| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 03/11/2009 | CN101382564A Micromachined sensors |
| 03/11/2009 | CN101381069A Condenser microphone using the ceramic package whose inside is encompassed by metal or conductive materials |
| 03/11/2009 | CN100468006C Resonant silicon micro mechanical sensor with auxiliary sensitive unit |
| 03/11/2009 | CN100467116C Microdevice |
| 03/10/2009 | US7501101 Especially a water vaporizer, headers connected to flow microchannels by orifices, wherein the ratio of the cross-sectional area of each orifice to the cross-sectional area of the flow microchannels connected to said orifices is between 0.0005 and 0.1. |
| 03/05/2009 | WO2008154652A3 Mems actuator with discretely controlled multiple motions |
| 03/05/2009 | US20090057792 Charge biased mem resonator |
| 03/05/2009 | US20090057147 Devices and methods for biochip multiplexing |
| 03/05/2009 | DE102008039706A1 Halbleiterbauelement Semiconductor device |
| 03/05/2009 | DE102007041920A1 Piezoelectric micro energy transducer for electricity or power supply of tire pressure control system for monitoring or control of physical dimension of tire lane system, has two electrode structures and piezoelectric structure |
| 03/05/2009 | DE102007041918A1 Piezoelektrischer Energiewandler mit Doppelmembran Piezoelectric energy converter with double membrane |
| 03/04/2009 | EP2029473A2 Method for packaging an optical mems device |
| 03/04/2009 | CN101379869A Shield case and mems microphone having the same |
| 03/04/2009 | CN100465786C An optical micro-electromechanical component and a manufacturing method thereof |
| 03/04/2009 | CN100465088C A Phi-shaped resonant micromechanical silicon pressure sensor |
| 02/26/2009 | WO2009025435A1 Apparatus for preventing stiction of mems microstructure |
| 02/26/2009 | WO2009024764A2 Mems package |
| 02/26/2009 | WO2009009803A3 Integrated motion processing unit (mpu) with mems inertial sensing and embedded digital electronics |
| 02/26/2009 | WO2009003958A3 Corrosion-resistant mems component, and method for the production thereof |
| 02/26/2009 | US20090049911 Integrated micro electro-mechanical system and manufacturing method thereof |
| 02/25/2009 | CN101373156A Sub- and micro- Newton level force measuring system |
| 02/25/2009 | CN101372310A Nano-scale localization platform based on bulk silicon process and method for processing vertical sidewall surface piezoresistance thereof |
| 02/25/2009 | CN100464383C T-shaped beam parallel plate micromechanical variable capacitor and manufacturing process thereof |
| 02/24/2009 | US7495882 Electronic components comprising adjustable-capacitance micro-electro-mechanical capacitors |
| 02/24/2009 | US7494555 Microfabricated elastomeric valve and pump systems |
| 02/24/2009 | CA2404735C A device for dispensing accurately-controlled small doses of liquid |
| 02/19/2009 | US20090044875 Microfluidic system |
| 02/19/2009 | DE102007035633A1 Micromechanical structure e.g. electrostatic drive, manufacturing method, involves using structures etched in silicon substrate as negative region, removing partial regions of substrate and opening galvanically produced metal structures |
| 02/18/2009 | EP1335878B1 Microstructure component |
| 02/18/2009 | CN201195694Y Micro-electronmechanical microphone packaging system |
| 02/18/2009 | CN101368826A Vibration isolation frame work decoupled silicon micro-gyroscope and preparation thereof |
| 02/18/2009 | CN101368825A Angle vibration silicon micro-gyroscope and preparation thereof |
| 02/17/2009 | US7492019 Micromachined assembly with a multi-layer cap defining a cavity |
| 02/12/2009 | WO2009020801A2 Mems device and interconnects for same |
| 02/12/2009 | WO2009020435A1 Integrated microfluidic device for gene synthesis |
| 02/12/2009 | WO2008145553A3 Micromechanical component having a thin layer cap |
| 02/12/2009 | US20090038699 Multistage-mixing microdevice |
| 02/12/2009 | DE102007037555A1 Mikromechanisches Bauelement und Verfahren zur Schwingungsanregung eines Schwingungselements eines mikromechanischen Bauelements Micro-mechanical device and method for vibration excitation of a vibration element of a micromechanical component |
| 02/11/2009 | EP2022752A2 MEMS device and interconnects for same |
| 02/11/2009 | EP2022633A2 Sensor device and printing machine with a sensor device |
| 02/11/2009 | EP1494868B1 Pusher actuation in a printhead chip for an inkjet printhead |
| 02/11/2009 | CN101363731A Rock quartz micro mechanical gyroscope based on shear stress detection and method for making same |
| 02/11/2009 | CN101362585A Semiconductor device, lead frame, and microphone package therefor |
| 02/11/2009 | CN100461448C Wafer-level seal for non-silicon-based devices |
| 02/11/2009 | CN100460933C Mechanical structure including a layer of polymerised liquid crystal and manufacturing method thereof |
| 02/11/2009 | CN100460028C Miniature needle array for medicine transmission and making process thereof |
| 02/10/2009 | US7489837 Optical microelectromechantical structure |
| 02/07/2009 | CA2638477A1 Integrated electrical cross-talk walls for electrostatic mems |
| 02/05/2009 | WO2009018304A2 Semiconductor device |
| 02/05/2009 | US20090032924 Hermetically sealed package with window |
| 02/05/2009 | US20090032124 Microfluidic Device Including Displaceable Material Trap, and System |
| 02/05/2009 | DE102007037375A1 Verfahren zum Ausbilden einer Struktur auf einem Substrat und ein Bauelement A method of forming a structure on a substrate and a component |
