| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 01/08/2009 | WO2009003542A2 Method for the production of a component, and component |
| 01/08/2009 | WO2008012846A8 Planar microelectromechanical device having a stopper structure for out-of-plane movements |
| 01/08/2009 | CA2692595A1 Low resistance through-wafer via |
| 01/07/2009 | EP2011762A2 Semiconductor device with a sensor connected to an external element |
| 01/07/2009 | EP2010451A2 Microstructured tool and method of making same using laser ablation |
| 01/07/2009 | EP2010450A2 Microfabricated devices and method for fabricating microfabricated devices |
| 01/07/2009 | EP2010449A1 Micromechanical component with wafer through-plating and corresponding production method |
| 01/07/2009 | EP1356511B1 Use of protective caps as masks at a wafer scale |
| 01/07/2009 | CN201178492Y Electric microphone apparatus of micro-computer |
| 01/07/2009 | CN101339202A Semiconductor device and manufacturing method of the same |
| 01/07/2009 | CN101337653A Automatic thermostat heating device |
| 01/07/2009 | CN101337652A Packaging of contact surface of sensor element and packaging method thereof |
| 01/07/2009 | CN100449815C 半导体压力传感器 The semiconductor pressure sensor |
| 01/07/2009 | CN100449684C Barrier layers for microelectromechanical systems |
| 01/06/2009 | CA2400025C Method for attaching a micromechanical device to a manifold, and fluid control system produced thereby |
| 01/02/2009 | DE102007030347A1 Integrierter Rotor Integrated rotor |
| 01/02/2009 | DE102007030121A1 Verfahren zur Herstellung eines Bauteils und Bauteil A method for producing a component and component |
| 01/02/2009 | DE102007029911A1 Akustisches Sensorelement Acoustic sensor element |
| 01/01/2009 | US20090000678 Microcapillary networks |
| 12/31/2008 | WO2009002523A2 Micro-electro-mechanical systems and photonic interconnects employing the same |
| 12/31/2008 | WO2009002272A1 A method of making a secondary imprint on an imprinted polymer |
| 12/31/2008 | WO2009002271A1 A wafer arrangement and a method for manufacturing the wafer arrangement |
| 12/31/2008 | WO2008089969A3 Electronic device comprising differential sensor mems devices and drilled substrates |
| 12/31/2008 | EP2008966A2 MEMS device formed inside hermetic chamber having getter film |
| 12/31/2008 | CN101332971A Passing type microwave power detector based on microelectronic mechanical cantilever beam and manufacturing method |
| 12/31/2008 | CN100448046C Micromachined electromechanical device |
| 12/30/2008 | CA2492865C Microfluidic devices, methods, and systems |
| 12/24/2008 | WO2008157480A1 Microfluidic device and method of manufacturing the microfluidic device |
| 12/24/2008 | WO2008127438A3 Parallel flow control (pfc) approach for active control, characterization, and manipulation of nanofluidics |
| 12/24/2008 | WO2008060389A3 Sensor device package having thermally compliant die pad |
| 12/24/2008 | EP2006248A2 Die mounting stress isolator |
| 12/24/2008 | EP2004543A2 Mems device package with thermally compliant insert |
| 12/24/2008 | EP2004542A1 Micromechanical housing comprising at least two cavities having different internal pressure and/or different gas compositions and method for the production thereof |
| 12/24/2008 | EP1494866B1 Discrete air and nozzle chambers in a printhead chip for an inkjet printhead |
| 12/24/2008 | DE102007028292A1 Bauelement mit spannungsreduzierter Befestigung Component with reduced voltage mounting |
| 12/24/2008 | DE102007028288A1 MEMS Bauelement und Verfahren zur Herstellung MEMS device and methods for preparing |
| 12/24/2008 | CN201169537Y Micro-electromechanical microphone encapsulation structure |
| 12/24/2008 | CN101331080A Substrate-level assembly for an integrated device, manufacturing process thereof and related integrated device |
| 12/24/2008 | CN101331079A Micromechanical component having a cap with a closure |
| 12/24/2008 | CN101329446A MEMS device with an angular vertical comb actuator |
| 12/24/2008 | CN101329361A Minitype silicon accelerometer having functions of measuring pressure intensity and temperature variation and its machining method |
| 12/21/2008 | CA2624400A1 Mems device with an angular vertical comb actuator |
| 12/18/2008 | WO2008154652A2 Mems actuator with discretely controlled multiple motions |
| 12/18/2008 | WO2008151683A1 Operation method and switch arrangement for a capacitive micromechanical sensor with analog reset |
| 12/18/2008 | WO2008151675A1 Premold housing having integrated vibration damping |
| 12/18/2008 | WO2008086530A3 Mems sensor with cap electrode |
| 12/18/2008 | US20080309191 Mems moving platform with lateral zipping actuators |
| 12/18/2008 | US20080308920 System and method of fabricating micro cavities |
| 12/18/2008 | DE102008027999A1 Halbleitersensor Semiconductor sensor |
| 12/18/2008 | DE102007027652A1 Betriebsverfahren und Schaltungsanordnung für einen kapazitiven mikromechanischen Sensor mit analoger Rückstellung Operating Method and circuit arrangement for a capacitive micromechanical sensor with analogue provision |
| 12/18/2008 | DE102007027428A1 Bauelement mit einem Schwingungselement Component having a vibration member |
| 12/17/2008 | EP2002383A1 Semiconductor device |
| 12/17/2008 | EP1127375B1 Bumped contacts for metal-to-semiconductor connections, and methods for fabricating same |
| 12/17/2008 | CN101324473A Piezoresistance sensor chip and machining process thereof |
