| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 05/12/2009 | US7531897 Process for sealing and connecting parts of electromechanical, fluid and optical microsystems and device obtained thereby |
| 05/12/2009 | US7531229 Microstructured component and method for its manufacture |
| 05/12/2009 | CA2463919C System architecture of optical switching fabric |
| 05/07/2009 | WO2009057990A2 Capacitive area-changed mems gyroscope with adjustable resonance frequencies |
| 05/07/2009 | WO2009056420A2 Micromechanical system |
| 05/07/2009 | WO2009039640A9 A system, apparatus and method for applying mechanical force to a material |
| 05/07/2009 | US20090117664 Liquid sending method of liquid in substrate channel and liquid sending apparatus |
| 05/07/2009 | DE102007052663A1 Mikromechanisches Bauelement, Kurzprozess zur Herstellung von MEMS-Bauelementen Micromechanical component, short process for the manufacture of MEMS devices |
| 05/07/2009 | DE102007052367A1 Mikromechanisches System Micromechanical System |
| 05/07/2009 | DE102007051871A1 Mikromechanisches Bauelement und Verfahren zum Betrieb eines mikromechanischen Bauelements Micro-mechanical device and method for operating a micromechanical component |
| 05/06/2009 | CN101426163A Vibration sensor and method for manufacturing the same |
| 05/06/2009 | CN100485377C Glass-chip for flowing minisize electrolyzer and manufacturing method thereof |
| 05/05/2009 | US7528472 Chip package mechanism |
| 04/30/2009 | DE102007051487A1 Düsen-, Filter- oder/und Positionierelement Nozzle, filter or / and positioning |
| 04/30/2009 | CA2641190A1 System and method for avoiding contact stiction in microelectromechanical system based switch |
| 04/29/2009 | EP2053017A2 Electrical connection through a substrate to a microelectromechanical devise |
| 04/29/2009 | EP1875224B1 Method for preparing monolithic separation and reaction media in a separation or reaction channel |
| 04/29/2009 | CN101417783A Micromechanical device and method of manufacturing micromechanical device |
| 04/29/2009 | CN100483829C Stack silicon-base miniature fuel celles and manufacturing method |
| 04/29/2009 | CN100483740C MOS transistor with deformable gate |
| 04/29/2009 | CN100483255C Infrared light source based on microelectronic mechanical system technique and its preparing method |
| 04/24/2009 | CA2641081A1 Electrical connection through a substrate to a microelectromechanical device |
| 04/23/2009 | WO2009052201A1 Electret power generator |
| 04/23/2009 | WO2007021818A3 Flow reactor method and apparatus |
| 04/23/2009 | WO2005036698A3 Microelectromechanical system package with environmental and interference shield |
| 04/23/2009 | DE102007050002A1 Mikromechanisches Sensor- oder Aktorbauelement und Verfahren zur Herstellung von mikromechanischen Sensor- oder Aktorbauelementen Micromechanical sensor or actuator device and method for producing micromechanical sensor or actuator components |
| 04/22/2009 | CN201226007Y Encapsulation structure for acceleration inductor |
| 04/22/2009 | CN101415139A Encapsulation structure for micro electromechanical system transducer |
| 04/22/2009 | CN101415138A Encapsulation structure for MEMS transducer |
| 04/22/2009 | CN101414701A Microelectron mechanical socle beam type microwave power coupler and preparation method thereof |
| 04/22/2009 | CN101414058A Device on a transparent substrate and micro mechanical-electric system device |
| 04/22/2009 | CN101412493A Micromechanical sensor- or actuator component and method for the production of micromechanical sensor- or actuator components |
| 04/22/2009 | CN100480047C Ink-jetting printing head with nozzle assembly array |
| 04/16/2009 | WO2009048952A1 Liquid-gap electrostatic hydraulic micro actuators |
| 04/16/2009 | WO2009018304A3 Semiconductor device |
| 04/16/2009 | WO2005050257A3 High temperature imaging device |
| 04/16/2009 | DE102008046860A1 Mikrohergestellter akustischer Transducer mit einer Mehrschichtelektrode The fabricated micro-acoustic transducer with a multilayer electrode |
| 04/16/2009 | DE102007048604A1 Verbund aus mindestens zwei Halbleitersubstraten sowie Herstellungsverfahren Composite of at least two semiconductor substrates and manufacturing method |
| 04/16/2009 | DE102007047010A1 Mikromechanisches Bauelement zur Modulation von elektromagnetischer Strahlung Micro-mechanical device for modulating electromagnetic radiation |
| 04/15/2009 | EP2048109A2 Electronic device, electronic module, and methods for manufacturing the same |
| 04/15/2009 | EP2047596A2 Frame and method of manufacturing assembly |
| 04/15/2009 | CN101410717A Device and method for measuring electrical power |
| 04/15/2009 | CN101410324A Microstructured tool and method of making same using laser ablation |
| 04/15/2009 | CN101409266A Package structure |
| 04/15/2009 | CN101408595A Torsional pendulum type minitype magnetic sensor |
| 04/15/2009 | CN100479195C Semiconductor device having actuator |
| 04/15/2009 | CN100479127C Micro-mechanical wafer chip test detecting card and its production |
| 04/15/2009 | CA2640827A1 Sealed wafer packaging of microelectromechanical systems |
