| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 06/27/2007 | CN1987486A Integrated optic grating interference micro mechanical acceleration sensor and its producing method |
| 06/27/2007 | CN1987364A Resonant silicon micro mechanical sensor with auxiliary sensitive unit |
| 06/27/2007 | CN1986385A Phi-shaped resonant micromechanical silicon pressure sensor |
| 06/27/2007 | CN1986011A Miniature needle array for medicine transmission and its making process |
| 06/27/2007 | CN1323025C Super hydrophobic surface possessing dual microtexture and preparing method |
| 06/27/2007 | CN1322978C Micro electro-mechanical device with flange actuator |
| 06/26/2007 | US7235281 forming collar which narrows opening and applying heat/pressure, then reflowing sealing layer; chemical/physical vapor deposition; for use in microelectronics, microelectromechanical systems |
| 06/21/2007 | WO2007068590A1 Micromechanical component and production method |
| 06/21/2007 | US20070140041 Fluid-handling apparatus and methods |
| 06/21/2007 | DE202007003027U1 Vorrichtung zur Handhabung von Fluiden mit einem Flußsensor The apparatus for handling fluids with a flow sensor |
| 06/21/2007 | DE102005060876A1 Sensor and production process has connected carrier and sensor substrates with metal-free sensor region arranged over a recess in the carrier substrate |
| 06/20/2007 | EP1798799A1 Fuel cell planarly integrated on a monocrystalline silicon chip and process of fabrication |
| 06/20/2007 | EP1798196A1 Multi-layer device with reduced UV radiations during encapsulation |
| 06/20/2007 | CN1983582A Semiconductor device |
| 06/20/2007 | CN1982201A Micro-optic reflecting component |
| 06/14/2007 | WO2007007206A3 Mems actuators and switches |
| 06/13/2007 | EP1795498A2 Package for a semiconductor device |
| 06/13/2007 | EP1795496A2 Semiconductor device for detecting pressure variations |
| 06/13/2007 | EP1794081A1 Packaged microchip with premolded-type package |
| 06/13/2007 | CN1980855A Method and system for improving alignment precision of parts in mems |
| 06/13/2007 | CN1980854A Module integrating MEMS and passive components |
| 06/13/2007 | CN1979714A 开关 Switch |
| 06/12/2007 | US7230743 Optical deflector array |
| 06/07/2007 | WO2007063048A1 Fluid separation microsystem |
| 06/07/2007 | WO2007062976A1 Method for mounting semiconductor chips and corresponding semiconductor chip arrangement |
| 06/07/2007 | US20070127186 Micro-Electromechanical Switch Performance Enhancement |
| 06/07/2007 | US20070126068 Microcomponent comprising a hermetically-sealed cavity and a plug, and method of producing one such microcomponent |
| 06/06/2007 | CN1974372A Monolithic integrated sensor chip for measing three parameters of pressure difference, absolute pressure and temperature and its making process |
| 06/06/2007 | CN1319848C Array type piezoelectricity-driven multi-cavity micro-mixer |
| 06/06/2007 | CN1319743C Translation to rotation conversion in an inkjet print head |
| 06/06/2007 | CN1319738C Symmetrically actuated fluid ejection components for a fluid ejection chip |
| 06/05/2007 | US7227677 Micro light modulator arrangement |
| 05/31/2007 | WO2007060290A1 Method for manufacturing a microelectromechanical component, and a microelectromechanical component |
| 05/31/2007 | WO2007060289A1 Method for manufacturing a microelectromechanical component, and a microelectromechanical component |
| 05/31/2007 | WO2007042336A3 Substrate-level assembly for an integrated device, manufacturing process thereof and related integrated device |
| 05/31/2007 | WO2007041302A3 Mems device and interconnects for same |
| 05/31/2007 | US20070122929 Method and zone for sealing between two microstructure substrates |
| 05/31/2007 | US20070121229 Apparatus, method and system for providing enhanced mechanical protection for thin beams |
| 05/31/2007 | US20070120273 Method for disposing a conductor structure on a substrate, and substrate comprising said conductor structure |
| 05/31/2007 | US20070120252 Nano-wire electronic device |
| 05/30/2007 | EP1789193A1 Micro-fluidic system |
| 05/30/2007 | CN1970431A Mciromechanical two-dimensional obliquity sensor silicon chip and production method |
| 05/30/2007 | CN1970430A Glass substrate optical display infra-red sensor |
| 05/30/2007 | CN1319156C Negative thermal dilation system device and conductive elastomer in mlcroelectronics seal connection |
| 05/30/2007 | CN1319139C Production of local vacuum sealing protective structure of silicon based sensor flexible piece |
| 05/24/2007 | WO2007058280A1 Electronic part sealing board, electronic part sealing board in multiple part form, electronic device using electronic part sealing board, and electronic device fabricating method |
| 05/24/2007 | WO2004077523A3 Micromachined assembly with a multi-layer cap defining cavity |
| 05/24/2007 | DE10393364B4 Lochmikrosonde unter Nutzung einer MEMS-Technik und ein Verfahren zur Herstellung derselben Hollow microprobe using an MEMS technique and a method of manufacturing the same |
| 05/24/2007 | DE102005055474A1 Beschleunigungssensor Acceleration sensor |
