B81B 7 - Micro-structural systems

Patents for B81B 7 - Micro-structural systems (8,983)
11/2006
11/16/2006	WO2006091904A3 Methods and apparatus for spatial light modulation
11/16/2006	US20060257070 Optical interference display cell and method of making the same
11/16/2006	DE202006012055U1 Strengthened housing structure for micro-electromechanical system (MEMS), has protective resin covering MEMS chip, control chip, wires and part of leadframe, and package covering protective resin, MEMS chip and part of leadframe
11/15/2006	EP1721866A1 MEMS device having a trilayered beam and related methods
11/15/2006	EP1720794A2 Packaged acoustic and electromagnetic transducer chips
11/15/2006	EP1437036A4 Latching micro magnetic relay packages and methods of packaging
11/15/2006	EP1360713A4 Light emitting semiconductor package
11/09/2006	US20060252229 Integrated circuit on high performance chip
11/09/2006	US20060249801 Semiconductor device
11/08/2006	EP1345843B1 System and method for constraining totally released microcomponents
11/08/2006	CN1283547C Micro-machined ultrasonic transducer (MUT) that limits the lateral propagation of acoustic energy and method thereof
11/07/2006	US7132721 Bonding for a micro-electro-mechanical system (MEMS) and MEMS based devices
11/07/2006	US7132356 Interconnection method
11/02/2006	WO2005113102A3 Micromixer
11/02/2006	US20060244085 Method for forming a chamber in an electronic device and device formed thereby
11/02/2006	EP1717195A1 Trilayered beam MEMS device and related methods
11/02/2006	EP1717194A1 Trilayered Beam MEMS device and related methods
11/02/2006	EP1717193A1 Trilayered beam MEMS device and related methods
11/02/2006	EP1716071A1 Optical scanning using vibratory diffraction gratings
11/02/2006	EP1165432B1 Thermal bend actuator and paddle structure for ink jet nozzle
11/02/2006	DE102005018321A1 Kapazitiver Mikropower-Generator für mehrfrequente Vibrationsquellen The capacitive micro power generator for vibration sources mehrfrequente
11/01/2006	CN1855498A Electromechanical non-volatile random memory
11/01/2006	CN1854061A Sockets for microassembly
11/01/2006	CN1282597C Cantilever with step-type structure and its manufacturing method
10/2006
10/31/2006	US7130177 Drive circuit of switch and relay circuit
10/31/2006	US7129176 Optical device having micro lens array and method for manufacturing the same
10/26/2006	DE102005018867A1 Piezoelektrischer Mikro-Power Wandler Piezoelectric Micro-power converter
10/26/2006	DE102005015584A1 Mikromechanisches Bauteil sowie Verfahren zur Herstellung eines mikromechanischen Bauteils Micromechanical element and process for producing a micromechanical component
10/25/2006	EP1714265A1 Mechanical structure including a layer of polymerised liquid crystal and method of manufacturing such
10/25/2006	EP1714264A1 Mechanical shutter with polymerised liquid crystal layer
10/25/2006	EP1194693B1 Microfabricated elastomeric valve and pump systems
10/25/2006	CN1851950A Micromechanical thermalelectric-stack infrared detector compatible with co-complementive metal oxide semiconductor technology and preparing method
10/24/2006	US7126216 Two part mold for wafer scale caps
10/24/2006	US7125739 Method for producing and testing a corrosion-resistant channel in a silicon device
10/24/2006	US7125540 Microsystem process networks
10/24/2006	US7125510 Microstructure fabrication and microsystem integration
10/19/2006	WO2006110782A1 Fabrication of a micro-electromechanical system (mems) device from a complementary metal oxide semiconductor (cmos)
10/19/2006	WO2006108588A1 Method for the production of enclosed electronic components, and enclosed electronic component
10/19/2006	WO2006081888A3 Acceleration measuring micromechanical sensor element and method for the production thereof
10/19/2006	DE102005017452A1 Mikroverdampfer Microevaporator
10/19/2006	DE10052419B4 Verfahren zur Herstellung mikromechanischer Bauelemente A process for preparing micromechanical components
10/18/2006	EP1712113A2 Method for disposing a conductor structure on a substrate, and substrate comprising said conductor structure
10/18/2006	EP1712002A1 Reference oscillator frequency stabilization
10/18/2006	EP1414739B1 Micro-machined ultrasonic transducer (MUT) array
10/17/2006	US7123111 Micro-electromechanical systems
10/17/2006	US7122940 Manipulator
10/12/2006	WO2006106567A1 Switch circuit
10/12/2006	WO2006105898A1 Micromechanical component, method for fabrication and use
10/12/2006	WO2006105570A1 Mems fluid sensor
