| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 07/16/2008 | EP1234326B1 Integrated packaging of micromechanical sensors and associated control circuits |
| 07/16/2008 | CN101221911A Packaging micro devices |
| 07/16/2008 | CN100402850C Microfabricated elastomeric valve and pump systems |
| 07/16/2008 | CN100402412C Methods and apparatus for high-shear mixing and reacting of materials |
| 07/16/2008 | CN100402291C Ink jet print head chip |
| 07/16/2008 | CN100402290C Print head chip with discrete air and nozzle chambers for an inkjet print head |
| 07/15/2008 | USRE40436 Hermetic seal and method to create the same |
| 07/15/2008 | CA2370927C Method and apparatus for the manipulation of particles by means of dielectrophoresis |
| 07/10/2008 | DE10351608B4 Beschleunigungssensor Acceleration sensor |
| 07/10/2008 | DE102007020755A1 Mikro-Scratch-Antrieb-Aktuator mit niedriger Betriebsspannung Micro scratch drive actuator with low operating voltage |
| 07/09/2008 | CN101218503A Micromechanical sensor, sensor array and method |
| 07/09/2008 | CN101216500A Circular and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer |
| 07/09/2008 | CN101216499A Circular and multi-ring shaped axial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer |
| 07/09/2008 | CN101216498A Dual spindle differential capacitance type micromechanical accelerameter |
| 07/09/2008 | CN101216358A Grid pressure sensing chip and preparation method, pressure distributed sensor |
| 07/09/2008 | CN101216312A Circular and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro gyroscope |
| 07/09/2008 | CN101216311A Circular and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor induced rotating micro gyroscope |
| 07/09/2008 | CN101216310A Circular and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope |
| 07/09/2008 | CN101216309A Circular and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro gyroscope |
| 07/09/2008 | CN101216308A Circular and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor induced rotating micro gyroscope |
| 07/09/2008 | CN101216307A Circular and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope |
| 07/09/2008 | CN100401192C Method for fabricating a structure for a microelectromechanical system (MEMS) device |
| 07/09/2008 | CN100400411C Microactuator device and optical switching system using the same |
| 07/08/2008 | US7396698 Methods and systems for providing MEMS devices with a top cap and upper sense plate |
| 07/08/2008 | US7396478 Multiple internal seal ring micro-electro-mechanical system vacuum packaging method |
| 07/03/2008 | WO2008079381A1 Structures and methods for crystal packaging |
| 07/03/2008 | WO2008078182A2 Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore |
| 07/03/2008 | WO2008077821A2 Encapsulation module method for production and use thereof |
| 07/03/2008 | WO2007126537A3 Oscillator system having a plurality of microelectromechanical resonators and method of designing controlling or operating same |
| 07/03/2008 | US20080158519 Laminated Micromirror Package |
| 07/02/2008 | EP1706267A4 Inkjet printer system with removable cartridge |
| 07/02/2008 | EP1389307B1 Sensor arrangement, in particular micro-mechanical sensor arrangement |
| 07/02/2008 | CN101209812A Capacitance type sensing structure |
| 07/02/2008 | CN100399575C Micro machinery variable capacitor for realizing high capacity valve regulating range using curved polar plate |
| 07/02/2008 | CN100399103C Micro-mirror device with dielectrophoretic micro- emulsions |
| 07/01/2008 | US7393712 Fluidic MEMS device |
| 06/26/2008 | US20080151002 Multi-Coloured Printhead Nozzle Array With Rows Of Nozzle Assemblies |
| 06/26/2008 | DE19812583B4 Verfahren zur Herstellung eines Bauelementes A method for producing a component |
| 06/26/2008 | DE102007059977A1 System for generating micro-mechanical oscillations in micro-mechanical cantilever, has oscillator whose specific side is firmly attached to rigid support and opposite side that includes insulating layer to which cantilever is fixed |
| 06/25/2008 | EP1836123B1 Method for generation of a given internal pressure in a cavity of a semiconductor component |
| 06/25/2008 | CN101204603A Embedded MENS bioelectrode and preparation technology thereof |
| 06/25/2008 | CN100397041C Piezoresistive micro mechanical gyro with micro beam straight pull and vertical compression structure and fabricating method thereof |
| 06/19/2008 | WO2008071545A1 Protection box for a microelectromechanical system including a wiring relay |
| 06/19/2008 | DE102006061386B3 Integrierte Anordnung, ihre Verwendung und Verfahren zu ihrer Herstellung Integrated arrangement, their use and processes for their preparation |
| 06/19/2008 | DE102006059084A1 Micromechanical element for use in miniaturized sensors, particularly in safety systems of motor vehicles, includes substrate with micromechanical functional element, where shift sequence is arranged |
| 06/19/2008 | DE102006058563B3 Mikrospiegel-Aktuator mit Kapselungsmöglichkeit sowie Verfahren zur Herstellung Micromirror actuator with Kapselungsmöglichkeit and methods of making |
| 06/19/2008 | DE102004062874B4 Mikrofluidchip des Mehrfachkanaltyps und elektrokinetische Mikroleistungszelle, die einen derartigen Mikrofluidchip verwendet The microfluidic chip of the multi-channel type and electrokinetic micro power cell using such a micro fluid chip |
| 06/18/2008 | EP1931461A1 Microfluidic flow device having at least one connecting channel linking two channels and corresponding method for using same |
| 06/18/2008 | CN101202272A Sealing structure for MEMS devices and method of the same |
