| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 09/13/2006 | CN1830752A Laser cell microoperation control method and device for metal particle |
| 09/13/2006 | CN1275066C Miniature movable device |
| 09/13/2006 | CN1275028C Soft-magnetic multilayer film force-sensitive sensor and preparation method thereof |
| 09/12/2006 | US7106066 Micro-electromechanical switch performance enhancement |
| 09/12/2006 | US7105131 Systems and methods for microelectromechanical system based fluid ejection |
| 09/12/2006 | US7104130 Ultra-miniature accelerometers |
| 09/12/2006 | US7104129 Vertically integrated MEMS structure with electronics in a hermetically sealed cavity |
| 09/08/2006 | WO2006092474A1 Device comprising an encapsulated microsystem and production method thereof |
| 09/07/2006 | US20060197958 MEMS Fabry Perot Filter for Integrated Spectroscopy System |
| 09/07/2006 | DE102005000835B3 Verfahren und Vorrichtung zur Dosierung kleiner Flüssigkeitsmengen Method and apparatus for dosing small amounts of liquid |
| 09/06/2006 | EP1697256A1 Method and system for self-aligning parts in mems |
| 09/06/2006 | EP1697255A1 Method for containing a device and a corresponding device |
| 09/05/2006 | US7101514 Control devices for evaporative chemical mixing/reaction |
| 08/31/2006 | WO2006091904A2 Methods and apparatus for spatial light modulation |
| 08/31/2006 | WO2006091791A2 Methods and apparatus for actuating displays |
| 08/31/2006 | WO2006061792A3 Hermetically sealed integrated circuit package |
| 08/31/2006 | WO2001089844A9 Ink jet printhead nozzle array |
| 08/31/2006 | DE102006007494A1 Ultraschallelement Ultrasonic element |
| 08/31/2006 | DE102005008515A1 Microphone for e.g. signal processing module, has diaphragms, whose acoustic resonances lie in acoustic operating frequency range of microphone, where resonances of diaphragms are shifted against each other and overlap range of microphone |
| 08/31/2006 | DE102005008512A1 Electrical module, has base plate with acoustic channel whose one end opens out into cavity, where channel is separated from another cavity by diaphragm of microphone chip which closes other end of channel |
| 08/31/2006 | DE102005008511A1 Micro electro mechanical system microphone, has microphone membrane and auxiliary membrane, which are electrically coupled so that movement of auxiliary membrane is effected simultaneously during movement of microphone membrane |
| 08/31/2006 | CA2817936A1 A display utilizing a control matrix to control movement of mems-based light modulators |
| 08/31/2006 | CA2817647A1 A display utilizing a control matrix to control movement of mems-based light modulators |
| 08/31/2006 | CA2817644A1 A display utilizing a control matrix to control movement of mems-based light modulators |
| 08/31/2006 | CA2817616A1 A display utilizing a control matrix to control movement of mems-based light modulators |
| 08/31/2006 | CA2804076A1 Methods and apparatus for spatial light modulation |
| 08/31/2006 | CA2804066A1 Methods and apparatus for spatial light modulation |
| 08/31/2006 | CA2803901A1 Methods and apparatus for spatial light modulation |
| 08/31/2006 | CA2803899A1 Methods and apparatus for spatial light modulation |
| 08/31/2006 | CA2803823A1 Methods and apparatus for spatial light modulation |
| 08/31/2006 | CA2803788A1 Methods and apparatus for spatial light modulation |
| 08/31/2006 | CA2803781A1 Methods and apparatus for spatial light modulation |
| 08/31/2006 | CA2795356A1 Methods and apparatus for actuating displays |
| 08/31/2006 | CA2795329A1 Methods and apparatus for actuating displays |
| 08/31/2006 | CA2795302A1 Methods and apparatus for actuating displays |
| 08/31/2006 | CA2598825A1 Methods and apparatus for spatial light modulation |
| 08/31/2006 | CA2598740A1 Methods and apparatus for actuating displays |
| 08/30/2006 | EP1696698A2 Condenser microphone and method for manufacturing the same |
| 08/30/2006 | EP1695937A2 Integrated micro electro-mechanical system and manufacturing method thereof |
| 08/30/2006 | EP1694597A1 Microcomponent comprising a hermetic microcavity and method for production of such a microcomponent |
| 08/30/2006 | EP1317399B1 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
| 08/29/2006 | US7098517 Semiconductor device |
| 08/29/2006 | US7098117 Method of fabricating a package with substantially vertical feedthroughs for micromachined or MEMS devices |
| 08/24/2006 | US20060188413 Fluidic methods and devices for parallel chemical reactions |
| 08/24/2006 | US20060187461 Integrated Spectroscopy System |
| 08/22/2006 | US7095546 Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays |
| 08/22/2006 | US7095309 oxidation resistance; titanium silicide, carbide |
| 08/22/2006 | US7095109 Optical fiber terminator package |
| 08/22/2006 | CA2364498C Ic-compatible parylene mems technology and its application in integrated sensors |
| 08/18/2006 | CA2536119A1 Micro-switches for downhole use |
