B81B 7 - Micro-structural systems

Patents for B81B 7 - Micro-structural systems (8,983)
12/2009
12/31/2009	DE102008002675A1 Mikroventil und Abdichteinrichtung zur Verwendung in einem Mikrofluidiksystem sowie Verfahren zu deren Herstellung Micro valve and sealing means for use in a microfluidic system, as well as processes for their preparation
12/30/2009	WO2009156201A2 Microelectromechanical sensor element
12/30/2009	WO2009137131A3 Temperature-robust mems gyroscope with 2-dof sense-mode addressing the tradeoff between bandwidth and gain
12/30/2009	WO2009108260A3 Universal sample preparation system and use in an integrated analysis system
12/30/2009	CN201373883Y Micro acceleration and micro angular rate single chip integrated sensor
12/30/2009	CN101616863A Electronic device comprising differential sensor MEMS devices and drilled substrates
12/30/2009	CN101613074A Micro electro mechanical systems element for measuring three-dimensional vectors
12/30/2009	CN101613073A Micro electromechanical system (MEMS)
12/29/2009	US7638429 Thin film encapsulation of MEMS devices
12/29/2009	US7638034 Electrochemical detection of single molecules using abiotic nanopores having electrically tunable dimensions
12/24/2009	US20090317302 Microfluidic System Comprising MEMS Integrated Circuit
12/24/2009	US20090317301 Bonded Microfluidics System Comprising MEMS-Actuated Microfluidic Devices
12/24/2009	US20090314368 Microfluidic System Comprising Pinch Valve and On-Chip MEMS Pump
12/24/2009	US20090314367 Bonded Microfluidics System Comprising CMOS-Controllable Microfluidic Devices
12/24/2009	US20090314366 Fluidic device
12/24/2009	DE102009021437A1 Spektroskopiemodul Spectroscopy module
12/24/2009	DE102008002579A1 Mikro-elektromechanisches Sensorelement Micro-electromechanical sensor element
12/23/2009	WO2009152547A1 Bonded microfluidics system comprising cmos-controllable microfluidic devices
12/23/2009	EP2135840A2 Getter on die in an upper sense plate designed MEMS
12/23/2009	EP2135839A2 Method and apparatus for improving measurement accuracy of mems devices
12/23/2009	EP2135069A1 Serial siphon valves for fluidic or microfluidic devices
12/23/2009	CN101610972A Protection box for a microelectromechanical system including a wiring relay
12/23/2009	CN101609101A Micro-accelerometer based on silica-based high speed electro-optical modulation of waveguide ring resonator
12/23/2009	CN101609063A Microelectrode array chip sensor for electrochemical immunological detection
12/23/2009	CN101608962A Micro Pirani gage
12/23/2009	CN100573071C Piezoresistance structure of MOS capacitance substrate on nano beam as well as detecting method
12/23/2009	CA2728433A1 Pressure measurement using a mems device
12/22/2009	US7635901 Microcomponent comprising a hermetically-sealed cavity and a plug, and method of producing one such microcomponent
12/17/2009	WO2009151836A2 Fabrication of microscale tooling
12/17/2009	WO2009150087A2 System support for electronic components and method for production thereof
12/17/2009	WO2009095108A3 Fixed body joint and micromechanical component
12/17/2009	US20090309521 Driver for MEMS device
12/17/2009	US20090309175 Electromechanical system having a controlled atmosphere, and method of fabricating same
12/17/2009	US20090308473 Micro-fluidic chip and flow sending method in micro-fluidic chip
12/17/2009	DE112004002667B4 Ladungssteuerschaltung, mikroelektromechanische Zelle, mikroelektromechanisches System und Verfahren zum Steuern einer mikroelektromechanischen Vorrichtung Charge control circuit, microelectromechanical cell, micro-electro-mechanical system and method for controlling a microelectromechanical device
12/17/2009	DE102009021957A1 Silizium-MEMS-Resonatoren Silicon MEMS resonators
12/17/2009	DE102009021441A1 Spektrometer Spectrometer
12/17/2009	DE102009021440A1 Spektroskopiemodul und Verfahren zum Herstellen desselben Spectroscopy of the same module and process for producing
12/17/2009	DE102009021244A1 Mikroelektromechanische System-Bauelemente Microelectromechanical system components
12/17/2009	DE102008002324A1 Method for manufacturing micromechanical or electronic component, involves attaching substrate material and covering material with each other and relatively positioning to each other by molding tool
12/16/2009	CN201365340Y Self-detection silicon micromachine capacitance microphone
12/16/2009	CN101602479A Capacitive sensing device and manufacture method thereof
12/16/2009	CN101602478A Micro electromechanical encapsulating structure
12/16/2009	CN100570755C Micro-socle girder resonator with low temperature cross sensitivity
12/16/2009	CN100570347C Sensor for self-testing self-oscillation of resonant-type tiny cantilever beam
12/10/2009	WO2009147961A1 Local fluorescence label microdevice for operating/measuring microobject
12/10/2009	DE102009021436A1 Spektroskopiemodul Spectroscopy module
12/10/2009	DE102008025202A1 Hermetisch geschlossenes Gehäuse für elektronische Bauelemente und Herstellungsverfahren Hermetically sealed enclosure for electronic components and manufacturing processes
12/10/2009	DE102008002307A1 Herstellungsverfahren für ein mikromechanisches Bauelement, entsprechender Bauelementverbund und entsprechendes mikromechanisches Bauelement Manufacturing method for a micromechanical component, corresponding device and corresponding composite micromechanical component
