| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 02/27/2002 | EP0784847B1 A memory device |
| 02/27/2002 | CN1338195A Flexible microsystem and building techniques |
| 02/26/2002 | US6351580 Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements |
| 02/14/2002 | WO2002012925A2 Micromirror elements, package for the micromirror elements, and protection system therefor |
| 02/14/2002 | WO2002012116A2 Bonded wafer optical mems process |
| 02/14/2002 | WO2001056920A3 Micro-electromechanical system device |
| 02/14/2002 | US20020017834 Acoustically actuated mems devices |
| 02/14/2002 | US20020017713 Microcap wafer-level package |
| 02/12/2002 | US6346735 Semiconductor sensor structure and method of manufacturing the same |
| 02/12/2002 | US6346429 Method for fabricating integrated sensors |
| 02/12/2002 | US6345502 Micromachined parylene membrane valve and pump |
| 02/07/2002 | DE10035564A1 Mikromechanisches Gehäuse Micromechanical housing |
| 01/31/2002 | WO2001020948A3 Mems digital-to-acoustic transducer with error cancellation |
| 01/31/2002 | US20020012744 Re-coating MEMS devices using dissolved resins |
| 01/31/2002 | US20020012616 Fluidic methods and devices for parallel chemical reactions |
| 01/31/2002 | US20020012159 Analog pulse width modulation cell for digital micromechanical device |
| 01/31/2002 | US20020011276 Gas cushion proportioning microsystem |
| 01/30/2002 | EP1175258A1 Modular chemical microsystem |
| 01/24/2002 | WO2002007482A2 Micro electro mechanical system controlled organic led and pixel arrays and method of using and of manufacturing same |
| 01/24/2002 | WO2002006152A2 System and method for constraining totally released microcomponents |
| 01/24/2002 | US20020008444 Micro-relay and method for manufacturing the same |
| 01/24/2002 | US20020008317 Micromechanical enclosure |
| 01/24/2002 | US20020008296 Integrated sensor having plurality of released beams for sensing acceleration and associated methods |
| 01/17/2002 | WO2002005413A2 Mems actuator with lower power consumption and lower cost simplified fabrication |
| 01/16/2002 | EP1172680A2 Method for coating micro-electromechanical systems (MEMS) |
| 01/16/2002 | CN1331345A Integrated microarray device |
| 01/15/2002 | US6338284 Electrical feedthrough structures for micromachined devices and methods of fabricating the same |
| 01/10/2002 | WO2002002794A2 Integrated microarray devices |
| 01/10/2002 | WO2002002227A2 Devices and methods for carrying out chemical reactions using photogenerated reagents |
| 01/10/2002 | DE10122133A1 Integrated analytic microsystem combines microfluidic component, e.g. capillary, with microelectronic component including signal measurement and processing circuits |
| 01/10/2002 | CA2415258A1 Devices and methods for carrying out chemical reactions using photogenerated reagents |
| 01/09/2002 | EP1169891A1 Flexible microsystem and building techniques |
| 01/06/2002 | CA2352653A1 Acoustically actuated mems devices |
| 01/03/2002 | WO2002001717A1 Nano-electromechanical filter |
| 01/03/2002 | WO2002001638A2 Microelectronic packages including reactive components, and methods of fabricating the same |
| 01/03/2002 | WO2002001633A1 Miniature microdevice package and process for making thereof |
| 01/03/2002 | US20020001873 Chip scale surface-mountable packaging method for electronic and MEMS devices |
| 01/03/2002 | US20020000649 Method of fabrication of a microstructure having an internal cavity |
| 01/03/2002 | US20020000646 Vacuum package fabrication of integrated circuit components |
| 01/03/2002 | US20020000630 Plastic package for micromechanical devices |
| 01/03/2002 | DE10130131A1 Semiconductor dynamic acceleration sensor comprises sensor chips adhesively connected to substrates |
| 01/02/2002 | EP1168609A2 Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof |
| 01/02/2002 | EP1167281A2 Chip scale surface-mountable packaging method for electronic and MEMS devices |
| 01/02/2002 | EP1127838A9 Flip-chip assembly of protected micromechanical devices |
| 01/02/2002 | EP0901578B1 Valveless liquid microswitch and method |
| 01/02/2002 | CN1328955A Bandpass filter of packaged microelectronic machinery system with integrated circuit and its manufacturing method |
| 01/01/2002 | US6335224 Protection of microelectronic devices during packaging |
| 12/27/2001 | WO2001046664A3 Method for producing micromechanical structures |
| 12/27/2001 | US20010055864 Encapsulated MEMS band-pass filter for integrated circuits and method of fabrication thereof |
| 12/27/2001 | US20010055836 Semiconductor dynamic sensor and method of manufacturing the same |
| 12/27/2001 | US20010054778 Microfabricated elastomeric valve and pump systems |
| 12/27/2001 | US20010054709 Chemically synthesized and assembled electronic devices |
| 12/27/2001 | US20010054315 Micromechanical component protected from environmental influences |
