| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 08/03/2005 | EP1559987A1 Micromechanical latching switch |
| 08/03/2005 | CN1649166A Micro machinery variable capacitor for realizing high capacity valve regulating range using curved polar plate |
| 08/02/2005 | US6924974 Hermetically sealed micro-device package using cold-gas dynamic spray material deposition |
| 08/02/2005 | US6924537 Semiconductor device including a potential drawing portion formed at a corner |
| 08/02/2005 | US6924485 Infrared ray detector having a vacuum encapsulation structure |
| 08/02/2005 | US6924166 Process for sealing devices incorporating microstructures |
| 08/02/2005 | US6924165 Methods and systems for buried electrical feedthroughs in a glass-silicon MEMS process |
| 08/02/2005 | US6923669 Microconnectors and non-powered microassembly therewith |
| 08/02/2005 | US6923524 Inkjet device encapsulated at the wafer scale |
| 07/28/2005 | WO2005068137A1 Self-cleaning adhesive structure and methods |
| 07/28/2005 | WO2005050751A3 Encapsulation assembly for electronic devices |
| 07/28/2005 | US20050161757 Wafer level hermetic sealing method |
| 07/28/2005 | US20050161432 microelectromechanical devices such as micromirror devices, by oxidizing the deformable element in an oxygen-containing gas other than air while the deformable element is in the deflected state |
| 07/28/2005 | US20050160737 Rotary combustor, and electrical generator comprising a combustor of this type |
| 07/28/2005 | US20050160715 Rotary combustor, and electricity generator comprising such a combustor |
| 07/28/2005 | DE10359217A1 Elektrische Durchkontaktierung von HL-Chips Electrical through-HL-chips |
| 07/28/2005 | DE102004063740A1 Mikrobearbeitete Ultraschalltransducerzellen mit nachgiebiger Stützstruktur Micromachined Ultraschalltransducerzellen with resilient support structure |
| 07/28/2005 | DE102004063707A1 Gekrümmte mikrobearbeitete Ultraschalltransducerarrays und zugehörige Herstellungsverfahren Curved micromachined ultrasound transducer and associated manufacturing processes |
| 07/28/2005 | DE102004052952A1 Ausrichtungsverfahren zur Herstellung eines integrierten Ultraschalltransducerfeldes Alignment method for manufacturing an integrated Ultraschalltransducerfeldes |
| 07/27/2005 | EP1557394A1 Apparatus and method for securing hermeticity of a cavity in which a passage ends |
| 07/27/2005 | EP1556949A2 Micro-electromechanical varactor with enhanced tuning range |
| 07/27/2005 | CN1647598A Method of manufacturing an electronic device |
| 07/27/2005 | CN1647595A Electrically insulating body, and electronic device |
| 07/27/2005 | CN1647275A Electronic device and method of manufacturing same |
| 07/27/2005 | CN1646417A Method of manufacturing an electronic device |
| 07/26/2005 | US6922499 MEMS driver circuit arrangement |
| 07/26/2005 | US6921575 Applying carbon nanotubes to low-viscosity dispersion medium to obtain a high-viscosity dispersing liquid which includes carbon nanotubes; forming a network of carbon nanotubes having electrical and/or magnetic connections by removing |
| 07/21/2005 | US20050158918 Masking layer in substrate cavity |
| 07/21/2005 | US20050158914 Process for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 07/21/2005 | US20050157374 Microelectromechanical device packages with integral heaters |
| 07/21/2005 | US20050157365 Micro light modulator arrangement |
| 07/21/2005 | US20050156694 RF MEMS switch and fabrication method thereof |
| 07/21/2005 | US20050156302 System for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 07/21/2005 | US20050156260 Microelectromechanical systems having trench isolated contacts, and methods for fabricating same |
| 07/21/2005 | US20050156259 Mems array, manufacturing method thereof, and mems device manufacturing method based on the same |
| 07/21/2005 | US20050155411 Method for producing a sensor or actuator arrangement, and corresponding sensor or actuator arrangement |
| 07/21/2005 | DE10324139B4 Mikroelektromechanisches Bauteil und Verfahren zu seiner Herstellung The micro-electro-mechanical component and method for its preparation |
| 07/20/2005 | EP1555713A1 RF Mems switch and fabrication method thereof |
| 07/20/2005 | EP1554218A2 Micromechanical component and corresponding production method |
| 07/20/2005 | CN1643385A Device used for multiple experimental tests on solid materials and a flow control system |
| 07/20/2005 | CN1641398A Micro-mirror device with dielectrophoretic micro- emulsions |
| 07/19/2005 | US6919980 Mirror rocking member for optical deflector |
| 07/19/2005 | US6919508 Build-up structures with multi-angle vias for chip to chip interconnects and optical bussing |
| 07/19/2005 | US6918297 Miniature 3-dimensional package for MEMS sensors |
| 07/19/2005 | CA2344737C Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof |
| 07/14/2005 | US20050152639 Optical switch and fabrication method thereof |
| 07/14/2005 | US20050152017 Micro-mirror device including dielectrophoretic microemulsion |
| 07/14/2005 | US20050151446 System and method for moving an object employing piezo actuators |
| 07/14/2005 | US20050151385 Self-cleaning adhesive structure and methods |
| 07/14/2005 | US20050150691 High temperature environment tool system and method |
| 07/14/2005 | DE102004007697B3 Etching a sacrificial layer comprises preparing system and carrier wafers, arranging the carrier wafer on the system wafer, filling hollow sections, etching and separating chips |
