| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 07/29/2009 | CN101492149A Electrical device |
| 07/29/2009 | CN101492148A Microphone package, lead frame, mold substrate, and mounting structure therefor |
| 07/29/2009 | CN100520411C Semiconductor acceleration sensor device and method for manufacturing the same |
| 07/29/2009 | CN100520299C Micro-electro-mechanical-system devices, speed-reducing blocks, method of reducing impact degree and gyroscope |
| 07/28/2009 | US7566957 Support device with discrete getter material microelectronic devices |
| 07/23/2009 | WO2009066979A3 Mems based probe card and a method of testing semiconductor ion sensor using the same |
| 07/23/2009 | US20090186447 Process for sealing and connecting parts of electromechanical, fluid and optical microsystems and device obtained thereby |
| 07/23/2009 | US20090183791 Modular mounting and connection or interconnection system for microfluidic devices |
| 07/23/2009 | DE102008004639A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component |
| 07/22/2009 | CN101486438A Flexible MEMS resistance reducing covering and method of manufacturing the same |
| 07/21/2009 | US7564033 Microstructured sensor |
| 07/16/2009 | WO2009087284A1 Structure comprising a getter layer and an adjusting sublayer, and fabrication process |
| 07/16/2009 | WO2009086977A2 Micromirror device and method for producing a micromirror device |
| 07/16/2009 | WO2009086624A1 Microfluidic microarray system and method for the multiplexed analysis of biomolecules |
| 07/16/2009 | WO2009024764A3 Mems package |
| 07/16/2009 | US20090179288 Semiconductor mechanical senseor |
| 07/16/2009 | CA2701363A1 Structure comprising a getter layer and an adjusting sublayer, and fabrication process |
| 07/15/2009 | EP1723072B1 Mechanical sensor with pyramid socket suspension |
| 07/15/2009 | EP1685269B1 Process for manufacturing devices which require a non evaporable getter material for their working |
| 07/14/2009 | US7560817 Interconnect including a pliable surface and use thereof |
| 07/14/2009 | US7560802 Electrical connections in substrates |
| 07/09/2009 | WO2009086330A2 Compact automatic focusing camera |
| 07/09/2009 | WO2009085585A2 Mems structure for flow sensor |
| 07/09/2009 | WO2009082812A1 Direct contact heat control of micro structures |
| 07/09/2009 | WO2009038686A3 Hermetic wafer level cavity package |
| 07/09/2009 | WO2009020801A3 Mems device and interconnects for same |
| 07/09/2009 | DE102008003452A1 Schutzsystem und Verfahren zur Vereinzelung von MEMS-Strukturen Protection system and method for separation of MEMS structures |
| 07/09/2009 | DE102008003344A1 Mikromechanisches Bauelement und Herstellungsverfahren für ein mikromechanisches Bauelement Micromechanical component and manufacturing method for a micromechanical component |
| 07/08/2009 | EP1356510B1 Wafer scale bonding of protective caps |
| 07/07/2009 | US7558453 Arrangement of a micro-optical component on a substrate, a method for adjustment of the arrangement, and an optical system with the arrangement |
| 07/07/2009 | CA2574271C Embedded control valve using electroactive material |
| 07/02/2009 | WO2009079780A1 Low temperature ceramic microelectromechanical structures |
| 07/02/2009 | WO2009023484A3 Shell flow sensor |
| 07/02/2009 | WO2009014801A3 Scanning nanotube probe device and associated method |
| 07/02/2009 | US20090166196 Use of microfluidic systems in the electrochemical detection of target analytes |
| 07/02/2009 | US20090165877 Actuator elements for microfluidics, responsive to multiple stimuli |
| 07/01/2009 | EP2076063A2 Ultra thin package for electric acoustic sensor chip of micro electro mechanical system |
| 07/01/2009 | EP2075221A2 Mechanical isolation for MEMS devices |
| 07/01/2009 | EP2074054A1 Mems bubble generator for large stable vapor bubbles |
| 07/01/2009 | CN101472835A Methods and systems for object identification and for authentication |
| 07/01/2009 | CN101468785A MEMS transducer and manufacturing method thereof |
| 06/25/2009 | WO2009079460A1 Electrothermal microactuator for large vertical displacement without tilt or lateral shift |
| 06/25/2009 | DE10058864B4 Mikromechanikstruktur für integrierte Sensoranordnungen und Verfahren zur Herstellung einer Mikromechanikstruktur Micromechanics structure for integrated sensor arrays and methods for making a micromechanical structure |
| 06/24/2009 | CN100503879C Support for microelectronic, microoptoelectronic or micromechanical devices |
| 06/23/2009 | US7551339 Optical scanning apparatus, optical writing apparatus, image forming apparatus, and method of driving vibration mirror |
| 06/21/2009 | CA2647126A1 Mems switch with improved standoff voltage control |
| 06/20/2009 | CA2645834A1 Mems microswitch having a conductive mechanical stop |
| 06/20/2009 | CA2645820A1 Mems microswitch having a dual actuator and shared gate |
| 06/18/2009 | WO2009076287A2 System and method of assessing a property of a flowing fluid |
| 06/18/2009 | DE102008006035B3 Micro-technical component for testing characteristics of fluid sample i.e. serum, in e.g. biological field, has protective layer arranged at substrate or cover such that functional element is shielded against incident radiation |