| 08/17/2006 | WO2006085825A1 A packaging method for mems devices, and mems packages produced using the method |
| 08/17/2006 | WO2006085015A1 Fluidic microprobe comprising microcavities for spectroscopic analysis or nmr imagery |
| 08/17/2006 | US20060183299 Electronic device sealed under vacuum containing a getter and method of operation |
| 08/17/2006 | US20060183262 Thin film encapsulation of MEMS devices |
| 08/16/2006 | CN1819968A Methods and apparatus for attaching a die to a substrate |
| 08/16/2006 | CA2536722A1 Articulated mems structures |
| 08/15/2006 | US7092593 Microactuator device and optical switching system using the same |
| 08/15/2006 | US7089786 Microelectromechanical system and method for determining temperature and moisture profiles within pharmaceutical packaging |
| 08/10/2006 | WO2006084028A2 Interdiffusion bonded stacked die device |
| 08/10/2006 | WO2006083310A2 Nanowire device with (111) vertical sidewalls and method of fabrication |
| 08/10/2006 | WO2006081888A2 Acceleration measuring micromechanical sensor element and method for the production thereof |
| 08/10/2006 | WO2006081636A1 Method for encapsulating a device in a microcavity |
| 08/10/2006 | WO2006036383A3 System and method of testing humidity in a sealed mems device |
| 08/10/2006 | WO2005050777A3 Receiver electronics proximate antenna |
| 08/09/2006 | EP1688776A1 Optical scanner package and method of manufacturing the same |
| 08/09/2006 | EP1687837A2 High temperature electronic devices |
| 08/09/2006 | EP1687237A1 Method to test the hermeticity of a sealed cavity micromechanical device and the device to be so tested |
| 08/09/2006 | CN1816731A Methods and apparatus for particle reduction in mems devices |
| 08/09/2006 | CN1816492A Micropump and micro-incubator utilizing gas generation and production method thereof |
| 08/09/2006 | CN1268537C Micro-actuator, micro-actuator device, optical switch and optical switch array |
| 08/08/2006 | US7088566 Charge control of micro-electromechanical device |
| 08/08/2006 | US7087894 Optical system for reinforcing optical tweezers capturing force |
| 08/08/2006 | US7087134 System and method for direct-bonding of substrates |
| 08/02/2006 | EP1685269A2 Process for manufacturing devices which require a non evaporable getter material for their working |
| 08/02/2006 | CN1812012A Amorphous FeCuNbCrSiB magnetic thin film solenoid micro-inducer |
| 08/02/2006 | CN1812011A Solenoid micro inducer based on amorphous FeCuNbCrSiB magnetic film |
| 08/02/2006 | CN1267931C Carbon nano-pipe and magnetic detecting device and plumb magnetic recording head employing this |
| 08/02/2006 | CN1267764C Imaging technique using optical MEMS device |
| 08/01/2006 | US7083997 Bonded wafer optical MEMS process |
| 08/01/2006 | US7083260 Printer head using a radio frequency micro-electromechanical system (RF MEMS) sprayer |
| 07/27/2006 | WO2006079094A1 A method to form an electronic device |
| 07/27/2006 | WO2006077565A1 Packaging of micro devices |
| 07/27/2006 | US20060166407 Hermetic packaging |
| 07/27/2006 | US20060166403 Fabrication of advanced silicon-based MEMS devices |
| 07/27/2006 | US20060165998 Durable optical element |
| 07/27/2006 | US20060164710 Optical scanning apparatus, optical writing apparatus, image forming apparatus, and method of driving vibration mirror |
| 07/27/2006 | US20060163712 System and method for direct-bonding of substrates |
| 07/27/2006 | DE102005002967A1 Verfahren zum Herstellen eines Bauelementes mit einem beweglichen Abschnitt A method for manufacturing a component having a movable portion |
| 07/27/2006 | DE102005002304A1 Micro-electromechanical sensor e.g. acceleration sensor, has sensor unit area-wisely and directly attached on substrate body in attachment area, where thermal expansion coefficient of unit is adjusted at expansion coefficients of body |
| 07/27/2006 | DE102005000834A1 Integrated dosing and mixing-through of small amounts of fluids is such that second fluid in reaction reservoir communicates with first fluid at connecting structure to create flow pattern in fluid |
| 07/26/2006 | EP1684425A1 Micro-resonator and communication apparatus |
| 07/26/2006 | EP1683209A2 Encapsulation assembly for electronic devices |
| 07/26/2006 | EP1440322B1 Micro-sensor |
| 07/26/2006 | CN1266509C Optical multilayer structure and its production method, optical switching device, and image display |
| 07/25/2006 | US7081700 Manipulator |
| 07/25/2006 | US7081647 Microelectromechanical system and method for fabricating the same |
| 07/20/2006 | WO2006076089A1 Mems packaging with improved reaction to temperature changes |
| 07/20/2006 | WO2006074871A1 Method for generation of a given internal pressure in a cavity of a semiconductor component |
| 07/20/2006 | US20060160258 Process for producing microelectromechanical components and a housed microelectromechanical component |
| 07/20/2006 | US20060157839 Re-assembly process for MEMS structures |