12/10/2009	CA2668637A1 Frequency tuning of disc resonator gyroscopes via resonator mass perturbation based on an identified model
12/09/2009	CN201360349Y Silicon capacitance microphone
12/09/2009	CN101597021A Method for structuring a device layer of a substrate
12/09/2009	CN101597020A Germanium window, manufacture method thereof and air-tight case body with same
12/09/2009	CN100568721C Static driven serial RF microwave filter
12/09/2009	CN100567896C Micro-mechanical gyroscope based on tunneling effect
12/08/2009	US7629190 Method for making a micromechanical device by using a sacrificial substrate
12/03/2009	WO2009145967A1 Semiconductor device with reduced sensitivity to package stress
12/03/2009	WO2009145963A1 Capacitive sensor with stress relief that compensates for package stress
12/03/2009	WO2009145726A1 Micro electro mechanical device package and method of manufacturing a micro electro mechanical device package
12/03/2009	DE10314875B4 Temperaturbeständiges elektronisches Bauteil in Form eines Sensors oder Aktors und Verfahren zu seiner Herstellung Temperature resistant electronic component in the form of a sensor or actuator and process for its preparation
12/03/2009	DE102009021438A1 Spektroskopiemodul Spectroscopy module
12/03/2009	DE102008002157A1 Sensor element to spectroscopically measure infrared radiation, comprises substrate, membrane formed on substrate upper side, cavity formed below the membrane in the substrate, thermopile structure, filtering device, and thermopile cells
12/02/2009	EP2126942A1 Mems actuators and switches
12/02/2009	CN101593863A Adjustable microwave band-pass filter
12/02/2009	CN101592626A Quasi-one-dimensional metal oxide nano-material biosensor and method for manufacturing same
12/02/2009	CN101592578A Silicon cantilever sensor, preparation method and application thereof
12/02/2009	CN101592489A Micromechanical tuning fork gyroscope
12/02/2009	CN101590996A Microphone of micro electro mechanical system
12/02/2009	CN100565924C Integrated driver for mems device using high voltage thin film transistors
12/02/2009	CN100565109C Circular and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro gyroscope
12/02/2009	CN100565108C Circular and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope
12/02/2009	CN100564039C Cartridge for ink jet printer
11/2009
11/26/2009	US20090289606 System and method for mems array actuation
11/26/2009	DE102008001876A1 Sensoranordnung und Verfahren zum Betrieb einer Sensoranordnung Sensor arrangement and method of operating a sensor arrangement
11/25/2009	EP2121513A2 Electronic device comprising differential sensor mems devices and drilled substrates
11/25/2009	EP2121512A1 Protection box for a microelectromechanical system including a wiring relay
11/25/2009	EP2121511A2 Micropackaging method and devices
11/25/2009	CN201352121Y Vibratory micromachined gyroscope
11/25/2009	CN101588529A Silica-based condenser microphone and production method thereof
11/25/2009	CN101587131A 加速度传感器 Acceleration sensor
11/25/2009	CN101587130A Crossed and encapsulated type wind speed and direction sensor of minitype wind measuring units
11/25/2009	CN101586985A Monolithic integrated non-refrigerated infrared/ultraviolet double-color detector and manufacture method thereof
11/24/2009	US7622781 Semiconductor dynamic quantity sensor
11/24/2009	US7622324 Wafer bonding hermetic encapsulation
11/19/2009	DE102009020838A1 Sensor für physikalische Größe und Verfahren zu dessen Herstellung Sensor for physical size and process for its preparation
11/19/2009	DE102008019585A1 Apparatus to move liquid droplets, by an electro-wetting effect, has a plane with groups of base electrodes and a plane with groups of control electrodes with narrow electrode gaps and wide electrode widths
11/18/2009	CN101583559A A micromechanical structure and a method of fabricating a micromechanical structure
11/18/2009	CN101581601A Detection method, micro-electromechanical component and micro-detection structure of micro-mechanical structure
11/18/2009	CN100561603C Scanning electrochemical and optical microscope probe and its preparation method
11/18/2009	CN100561236C Microelectron-mechanical reconfigurable broad band microwave power detector and method of manufacturing the same
11/18/2009	CN100561148C Non-refrigeration infrared focal plane array seeker and preparation method thereof
11/17/2009	CA2414739C Vent in a micro electro-mechanical device
11/12/2009	WO2009137131A2 Temperature-robust mems gyroscope with 2-dof sense-mode addressing the tradeoff between bandwidth and gain
11/12/2009	WO2009136196A2 Mems transducers
11/12/2009	WO2007113325A8 Micromechanical housing comprising at least two cavities having different internal pressure and/or different gas compositions and method for the production thereof
11/12/2009	DE102008001663A1 Micromechanical component i.e. micro-mirror, has positioning element i.e. mirror plate, adjustable with respect to base substrate by bending spring mechanism based on different internal stresses of subunits
11/11/2009	EP2114819A1 Mems actuators and switches
11/11/2009	CN201344938Y Bilateral micro-inertia sensor
11/11/2009	CN201344937Y Micro-inertia sensor
11/11/2009	CN201344802Y Oscillating micro-silicon gyroscope

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