| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 07/20/2006 | US20060157808 Electronic component having micro-electrical mechanical system |
| 07/20/2006 | US20060157274 Wafer-level hermetic micro-device packages |
| 07/20/2006 | DE102006002067A1 Ultraschall-Sensor Ultrasonic sensor |
| 07/19/2006 | EP1423714B1 Microstructure with movable mass |
| 07/19/2006 | CN1806339A A novel packaging method for microstructure and semiconductor devices |
| 07/18/2006 | US7079301 MEMS device and method of forming MEMS device |
| 07/18/2006 | US7078804 Micro-electro-mechanical system (MEMS) package with side sealing member and method of manufacturing the same |
| 07/18/2006 | US7078293 Method for fabricating optical interference display cell |
| 07/18/2006 | US7078268 Method of fabricating a vacuum sealed microdevice package with getters |
| 07/18/2006 | US7077969 Miniature microdevice package and process for making thereof |
| 07/13/2006 | WO2006072170A1 Micro-electromechanical relay and related methods |
| 07/13/2006 | US20060150721 Fluid delivery for scanning probe microscopy |
| 07/13/2006 | DE10350460B4 Verfahren zur Herstellung von mikromechanische und/ oder mikroelektronische Strukturen aufweisenden Halbleiterbauelementen, die durch das feste Verbinden von mindestens zwei Halbleiterscheiben entstehen, und entsprechende Anordnung A process for preparing micromechanical and / or microelectronic structures having semiconductor devices caused by the solid connecting at least two semiconductor wafers, and corresponding arrangement |
| 07/13/2006 | DE102004062992A1 Switchable, high-frequency, micro-electromechanical system component, combines signal line and switching component in common plane on substrate |
| 07/13/2006 | CA2530252A1 Photo-sensitive mems structure |
| 07/12/2006 | EP1678511A1 Trapped charge field bias vibrating beam accelerometer |
| 07/12/2006 | EP1678470A2 Integrated spectroscopy system |
| 07/12/2006 | EP1678074A1 Method and device for secure, insulated and electrically conductive assembling of treated semiconductor wafers |
| 07/12/2006 | EP1269259A4 Solventless, resistless direct dielectric patterning |
| 07/12/2006 | CN1801485A Device comprising multi-layered thin film having excellent adhesive strength and method for fabricating the same |
| 07/12/2006 | CN1801399A Probe for scanning magnetic microscope and manufacturing method thereof, method for forming iron-magnetic alloy film on carbon nanopipe |
| 07/11/2006 | US7074636 Methods and apparatus for attaching getters to MEMS device housings |
| 07/11/2006 | US7074635 MEMS structure and method for fabricating the same |
| 07/11/2006 | US7074463 Durable optical element |
| 07/11/2006 | US7073380 Pyramid socket suspension |
| 07/11/2006 | CA2421934C Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
| 07/06/2006 | WO2006036642A3 Method of making a reflective display device using thin film transistor production techniques |
| 07/06/2006 | US20060148132 Method of fabricating a vacuum sealed microdevice package with getters |
| 07/06/2006 | DE102004061732A1 Controllable several storage cell system for e.g. material delivery, comprises a polymer storage cell, which has a hydrogel structure, a cell carrier, and a media |
| 07/06/2006 | DE102004061731A1 Programmable micro template on hydraulic gel basis for e.g. steered printing comprises actuators on pourable polymer networks with volume phase transition and electrical and/or a magnetic field factor |
| 07/05/2006 | EP1677118A1 Micromachined accelerometer with capacitive combs |
| 07/05/2006 | EP1675803A2 Methods and systems for providing mems devices with a top cap and upper sense plate |
| 07/05/2006 | CN1262468C Air tight method for packing micro system in-situ |
| 07/04/2006 | US7071521 Process for producing microelectromechanical components and a housed microelectromechanical component |
| 07/04/2006 | US7071016 Micro-electro mechanical systems (MEMS) device using silicon on insulator (SOI) wafer, and method of fabricating and grounding the same |
| 06/29/2006 | WO2006068619A1 Device and use thereof |
| 06/29/2006 | WO2006067784A1 Chip packaging |
| 06/29/2006 | WO2006044219A3 Wafer level microelectronic packaging with double isolation |
| 06/29/2006 | US20060141786 Method of manufacturing an electronic device and electronic device |
| 06/29/2006 | US20060141760 Method for producing an electrical component |
| 06/29/2006 | US20060138901 Manipulator |
| 06/29/2006 | US20060138642 Micromechanical getter anchor |
| 06/29/2006 | US20060137460 Micromechanical component and method |
| 06/29/2006 | DE102004060364A1 Halbleitersubstrat mit Mehrschichtaufbau und Verfahren zur Herstellung Semiconductor substrate having a multilayer structure and methods for preparing |
| 06/29/2006 | CA2592097A1 Device and use thereof |
| 06/28/2006 | CN1794359A Scanning electrochemical and optical microscope probe and its preparation method |
| 06/27/2006 | US7065867 Low temperature hermetic sealing method having passivation layer |
| 06/27/2006 | US7065857 Method of manufacturing electronic device |