| 04/14/2009 | US7517712 Wafer-level hermetic micro-device packages |
| 04/09/2009 | WO2008115716A3 Mems cavity-coating layers and methods |
| 04/09/2009 | US20090090422 Method for Treating Drops in a Microfluid Circuit |
| 04/09/2009 | DE10310161B4 Monolithisch integrierte Schaltkreis-Anordnung The monolithic integrated circuit arrangement |
| 04/08/2009 | EP2045005A2 Devices and methods for carrying out chemical reactions using photogenerated reagents |
| 04/08/2009 | EP2043864A1 Mems bubble generator |
| 04/08/2009 | CN101403763A Cantilever beam type accelerometer based on plane annular microcavity |
| 04/08/2009 | CN101403615A Direct frequency-output vibration gyroscope structure |
| 04/08/2009 | CN101402445A Method for manufacturing micro-structure with self-alignment and manufactured infrared thermopile detector |
| 04/08/2009 | CN100476431C Planar microelectromagnetic unit array chip capable of being gated separately |
| 04/07/2009 | US7514283 Method of fabricating electromechanical device having a controlled atmosphere |
| 04/07/2009 | US7514045 Covered microchamber structures |
| 04/07/2009 | US7514012 Pre-oxidization of deformable elements of microstructures |
| 04/03/2009 | CA2639584A1 System with circuitry for suppressing arc formation in micro-electromechanical system based switch |
| 04/02/2009 | WO2009039640A1 A system, apparatus and method for applying mechanical force to a material |
| 04/02/2009 | US20090084445 Nanojet Spouting Method and Nanojet Mechanism |
| 04/02/2009 | DE102007046498A1 Mikroelektromechanisches Bauelement und Herstellungsverfahren The micro-electro-mechanical device and manufacturing method |
| 04/02/2009 | DE102007046305A1 Mikrofluidisches Bauelement sowie Herstellungsverfahren Microfluidic device and manufacturing method |
| 04/02/2009 | CA2700946A1 A system, apparatus and method for applying mechanical force to a material |
| 04/01/2009 | EP2041022A1 Integrated circuit distributed over at least two non-parallel planes and its method of production |
| 04/01/2009 | EP2041021A1 Method for producing a sensor element and sensor element |
| 04/01/2009 | CN101397121A Silicon nanowire pressure sensor, cantilever beam, production method and pressure measurement method thereof |
| 04/01/2009 | CN101397120A Micromachined electromechanical device |
| 04/01/2009 | CN100474519C Three beam MEMS device and correlation method |
| 03/26/2009 | WO2009038686A2 Hermetic wafer level cavity package |
| 03/26/2009 | WO2009038501A1 Systems, device and object comprising electroactive polymer material, methods and uses relating to operation and provision thereof |
| 03/26/2009 | US20090079017 Semiconductor device having multiple substrates |
| 03/26/2009 | US20090078326 Light-driven microfluidic devices and amplification of stimulus-induced wetting |
| 03/25/2009 | EP2038208A1 Nanodevice structure and fabricating method thereof |
| 03/25/2009 | EP1412550B1 Support with getter-material for micromechanical device |
| 03/25/2009 | CN101392403A Method for preparing gold electrode pair |
| 03/25/2009 | CN101391742A 半导体装置 Semiconductor device |
| 03/25/2009 | CN100472216C Microelectromechanical microwave powersensor with two balanced thermopiles and its prepn process |
| 03/19/2009 | WO2009003542A3 Method for the production of a component, and component |
| 03/19/2009 | WO2008130493A3 Connecting microsized devices using ablative films |
| 03/19/2009 | WO2008006976A8 Integrated circuit distributed over at least two non-parallel planes and its method of production |
| 03/19/2009 | US20090072380 Microelectromechanical Device Packages with Integral Heaters |
| 03/19/2009 | DE102007034072B3 Vorrichtung und Verfahren zum Ladungstransfer Apparatus and method for charge transfer |
| 03/18/2009 | CN101388364A Electric isolation region forming method adopting low temperature process, single chip integration method and chip |
| 03/18/2009 | CN101387664A Microelectronic machinery microwave frequency detector and method for making same |
| 03/18/2009 | CN101387496A Micro-displacement sensor based on ring micro-chamber and cantilever beam of integration plane |
| 03/18/2009 | CN101386402A Infrared detector and manufacturing method thereof |
| 03/18/2009 | CN101386401A Monitoring structure of infrared detector pixel stress and monitoring method |
| 03/18/2009 | CN101386400A Capacitance single mass three-shaft acceleration transducer and preparation method |
| 03/18/2009 | CN100470778C Device comprising multi-layer thin film having excellent adhesive strength and method for fabricating the same |
| 03/18/2009 | CA2639574A1 Method and apparatus for a hearing assistance device using mems sensors |
| 03/17/2009 | US7503206 Fluid delivery for scanning probe microscopy |
| 03/12/2009 | WO2009002523A3 Micro-electro-mechanical systems and photonic interconnects employing the same |
| 03/12/2009 | US20090068795 Production methods of electronic devices |
| 03/12/2009 | US20090068781 Method of manufacture for microelectromechanical devices |
| 03/12/2009 | US20090065894 Electronic circuit device having silicon substrate |
| 03/12/2009 | US20090064785 Integrated micro electro-mechanical system and manufacturing method thereof |