| 02/04/2009 | EP2019811A1 Micro component provided with a cavity bounded by a cap with improved mechanical strength |
| 02/04/2009 | EP2019810A1 Chip housing with reduced coupled-in vibration |
| 02/04/2009 | CN101360354A Electronic component, fabrication method for the same and electronic device having the same |
| 02/04/2009 | CN101359645A Semiconductor device, premolding packaging structure and manufacture method |
| 02/04/2009 | CN100459116C Electronic device and method of manufacturing same |
| 02/04/2009 | CN100459031C Silica micro-mechanical two-dimensional obliquity sensor silicon chip and production method |
| 02/03/2009 | US7485454 Microreactor |
| 02/03/2009 | CA2475943C Locality information retrieval system |
| 01/29/2009 | WO2009014118A1 Mems sensor, and mems sensor manufacturing method |
| 01/28/2009 | EP2018347A1 Piezoelectric micro-system for the active vibratory insulation of vibration sensitive components |
| 01/28/2009 | CN101355076A Integrated circuit having a semiconductor substrate with a barrier layer |
| 01/28/2009 | CN101354404A Metal-silicon compound cantilever beam type microelectronic mechanical system probe card and manufacture method thereof |
| 01/28/2009 | CN101353153A MEMS sensor and manufacturing method thereof |
| 01/28/2009 | CN101353152A MEMS sensor and manufacturing method thereof |
| 01/28/2009 | CN101353151A MEMS sensor and silicon microphone |
| 01/27/2009 | US7482196 Method of manufacturing a semiconductor device having MEMS |
| 01/27/2009 | US7482194 Electronic component having micro-electrical mechanical system |
| 01/22/2009 | WO2009011409A1 Oscillator device and optical deflector using the same |
| 01/22/2009 | DE102008025599A1 Gehäuste aktive Mikrostrukturen mit Direktkontaktierung zu einem Substrat Packaged active microstructures with direct contacting a substrate |
| 01/22/2009 | DE102007034701A1 Halbleitersubstrat und Verfahren zum Herstellen eines Halbleiterbauelements Semiconductor substrate and method for fabricating a semiconductor device |
| 01/22/2009 | DE102007033002A1 Mikromechanisches Bauelement und Verfahren zum Betrieb eines mikromechanischen Bauelements Micro-mechanical device and method for operating a micromechanical component |
| 01/22/2009 | DE102007033001A1 Mikromechanisches Bauelement und Verfahren zum Betrieb eines mikromechanischen Bauelements Micro-mechanical device and method for operating a micromechanical component |
| 01/22/2009 | DE102007033000A1 Mikromechanisches Bauteil mit einem Positionserkennungsbauteil zur Positionsbestimmung und Amplitudenbestimmung eines schwingfähigen Elements Micromechanical component with a position-detecting device for determining the position and amplitude determination of a vibratable element |
| 01/21/2009 | EP2017628A1 Physical sensor and method of manufacturing |
| 01/21/2009 | EP2016022A2 Methods and systems for object identification and for authentication |
| 01/21/2009 | CN201184818Y Enhanced type infrared absorption board for optical readout thermal type infrared image sensor |
| 01/21/2009 | CN101351399A Electronic part sealing board, electronic part sealing board in multiple part form, electronic device using electronic part sealing board, and electronic device fabricating method |
| 01/21/2009 | CN101349560A Horizontal attitude sensitive chip and manufacturing method thereof, horizontal attitude sensor |
| 01/21/2009 | CN101348233A Microstructure resonant beam pressure sensor |
| 01/21/2009 | CN101348232A Bubble type micropump and indirect type bubble generating apparatus thereof |
| 01/21/2009 | CN100454535C Method and system for hermetically sealing packages for optics |
| 01/21/2009 | CN100453443C Glass substrate optical display infra-red sensor |
| 01/21/2009 | CN100453442C Micromechanical or microoptoelectronic devices with deposit of getter material and integrated heater, and support for the production thereof |
| 01/15/2009 | WO2009009803A2 Integrated motion processing unit (mpu) with mems inertial sensing and embedded digital electronics |
| 01/15/2009 | US20090014820 Semiconductor mechanical sensor |
| 01/15/2009 | DE102008031096A1 Befestigungselement für ein Halbleiter-Sensorbauelement Fastening element for a semiconductor sensor device |
| 01/15/2009 | DE102008021175A1 Resonator, Oszillator und Kommunikationsvorrichtung Resonator, oscillator, and communication device |
| 01/14/2009 | EP2015358A2 Non-volatile SRAM memory cell with mobile-gate transistors and piezoelectric activation |
| 01/14/2009 | EP2014611A2 Suspended-gate MOS transistor with non-volatile operation by piezoelectric activation |
| 01/14/2009 | EP1186002A4 Ic-compatible parylene mems technology and its application in integrated sensors |
| 01/14/2009 | CN101344447A Micro-electromechanical pressure transducer |
| 01/14/2009 | CN101344413A Flat diaphragm type gas flow sensor and method of producing the same |
| 01/14/2009 | CN100452350C Manufacturing method for non-refrigeration infrared focal plane array based on silicon substrate without sacrifice layer |
| 01/13/2009 | US7476961 Method and apparatus for forming a DMD window frame with molded glass |
| 01/13/2009 | US7476327 Method of manufacture for microelectromechanical devices |
| 01/08/2009 | WO2009005462A1 Low resistance through-wafer via |
| 01/08/2009 | WO2009005157A1 Oscillator device and method of manufacturing the same |
| 01/08/2009 | WO2009003958A2 Corrosion-resistant mems component, and method for the production thereof |