| 05/23/2007 | EP1787947A2 Mems Flip-Chip Packaging |
| 05/23/2007 | EP1787946A2 Thermally isolated membrane structure |
| 05/23/2007 | EP1787491A1 Silicon condenser microphone and manufacturing method |
| 05/23/2007 | EP1301344B1 Ink jet printhead having a moving nozzle with an externally arranged actuator |
| 05/23/2007 | CN1966395A Oriented arrange carbon nanotube composite material, high speed preparation method and preparation apparatus |
| 05/23/2007 | CN1966394A Touch sensor and its manufacture method |
| 05/22/2007 | US7220621 Sub-wavelength structures for reduction of reflective properties |
| 05/18/2007 | WO2007034276A3 Apparatus for downhole fluids analysis utilizing micro electro mechanical systems (mems) or other sensors |
| 05/18/2007 | WO2007022249A3 Packaged microphone with electrically coupled lid |
| 05/18/2007 | WO2007022179A3 Partially etched leadframe packages having different top and bottom topologies |
| 05/17/2007 | US20070111353 Hybrid microfluidic chip and method for manufacturing same |
| 05/17/2007 | US20070110947 Method and Apparatus for Forming a DMD Window Frame with Molded Glass |
| 05/17/2007 | US20070109081 RF MEMS switch and fabrication method thereof |
| 05/16/2007 | EP1785392A2 Miniature Package for Translation of Sensor Sense Axis |
| 05/16/2007 | CN1964915A Temperature resistant hermetic sealing formed at low temperatures for MEMS packages |
| 05/16/2007 | CN1316281C Micro-mirror element |
| 05/16/2007 | CN1315623C Nanotweezers and nanomanipulator |
| 05/10/2007 | US20070103029 Self-assembling mems devices having thermal actuation |
| 05/09/2007 | EP1782117A1 Mems mirror with amplification of mirror rotation angle |
| 05/09/2007 | EP1492449B1 Neuron signal analysis system |
| 05/09/2007 | EP1203748B1 Microdevice and its production method |
| 05/09/2007 | CN1315169C Parallel, individually addressable probes for nanolithography |
| 05/09/2007 | CN1315152C Floating entry protective apparatus and method for preventing circuit from short-circuiting |
| 05/08/2007 | US7215527 MEMS digital-to-acoustic transducer with error cancellation |
| 05/08/2007 | US7214302 Method and device for moving and placing liquid drops in a controlled manner |
| 05/03/2007 | WO2007010072A3 Method for the monolithic integration of materials of high mechanical quality with integrated circuits for mems/nems applications |
| 05/03/2007 | US20070098600 Devices and methods for biochip multiplexing |
| 05/03/2007 | US20070096296 Manufacture of mountable capped chips |
| 05/03/2007 | US20070096294 Semiconductor device and manufacturing method of the same |
| 05/03/2007 | US20070094864 RF MEMS switch and fabrication method thereof |
| 05/03/2007 | DE102004049730B4 Mikrokapillarreaktor und Verfahren zum kontrollierten Vermengen von nicht homogen mischbaren Fluiden unter Verwendung dieses Mikrokapillarreaktors Microcapillary reactor and method for controlled mixing of non-homogeneously miscible fluids using this microcapillary reactor |
| 05/02/2007 | EP1780174A1 Nano data writing and reading apparatus using cantilever structure and fabrication method thereof |
| 05/02/2007 | EP1779413A2 Mems device and interposer and method for integrating mems device and interposer |
| 05/02/2007 | EP1778582A1 Micromechanical component with a number of chambers and production method |
| 05/02/2007 | EP1642365B1 Miniature 3-dimensional package for mems sensors |
| 05/02/2007 | EP1437325B1 Micro-actuator, micro-actuator device, optical switch and optical switch array |
| 05/02/2007 | EP1356508A4 Inkjet device encapsulated at the wafer scale |
| 04/26/2007 | WO2007045204A1 Housing with a cavity for a mechanically-sensitive electronic component and method for production |
| 04/26/2007 | US20070090473 Microelectromechanical component and method for the production thereof |
| 04/26/2007 | DE102006049004A1 Sensor used as, e.g. acceleration or pressure sensor comprises semiconductor chip having sensing portion for detecting physical quantity, circuit chip, and first and second films made of resin |
| 04/25/2007 | EP1776312A1 Device comprising an encapsulated microsystem and production method thereof |
| 04/25/2007 | EP1601611B1 System and method for buried electrical feedthroughs in a glass-silicon mems process |
| 04/25/2007 | CN1953933A MEMS device with conductive path through substrate |
| 04/25/2007 | CN1312754C Manufacturing method of electronic, photoelectronic or electromechanical device, and electronic device |
| 04/24/2007 | US7208809 Semiconductor device having MEMS |
| 04/19/2007 | WO2007042336A2 Substrate-level assembly for an integrated device, manufacturing process thereof and related integrated device |
| 04/19/2007 | WO2005017954A3 Wafer-level sealed microdevice having trench isolation and methods for making the same |
| 04/18/2007 | EP1775992A1 Thermostable electret condenser microphone |
| 04/18/2007 | EP1775259A1 Wafer level package for sensor devices |
| 04/18/2007 | EP1774547A1 Microfabricated system for magnetic field generation and focusing |
| 04/18/2007 | CN1950291A Reduction of etching charge damage in manufacture of microelectromechanical devices |