| 12/25/2001 | US6333583 Microelectromechanical systems including thermally actuated beams on heaters that move with the thermally actuated beams |
| 12/20/2001 | WO2001096019A1 High-performance system for parallel and selective dispensing of micro-droplets |
| 12/20/2001 | US20010052628 Semiconductor pressure sensor having strain gauge and circuit portion on semiconductor substrate |
| 12/20/2001 | DE10128577A1 Semiconductor pressure sensor for e.g., as intake pressure sensor in vehicle engine intake, has semiconductor substrate, diaphragm portion, strain gauge, circuit portion, and local oxidation of silicon film |
| 12/15/2001 | CA2311622A1 Sub-nanoliter liquid drop dispensing system and method therefor |
| 12/13/2001 | WO2001095468A1 Micromechanical device with damped microactuator |
| 12/13/2001 | WO2001095237A2 Microchannel device for heat or mass transfer |
| 12/13/2001 | WO2001095006A1 Damped micromechanical device and method for making same |
| 12/13/2001 | WO2001026136A3 Encapsulation for a three-dimensional microsystem |
| 12/13/2001 | CA2738537A1 Microsystem process networks |
| 12/12/2001 | EP1162169A2 Interconnecting micromechanical devices |
| 12/06/2001 | WO2001092842A2 Manufacture of mems structures in sealed cavity using dry-release mems device encapsulation |
| 12/06/2001 | WO2001091902A2 Methods and devices for sealing microchip reservoir devices |
| 12/06/2001 | DE10059604A1 Structure for connecting up electronic components, has a metal carrier strip supporting two single strips holding tongues aligned inwards welded to connector wires for a sensor element designed as a semiconductor sensor |
| 12/06/2001 | CA2843053A1 Systems and methods for monitoring health and delivering drugs transdermally |
| 12/06/2001 | CA2688795A1 Systems and methods for monitoring health and delivering drugs transdermally |
| 12/04/2001 | US6326682 Hermetically sealed transducer and methods for producing the same |
| 12/04/2001 | US6325886 Method for attaching a micromechanical device to a manifold, and fluid control system produced thereby |
| 11/29/2001 | WO2001089844A1 Ink jet printhead nozzle array |
| 11/29/2001 | WO2001089681A2 Modular chemical production system incorporating a microreactor |
| 11/29/2001 | DE10022266A1 Verfahren zum Herstellen und Verschließen eines Hohlraums für Mikrobauelemente oder Mikrosysteme A method of manufacturing and closing a cavity for microdevices or microsystems |
| 11/28/2001 | EP1157967A2 Packaging micromechanical devices |
| 11/27/2001 | US6322374 Micro-zero insertion force socket |
| 11/22/2001 | WO2001087767A2 Micro-electrocmechamical sensor (mems) resonator |
| 11/22/2001 | WO2001087765A2 Micromechanical component and method for producing the same |
| 11/22/2001 | DE10024697A1 Manufacturing micromechanical component, involves providing sensor structure with trenches of width not greater than determined maximum width closable by closure layer bulges |
| 11/22/2001 | CA2342409A1 Packaging micromechanical devices |
| 11/15/2001 | WO2001085601A1 Method for the production and sealing of a cavity for microcomponents or microsystems |
| 11/15/2001 | WO2001085599A2 System and method for coupling microcomponents |
| 11/15/2001 | US20010040262 Semiconductor sensor chip, method of manufacturing the same, and semiconductor sensor having the same |
| 11/13/2001 | US6316840 Semiconductor device |
| 11/08/2001 | DE10022398A1 Gaspolster-Mikrodosiersystem Gas cushion proportioning microsystem |
| 11/06/2001 | US6313514 Pressure sensor component |
| 11/01/2001 | WO2000062931A9 The use of microfluidic systems in the electrochemical detection of target analytes |
| 10/31/2001 | EP1150318A1 Micromachine switch and its production method |
| 10/31/2001 | EP1150105A2 Microdosing system with gas cushion |
| 10/31/2001 | CN1320101A Method of and apparatus for sealing an hermetic lid to a microelectronic machine |
| 10/31/2001 | CN1319558A Microelectronic mechanical system on heater moved with hot started beam, and the beam |
| 10/31/2001 | CN1319557A Electromechanic apparatus with brake assembly for controlling optical shutter and moveable element moving |
| 10/30/2001 | US6310419 Resistor array devices including switch contacts operated by microelectromechanical actuators and methods for fabricating the same |
| 10/30/2001 | US6308569 Micro-mechanical inertial sensors |
| 10/25/2001 | US20010034083 Method of fabricating a molded package for micromechanical devices |
| 10/25/2001 | US20010033796 Microfabricated elastomeric valve and pump sysems |
| 10/23/2001 | US6307452 Folded spring based micro electromechanical (MEM) RF switch |
| 10/18/2001 | WO2001077008A1 Micromechanical component and corresponding production method |
| 10/18/2001 | US20010029983 Microfabricated elastomeric valve and pump systems |
| 10/18/2001 | DE10017976A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |