| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 09/05/2007 | EP1829819A2 Passive thermal isolation structure |
| 09/05/2007 | EP1828048A1 Multisensor assembly |
| 09/05/2007 | CN101030548A Micro-mechanical wafer chip test detecting card and its production |
| 09/05/2007 | CN101030033A Production of MEMS suspending structure by laminated photoetching glue victim layer |
| 09/05/2007 | CN100335905C Microstructure with movable mass |
| 09/05/2007 | CN100335278C Buckle resistant thermal bend actuators |
| 09/04/2007 | US7265429 System and method of fabricating micro cavities |
| 09/04/2007 | US7263885 Physical quantity sensor having sensor chip and circuit chip |
| 09/04/2007 | US7263883 Gyro-sensor comprising a plurality of component units, and fabricating method thereof |
| 08/30/2007 | WO2007098277A2 6-axis electromagnetically-actuated meso-scale nanopositioner |
| 08/30/2007 | US20070202627 Silicon Condenser Microphone and Manufacturing Method |
| 08/30/2007 | US20070201715 Silicon Condenser Microphone and Manufacturing Method |
| 08/30/2007 | DE102007007178A1 Kapazitive mikrobearbeitete Ultraschalltransducer und Verfahren zur Herstellung derselben Capacitive micromachined ultrasonic transducers and method of producing same |
| 08/29/2007 | CN101024481A Micro electro mechanical system, semiconductor device, and manufacturing method thereof |
| 08/28/2007 | US7263674 System and method for three-dimensional visualization and postprocessing of a system model |
| 08/28/2007 | US7262522 Microelectromechanical isolating power converter |
| 08/28/2007 | US7262509 Microelectronic assembly having a perimeter around a MEMS device |
| 08/23/2007 | WO2007010361A3 A mems package using flexible substrates, and method thereof |
| 08/23/2007 | US20070196923 Detecting leaks in micro-optoelectromechanical devices (MOEMS) or microelectromechanical (MEMS) devices; indicator may be copper, which changes optical properties upon oxidation |
| 08/23/2007 | DE102006007729A1 Micro-electro-mechanical system substrate manufacturing method, involves depositing semiconductor function layer over surface of semiconductor substrate to form membrane region over cavern and connection forming region beside cavern |
| 08/22/2007 | EP1821570A1 Miniature silicon condenser microphone and method for producing same |
| 08/22/2007 | EP1819633A2 Galvanically isolated signal conditioning system |
| 08/22/2007 | CN101023021A Method of making a reflective display device using thin film transistor production techniques |
| 08/21/2007 | US7259436 Micromechanical component and corresponding production method |
| 08/16/2007 | DE102006005419A1 Semiconductor component for electronic device, includes walls with photolithographically patterned polymer, and cavity covering having polymer layer, where molecular chains of the polymers are crosslinked to form stable cavity housing |
| 08/16/2007 | DE102006004218B3 Elektromechanische Speicher-Einrichtung und Verfahren zum Herstellen einer elektromechanischen Speicher-Einrichtung Electromechanical memory device and method for manufacturing an electromechanical memory device |
| 08/15/2007 | EP1817546A1 Use of visco-elastic polymer to reduce acoustic and/or vibration induced error in microelectromechanical devices and systems |
| 08/15/2007 | EP1301346B1 Buckle resistant thermal bend actuators |
| 08/15/2007 | CN2935473Y Reinforced micro-electromechanical packaging structure |
| 08/15/2007 | CN1332179C Differential capacitive type MEMS sensor apparatus with capacitance compensator having MEMS structure |
| 08/15/2007 | CN1331727C Micromachine production method |
| 08/14/2007 | US7256127 Air gap formation |
| 08/09/2007 | DE102007003810A1 Ultraschallwellen-Erzeugungsvorrichtung Ultrasonic wave generating device |
| 08/09/2007 | DE102006003718A1 Fertigungsprozess für integrierte mikroelektro-mechanische Bauelemente Manufacturing process for integrated micro-electro-mechanical components |
| 08/08/2007 | EP1207378B1 Semiconductor pressure sensor and pressure sensing device |
| 08/08/2007 | EP1200262B1 Seal in micro electro-mechanical ink ejection nozzle |
| 08/08/2007 | CN101013197A Device on a transparent substrate and method for alignment forming and micro mechanical-electric device |
| 08/02/2007 | WO2007087247A2 Wafer level chip packaging |
| 08/02/2007 | US20070177246 Micromechanical Getter Anchor |
| 08/02/2007 | DE202007006274U1 Integriertes Multi-Sensor-Modul Integrated multi-sensor module |
| 08/02/2007 | DE10238843B4 Halbleiterbauelement Semiconductor device |
| 08/02/2007 | DE102005056941B3 Vibrationswandler Vibration transducer |
| 08/01/2007 | EP1813571A2 Sealed structure and method of fabricating the sealed structure |
| 08/01/2007 | EP1714265B1 Mechanical structure including a layer of polymerised liquid crystal and method of manufacturing such |
| 08/01/2007 | EP1463610B1 Sampling and gripper device |
| 08/01/2007 | CN1329284C Fabrication of a reflective spatial light modulator |
| 08/01/2007 | CN101010140A Micro-fluidic system |
| 07/26/2007 | WO2007084070A1 Miniaturized high conductivity thermal/electrical switch |
| 07/26/2007 | WO2007034276B1 Apparatus for downhole fluids analysis utilizing micro electro mechanical systems (mems) or other sensors |
| 07/26/2007 | DE19906067B4 Halbleitersensor für physikalische Größen und Verfahren zu dessen Herstellung A semiconductor sensor of physical quantities and methods for its preparation |
| 07/26/2007 | DE102006059091A1 Mikrooptisches reflektierendes Bauelement Microoptical reflective component |
| 07/26/2007 | DE102006001321B3 Switching device, has two signal lines and ground lines which are controlled by plated-through hole through laminar extending substrate, where signal lines surrounded by ground lines |
| 07/26/2007 | CA2637414A1 Miniaturized high conductivity thermal/electrical switch |
| 07/25/2007 | CN1328058C Pagewidth printing assembly |
| 07/25/2007 | CN1328052C Ink jet nozzle assembly including displaceable ink pusher |
| 07/25/2007 | CN1328051C Pusher actuation in a printhead chip for an inkjet printhead |
| 07/25/2007 | CN101006748A Silicon condenser microphone and manufacturing method |
| 07/25/2007 | CN101005097A Semiconductor pressure resistance type sensor and its operation method |
| 07/24/2007 | US7248128 Reference oscillator frequency stabilization |
| 07/24/2007 | US7247246 Vertical integration of a MEMS structure with electronics in a hermetically sealed cavity |
| 07/19/2007 | DE102006061886A1 Ultraschallsensor Ultrasonic sensor |
| 07/19/2007 | DE102006001493A1 MEMS-Sensor und Verfahren zur Herstellung MEMS sensor and methods for preparing |
| 07/18/2007 | EP1301345B1 Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator |
| 07/18/2007 | EP1292450B1 Ink jet printhead nozzle array |
| 07/18/2007 | CN2924545Y Capacitive microwave power sensor |
| 07/18/2007 | CN101000968A Stack silicon-base miniature fuel celles and manufacturing method |
| 07/18/2007 | CN101000800A XY stage module, storage system employing the same and method for fabricating the xy stage module |
| 07/12/2007 | WO2007076820A2 Ultrasonic transducer comprising a self-supporting matching layer, and method for the production thereof |
| 07/12/2007 | US20070158775 Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch |
| 07/11/2007 | EP1806782A2 Method for manufacturing semiconductor device |
| 07/11/2007 | EP1806613A1 Two-axis micro optical scanner |
| 07/11/2007 | EP1806316A2 Mems device seal using liquid crystal polymer |
| 07/11/2007 | EP1806315A2 Discrete stress isolator |
| 07/11/2007 | EP1805101A1 Method for assembling semiconductor chips, and corresponding semiconductor chip assembly |
| 07/11/2007 | EP1115649B1 Micromechanical component with sealed membrane openings |
| 07/11/2007 | CN1997588A Nanowire device with (111) vertical sidewalls and method of fabrication |
| 07/11/2007 | CN1994861A All-optical micromachine non-frigorific infrared thermal imaging chip structure and its production method |
| 07/11/2007 | CN1326225C Micro-mechanical chip testing card and producing method thereof |
| 07/11/2007 | CN1325264C Ink jet printhead chip and method of producing the same, ink jet printhead |
| 07/11/2007 | CN1325228C Manipulator |
| 07/10/2007 | US7242509 MEMS Fabry Perot filter for integrated spectroscopy system |
| 07/10/2007 | US7242089 Miniature silicon condenser microphone |
| 07/10/2007 | CA2414735C Seal in micro electro-mechanical ink ejection nozzle |
| 07/05/2007 | WO2007074821A1 Spring, mirror element, mirror array and optical switch |
| 07/05/2007 | WO2007074018A1 Micromechanical component having a cap with a closure |
| 07/05/2007 | WO2007074017A1 Micromechanical component having a cap |
| 07/05/2007 | US20070151099 Direct integration of inorganic nanowires with micron-sized electrodes |
| 07/05/2007 | DE19830476B4 Halbleitervorrichtung insbesondere Sensor Semiconductor device, in particular sensor |
| 07/05/2007 | DE102006061763A1 Micro mirror for use in micro-mirror device, has reflection mirror and torsion bars protruding from reflection mirror where carrier frame holds reflection mirror such that reflection mirror rotates over torsion bars around axis of rotation |
| 07/05/2007 | DE102006061762A1 Micro mirrors for e.g. used as scanner for bar code reader, has retaining unit in which mirror is retained in such way that it tilts about mirror pivotal axis and mirror has two fixed electrode groups with multiple electrodes |
| 07/05/2007 | DE102006061182A1 Ultraschall-Sensor Ultrasonic sensor |
| 07/05/2007 | DE102005061343A1 Ultrasonic transducer for use in e.g. medical catheter systems, comprises piezo-active transducer layer which is embodied as non-self-supporting layer |
| 07/04/2007 | EP1804110A1 Mirror package and method of manufacturing the mirror package |
| 07/03/2007 | US7238546 Hermetically sealed micro-device package with window |
| 07/03/2007 | US7238429 Ultra-hard low friction coating based on A1MgB14 for reduced wear of MEMS and other tribological components and system |
| 07/03/2007 | CA2426483C Mems-based integrated magnetic particle identification system |
| 06/28/2007 | US20070145542 Nano-wire electrode structure |
| 06/28/2007 | US20070144906 Method of actuating and an actuator |
| 06/28/2007 | DE102006002177B3 Infrarot-Mikrosensor Infrared micro sensor |
| 06/27/2007 | CN1988246A Laminated filter based on MEMS technology |