| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 03/25/2004 | WO2004024618A1 Microdevice and manufacturing method |
| 03/25/2004 | WO2003070625A3 Thin film encapsulation of mems devices |
| 03/25/2004 | WO2003065050A3 Method of manufacturing an accelerometer |
| 03/25/2004 | US20040059449 Selecting a material for use as the expansive element |
| 03/25/2004 | US20040058476 Wafer bonding hermetic encapsulation |
| 03/24/2004 | EP1400487A2 Semiconductor unit having MEMS |
| 03/24/2004 | CN1143135C Miniature mechanical appts. |
| 03/23/2004 | US6711024 Flexible microsystem and building techniques |
| 03/23/2004 | US6710512 Microelement piezoelectric feedback type picking and releasing device |
| 03/23/2004 | US6710461 Solder bumps formed on conductor plugs; damage prevention |
| 03/23/2004 | US6708492 Resonant thermal out-of-plane buckle-beam actuator |
| 03/18/2004 | WO2004023490A2 Fluid delivery for scanning probe microscopy |
| 03/18/2004 | WO2004022477A1 Microchip with thermal stress relief means |
| 03/18/2004 | WO2003090933A3 Method and structures for improved assembly of mems devices employing a centrifuge |
| 03/18/2004 | WO2003084862A3 Packaging microelectromechanical structures |
| 03/18/2004 | WO2003036672A3 A multi-layer 3d device and method of manufacturing |
| 03/18/2004 | WO2003030252B1 Process for producing interconnects |
| 03/18/2004 | US20040053434 Microelectronic mechanical system and methods |
| 03/18/2004 | US20040051181 Packaging microelectromechanical structures |
| 03/18/2004 | US20040050162 Semiconductor mechanical sensor |
| 03/18/2004 | US20040050161 Micromechanical component and method for producing the same |
| 03/18/2004 | DE10334341A1 Kaskadierte hydrodynamische Fokussierung in Mikrofluidikkanälen Cascaded hydrodynamic focusing in microfluidic channels |
| 03/17/2004 | EP1398831A2 Air gaps formation |
| 03/17/2004 | EP1398297A2 Electronic component with carbon nanotube interconnects and method of manufacturing the same |
| 03/17/2004 | CN1482369A Cascaded hydrodynamic focusing in microfluidic channels |
| 03/16/2004 | US6707176 Non-linear actuator suspension for microelectromechanical systems |
| 03/16/2004 | US6706619 Method for tiling unit cells |
| 03/16/2004 | US6706549 Multi-functional micro electromechanical devices and method of bulk manufacturing same |
| 03/16/2004 | US6706548 Method of making a micromechanical device |
| 03/11/2004 | WO2004021398A2 Wafer-level seal for non-silicon-based devices |
| 03/11/2004 | WO2004021382A2 Micro-electromechanical switch performance enhancement |
| 03/11/2004 | WO2004020961A1 Hermetic packaging |
| 03/11/2004 | WO2004020329A1 Microelectromechanical system comb actuator and manufacturing method thereof |
| 03/11/2004 | US20040046837 Systems and methods for microelectromechanical system based fluid ejection |
| 03/11/2004 | US20040046248 Microsystem packaging and associated methods |
| 03/11/2004 | US20040046245 Microelectromechanical system package with environmental and interference shield |
| 03/11/2004 | US20040046223 Semiconductor component |
| 03/11/2004 | DE10238843A1 Semiconductor component used in opto-electronic communications comprises a Peltier element for cooling a micro-structure and a thermal generator coupled together via a coupling unit |
| 03/10/2004 | EP1396470A2 Fabrication of microstructures with vacuum-sealed cavity |
| 03/10/2004 | CN1481000A Base plate with minitype connection components and its preparation method |
| 03/10/2004 | CN1480981A Electronic component and its mfg. method |
| 03/09/2004 | US6704131 MEMS enclosure |
| 03/09/2004 | US6703679 Low-resistivity microelectromechanical structures with co-fabricated integrated circuit |
| 03/09/2004 | US6703675 Particle filter for partially enclosed microelectromechanical systems |
| 03/09/2004 | US6703203 Integrated microarray devices |
| 03/09/2004 | US6701779 Perpendicular torsion micro-electromechanical switch |
| 03/04/2004 | WO2004019402A1 Electrical component |
| 03/04/2004 | WO2004019048A1 Micromechanical component |
| 03/04/2004 | US20040043506 Apparatus associated with fluid transport phenomena as well as controlling fluid flow and accurate localization of particles in miniaturized systems |
| 03/04/2004 | US20040042213 Light modulating device and exposure apparatus using the same |
| 03/04/2004 | US20040041254 Packaged microchip |
| 03/04/2004 | US20040041248 Packaged microchip with isolation |
| 03/04/2004 | US20040041154 Nonconductor substrate enclosing carbon nanotubes; electrodes |
| 03/04/2004 | US20040041010 Exothermic processing |
