| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 09/17/2009 | WO2009112138A2 Cover for microsystems and method for producing a cover |
| 09/17/2009 | WO2009111874A1 Low-temperature wafer level processing for mems devices |
| 09/17/2009 | US20090231778 High frequency electrical element |
| 09/16/2009 | CN101534465A Micro electronmechanical microphone and packaging method thereof |
| 09/16/2009 | CN101534103A Radio frequency filter capable of single chip integration and manufacture method thereof |
| 09/16/2009 | CN101533832A Integrated chips of Micro-electro-mechanism system device and integrated circuit, and integration method |
| 09/16/2009 | CN101533075A MEMS horizontal resonant mode gauss meter |
| 09/16/2009 | CN101532889A Force sensor |
| 09/16/2009 | CN101532879A Micro-spectrum analysis method and device based on Fresnel zone plate |
| 09/16/2009 | CN101531334A Magnetic drive micro-inertial sensor for increasing detection capacitance and preparation method |
| 09/16/2009 | CN101531333A Sensor self-powered circuit based on MEMS, and manufacturing process thereof |
| 09/15/2009 | CA2454963C Parallel, individually addressable probes for nanolithography |
| 09/11/2009 | WO2009111487A1 Process of making a microtube and microfluidic devices formed therewith |
| 09/10/2009 | DE102008012384A1 Deckel für Mikro-Systeme und Verfahren zur Herstellung eines Deckels Lid for micro-systems and method for producing a lid |
| 09/09/2009 | CN101526659A Driving device and shot module using same |
| 09/09/2009 | CN101525116A Structure of vertical three-dimensional combined packaging of micro electric mechanical system and manufacture method thereof |
| 09/09/2009 | CN101525115A Micro inertial sensor embedded with movable electrode and manufacturing method thereof |
| 09/09/2009 | CN100538981C Microdevice assembly having a fine grain getter layer for maintaining vacuum |
| 09/08/2009 | US7586668 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 09/07/2009 | CA2625251A1 High performance micro-fabricated electrostatic quadrupole lens |
| 09/03/2009 | WO2009108411A1 Microelectromechanical systems component and method of making same |
| 09/03/2009 | US20090219605 Optical interference display panel and manufacturing method thereof |
| 09/03/2009 | DE102008011175A1 Mikromechanischer Aktuator The micromechanical actuator |
| 09/02/2009 | CN101520351A Heat-variable surface shearing stress sensor |
| 09/02/2009 | CN101520350A Process for manufacturing improved high-sensitivity low pressure sensor chip |
| 09/02/2009 | CN101519183A Mems packaging including integrated circuit dies |
| 08/27/2009 | WO2009105609A1 Integrated carrier for microfluidic device |
| 08/27/2009 | WO2009086330A3 Compact automatic focusing camera |
| 08/27/2009 | US20090212658 Micro--electromechanical actuator with spacer separated layers |
| 08/27/2009 | US20090211087 Method and system for improving alignment precision of parts in mems |
| 08/27/2009 | DE102008010241A1 Mikromechanische Vorrichtung mit Drehschwinger Micromechanical device with rotary vibrator |
| 08/27/2009 | DE102004001892B4 Verfahren zur Herstellung einer FBAR-Vorrichtung vom Wafer-Level-Package-Typ Process for the preparation of an FBAR device from the wafer-level package type |
| 08/26/2009 | EP2093184A2 MEMS device with temperature compensation |
| 08/26/2009 | EP1866235A4 Mems actuators and switches |
| 08/26/2009 | CN201297972Y 压力传感器 Pressure Sensor |
| 08/26/2009 | CN101515026A Resonance micro electromechanical system magnetic field sensor and measuring method thereof |
| 08/26/2009 | CN101514897A Improved sonic type micro mechanical scopperil |
| 08/26/2009 | CN101513990A 致动器 Actuator |
| 08/26/2009 | CN101513989A Functional device and manufacturing method thereof |
| 08/25/2009 | US7579663 Hermetic packaging and method of manufacture and use therefore |
| 08/20/2009 | WO2009102796A1 Microfluidic device and methods of operation and making |
| 08/20/2009 | WO2009102763A1 Microfluidic device and method of operation |
| 08/20/2009 | WO2009100516A1 Cell culture and cell assays using digital microfluidics |
| 08/20/2009 | WO2009085585A3 Mems structure for flow sensor |
| 08/20/2009 | DE10228767B4 Mikrovorrichtung und Verfahren für eine Komponententrennung in einem Fluid Micro device and method for separation of components in a fluid |
| 08/20/2009 | DE102008063422A1 Sensor zur Erfassung einer physikalischen Grösse Sensor for detecting a physical quantity |
| 08/20/2009 | DE102008009215A1 Bauelement zur Darstellung von Symbolen und damit hergestellte optische Anzeigevorrichtung Device for displaying symbols and optical display device produced therewith |
| 08/20/2009 | CA2715325A1 Measurement and apparatus for electrical measurement of electrical drive parameters for a mems based display |
| 08/20/2009 | CA2714046A1 Cell culture and cell assays using digital microfluidics |
| 08/19/2009 | EP2089312A1 A micromechanical structure and a method of fabricating a micromechanical structure |
| 08/19/2009 | CN101510543A Integrated semiconductor device |
| 08/19/2009 | CN101510486A Micro actuation switch |
| 08/19/2009 | CN101510482A Silicon micro mechanical pressure switch, preparation method and use thereof |