| 07/13/2005 | EP1552343A1 High-density interconnection of temperature sensitive electronic devices |
| 07/13/2005 | EP1552258A1 Hermetic packaging |
| 07/13/2005 | EP1315993A4 Micromirror elements, package for the micromirror elements, and protection system therefor |
| 07/13/2005 | CN1637457A Optical switch and fabrication method thereof |
| 07/13/2005 | CN1637391A Differential capacitive type mems sensor apparatus with capacitance compensator having mems structure |
| 07/13/2005 | CN1637347A A rotary combustor, and electrical generator comprising a combustor of this type |
| 07/13/2005 | CN1637346A A rotary combustor, and electrical generator comprising a combustor of this type |
| 07/12/2005 | US6917461 Laminated package |
| 07/12/2005 | US6917099 Die carrier with fluid chamber |
| 07/12/2005 | US6917086 Trilayered beam MEMS device and related methods |
| 07/07/2005 | WO2005061376A1 Method for containing a device and a corresponding device |
| 07/07/2005 | WO2005061375A1 Microcomponent comprising a hermetically-sealed cavity and a plug, and method of producing one such microcomponent |
| 07/07/2005 | WO2005061374A1 Microcomponent comprising a hermetic microcavity and method for production of such a microcomponent |
| 07/07/2005 | WO2005029555A3 Nanostructure augmentation of surfaces for enhanced thermal transfer |
| 07/07/2005 | WO2005026040A3 Wafer level capped sensor |
| 07/07/2005 | US20050148132 Alignment method for fabrication of integrated ultrasonic transducer array |
| 07/07/2005 | US20050146247 Curved micromachined ultrasonic transducer arrays and related methods of manufacture |
| 07/07/2005 | US20050146240 Micromachined ultrasonic transducer cells having compliant support structure |
| 07/07/2005 | US20050146022 Apparatus for housing a micromechanical structure and method for producing the same |
| 07/07/2005 | US20050146000 Surface mount package and method for forming multi-chip microsensor device |
| 07/07/2005 | DE102004004476B3 Resin cover application to a system wafer, comprises applying a cover to a carrier via a connection layer, and then mechanically removing the carrier and connection layer |
| 07/06/2005 | EP1550894A1 Optical device with a mobile optical element interacting with a optical guiding structure |
| 07/06/2005 | EP1550866A1 Integrated chemical synthesizers |
| 07/06/2005 | EP1550161A2 Hermetically sealed microdevices having a single crystalline silicon getter for maintaining vacuum |
| 07/06/2005 | EP1549586A1 Micromechanical component and method |
| 07/05/2005 | US6914709 MEMS device and method of forming MEMS device |
| 07/05/2005 | US6914323 Methods and apparatus for attaching getters to MEMS device housings |
| 07/05/2005 | US6914245 Infrared light detection array and method of producing the same |
| 06/30/2005 | WO2005058749A1 Semiconductor assembly with conductive rim and method of producing the same |
| 06/30/2005 | WO2005058459A1 Component separating device, method of producing the device, and method of separating component by using the device |
| 06/30/2005 | WO2004087563A3 Barrier layers for microelectromechanical systems |
| 06/30/2005 | US20050142917 Electrically insulating body, and electronic device |
| 06/30/2005 | US20050142692 Wafer-level packaging of optoelectronic devices |
| 06/30/2005 | US20050142686 Method for forming at least one protective cap |
| 06/30/2005 | US20050142242 Moulding assembly for forming at least one protective cap |
| 06/30/2005 | US20050141398 Optical device with a mobile optical element capable of interacting with an optical guide structure |
| 06/30/2005 | US20050139967 Signal routing in a hermetically sealed MEMS device |
| 06/30/2005 | US20050139940 Methods for depositing, releasing and packaging microelectromechanical devices on wafer substrates |
| 06/30/2005 | US20050139871 Micro-electromechanical systems |
| 06/30/2005 | US20050139577 Microelectromechanical system comb actuator and manufacturing method thereof |
| 06/30/2005 | DE10355460A1 Magnetically-controlled micro-fluid system for e.g. 'lab-on-chip' system for determination of presence of bio-molecules, virus, biological cells |
| 06/30/2005 | DE10353767A1 Vorrichtung zur Häusung einer mikromechanischen Struktur und Verfahren zur Herstellung derselben An apparatus for package features a micromechanical structure and method of manufacturing the same |
| 06/30/2005 | DE10350460A1 Verfahren zum Verbinden prozessierter Halbleiterscheiben bei dem neben dem festen isolierenden Zusammenfügen auch eine elektrische Verbindung hergestellt wird und entsprechende Anordnung A method of connecting a processed semiconductor wafers in which not only the fixed insulating assembly and an electrical connection is established and corresponding arrangement |
| 06/30/2005 | DE10196531B4 Beschleunigungssensor und Herstellungsverfahren dafür Acceleration sensor and production method thereof |
| 06/29/2005 | EP1548855A2 System and method for moving an object employing piezo actuators |
| 06/29/2005 | EP1548487A1 Micro-actuators with dielectrophoretic micro- emulsions |
| 06/29/2005 | EP1548403A1 Apparatus and method for driving mems structure and detecting motion of the driven mems structure using a single electrode |
| 06/29/2005 | EP1548364A2 A rotary combustor, and electrical generator comprising a combustor of this type |
| 06/29/2005 | EP1548363A2 Rotary combuster, and electricity generator comprising such a combuster |