| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 11/18/2008 | CA2590402A1 Fiber optic mems seismic sensor with mass supported by hinged beams |
| 11/18/2008 | CA2370950C Actuator element |
| 11/13/2008 | DE102007020792A1 Self assembly microstructure e.g. micro rotary fan, has movable portion that includes photosensitive polyimide elastic joint so that movable portion is rotated and lifted up by large surface tension force is generated from joint |
| 11/12/2008 | CN101303365A Resonance type micro accelerometer |
| 11/12/2008 | CN101303363A Multipurpose micro-flow liquid comprehensive processing system |
| 11/12/2008 | CN101301992A Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device |
| 11/12/2008 | CN101301991A Micromechanical component, device for designing micromechanical component, procedures for manufacturing micromechanical component, and micro-mechanical system |
| 11/12/2008 | CN101301990A Sonic surface wave microfluid driver for chip lab and manufacturing method thereof |
| 11/12/2008 | CN101301989A Microfluid drive and mixed structure, and use method thereof |
| 11/11/2008 | US7451067 Method for analysis of cell structure, and cell structure |
| 11/11/2008 | US7449773 Microelectromechanical device packages with integral heaters |
| 11/11/2008 | US7449358 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 11/06/2008 | WO2008132028A2 Method for producing a micromechanical component having a trench structure for backside contact |
| 11/06/2008 | US20080272867 Mems device with integral packaging |
| 11/06/2008 | DE102008015709A1 Elektrische Einrichtung mit Abdeckung An electrical device with cover |
| 11/06/2008 | DE102008000261A1 Semiconductor device has cap electrical conductivity regions that function as draw-out electrical conductivity regions of cap substrate, are electrically connected to movable and fixed base semiconductor regions of base substrate |
| 11/06/2008 | DE102004021693B4 Mikromechanischer Sensor Micromechanical sensor |
| 11/05/2008 | EP1133789B1 Mechanical patterning of a device layer |
| 11/05/2008 | CN101298987A Robustness tuning fork vibrating type micromechanical gyroscope |
| 11/05/2008 | CN101298315A Preparation of nano-tube contilever beam array |
| 11/04/2008 | US7446044 Carbon nanotube switches for memory, RF communications and sensing applications, and methods of making the same |
| 10/30/2008 | US20080266636 Scanner Apparatus Having Electromagnetic Radiation Devices Coupled to MEMS Acuators |
| 10/30/2008 | DE102008020776A1 Sensorvorrichtung zur Erfassung von Änderungen einer dynamischen Grösse und gleichzeitiger Unterdrückung von Erfassungsabweichungen, die durch eine Biegeverformung eines Sensorchips verursacht werden Sensor means for detecting changes in a dynamic size and simultaneous suppression of detecting deviations caused by a bending deformation of a sensor chip |
| 10/30/2008 | DE102008012825A1 Mikromechanisches Bauelement mit verkippten Elektroden Micromechanical component with tilted electrode |
| 10/30/2008 | DE102007019031A1 Optoelectronic device, has optoelectronic module fastened to module carrier e.g. molded interconnect device, and under-filling inserted into region between optoelectronic module and carrier, and forming lens |
| 10/29/2008 | CN101297228A Projection display system including a high fill ratio silicon spatial light modulator |
| 10/29/2008 | CN101294844A Bending piezo-electricity type zinc oxide nano stick micromotor(MEMS) vibration transducer |
| 10/28/2008 | US7443002 Encapsulated microstructure and method of producing one such microstructure |
| 10/23/2008 | US20080259253 Mechanical Structure Including a Layer of Polymerised Liquid Crystal and Method of Manufacturing Such |
| 10/23/2008 | US20080259226 Mechanical Shutter with Polymerised Liquid Crystal Layer |
| 10/23/2008 | DE102007051820A1 Mikromechanisches Bauelement mit erhöhter Steifigkeit Micromechanical component with increased stiffness |
| 10/23/2008 | DE102007019033A1 Optoelectronic assembly, has carrier i.e. molded interconnect device, with opening i.e. linear hopper, in wall region to ensure coupling between component and fiber, where opening is designed such that size of opening changes between sides |
| 10/22/2008 | EP1410436B1 Parallel, individually addressable probes for nanolithography |
| 10/22/2008 | CN101290255A 0-50pa single slice silicon based SOI ultra-low micro pressure sensor and its processing method |
| 10/22/2008 | CN101289160A 0-100Pa monolithic silicon based SOI high-temperature low drift micropressure sensor and processing method thereof |
| 10/22/2008 | CN100428389C Swinging electromagnetic micro-electromechanical system relay |
| 10/22/2008 | CN100427378C Microstructure manufacture and microsystem integration |
| 10/21/2008 | US7439547 Micro electro mechanical system apparatus |
| 10/21/2008 | CA2414734C Fault detection in a micro electro-mechanical device |
| 10/16/2008 | WO2008124817A1 Mems device for producing a lemniscate pattern to counter zigzag effect |
| 10/16/2008 | WO2008122865A2 Micro-electro-mechanical system micro mirror |
| 10/16/2008 | US20080254572 Vertical system integration |
| 10/16/2008 | US20080251941 Vertical system integration |
| 10/16/2008 | DE102008012826A1 Verfahren zur Erzeugung einer mikro-mechanischen Struktur aus zweidimensionalen Elementen und mikromechanisches Bauelement Method for producing a micromechanical structure from two-dimensional elements and micromechanical component |
| 10/15/2008 | EP1979939A1 Miniaturized high conductivity thermal/electrical switch |