| 06/18/2009 | DE102007060632A1 Verfahren zum Herstellen eines Kappenwafers für einen Sensor A method of manufacturing a cap wafer for a sensor |
| 06/18/2009 | DE102007060352A1 Device for electronically compatible thermal controlling of integrated micro-systems on basis of active temperature sensitive hydraulic gels, has component, which produces temperature field |
| 06/18/2009 | DE102007057492A1 Mikroelektromechanisches System Micro-Electro-Mechanical System |
| 06/17/2009 | CN101456530A Method and system for mems switches fabricated in an integrated circuit package |
| 06/16/2009 | CA2387581C Method and device for moving and placing liquid drops in a controlled manner |
| 06/11/2009 | WO2009073410A1 Airflow sensor with pitot tube for pressure drop reduction |
| 06/11/2009 | WO2009071746A1 Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas |
| 06/11/2009 | WO2009071637A2 Mems package and method for the production thereof |
| 06/11/2009 | WO2008148654A3 Electrical contact for a micromechanical component |
| 06/11/2009 | US20090145485 Microfluidic methods and apparatuses for fluid mixing and valving |
| 06/10/2009 | DE102008003979B3 Fluidikvorrichtung, Fluidikmodul und Verfahren zum Handhaben einer Flüssigkeit Fluidic device, fluidic module and method for handling a liquid |
| 06/10/2009 | DE102007058951A1 MEMS Package MEMS package |
| 06/10/2009 | CN100498077C A rotary combustor, and electrical generator comprising a combustor of this type |
| 06/09/2009 | US7545251 Micro-electromechanical actuator |
| 06/09/2009 | US7544540 Encapsulated electrical component and production method |
| 06/09/2009 | CA2195859C Microcomponent sheet architecture |
| 06/04/2009 | US20090140357 High-temperature electrostatic transducers and fabrication method |
| 06/04/2009 | US20090139576 Microfluidic systems, devices and methods for reducing noise generated by mechanical instabilities |
| 06/04/2009 | DE102008004139B3 Liquid moving device for moving liquid back and forth over sensor surface of analytic sensor utilized in bio analytics field, has channel designed in such manner that counter pressure difference opposite to pressure difference is produced |
| 06/03/2009 | EP2064147A1 Integrated mems packaging |
| 06/03/2009 | CN101445216A Split type micro-electric mechanic system and preparation method thereof |
| 06/03/2009 | CN101445215A Infrared receiver and manufacturing method thereof |
| 06/02/2009 | CA2438810C Microfluidic valve and microactuator for a microvalve |
| 05/28/2009 | WO2009067222A1 Microfabricated cantilever slider with asymmetric spring constant |
| 05/28/2009 | WO2009066996A1 Device for microfludic application |
| 05/28/2009 | WO2009066979A2 Mems based probe card and a method of testing semiconductor ion sensor using the same |
| 05/28/2009 | DE102007057037A1 Sensorelement für spektroskopische oder optische Messungen und Verfahren zu dessen Herstellung Sensor element for spectroscopic or optical measurements and process for its preparation |
| 05/27/2009 | EP1299564B1 Integrated microarray devices |
| 05/27/2009 | CN201247082Y Flat diaphragm type gas flow sensor |
| 05/27/2009 | CN101441112A Non-refrigeration infrared detector array based on monocrystal silicon PN junction and preparing method thereof |
| 05/27/2009 | CN101439841A Non-refrigeration infrared image sensor chip and preparation thereof |
| 05/27/2009 | CN100491232C Micro electromechanical packaging structure for wind direction sensor |
| 05/26/2009 | US7537964 Method of fabricating a miniature silicon condenser microphone |
| 05/26/2009 | CA2463917C Feedback control system for a mems based optical switching fabric |
| 05/21/2009 | US20090126813 Liquid-Transport Device and System |
| 05/20/2009 | CN101437187A Stacked encapsulation structure for tapering (reducing) minitype sensor encapsulation volume |
| 05/20/2009 | CN101436571A Electrical device and method |
| 05/20/2009 | CN101434374A Structure and implementing method of MEMS device disc grade chip size hermetic package |
| 05/20/2009 | CN101434373A Micro-device and method for manufacturing the same |
| 05/19/2009 | US7534658 Process for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 05/19/2009 | US7534331 Use of microfluidic systems in the electrochemical detection of target analytes |
| 05/14/2009 | WO2009061168A1 Fabrication method of a micromechanical device |
| 05/14/2009 | WO2009060029A1 Electronic component with mechanically decoupled ball-type connections |
| 05/13/2009 | CN101431319A Electronic component |
| 05/13/2009 | CN101431172A Reconfigurable microwave low-pass filter containing MEMS switch and its manufacturing method |
| 05/13/2009 | CN101430340A Silicon micro-piezoresistive accelerometer capable of reducing temperature excursion |
| 05/13/2009 | CN100487837C Micro-electromechanical varactor with enhanced tuning range |
| 05/13/2009 | CN100487376C Double quality blocks attune output type silicon MEMS gyroscopes |
| 05/12/2009 | US7532404 Optical device having micro lens array |
| 05/12/2009 | US7532385 Optical interference display panel and manufacturing method thereof |