| 06/18/2008 | CN101201272A Micro bridge for micrometering bolometer |
| 06/17/2008 | US7388285 Hermetically sealed package for optical, electronic, opto-electronic and other devices |
| 06/12/2008 | WO2008069551A1 Micro fluidic transportation device and method for manufacturing the same |
| 06/12/2008 | WO2008021227A3 High profile contacts for microelectromechanical systems |
| 06/12/2008 | US20080136000 Micromechanical Component Having Multiple Caverns, and Manufacturing Method |
| 06/11/2008 | EP1928780A2 Mems device and interconnects for same |
| 06/11/2008 | CN100393387C Component separating device, method of producing the device, and method of separating component by using the device |
| 06/10/2008 | CA2326455C Wafer-pair having deposited layer sealed chambers |
| 06/05/2008 | WO2008066087A1 Fine structure device, method for manufacturing the fine structure device and substrate for sealing |
| 06/05/2008 | US20080130082 Mems processing |
| 06/05/2008 | DE19804748B4 Anordnung und Verfahren der Isolierung gegen mechanische Spannung bei der Befestigung von Halbleiterchips Arrangement and method of the insulation against mechanical stress at the mounting of semiconductor chips |
| 06/04/2008 | EP1927575A2 Semiconductor device carrying a micro electro mechanical system |
| 06/04/2008 | CN100392467C Method and system for projecting images on objects |
| 06/04/2008 | CN100391825C Non-close parked metal hollow ball shell ordered network structure material and its making method |
| 06/03/2008 | US7381589 Silicon condenser microphone and manufacturing method |
| 06/03/2008 | US7380905 Ink jet printhead nozzle array |
| 05/30/2008 | CA2613961A1 Microelectromechanical electric potential sensor |
| 05/30/2008 | CA2612206A1 Micromirror device with a hybrid actuator |
| 05/29/2008 | WO2008061832A2 Self-testing micromechanical pressure sensor |
| 05/29/2008 | WO2008061319A1 Micromechanical resonant arrays and methods of making |
| 05/29/2008 | DE19950538B4 Halbleiterdrucksensorvorrichtung mit Schutzelementen Semiconductor pressure sensor apparatus with protective elements |
| 05/29/2008 | DE102006057568A1 Mikrooptisches Element mit einem Substrat und Verfahren zu seiner Herstellung Micro-optical element comprising a substrate and process for its preparation |
| 05/28/2008 | EP1924523A1 Microelectromechanical device packaging with an anchored cap and its manufacture |
| 05/28/2008 | CN101189180A Thin package for a micro component |
| 05/28/2008 | CN101188203A Hermetic sealing of micro devices |
| 05/27/2008 | US7378294 Wafer-level sealed microdevice having trench isolation and methods for making the same |
| 05/22/2008 | WO2008060389A2 Sensor device package having thermally compliant die pad |
| 05/21/2008 | DE102007038465A1 Kameramodul auf Waferebene Camera module at the wafer level |
| 05/21/2008 | CN101183675A Hermetically sealed wafer level packaging for optical mems devices |
| 05/20/2008 | US7375404 Fabrication and integration of polymeric bioMEMS |
| 05/15/2008 | WO2008057911A2 Microelectronic flow sensor packaging method and system |
| 05/15/2008 | WO2008057055A1 A micromechanical structure and a method of fabricating a micromechanical structure |
| 05/15/2008 | WO2008055722A1 Micromechanical sensor with integrated chip capacitor |
| 05/15/2008 | WO2007145778A3 Mems device and method of fabricating the same |
| 05/15/2008 | DE102007051823A1 Sensor für eine physikalische Grösse und Verfahren zur Fertigung des Sensors A physical quantity sensor and method for manufacturing the sensor |
| 05/15/2008 | DE10144207B4 Anordnung mit mindestens zwei unterschiedlichen elektronischen Halbleiterschaltungen und Verwendung der Anordnung zur schnellen Datenübertragung Arrangement with at least two different electronic semiconductor circuits and use of the arrangement for fast data transfer |
| 05/14/2008 | CN101177234A Electronic device and method for manufacturing thereof |
| 05/14/2008 | CN100388474C Thermally enhanced microcircuit package and method of forming same |
| 05/14/2008 | CN100387509C Manufacturing method used for improving performance of non-refrigerating infrared focal plane array device |
| 05/08/2008 | WO2008052363A1 Electrical microvalve and method of manufacturing thereof |
| 05/08/2008 | WO2008052306A1 Three-dimensional microstructures and methods for making same |
| 05/08/2008 | WO2007149621A3 Methods and systems for object identification and for authentication |
| 05/08/2008 | US20080108169 Ultrathin module for semiconductor device and method of fabricating the same |
| 05/08/2008 | US20080106275 Sensor and Method for Measuring a Variable Affecting a Capacitive Component |
| 05/08/2008 | DE10227593B4 Strömungsschaltungs-Mikrobauelemente Flow circuit microdevices |
| 05/08/2008 | DE102007050865A1 Functional component e.g. high frequency sensor, for use in micro electromechanical system, has reaction product layer produced on boundary layer when metal layer and substrate are connected together by anodic connection |
| 05/08/2008 | DE102007002583A1 Optische Anordnung und Verfahren zum Steuern und Beeinflussen eines Lichtstrahls Optical assembly and method for controlling and influencing a light beam |
| 05/08/2008 | DE102006052468A1 Mikromechanischer Sensor mit integriertem Chipkondensator Micromechanical sensor with integrated chip capacitor |
| 05/08/2008 | CA2703801A1 Electrical microvalve and method of manufacturing thereof |
| 05/07/2008 | EP1917509A1 Sensor arrangement comprising a substrate and a housing and method for producing a sensor arrangement |
| 05/07/2008 | CN101173958A Bidirectional micro-inertia sensor and production method thereof |