| 03/04/2004 | US20040040828 Micro-electromechanical switch performance enhancement |
| 03/03/2004 | EP1394826A2 Micro-relay and method for manufacturing the same |
| 03/03/2004 | EP1394100A2 Apparatus and method for controlling movement of a device after packaging |
| 03/02/2004 | US6700173 Electrically isolated support for overlying MEM structure |
| 03/02/2004 | US6699394 Micromachined parylene membrane valve and pump |
| 02/26/2004 | WO2003107397A3 Microelectromechanical system and method for determining temperature and moisture profiles within pharmaceutical packaging |
| 02/26/2004 | WO2003106927A3 Passive temperature compensation technique for mems devices |
| 02/26/2004 | US20040037956 Vapor deposition a silane coupling agent on electronics, under control pressure in vacuum chamber; preventing non-uniform coatings |
| 02/26/2004 | US20040036455 Microenergy device for producing mechanically modulated microenergy output from digital microenergy output from digital microenergy input |
| 02/26/2004 | US20040036173 Particle filter for microelectromechanical systems |
| 02/26/2004 | US20040036133 Particle filter for partially enclosed microelectromechanical systems |
| 02/26/2004 | US20040035481 Micro channel unit |
| 02/26/2004 | US20040035205 Electrically isolated support for overlying mem structure |
| 02/25/2004 | EP1391420A2 Method and apparatus for protecting wiring and integrated circuit device |
| 02/25/2004 | EP1391419A1 Gripper and method of manufacturing the gripper |
| 02/25/2004 | EP1391241A1 The use of microfluidic systems in the electrochemical detection of target analytes |
| 02/25/2004 | EP1390793A2 Pivoting optical micromirror, array for such micromirrors and method for making same |
| 02/25/2004 | CN1477655A Floating structure radio-frequency microinductor and its production process |
| 02/25/2004 | CN1477054A Microstructure manufacture and microsystem integration |
| 02/24/2004 | US6696645 On-wafer packaging for RF-MEMS |
| 02/24/2004 | US6696343 Micro-electromechanical varactor with enhanced tuning range |
| 02/19/2004 | WO2004015764A2 Vertical system integration |
| 02/19/2004 | WO2003016206A3 System and method for precise positioning of microcomponents |
| 02/19/2004 | WO2002068320A3 Devices having substrates with openings passing through the substrates and conductors in the openings, and methods of manufacture |
| 02/19/2004 | US20040033404 Fuel-cell element stack with stress relief and methods |
| 02/19/2004 | US20040032012 Hermetically packaging a microelectromechanical switch and a film bulk acoustic resonator |
| 02/19/2004 | DE10235372A1 Electrical component, especially micromechanical silicon chip, has layer transparency enabling welding with laser beam with power density in joining plane increased to melt layers by absorption |
| 02/18/2004 | EP1389307A2 Sensor arrangement, in particular micro-mechanical sensor arrangement |
| 02/14/2004 | CA2437202A1 Mems-based fuel cell and methods |
| 02/12/2004 | WO2004013698A1 High-density interconnection of temperature sensitive electronic devices |
| 02/12/2004 | WO2004013039A2 Low temperature plasma si or sige for mems applications |
| 02/12/2004 | WO2004013038A2 Etch stop control for mems device formation |
| 02/12/2004 | WO2003042094A3 Multi-chip module integrating mems mirror array with electronics |
| 02/12/2004 | WO2003016205A3 Mems and method of manufacturing mems |
| 02/12/2004 | US20040029360 Wafer-level package with silicon gasket |
| 02/12/2004 | US20040028849 Low temperature method for forming a microcavity on a substrate and article having same |
| 02/12/2004 | US20040027701 Optical multilayer structure and its production method, optical switching device, and image display |
| 02/12/2004 | US20040027218 Latching micro magnetic relay packages and methods of packaging |
| 02/12/2004 | US20040027034 Piezoelectric actuator array and manufacturing method |
| 02/12/2004 | DE10235370A1 Micromechanical component especially an acceleration sensor for motor vehicles, has spring with non linear response for reduced sensitivity at high accelerations |
| 02/11/2004 | CN1137999C Integrated microarray device |
| 02/05/2004 | WO2004011368A2 Low temperature anodic bonding method using focused energy for assembly of micromachined systems |
| 02/05/2004 | WO2003062136A3 Method and system for locally connecting microstructures |
| 02/05/2004 | US20040023433 High-density interconnection of temperature sensitive electronic devices |
| 02/05/2004 | US20040023429 Low temperature plasma Si or SiGe for MEMS applications |
| 02/05/2004 | US20040023424 Etch stop control for MEMS device formation |