| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 03/28/2006 | US7019955 MEMS digital-to-acoustic transducer with error cancellation |
| 03/28/2006 | US7017662 High temperature environment tool system and method |
| 03/27/2006 | CA2520950A1 System and method for display device with end-of-life phenomena |
| 03/27/2006 | CA2520672A1 System and method for display device with reinforcing substance |
| 03/27/2006 | CA2520624A1 System with server based control of client device display features |
| 03/27/2006 | CA2520623A1 Methods of fabricating interferometric modulators by selectively removing a material |
| 03/27/2006 | CA2520622A1 Method and device for protecting interferometric modulators from electrostatic discharge |
| 03/27/2006 | CA2520461A1 Method and device for manipulating color in a display |
| 03/27/2006 | CA2520457A1 Selectable capacitance circuit |
| 03/27/2006 | CA2520388A1 System and method for multi-level brightness in interferometric modulation |
| 03/27/2006 | CA2520384A1 Photonic mems and structures |
| 03/27/2006 | CA2520376A1 Method of making prestructure for mems systems |
| 03/27/2006 | CA2520374A1 Methods of fabricating interferometric modulators by selectively removing a material |
| 03/27/2006 | CA2520358A1 System and method for protecting micro-structure of display array using spacers in gap within display device |
| 03/27/2006 | CA2520354A1 System and method for illuminating interferometric modulator display |
| 03/27/2006 | CA2520352A1 Method and system for reducing power consumption in a display |
| 03/27/2006 | CA2520325A1 System and method for implementation of interferometric modulator displays |
| 03/27/2006 | CA2519983A1 Device having a conductive light absorbing mask and method for fabricating same |
| 03/27/2006 | CA2519741A1 System and method of transmitting video data |
| 03/27/2006 | CA2519660A1 Apparatus and method for reducing perceived color shift |
| 03/27/2006 | CA2519659A1 Method and device for reflectance with a predetermined spectral response |
| 03/27/2006 | CA2519656A1 Method and system for packaging mems devices with incorporated getter |
| 03/27/2006 | CA2519600A1 Reflective display pixels arranged in non-rectangular arrays |
| 03/27/2006 | CA2519593A1 Device and method for display memory using manipulation of mechanical response |
| 03/27/2006 | CA2519485A1 Method and device for compensating for color shift as a function of angle of view |
| 03/27/2006 | CA2519484A1 Method and system for providing mems device package with secondary seal |
| 03/27/2006 | CA2519043A1 Method and device for manipulating color in a display |
| 03/27/2006 | CA2518901A1 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion |
| 03/27/2006 | CA2518808A1 Device having patterned spacers for backplates and method of making the same |
| 03/27/2006 | CA2518805A1 Method and system for packaging a display |
| 03/27/2006 | CA2518784A1 Method and device for multi-state interferometric light modulation |
| 03/27/2006 | CA2518396A1 Method and device for providing electronic circuitry on a backplate |
| 03/27/2006 | CA2518370A1 Apparatus and methods for arranging devices into an interconnected array |
| 03/27/2006 | CA2518337A1 Device and method for manipulation of thermal response in a modulator |
| 03/27/2006 | CA2517413A1 System and method for display device with activated desiccant |
| 03/27/2006 | CA2517404A1 Method and device for corner interferometric modulation |
| 03/27/2006 | CA2517328A1 Method and device for a display having transparent components integrated therein |
| 03/27/2006 | CA2517325A1 Systems and methods for driving a bi-stable display element |
| 03/27/2006 | CA2517315A1 Method and device for electrically programmable display |
| 03/27/2006 | CA2517116A1 System and method of transmitting video data |
| 03/27/2006 | CA2517109A1 System and method of providing a regenerating protective coating in a mems device |
| 03/27/2006 | CA2517092A1 System and method of providing mems device with anti-stiction coating |
| 03/27/2006 | CA2517089A1 Method and post structures for interferometric modulation |
| 03/27/2006 | CA2517048A1 Conductive bus structure for interferometric modulator array |
| 03/27/2006 | CA2517038A1 Interferometric modulator array with integrated mems electrical switches |
| 03/27/2006 | CA2516915A1 Display region architectures |
| 03/27/2006 | CA2516912A1 System and method for display device with integrated desiccant |
| 03/27/2006 | CA2516638A1 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate |
| 03/27/2006 | CA2516578A1 Display device having an array of spatial light modulators with integrated color filters |
| 03/27/2006 | CA2516576A1 Method and system for sealing a substrate |
| 03/27/2006 | CA2515622A1 Method and system for xenon fluoride etching with enhanced efficiency |
| 03/27/2006 | CA2514701A1 Controller and driver features for bi-stable display |
| 03/27/2006 | CA2514680A1 Controller and driver features for bi-stable display |
