| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 09/10/2008 | CN101261965A Encapsulation structure with micro hole and its making method |
| 09/10/2008 | CN101261964A Functional device package |
| 09/10/2008 | CN101261963A Miniature electronic part and its encapsulation part and making method |
| 09/10/2008 | CN100417523C Ink-jet printing head with isolated nozzle controller |
| 09/09/2008 | US7422929 Wafer-level packaging of optoelectronic devices |
| 09/04/2008 | WO2008072029A3 Systems and methods for rapidly changing the solution environment around sensors |
| 09/04/2008 | US20080210320 Microfabricated elastomeric valve and pump systems |
| 09/03/2008 | EP1487738B1 Silicon carbide microelectromechanical devices with electronic circuitry |
| 09/03/2008 | CN101256105A Monocrystaline silicon transverse miniature MEMS pirani meter and preparation method thereof |
| 09/03/2008 | CN101254892A Semiconductor device and manufacturing method thereof |
| 09/03/2008 | CN100416834C Electromechanical non-volatile random memory |
| 09/03/2008 | CN100416735C Microelectromechanical devices |
| 09/03/2008 | CN100415634C Electronic device with covering layer in cavity, and manufacture method thereof |
| 09/02/2008 | US7420724 Scanner apparatus having electromagnetic radiation devices coupled to MEMS actuators |
| 09/02/2008 | CA2370773C Actuator control in a micro electro-mechanical liquid ejection device |
| 08/28/2008 | WO2008101347A1 Mems actuators and switches |
| 08/28/2008 | DE102007008518A1 Semiconductor module for micro-electro-mechanical system, has semiconductor chip having movable unit and active main surface that is turned towards carrier, where another chip is attached at former chip, and cavity is formed between chips |
| 08/28/2008 | CA2678680A1 Mems actuators and switches |
| 08/27/2008 | EP1962344A1 Electronic device packages and methods of formation |
| 08/27/2008 | EP1961696A1 Electronic part sealing board, electronic part sealing board in multiple part form, electronic device using electronic part sealing board, and electronic device fabricating method |
| 08/27/2008 | CN101253399A Sensor arrangement comprising a substrate and a housing and method for producing a sensor arrangement |
| 08/27/2008 | CN101252122A Hermetically sealed optoelectronic mems wafer level package |
| 08/27/2008 | CN101251426A Piezoresistance structure of MOS capacitance substrate on nano beam as well as detecting method |
| 08/27/2008 | CN101249936A Packaging conformation for micro electromechanical systems and method for manufacturing same |
| 08/27/2008 | CN100413777C Micro electro-mechanical device with leakage-prevention vent |
| 08/26/2008 | US7417778 Light deflector, light deflection array, image forming apparatus, and image projection display apparatus |
| 08/26/2008 | US7416910 Pyramid socket suspension |
| 08/21/2008 | WO2008078182A3 Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore |
| 08/21/2008 | US20080199974 Method for Functionalizing Biosensor Chips |
| 08/21/2008 | US20080197749 Mems micromotor and timepiece equipped with this micromotor |
| 08/21/2008 | DE102008000128A1 Halbleitersensor und sein Herstellungsverfahren Semiconductor sensor and its manufacturing method |
| 08/21/2008 | DE10024697B4 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 08/20/2008 | CN101248002A Microelectromechanical device packaging with an anchored cap and its manufacture |
| 08/20/2008 | CN101244801A Micro-drive structure for implementing coplane and off-plane movement |
| 08/20/2008 | CN101244800A Power overlay structure and method for making the same |
| 08/20/2008 | CN100412607C Microelectromechanical system and method for fabricating the same |
| 08/20/2008 | CN100412604C Micromirror array for projection TV |
| 08/20/2008 | CN100412603C Projection TV with improved micromirror array |
| 08/20/2008 | CN100412602C Micromirror with micromirror element arrays |
| 08/14/2008 | WO2008095238A1 Electrode reactivation in a microfluidic device |
| 08/14/2008 | US20080190171 Shelled thermal structures for fluid sensing |
| 08/14/2008 | DE19680763B4 Microelectromechanical device useful for data storage applications - has cantilevered beam free to move above substrate and carrying insulated conductors is able to position tip on beam in contact with one conductor and move parallel to and perpendicular to substrate plane |
| 08/13/2008 | EP1955978A2 Hermetically sealed package for a MEMS device |
| 08/13/2008 | EP1954369A1 Fluid separation microsystem |
| 08/13/2008 | EP1417455B1 Microgyroscope with electronic alignment and tuning |
| 08/13/2008 | EP1216602B1 Mems digital-to-acoustic transducer with error cancellation |
| 08/13/2008 | CN101239698A Z-axis microelectromechanical device with improved stopper structure |
| 08/12/2008 | US7410901 Submicron device fabrication |
| 08/12/2008 | US7410816 Method for forming a chamber in an electronic device and device formed thereby |
| 08/07/2008 | US20080186605 Optical Module for Observing Event or Object |
| 08/07/2008 | US20080185043 Microfluidic Device |