10/12/2006	WO2006091791A9 Methods and apparatus for actuating displays
10/12/2006	US20060228066 Optical microelectromechantical structure
10/12/2006	CA2602714A1 Mems fluid sensor
10/11/2006	EP1708959A1 Semiconductor assembly with conductive rim and method of producing the same
10/11/2006	EP1708958A1 Microcomponent comprising a hermetically-sealed cavity and a plug, and method of producing one such microcomponent
10/11/2006	EP1356510A4 Wafer scale molding of protective caps
10/11/2006	EP1325302B1 Nanoelectromechanical device for biochemical analysis
10/11/2006	CN1846012A Process for manufacturing devices which require a non evaporable getter material for their working
10/11/2006	CN1845327A Single slice integration temperature, humidity, pressure sensor chip based on polymer material
10/11/2006	CN1279595C Base plate with minitype connection components and its preparation method
10/11/2006	CN1279338C Resonant tunneling micro mechanical force sensor and method for manufacturing the same
10/11/2006	CN1278922C Fork type micromechanical gyro and its manufacturing method
10/11/2006	CN1278921C Micro-liquid drop driver based on power-on wetting of medium layer
10/10/2006	US7118991 Encapsulation wafer process
10/05/2006	WO2006083310A3 Nanowire device with (111) vertical sidewalls and method of fabrication
10/05/2006	US20060219435 Modifying the electro-mechanical behavior of devices
10/05/2006	CA2602103A1 Micromechanical component and method for fabricating a micromechanical component
10/04/2006	EP1706267A1 Inkjet printer system with removable cartridge
09/2006
09/28/2006	WO2006102351A1 Wire bonded wafer level cavity package
09/28/2006	WO2006101689A1 Wafer level capped sensor
09/28/2006	WO2006101067A1 Switch array
09/28/2006	US20060216847 Process for fabricating micromachine
09/28/2006	US20060214761 Micro-electromechanical actuator
09/28/2006	US20060214248 Single crystal silicon sensor with additional layer and method of producing the same
09/28/2006	DE102005016243B3 Micromechanical component e.g. micro electro mechanical system structure, for use as e.g. micro sensor, has one metal layer of multi-layer structure extending at side over pile and electrically conductive membrane integrated in structure
09/28/2006	DE102005000834B4 Verfahren und Vorrichtung zur Dosierung und Durchmischung kleiner Flüssigkeitsmengen Method and apparatus for dosing and mixing of small quantities of liquid
09/27/2006	EP1705489A2 Sensor design and process
09/27/2006	EP1705152A2 Method and apparatus for making micro or nanostructured component use resistant
09/27/2006	EP1454349B1 Trilayered beam mems device and related methods
09/21/2006	WO2006097842A1 Thin package for a micro component
09/21/2006	WO2006097307A1 Technical functional element consisting of a stack of layers
09/21/2006	WO2006097302A1 Method for manufacturing packed bed column and packed bed column obtained therewith
09/21/2006	WO2006097301A1 Method for preparing monolithic separation and reaction media in a separation or reaction channel
09/21/2006	WO2006052763A3 Compression and cold weld sealing methods and devices
09/21/2006	US20060211234 Re-assembly process for mems structures
09/21/2006	US20060211177 Structure and process for packaging RF MEMS and other devices
09/21/2006	US20060210390 Film cooling for microcircuits
09/21/2006	DE19639946B4 Mikromechanisches Bauelement Micromechanical component
09/20/2006	EP1552343A4 High-density interconnection of temperature sensitive electronic devices
09/20/2006	CN1835188A Micro movable device and method of making the same using wet etching
09/19/2006	US7109580 Hermetically sealed package for optical, electronic, opto-electronic and other devices
09/19/2006	US7107840 Pyramid socket suspension
09/14/2006	US20060205106 Integrated micro electro-mechanical system and manufacturing method thereof
09/14/2006	DE20122617U1 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system
09/14/2006	DE20122616U1 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system
09/14/2006	DE20122615U1 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system
09/14/2006	DE20122614U1 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system
09/13/2006	EP1700821A2 Sockets for microassembly
09/13/2006	EP1700002A2 High temperature environment tool system and method
09/13/2006	EP1230574B1 A deflectable spatial light modulator having superimposed hinge and deflectable element
09/13/2006	CN1832899A Optical microelectromechanical structure

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