| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 06/29/2005 | CN1633711A Light emitting display device with mechanical pixel switch |
| 06/29/2005 | CN1632486A Resonant tunneling micro mechanical force sensor and method for manufacturing the same |
| 06/28/2005 | US6912335 Optical switch with reduced beam divergence |
| 06/28/2005 | US6912082 Integrated driver electronics for MEMS device using high voltage thin film transistors |
| 06/28/2005 | CA2366527C Electrostatically actuated micro-electro-mechanical system (mems) device |
| 06/23/2005 | WO2005057437A2 A system and method for three-dimensional visualization and postprocessing of a system model |
| 06/23/2005 | US20050133880 Electrical through-plating of semiconductor chips |
| 06/23/2005 | US20050133254 Direct integration of inorganic nanowires with micron-sized electrodes |
| 06/23/2005 | US20050132814 Semiconductor pressure sensor and pressure sensing device |
| 06/23/2005 | US20050132806 Apparatus and method for driving MEMS structure and detecting motion of the driven MEMS structure using a single electrode |
| 06/23/2005 | US20050132800 Semiconductor mechanical sensor |
| 06/23/2005 | DE10353121A1 Electric component for detecting a liquid medium's ions has a sensor/actuator chip and a substrate for a layer for making things passive and a sensor/actuator structure with an active surface area |
| 06/22/2005 | EP1544463A2 A micro fluid pumping device and a pumping method for same |
| 06/22/2005 | EP1544164A2 Hermetic wafer-level packaging for MEMS devices with low-temperature metallurgy |
| 06/22/2005 | CN1631066A Latching micro magnetic relay packages and methods of packaging |
| 06/22/2005 | CN1207737C Floating structure radio-frequency microinductor and its production process |
| 06/22/2005 | CN1207593C Micro-mirror surface unit containing mirror surface base plate and wiring substrate isolated with conductive lining |
| 06/21/2005 | US6908781 Method and apparatus for protecting wiring and integrated circuit device |
| 06/16/2005 | WO2005053847A1 Hybrid microfluidic chip and method for manufacturing same |
| 06/16/2005 | US20050129529 Device and method for pumping fluids employing the movement of gas bubbles in microscale |
| 06/16/2005 | US20050127786 System and method for moving an object employing piezo actuators |
| 06/16/2005 | US20050127525 Semiconductor assembly with conductive rim and method of producing the same |
| 06/16/2005 | US20050127499 Mems device with conductive path through substrate |
| 06/15/2005 | EP1541234A1 Hybrid microfluidic chip and method of manufacture |
| 06/15/2005 | EP1540736A2 Wafer-level seal for non-silicon-based devices |
| 06/15/2005 | EP1540727A1 Method for sealing a microcavity and package comprising at least one microcavity |
| 06/15/2005 | EP1539637A2 Fluid delivery for scanning probe microscopy |
| 06/15/2005 | CN1206669C Electrostatic driven micromachine changeable inductor |
| 06/15/2005 | CN1206156C Bandpass filter of packaged microelectronic machinery system with integrated circuit and its manufacturing method |
| 06/14/2005 | US6906849 Micro-mirror element |
| 06/14/2005 | US6906847 Spatial light modulators with light blocking/absorbing areas |
| 06/14/2005 | US6906395 Hermetically sealed silicon micro-machined electromechanical system (MEMS) device having diffused conductors |
| 06/09/2005 | WO2004080133A3 Integrated sensor and electronics package |
| 06/09/2005 | US20050125750 System and method for three-dimensional visualization and postprocessing of a system model |
| 06/09/2005 | US20050124159 Deflectable microstructure and method of manufacturing the same through bonding of wafers |
| 06/09/2005 | US20050121763 Multi-substrate package and method for assembling same |
| 06/09/2005 | US20050121735 Hermetically sealed silicon micro-machined electromechanical system (MEMS) device having diffused conductors |
| 06/09/2005 | US20050121413 Method of manufacturing an electronic device |
| 06/09/2005 | DE10352002A1 Sensormodul Sensor module |
| 06/08/2005 | EP1538473A1 Optical deflector array |
| 06/08/2005 | EP1537590A2 Micro-electromechanical switch performance enhancement |
| 06/08/2005 | CN1623887A Thin film minibridge structure and its mfg. method |
| 06/08/2005 | CN1205041C Ink jet print head nozzle array |
| 06/08/2005 | CN1205035C Ink jet printhead having moving nozzle with externally arranged actuator |
| 06/07/2005 | US6903452 Packaging microelectromechanical structures |
| 06/07/2005 | US6903366 Chemically synthesized and assembled electronic devices |
| 06/07/2005 | US6902872 Microelectronics having circuit on multilayers including electrconductive laminates forming connection structures; print heads |
| 06/07/2005 | US6902656 Fabrication of microstructures with vacuum-sealed cavity |
| 06/02/2005 | WO2005050777A2 Receiver electronics proximate antenna |
| 06/02/2005 | WO2005050751A2 Encapsulation assembly for electronic devices |
| 06/02/2005 | WO2005050714A2 High temperature electronic devices |
| 06/02/2005 | WO2005050257A2 High temperature imaging device |
| 06/02/2005 | WO2005049957A2 High temperature environment tool system and method |
| 06/02/2005 | WO2005049482A1 Method for controlling the hermeticity of a closed cavity of a micrometric component, and micrometric component for the implementation thereof |