| 06/22/2006 | WO2006065547A1 Use of visco-elastic polymer to reduce acoustic and/or vibration induced error in microelectromechanical devices and systems |
| 06/22/2006 | WO2006034377A3 Light powered microactuator, microfluidic dispenser and retinal prosthesis |
| 06/22/2006 | DE102005007872B3 Temperature measurement in microfluidic channel of microfluidic device, comprises irradiating volume element of the channel by pulsed laser, elastic scattering and detecting Raman light and converting the Raman light to signals |
| 06/22/2006 | CA2589752A1 Use of visco-elastic polymer to reduce acoustic and/or vibration induced error in microelectromechanical devices and systems |
| 06/21/2006 | EP1671924A2 Micromechanical device and method of manufacturing a micromechanical device |
| 06/21/2006 | EP1671923A2 Micromechanical device and method of manufacturing a micromechanical device |
| 06/21/2006 | EP1671922A2 Electromechanical assemblies using molecular-scale electrically conductive and mechanically flexible beams and methods for application of the same |
| 06/21/2006 | EP1671091A1 Surface mount package and method for forming multi-chip microsensor device |
| 06/21/2006 | EP1406831B1 Micromechanical cap structure and a corresponding production method |
| 06/21/2006 | CN1791975A Electrical connections in substrates |
| 06/21/2006 | CN1790751A Semiconductor device having actuator |
| 06/21/2006 | CN1260796C Side welding method for flip-chip semiconductor device |
| 06/20/2006 | US7063909 Fuel-cell element stack with stress relief and methods |
| 06/20/2006 | US7063796 Micromechanical component and method for producing the same |
| 06/15/2006 | WO2006061781A1 Multisensor assembly |
| 06/15/2006 | WO2006061274A1 Chip module and method for the production thereof |
| 06/15/2006 | WO2006061073A1 Integrated microsensor and method for production |
| 06/15/2006 | US20060128064 Wafer packaging and singulation method |
| 06/15/2006 | US20060128048 Pyramid socket suspension |
| 06/15/2006 | US20060125348 Micromachined ultrasonic transducer cells having compliant support structure |
| 06/15/2006 | US20060125032 Micro electro mechanical system apparatus |
| 06/15/2006 | US20060124555 Component separation device, method of producing the device, and method of separating component by using the device |
| 06/15/2006 | US20060123927 Pyramid socket suspension |
| 06/15/2006 | US20060123907 Pyramid socket suspension |
| 06/14/2006 | CN1788346A Methods and apparatus for attaching getters to mems device housings |
| 06/14/2006 | CN1788330A Barrier layers for microelectromechanical systems |
| 06/13/2006 | US7061618 Integrated spectroscopy system |
| 06/13/2006 | US7060895 Modifying the electro-mechanical behavior of devices |
| 06/13/2006 | US7060894 Device for connecting microcomponents |
| 06/08/2006 | WO2006020744A3 Structure and method of forming capped chips |
| 06/08/2006 | US20060118946 Semiconductor assembly with conductive rim and method of producing the same |
| 06/08/2006 | DE102005058276A1 Sensorvorrichtung Sensor device |
| 06/08/2006 | DE102004058880A1 Integrierter Mikrosensor und Verfahren zur Herstellung Integrated micro sensor and process for producing |
| 06/08/2006 | DE102004058064A1 Biochemisches Halbleiterchiplabor mit angekoppeltem Adressier- und Steuerchip und Verfahren zur Herstellung desselben Of the same biochemical semiconductor chip with a coupled laboratory addressing and control chip and method for producing |
| 06/07/2006 | EP1356511A4 Use of protective caps as masks at a wafer scale |
| 06/06/2006 | US7057784 Mirror rocking member for optical deflector |
| 06/06/2006 | US7055797 Micro-actuator, fabrication method thereof, and micro-actuating valve |
| 06/01/2006 | WO2006009404A8 Systems with water-activated battery |
| 06/01/2006 | US20060115920 Semiconductor device having MEMS |
| 06/01/2006 | US20060115413 Especially a water vaporizer, headers connected to flow microchannels by orifices, wherein the ratio of the cross-sectional area of each orifice to the cross-sectional area of the flow microchannels connected to said orifices is between 0.0005 and 0.1. |
| 06/01/2006 | US20060113660 Chip package mechanism |
| 06/01/2006 | US20060113649 Light transmissive cover, device provided with same and methods for manufacturing them |
| 05/31/2006 | EP1661850A1 Method for packaging a micro-component using a mould |
| 05/31/2006 | CN1781176A Microdevice assembly having a fine grain getter layer for maintaining vacuum |
| 05/31/2006 | CN1779436A Coaxial-illuminating microscope otpical system for atomic force microscope |
| 05/31/2006 | CN1778663A Method and apparatus for preventing metal/silicon spiking in MEMS devices |
| 05/31/2006 | CN1258199C Deep etching plane magnet coil and making method |
| 05/30/2006 | US7053456 Electronic component having micro-electrical mechanical system |
| 05/30/2006 | US7052464 Alignment method for fabrication of integrated ultrasonic transducer array |
| 05/30/2006 | CA2320458C Mems variable optical attenuator |
| 05/25/2006 | US20060110854 Methods and systems for providing MEMS devices with a top cap and upper sense plate |
| 05/25/2006 | US20060107743 Micromechanical component |