| 12/17/2008 | CN101324434A High performance micro-mechanical gyroscope of resonance silicon |
| 12/17/2008 | CN101323428A Patterned contact sheet to protect critical surfaces in manufacturing processes |
| 12/17/2008 | CN101323426A Minisize inertia device structure in overweight mass block surface and manufacturing method thereof |
| 12/17/2008 | CN100444422C Electronic component, electronic component module and mfg. method for said electronic component |
| 12/17/2008 | CN100443397C Microcooling observing and controlling system and machining method thereof |
| 12/16/2008 | US7466022 Wafer-level seal for non-silicon-based devices |
| 12/16/2008 | US7466000 Semiconductor device having multiple substrates |
| 12/16/2008 | US7465977 Method for producing a packaged integrated circuit |
| 12/11/2008 | DE102008025691A1 Piezoelektrischer dünner Film, piezoelektrisches Material und Herstellungsverfahren für piezoelektrischen dünnen Film und piezoelektrisches Material, und piezoelektrischer Resonator, Schalterelement und physikalischer Fühler, die piezoelektrischen dünnen Film verwenden A piezoelectric thin film piezoelectric material and manufacturing method of piezoelectric thin film and piezoelectric material and piezoelectric resonator element and switch physical sensors that use piezoelectric thin film |
| 12/11/2008 | DE102008007682A1 Modul mit einem Mikro-Elektromechanischen Mikrofon Module with a micro-electro-mechanical microphone |
| 12/10/2008 | CN101320081A Micro electro-mechanical system magnetic field sensor and measuring method |
| 12/09/2008 | US7462932 Manufacture of mountable capped chips |
| 12/09/2008 | US7462919 Microelectromechanical component and method for the production thereof |
| 12/09/2008 | CA2438955C Method and device for handling liquid particulates |
| 12/04/2008 | WO2008145553A2 Micromechanical component having a thin layer cap |
| 12/04/2008 | WO2008145445A1 Hot film-type air flow meter and production method thereof |
| 12/04/2008 | DE10353139B4 Stapelbares modulares Gehäusesystem und ein Verfahren zu dessen Herstellung A stackable modular housing system and a method for its preparation |
| 12/04/2008 | DE102007052009B3 Safety system is based on optical identification of highly specific, spatially appearing microstructures in substrate by micro-optical enlargement system integrated into substrate |
| 12/03/2008 | CN101316462A Packaging body and packaging component for microphone of micro electro-mechanical systems |
| 12/03/2008 | CN101316461A Packaging body and packaging component for microphone of micro electro-mechanical systems |
| 12/03/2008 | CN100441068C Latching micro magnetic relay packages and methods of packaging |
| 11/27/2008 | WO2008143959A1 Pressure manifold to equalize pressure in integration pcr-ce microfluidic devices |
| 11/27/2008 | WO2008121845A3 Micro-deployable devices and systems |
| 11/27/2008 | WO2008078182A8 Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore |
| 11/26/2008 | CN101312904A Method for manufacturing a microelectromechanical component, and a microelectromechanical component |
| 11/26/2008 | CN101312903A Method for manufacturing a microelectromechanical component, and a microelectromechanical component |
| 11/26/2008 | CN100436306C Touch sensor and its manufacture method |
| 11/25/2008 | US7456713 RF MEMS switch and fabrication method thereof |
| 11/25/2008 | US7456497 Electronic devices and its production methods |
| 11/20/2008 | US20080284611 Vertical system integration |
| 11/20/2008 | DE102007022959A1 Semiconductor device manufacturing method, involves coating semiconductor chip with casting compound e.g. thermoplastic material, forming through hole in casting compound, and depositing electric conductive materials in through hole |
| 11/20/2008 | DE102007021920A1 Mikromechanisches Bauelement, mikromechanisches System, Vorrichtung zum Einstellen einer Empfindlichkeit eines mikromechanischen Bauelements, Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component, micro-mechanical system, means for adjusting a sensitivity of a micromechanical component, method for producing a micromechanical component |
| 11/19/2008 | EP1992589A2 Packaging of MEMS microphone |
| 11/19/2008 | EP1992588A2 Packaging of MEMS microphone |
| 11/19/2008 | EP1991879A1 Device and method for measuring electrical power |
| 11/19/2008 | CN101309853A Apparatus for downhole fluids analysis utilizing micro electro mechanical systems (mems) or other sensors |
| 11/19/2008 | CN101308803A 半导体器件 Semiconductor devices |
| 11/19/2008 | CN101308249A Oscillator device, optical deflector and driving signal generating method |
| 11/19/2008 | CN101308248A Oscillator device, optical deflector and image forming apparatus using the optical deflector |
| 11/19/2008 | CN101308051A Three-dimensional micro- force silicon micro- sensor |
| 11/19/2008 | CN101307481A Multifunctional dielectrophoresis operated micro-electrode on-chip system and its manufacture method |
| 11/19/2008 | CN101306794A Nanometer micro-electrode and making method |
| 11/19/2008 | CN101306793A Micro-actuating fluid supply machine |
| 11/19/2008 | CN101306792A Micro-actuating fluid supply machine, micro-pump structure and ink jet head structure using the same |
| 11/19/2008 | CN100435408C Laminated filter based on MEMS technology |
| 11/18/2008 | US7453269 Magnetic MEMS sensor device |