| 08/19/2009 | CN101509888A Method for making silicone base integrable miniature glucose sensor |
| 08/19/2009 | CN101509788A Capacitance silicon micromechanical rainfall sensor |
| 08/19/2009 | CN100530643C Semiconductor integrated circuit with electrostatic actuator driving circuit, MEMS, and method for driving electrostatic actuator |
| 08/13/2009 | WO2009099791A1 Methods of reducing cd loss in a microelectromechanical device |
| 08/13/2009 | WO2009097924A2 Micromechanical component and method for producing the same |
| 08/13/2009 | WO2009076287A3 System and method of assessing a property of a flowing fluid |
| 08/13/2009 | WO2008087022A8 Housing for micro-mechanical and micro-optical components used in mobile applications |
| 08/13/2009 | US20090199917 Microfluidic Device with Variable Volume Material |
| 08/13/2009 | DE102008007665A1 Micro-mechanical component has two comb electrodes, and contact element for applying voltage between comb electrodes, where former comb electrode has connection part and two electrode fingers |
| 08/13/2009 | DE102004026210B4 Vorrichtung zur Erfassung einer physikalischen Größe und Gehäuse für eine Anordnung zur Messung einer physikalischen Größe A device for detecting a physical quantity and housing for a device for measuring a physical quantity |
| 08/12/2009 | EP1252028B1 Method of fabricating a micro machined structure |
| 08/12/2009 | CN101504896A Bi-stable acceleration induction micro-switch based adhesion |
| 08/12/2009 | CN101504426A Comb condenser type dual-spindle accelerometer |
| 08/12/2009 | CN100526934C Micromirror array with improved in-plane rotation tolerance |
| 08/11/2009 | US7573111 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/11/2009 | US7572660 Electrical through-plating of semiconductor chips |
| 08/11/2009 | US7572110 Pumping apparatus using thermal transpiration micropumps |
| 08/06/2009 | WO2009095856A2 A mems structure and a method of manufacturing the same |
| 08/06/2009 | WO2009095108A2 Fixed body joint and micromechanical component |
| 08/06/2009 | WO2009057990A3 Capacitive area-changed mems gyroscope with adjustable resonance frequencies |
| 08/06/2009 | US20090194768 Vertical system integration |
| 08/06/2009 | DE102008007345A1 Mikromechanisches Bauelement und Verfahren zur Herstellung desselben Micromechanical component and method of manufacturing the same |
| 08/05/2009 | EP2084104A1 Electrical microvalve and method of manufacturing thereof |
| 08/05/2009 | EP1765725B1 Nanowire device with (111) vertical sidewalls and method of fabrication |
| 08/05/2009 | CN101498704A Valveless micro-flow control gradient real-time reaction chip and reaction control method |
| 08/05/2009 | CN101498608A Full-hollow structure light modulation thermal imaging focal plane array with self-supporting frame work |
| 08/05/2009 | CN101498607A Full-hollow structure light modulation thermal imaging focal plane array with silicon support frame work |
| 08/05/2009 | CN101498596A Flow sensor with metal film resistor |
| 08/05/2009 | CN101498580A Oscillation type silicon micro-gyroscope |
| 08/05/2009 | CN101497423A Micro-electronmechanical system and its manufacturing method |
| 08/05/2009 | CN101497422A Low-temperature glass solder bonding and encapsulating method based on disc level glass micro-chamber |
| 08/05/2009 | CN101497017A Microflow control structure |
| 08/04/2009 | US7570134 Micro-resonator and communication apparatus |
| 08/04/2009 | US7569129 Activation, deactivation of electrodes embedded in surface; process control; mixing drops; splitting drops |
| 08/04/2009 | US7568390 Semiconductor acceleration sensor device and method for manufacturing the same |
| 07/30/2009 | WO2009094626A1 Device for fluid spreading and transport |
| 07/30/2009 | WO2009094420A1 A flexural mechanism for passive angle alignment and locking |
| 07/30/2009 | WO2009094236A2 Autonomous electrochemical actuation of microfluidic circuits |
| 07/30/2009 | WO2009092361A2 Mems component, method for producing a mems component, and method for handling a mems component |
| 07/30/2009 | US20090188794 Device for Fluid Spreading and Transport |
| 07/30/2009 | US20090188576 Check valve diaphragm micropump |
| 07/30/2009 | DE10353121B4 Elektrisches Bauelement Electrical component |
| 07/30/2009 | DE102008062499A1 Mems-Bauelemente und Verfahren zur Herstellung derselben MEMS devices and methods for manufacturing the same |
| 07/30/2009 | DE102008028299B3 System support for e.g. micro-electro-mechanical system component, has flexible support with upper side, and conductor paths guided to connecting contacts on upper side of components, which is turned away from flexible support |
| 07/30/2009 | DE102008006570A1 Festkörpergelenk und mikromechanisches Bauelement Solid joint and micromechanical component |
| 07/30/2009 | DE102008005686A1 MEMS-Bauelement, Verfahren zur Herstellung eines MEMS-Bauelements und Verfahren zur Handhabung eines MEMS-Bauelements MEMS device, method for manufacturing a MEMS device and method for handling a MEMS device |
| 07/29/2009 | CN101492150A Micro-machine overhang beam simultaneously implementing driving and self-cleaning with single integrated resister |