| 03/27/2006 | CA2514626A1 Method and system for writing data to mems display elements |
| 03/27/2006 | CA2514489A1 System and method of reducing color shift in a display |
| 03/27/2006 | CA2514350A1 Portable etch chamber |
| 03/27/2006 | CA2514349A1 Method of selective etching using etch stop layer |
| 03/27/2006 | CA2514348A1 Method and device for packaging a substrate |
| 03/27/2006 | CA2514346A1 System and method of illuminating interferometric modulators using backlighting |
| 03/27/2006 | CA2514344A1 Electro-optical measurement of hysteresis in interferometric modulators |
| 03/27/2006 | CA2513030A1 Method and system for packaging a mems device |
| 03/27/2006 | CA2512922A1 Method and system for detecting leak in electronic devices |
| 03/23/2006 | US20060063292 Method for producing a packaged integrated circuit |
| 03/23/2006 | US20060062924 Carbon nanotube structures, carbon nanotube devices using the same and method for manufacturing carbon nanotube structures |
| 03/23/2006 | DE102005043906A1 Sensor vom kapazitiven Typ für eine physikalische Größe, der einen Sensorchip und einen Schaltkreischip aufweist The capacitance type sensor for a physical quantity that has a sensor chip and a circuit chip |
| 03/23/2006 | DE102005029841A1 Mikromechanische Vorrichtung mit integrierter Heizung Micromechanical device with integrated heating |
| 03/23/2006 | DE102004011667B4 Vorrichtung mit einem Halbleiterchip und einem mikrofluidischen System und Verfahren zur Herstellung Device having a semiconductor chip and a microfluidic system and method for producing |
| 03/22/2006 | EP1638153A2 Piezoelectric/electrostrictive device and method of manufacturing same |
| 03/22/2006 | EP1637498A1 MOS transistor with deformable gate |
| 03/22/2006 | EP1636131A1 Optical microelectromechanical structure |
| 03/22/2006 | EP1636130A2 Integrated circuit on high performance chip |
| 03/22/2006 | EP1522095B1 Method for producing a component having submerged connecting areas |
| 03/22/2006 | EP1414738B1 Micro-machined ultrasonic transducer (mut) substrate that limits the lateral propagation of acoustic energy |
| 03/22/2006 | CN1246215C Movement sensor in micro electro mechanical device including detecting controller arm |
| 03/21/2006 | US7016099 MEMS element, GLV device, and laser display |
| 03/21/2006 | US7015074 Vacuum package fabrication of integrated circuit components |
| 03/16/2006 | WO2006027281A1 Micromechanical component with a cavity and method for production of such a component |
| 03/16/2006 | US20060055001 Semiconductor device having multiple substrates |
| 03/16/2006 | US20060054984 MOS transistor with a deformable gate |
| 03/16/2006 | US20060054021 Particle filter for microelectromechanical systems |
| 03/16/2006 | DE102005043013A1 Sensoranordnung mit einem Stopper zur Begrenzung einer Verschiebung Sensor array with a stopper to limit movement |
| 03/16/2006 | DE102005040081A1 Ultraschallsensor Ultrasonic sensor |
| 03/16/2006 | DE102005036264A1 Mikrovorrichtung mit einer Mikrosystemstruktur und Verfahren zur Herstellung derselben Micro device having a micro-structure system and method for producing same |
| 03/16/2006 | DE102004037348A1 Fluid-Transport-Vorrichtung, Sensor-Anordnung, Fluid-Misch-Vorrichtung und Verfahren zum Herstellen einer Fluid-Transport-Vorrichtung Fluid transport device, the sensor arrangement, fluid-mixing device and method of manufacturing a fluid transport device |
| 03/15/2006 | EP1633673A2 Microelectromechanical systems having trench isolated contacts, and methods for fabricating same |
| 03/15/2006 | CN1748121A Methods and systems for decelerating proof mass movements within mems structures |
| 03/15/2006 | CN1747165A Electronic device and method of manufacturing the same |
| 03/14/2006 | US7011988 Build-up structures with multi-angle vias for Chip to Chip interconnects and optical bussing |
| 03/14/2006 | US7011986 Method for manufacturing a housing for a chip with a micromechanical structure |
| 03/14/2006 | US7010854 Re-assembly process for MEMS structures |
| 03/09/2006 | WO2006025014A1 Micro-fluidic system |
| 03/09/2006 | US20060049471 Encapsulated microstructure and method of producing one such microstructure |
| 03/09/2006 | DE102005041577A1 Sensor für eine physikalische Grösse Sensor for a physical quantity |
| 03/09/2006 | DE102004043120A1 Mikromechanisches Bauelement mit Hohlraum und Herstellungsverfahren für ein solches Bauelement Micromechanical component with cavity and manufacturing method for such a device |
| 03/08/2006 | EP1540736A4 Wafer-level seal for non-silicon-based devices |
| 03/08/2006 | EP1299564A4 Integrated microarray devices |
| 03/08/2006 | CN1743959A Infrared light source based on microelectronic mechanical system technique and its preparing method |
| 03/08/2006 | CN1244489C Method for manufacturing a housing for a chip having a micromechanical structure |
| 03/07/2006 | US7009302 Micromachine package and method for manufacturing the same |
| 03/07/2006 | US7009124 Acceleration switch |