical sensor |
| 07/26/2001 | DE19940581C2 Verfahren zur Herstellung integrierter Sensoren A process for manufacturing integrated sensors |
| 07/24/2001 | US6265246 Microcap wafer-level package |
| 07/24/2001 | US6265239 Micro-electro-mechanical optical device |
| 07/19/2001 | WO2001001025A3 Microfabricated elastomeric valve and pump systems |
| 07/18/2001 | EP1115649A1 Micromechanical component with sealed membrane openings |
| 07/17/2001 | US6262464 Encapsulated MEMS brand-pass filter for integrated circuits |
| 07/12/2001 | WO2001050106A1 Grain growth of electrical interconnection for microelectromechanical systems (mems) |
| 07/12/2001 | DE19962231A1 Verfahren zur Herstellung mikromechanischer Strukturen A process for producing micromechanical structures |
| 07/11/2001 | EP1113982A2 Method of and apparatus for sealing an hermetic lid to a microelectronic machine |
| 07/10/2001 | US6258704 Methods for fabricating dimpled contacts for metal-to-semiconductor connections |
| 07/10/2001 | US6257739 Scanning vertical cavity surface emitting laser array capable of page-width image scan |
| 07/05/2001 | WO2001048532A2 Integrated planar optical waveguide and shutter |
| 07/05/2001 | WO2000054312A8 Ic-compatible parylene mems technology and its application in integrated sensors |
| 07/05/2001 | CA2392467A1 Integrated planar optical waveguide and shutter |
| 07/04/2001 | CN1301665A Some improvement of micro electromechanical device |
| 07/03/2001 | US6255741 Semiconductor device with a protective sheet to affix a semiconductor chip |
| 06/28/2001 | WO2001046664A2 Method for producing micromechanical structures |
| 06/28/2001 | WO2001046066A2 Sensor with at least one micromechanical structure and method for the production thereof |
| 06/28/2001 | DE19961578A1 Sensor comprises a micromechanical structure based on silicon integrated in the sensor chamber of a base wafer and a cover made of a transparent deposition layer and a sealing layer |
| 06/27/2001 | EP1110905A1 Micro-electromechanical device |
| 06/26/2001 | US6253001 Optical switches using dual axis micromirrors |
| 06/21/2001 | US20010004085 Method for hermetically encapsulating microsystems in situ |
| 06/20/2001 | EP1108677A1 Method of hermetic In Situ encapsulation of microsystems |
| 06/20/2001 | EP1108203A2 Micromechanical component protected against environmental influences |
| 06/14/2001 | WO2001043181A1 Methods for producing packaged integrated circuit devices & packaged integrated circuit devices produced thereby |
| 06/14/2001 | CA2394458A1 Methods for producing packaged integrated circuit devices & packaged integrated circuit devices produced thereby |
| 06/07/2001 | DE10014303C1 Secure semiconductor device with protection against hacking e.g. for chip card |
| 06/06/2001 | EP1104746A1 Micro-electro-mechanical optical device |
| 06/05/2001 | US6242075 Planar multilayer ceramic structures with near surface channels |
| 06/05/2001 | US6240782 Semiconductor physical quantity sensor and production method thereof |
| 05/31/2001 | US20010001931 Semiconductor mechanical sensor |
| 05/31/2001 | DE19964218A1 Elektromechanisches Bauelement und Verfahren zur Herstellung desselben An electromechanical component and method of manufacturing the same |
| 05/30/2001 | EP1010361A4 Microfabricated high aspect ratio device with electrical isolation and interconnections |