| 08/07/2008 | DE19911916B4 Verfahren zur Herstellung einer Halbleitervorrichtung mit Schutzlage A process for producing a semiconductor device with protective layer |
| 08/06/2008 | EP1953816A1 Sensor device and method for manufacturing same |
| 08/06/2008 | EP1953814A1 Wafer level package structure and method for manufacturing same |
| 08/06/2008 | EP1953583A2 Micro mirror arrays and microstructures with solderable connection sites |
| 08/06/2008 | EP1951611A1 Method for manufacturing a microelectromechanical component, and a microelectromechanical component |
| 08/06/2008 | EP1951609A1 Method for manufacturing a microelectromechanical component, and a microelectromechanical component |
| 08/06/2008 | CN101234746A Apparatus and method for housing micromechanical systems |
| 08/06/2008 | CN100409064C Resonance assembly, double-shaft assembly and method for manufacturing double-shaft assembly and micro-system assembly |
| 08/06/2008 | CN100408470C Microchip with thermal stress relief means |
| 08/06/2008 | CN100408336C Thermoelastic expanding element |
| 08/06/2008 | CN100408157C Reaction method using microreactor |
| 08/05/2008 | US7408283 Micromachined ultrasonic transducer cells having compliant support structure |
| 08/05/2008 | US7407827 Semiconductor mechanical sensor |
| 08/05/2008 | US7407614 Method for forming at least one protective cap |
| 08/05/2008 | CA2524020C Pulse modulator and pulse modulation method |
| 07/31/2008 | WO2008091221A2 Micropackaging method and devices |
| 07/31/2008 | WO2008089969A2 Electronic device comprising differential sensor mems devices and drilled substrates |
| 07/31/2008 | US20080180821 Apparatus, method and system for providing enhanced mechanical protection of thin beams |
| 07/31/2008 | DE102007002725A1 Gehäuse für in mobilen Anwendungen eingesetzte mikromechanische und mikrooptische Bauelemente Housing for mobile applications used in micro-mechanical and micro-optical components |
| 07/30/2008 | CN101233619A A package and manufacturing method for a microelectronic component |
| 07/30/2008 | CN101229911A Optical-mechanical double-layer structural uncooled infrared imaging focal plane array detector |
| 07/30/2008 | CN101229910A Uncooled infrared imaging focal plane array detector |
| 07/30/2008 | CN100406374C Laser cell microoperation control method and device for metal particle |
| 07/30/2008 | CN100406373C Packaging structure of microscope element |
| 07/29/2008 | US7404332 Micromechanical component and method |
| 07/29/2008 | CA2414722C Seal for a micro electro-mechanical liquid chamber |
| 07/24/2008 | WO2008087022A1 Housing for micro-mechanical and micro-optical components used in mobile applications |
| 07/24/2008 | US20080174204 Electromechanical element, electric circuit device and production method of those |
| 07/24/2008 | DE102007002832A1 Method for manufacturing device with arrangement of micro-needles, involves preparing silicon semiconductor substrate, whose surface is applied and structured with masking layer |
| 07/24/2008 | DE102004028927B4 Beschleunigungssensor Acceleration sensor |
| 07/24/2008 | CA2675501A1 Housing for micromechanical and micro-optic components used in mobile applications |
| 07/23/2008 | EP1945561A2 Substrate-level assembly for an integrated device, manufacturing process thereof and related integrated device |
| 07/23/2008 | CN101226856A Micro-switching device and method of manufacturing the same |
| 07/23/2008 | CN101226850A Silicon micro mechanical pressure switch, preparation method and uses thereof |
| 07/23/2008 | CN101226081A Enhanced type infrared absorption plate for optical read-out heat type infrared image sensor and preparation method thereof |
| 07/22/2008 | US7402913 High density nanostructured interconnection |
| 07/22/2008 | US7402897 Vertical system integration |
| 07/22/2008 | US7402878 Packaging method for microstructure and semiconductor devices |
| 07/22/2008 | US7402849 Parallel, individually addressable probes for nanolithography |
| 07/22/2008 | US7402449 Integrated micro electro-mechanical system and manufacturing method thereof |
| 07/22/2008 | CA2358115C Electrostatic/pneumatic actuators for active surfaces |
| 07/17/2008 | WO2008086537A2 Aluminum based bonding of semiconductor wafers |
| 07/17/2008 | WO2008086530A2 Mems sensor with cap electrode |
| 07/17/2008 | WO2008085252A2 Mems device and electrical interconnects for same |
| 07/17/2008 | WO2007143623A8 Methods and systems for micro machines |
| 07/17/2008 | DE102007001518A1 Vorrichtung und Verfahren zum Häusen mikromechanischer Systeme Apparatus and method for housing micromechanical systems |
| 07/17/2008 | DE102006003718B4 Mikro-elektro-mechanisches Bauelement und Fertigungsprozess für integrierte mikro-elektro-mechanische Bauelemente Micro-electro-mechanical component and manufacturing process for integrated micro-electro-mechanical components |
| 07/16/2008 | EP1944266A1 MEMS Packaging with reduced mechanical strain |
| 07/16/2008 | EP1943186A2 Microscopic electro-mechanical systems, radio frequency devices utilizing nanocoils and spiral pitch control techniques for fabricating the same |