| 10/15/2008 | EP1979080A2 Microreactor glass diaphragm sensors |
| 10/15/2008 | CN101285847A Temperature insensitive optical fibre grating acceleration sensor |
| 10/15/2008 | CN101285846A Optical fibre grating accelerometer based on cantilever beam deflection |
| 10/15/2008 | CN101285845A Cantilever beam type optical fibre grating accelerometer |
| 10/15/2008 | CN101284642A Micromechanical device with tilted electrodes |
| 10/14/2008 | US7434305 Method of manufacturing a microphone |
| 10/09/2008 | WO2008121845A2 Micro-deployable devices and systems |
| 10/09/2008 | WO2008078182B1 Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore |
| 10/09/2008 | DE102008013116A1 Verfahren zur Erzeugung einer mikromechanischen Struktur Method for producing a micromechanical structure |
| 10/09/2008 | DE102008013098A1 Mikromechanisches Bauelement mit Temperaturstabilisierung und Verfahren zur Einstellung einer definierten Temperatur oder eines definierten Temperaturverlaufes an einem mikromechanischen Bauelement Micromechanical component with temperature stabilization and method for setting a defined temperature or a defined temperature profile on a micromechanical device |
| 10/09/2008 | DE102007015726A1 Auslenkbare Struktur, mikromechanische Struktur mit derselben und Verfahren zur Einstellung einer mikromechanischen Struktur Deflectable structure, micromechanical structure with the same and method for adjusting a micromechanical structure |
| 10/08/2008 | EP1641710B1 Micromechanical apparatus and method of forming a micromechanical device layer |
| 10/08/2008 | EP1296886B1 Method for producing a micromechanical component |
| 10/08/2008 | CN101282594A Encapsulation structure for Micro-electromechanical microphone with two-sided mounting-pasted electrode |
| 10/08/2008 | CN101281071A Double-resonance girder type micro mechanical pressure sensor |
| 10/08/2008 | CN101279712A Method for generating a micromechanical structure |
| 10/08/2008 | CN101279709A Multi-layer type encapsulation structure of minisize acoustic sensor |
| 10/08/2008 | CN101279708A Micromechanical device of increased rigidity |
| 10/08/2008 | CN101279707A Deflectable structure, micromechanical structure comprising same, and method for adjusting a micromechanical structure |
| 10/07/2008 | US7432582 Method of forming a through-substrate interconnect |
| 10/02/2008 | WO2008085252A3 Mems device and electrical interconnects for same |
| 10/02/2008 | US20080242553 Devices and methods for biochip multiplexing |
| 10/02/2008 | US20080239005 Inkjet Printhead Nozzle Assembly Having A Raised Rim To Support An Ink Meniscus |
| 10/02/2008 | US20080237826 Method for protecting encapsulated sensor structures using stack packaging |
| 10/02/2008 | US20080237591 Vertical system integration |
| 10/02/2008 | CA2627978A1 Software-definable radio transceiver with mems filters |
| 10/01/2008 | CN101276807A Semiconductor device and method of manufacturing the same |
| 10/01/2008 | CN101276707A MEMS device and portable communication terminal with said MEMS device |
| 10/01/2008 | CN101276691A Apparatus and method for drive controlling micro machine device |
| 10/01/2008 | CN101276053A Micro oscillating device and micro oscillating device array |
| 10/01/2008 | CN100423310C Micromechanical thermalelectric-stack infrared detector compatible with co-complementive metal oxide semiconductor technology and preparing method |
| 09/30/2008 | US7429495 System and method of fabricating micro cavities |
| 09/28/2008 | CA2625721A1 Sorption micro-array |
| 09/25/2008 | WO2008113166A1 Mems actuators and switches |
| 09/25/2008 | WO2008113112A1 Stop structure for microfluidic device |
| 09/25/2008 | CA2679219A1 Mems actuators and switches |
| 09/24/2008 | CN101272982A MEMS device and interconnects for same |
| 09/24/2008 | CN101272636A Capacitor type microphone chip |
| 09/24/2008 | CN101271164A Guiding type wind direction and wind velocity sensor |
| 09/24/2008 | CN101271124A L-beam piezoresistance type micro-accelerometer and production method thereof |
| 09/24/2008 | CN101271029A Silicon piezoresistance type pressure transducer encapsulation structure based on substrates |
| 09/24/2008 | CN101271028A Silicon pressure transducer chip and method based on silicon-silicon linking and silicon-on-insulating layer |
| 09/23/2008 | CA2393049C Component for a four color printhead module |
| 09/18/2008 | WO2008091221A3 Micropackaging method and devices |
| 09/18/2008 | DE10218325B4 Verfahren zum Betreiben einer Chip-Anordnung Method for operating a chip arrangement |
| 09/17/2008 | EP1968884A1 Micromechanical component having a cap with a closure |
| 09/17/2008 | EP1476394B1 Thin film encapsulation of mems devices |
| 09/17/2008 | CN101267192A Static driven serial RF microwave filter |
| 09/17/2008 | CN101266176A Si-Si bonding isolator upper silicon high-temperature pressure sensor chip and manufacture method |
| 09/17/2008 | CN100420021C Single slice integration temperature, humidity, pressure sensor chip based on polymer material |
| 09/12/2008 | WO2008106782A1 Serial siphon valves for fluidic or microfluidic devices |
| 09/12/2008 | CA2679395A1 Serial siphon valves for fluidic or microfluidic devices |
| 09/11/2008 | US20080218834 Method and apparatus for providing a light absorbing mask in an interferometric modulator display |
| 09/11/2008 | DE102007020756A1 Layout-Design für Mikro-Scratch-Antrieb-Aktuatoren Layout design for micro-scratch drive actuators |
| 09/10/2008 | CN101261977A Electronic device packages and methods of formation |