| 06/02/2005 | WO2005049480A1 A method of actuating and an actuator |
| 06/02/2005 | WO2004108585A3 Microelectromechanical systems having trench isolated contacts, and methods for fabricating same |
| 06/02/2005 | US20050118920 Method for the production of a microstructure comprising a vacuum cavity and a microstructure |
| 06/02/2005 | US20050117271 Electronic device and method of manufacturing same |
| 06/02/2005 | US20050117196 Spatial light modulator, spatial light modulator array, and exposure apparatus |
| 06/02/2005 | US20050116344 Microelectronic element having trace formed after bond layer |
| 06/02/2005 | DE10350551A1 Micromechanical sensor on electronic chip for forwarding detected measuring magnitudes, with two components and sensor element on top side of first component |
| 06/02/2005 | CA2546810A1 Method for controlling the hermeticity of a closed cavity of a micrometric component, and micrometric component for the implementation thereof |
| 06/01/2005 | EP1535879A1 Mems array, manufacturing method thereof, and mems device manufacturing method based on the same |
| 06/01/2005 | EP1534624A1 Microchip with thermal stress relief means |
| 06/01/2005 | CN2703328Y Optical-mechanical micro-beam array thermal infrared image sensor |
| 06/01/2005 | CN1623111A Micro light modulator arrangement |
| 05/31/2005 | US6900072 Method for making a micromechanical device by using a sacrificial substrate |
| 05/26/2005 | WO2005047558A2 Process for manufacturing devices which require a non evaporable getter material for their working |
| 05/26/2005 | US20050112882 Microfabricated elastomeric valve and pump systems |
| 05/26/2005 | US20050111786 Mems driver circuit arrangement |
| 05/25/2005 | EP1533270A1 Method to test the hermeticity of a sealed cavity micromechanical device and the device to be so tested |
| 05/25/2005 | EP1532070A2 Microelectromechanical device with integrated conductive shield |
| 05/25/2005 | EP1386347A4 Microelectromechanical system (mens) device |
| 05/25/2005 | EP1230574A4 A deflectable spatial light modulator having superimposed hinge and deflectable element |
| 05/25/2005 | DE10348908A1 Microsystem on semiconductor substrate, e.g. acceleration sensor, with integrated circuit, micromechanical component has silicon functional layer on substrate near component region, metallization to contact point, preferred interrupt points |
| 05/25/2005 | DE10348336A1 Mechatronic system, e.g. for machine and system construction, has at least one modifier layer of material with coefficient of thermal expansion between those of metal and ceramic arranged between ceramic substrate and metallic surface |
| 05/25/2005 | CN1618724A Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof |
| 05/25/2005 | CN1618723A Micro mechanical structure device of case packing and its mfg methool |
| 05/25/2005 | CN1618722A Mems having a three-wafer structure |
| 05/24/2005 | US6897551 Support for microelectronic, microoptoelectronic or micromechanical devices |
| 05/24/2005 | US6897469 Sub-wavelength structures for reduction of reflective properties |
| 05/24/2005 | US6896780 Microelectrode, microelectrode array and method for manufacturing the microelectrode |
| 05/19/2005 | WO2005046051A1 Micro-resonator and communication apparatus |
| 05/19/2005 | US20050106852 Air gap interconnect structure and method |
| 05/19/2005 | US20050106785 Method for manufacturing a housing for a chip with a micromechanical structure |
| 05/19/2005 | US20050104675 Micro-electromechanical systems |
| 05/19/2005 | US20050104176 High temperature electronic devices |
| 05/19/2005 | US20050103105 Acceleration sensor system |
| 05/19/2005 | US20050103097 Sensor |
| 05/19/2005 | DE202005001559U1 Chip structure for stress-prone chips especially for sensor chips mounted on wiring carrier, provides mechanical or acoustic coupling of chip for bonding process |
| 05/19/2005 | DE20122373U1 Projection system for projecting a colored picture has micro-mirrors in a structure for reflecting light and electrodes to cause deflection in a micro-mirror plate |
| 05/19/2005 | DE20122372U1 Chip for a system to project colored pictures separates from a wafer with a section of micro-mirrors set out in a two-dimensional structure |
| 05/19/2005 | DE20122371U1 Projection display device for projecting a colored picture has micro-mirrors in a structure for reflecting light and electrodes to cause deflection in a micro-mirror plate |
| 05/19/2005 | DE20122370U1 Bundled micro-mirror field for a projection display device projects a colored picture with micro-mirrors in a structure for reflecting light and electrodes to cause deflection in a micro-mirror plate |
| 05/19/2005 | DE10347418A1 Beschleunigungssensoranordnung Acceleration sensor assembly |
| 05/18/2005 | EP1531267A2 Pumping device using thermal-transpiration micropumps |
| 05/17/2005 | US6894383 Bulk acoustic resonance or radio frequency filter; bonding to membrane then support structure |
| 05/17/2005 | US6894358 Process for producing microelectromechanical components and a housed microelectromechanical component |
| 05/17/2005 | US6893885 Method for electrically and mechanically connecting microstructures using solder |
| 05/17/2005 | US6893574 Miniaturized device to protect the mechanical and electrical components of the Micro-Electromechanical System |