B81B 7 - Micro-structural systems

Patents for B81B 7 - Micro-structural systems (8,983)
11/2009
11/11/2009	CN101576570A Suspending inductive device and fabricating method thereof
11/11/2009	CN101576569A Vacuum micro-electronics acceleration transducer
11/11/2009	CN101575083A Micromachined thermopile infrared detector
11/11/2009	CN101575082A Micro wind turbine generator based on wind-induced vibration mechanism and piezoelectric effect
11/11/2009	CN100559549C Electronic component and its mfg. method
11/11/2009	CN100559123C Difference measurement method for MEMS gyroscopes
11/11/2009	CN100558627C Micro-drive structure for implementing coplane and off-plane movement
11/10/2009	US7615788 Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry
11/10/2009	US7615395 Method for containing a device and a corresponding device
11/05/2009	WO2009134786A2 Quality control method and micro/nano-channeled devices
11/05/2009	WO2009133724A1 Micropump device
11/05/2009	WO2009132440A1 Mems device with independent rotation in two axes of rotation
11/05/2009	WO2009071637A3 Mems package and method for the production thereof
11/05/2009	US20090275115 Microreactor
11/05/2009	DE102008021108A1 Sensor arrangement producing method, involves contacting sensor element and lead frame with contact connecting element, and covering sensor element by sealing compound, where region of sensor element is free from sealing compound
11/05/2009	DE102008001465A1 Mikromechanisches Bauteil, Verfahren zum Betreiben eines mikromechanischen Bauteils und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element, method for operating a micromechanical component and manufacturing method for a micromechanical component
11/05/2009	DE102008001449A1 Sensor arrangement for e.g. antilock brake system of automobile, has molded housing comprising recess, and sensor module connected with carrier such that heat transmission is provided between sensor module and carrier
11/05/2009	CA2722783A1 Mems device with independent rotation in two axes of rotation
11/03/2009	CA2414736C Thermal bend actuator for a micro electro-mechanical device
10/2009
10/29/2009	WO2009132324A1 Mems package having formed metal lid
10/29/2009	WO2009131346A2 Mems probe card and manufacturing method thereof
10/29/2009	DE102009018266A1 Sensor zur Erfassung einer physikalischen Grösse und Verfahren zu dessen Fertigung Sensor for detecting a physical quantity and process for its manufacturing
10/29/2009	DE102009017328A1 Integrierte MEMS-Vorrichtung und Steuerschaltung Integrated MEMS device and control circuit
10/29/2009	DE102008019692A1 Silicon micro system for use in area of e.g. microbiology for cultivating cell, has two-stage opening at upper side and/or lower side, and contact region that is nano-structured between system and integrated polymer-functional component
10/29/2009	DE102008001063A1 Verfahren zur Herstellung von siliziumhaltigen keramischen Strukturen Process for the preparation of silicon-containing ceramic structures
10/28/2009	EP2112488A2 Pressure sensor module and electronic component
10/28/2009	EP2112471A1 Mounting device for electronic component
10/28/2009	CN101567394A Vertical surrounding grid junction type field effect transistor, preparation method and applications thereof
10/28/2009	CN101567368A Wafer circuit protection structure and manufacturing method thereof
10/28/2009	CN101566643A Structure of film thermoelectric converter based on bi-material microcantilevel and fabricating method thereof
10/28/2009	CN101566510A Pressure sensor, manufacturing method thereof, and electronic component provided therewith
10/28/2009	CN101566502A Thermo-optical infrared detector and preparation method thereof
10/28/2009	CN101565161A Large dimension micro-beam array for optical reading out heat type infrared radiation sensor
10/28/2009	CN101565160A Micro-electromechanical system and packaging method thereof
10/28/2009	CN100555736C Meso-microelectromechanical system package
10/28/2009	CN100554496C Process for manufacturing devices which require a non evaporable getter material for their working
10/27/2009	US7607826 Thermoelastic device with preselected resistivity, inertness and deposition characteristics
10/22/2009	WO2009128979A1 Spring member for use in a microelectromechanical systems sensor
10/22/2009	WO2009128855A1 Getter formed by laser-treatment and methods of making same
10/22/2009	WO2009056420A3 Micromechanical system
10/22/2009	US20090260692 Autonomous electrochemical actuation of microfluidic circuits
10/22/2009	DE102008019600A1 Optische Vorrichtung in gestapelter Bauweise und Verfahren zur Herstellung derselben An optical device in a stacked construction and method of manufacturing the same
10/22/2009	DE102008001238A1 Mikromechanisches Bauteil, Verfahren zum Betreiben eines mikromechanischen Bauteils und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element, method for operating a micromechanical component and manufacturing method for a micromechanical component
10/22/2009	DE102008001232A1 Elektrodenkamm, mikromechanisches Bauteil und Herstellungsverfahren für einen Elektrodenkamm und für ein mikromechanisches Bauteil Electrode comb, micromechanical component and manufacturing method for an electrode comb, and for a micromechanical component
10/22/2009	DE102008001005A1 Method for the production of layered composite with epitactically grown layer made of magnetic shape-memory material, comprises subjecting a sacrificial layer on one- or multilayered substrate
10/21/2009	CN201331399Y Piezoresistive micro cantilever beam sensor based on stress concentration of slots
10/21/2009	CN101561510A Chip of three-dimensional MEMS geophone and preparation method thereof
10/21/2009	CN101561319A Capacitive MEMS non-refrigerated infrared detector and preparation method thereof
10/21/2009	CN101561277A Micro gyro driven by reverse magnetic suspension and corona to rotate
10/21/2009	CN101561276A Suspension motor micro gyro operated by adopting electromagnetism and corona
10/21/2009	CN101561275A Suspension rotor micro gyro by utilizing electromagnetism and charge relaxation to work
10/21/2009	CN101561274A Micro gyro driven by static suspension corona to rotate
10/21/2009	CN101559914A Digital micro-droplet drive with deep submicron pore structure and manufacturing method thereof
10/21/2009	CN101559913A Structure for increasing strength and service life of deformable beam and application thereof
10/21/2009	CN100552382C Circular and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor induced rotating micro gyroscope
10/21/2009	CN100551462C Preparation method of biological microelectrode array based on flexible substrate
10/20/2009	CA2414741C Movement sensor in a micro electro-mechanical device
10/15/2009	WO2009125038A1 Multiple prototyping method for mechanical capacitive microsensors
10/15/2009	US20090255340 Semiconductor acceleration sensor device and method for manufacturing the same
10/15/2009	DE102008001071A1 Mikromechanische Aktuatorstruktur und entsprechendes Betätigungsverfahren Micromechanical actuator structure and corresponding operating method
10/15/2009	DE102008001058A1 Mikromechanische Elektrodenstruktur, entsprechendes Herstellungsverfahren und Mikroaktuatorvorrichtung Micromechanical electrode structure, method of manufacture and Mikroaktuatorvorrichtung
10/15/2009	DE102008001053A1 Elektrodenkamm, mikromechanisches Bauteil und Herstellungsverfahren für einen Elektrodenkamm oder ein mikromechanisches Bauteil Electrode comb, micromechanical component and manufacturing method for an electrode comb or a micromechanical component
10/15/2009	DE102008001042A1 Manufacturing method for micromechanical structure, involves producing functional layer made of one material, where sealing layer is produced on functional layer, and is made of another material
10/14/2009	EP2010449B1 Micromechanical component with wafer through-plating and corresponding production method
10/14/2009	CN101556290A Gas gyroscope for measuring the angular speed in any direction
10/14/2009	CN100550429C MEMS device having contact and standoff bumps and related methods
10/14/2009	CN100549643C Micro bridge for micrometering bolometer
10/13/2009	US7601537 Detecting leaks in micro-optoelectromechanical devices (MOEMS) or microelectromechanical (MEMS) devices; indicator may be copper, which changes optical properties upon oxidation
10/13/2009	US7601270 Microfabricated elastomeric valve and pump systems
10/08/2009	WO2009124118A1 Contour sensor incorporating mems mirrors
10/08/2009	US20090250130 Production of microfluidic polymeric devices by photo-assisted and/or thermally assisted printing
10/08/2009	DE102008037947A1 Element-Wafer und Verfahren zu dessen Herstellung Element wafer and process for its preparation
10/07/2009	EP2107599A2 System And Method Of Forming A Wafer Scale Package
10/07/2009	EP2107039A2 Microelectromechanical thin film device of transition metal oxide, and manufacturing method thereof
10/07/2009	CN201323654Y Packaging structure of micro electro mechanical system (MEMS) transducer
10/07/2009	CN201323653Y Packaging structure of transducer
10/07/2009	CN201321377Y Micro electro mechanical system microphone package with PCB provided with sound holes
10/07/2009	CN101551403A Integrated silicon chip for testing acceleration, pressure and temperature, and manufacturing method thereof
10/07/2009	CN101551284A Pressure sensor based on Si-Si direct bonding and manufacturing method thereof
10/07/2009	CN101549847A Micro electro mechanical system and head gimbal assembly
10/07/2009	CN100547723C Micro movable device and method of making the same using wet etching
10/06/2009	US7597814 Structure formed with template having nanoscale features
10/01/2009	US20090246086 Microfluidic network and method
10/01/2009	US20090242061 Dual-cavity fluid conveying apparatus
09/2009
09/30/2009	CN101547529A Miniature inductive heater
09/30/2009	CN101544348A Composite micro-nano structure array on high light-transmission substrate and method and application thereof
09/30/2009	CN101544347A Bidirectional bistable microdrive based on electrothermal and electromagnetic drive
09/29/2009	US7595223 Process for bonding and electrically connecting microsystems integrated in several distinct substrates
09/29/2009	CA2414354C Nano-electromechanical filter
09/24/2009	WO2009094236A3 Autonomous electrochemical actuation of microfluidic circuits
09/24/2009	US20090235990 Monodisperse Microdroplet Generation and Stopping Without Coalescence
09/24/2009	DE10326555B4 Verfahren zur Herstellung einer integrierten Schaltung sowie durch das Verfahren hergestellte integrierte Schaltung A method of manufacturing an integrated circuit and integrated circuit prepared by the process
09/24/2009	DE102009003640A1 Mikroelektromechanische Strommessvorrichtung Microelectromechanical current measuring device
09/24/2009	DE102008013624A1 Mikrosensor mit einem CNT-Sensorelement und Verfahren zu dessen Herstellung Microsensor with a CNT-sensor element and method of production
09/24/2009	DE102008002809A1 Micromechanical device for e.g. binoculars, has image processing units, and imaging element and position, orientation or movement detecting system that are mechanically and fixedly connected with each other at common component
09/23/2009	EP2102096A1 Housing for micro-mechanical and micro-optical components used in mobile applications
09/23/2009	CN101539586A Element wafer and method for manufacturing the same
09/23/2009	CN101538006A Method for preparing optical modulation thermal imaging focal plane array
09/23/2009	CN101538003A Micromechanical transformer and manufacturing method thereof
09/22/2009	US7592195 Method for producing a sensor or actuator arrangement, and corresponding sensor or actuator arrangement

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