| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 03/10/2010 | CN101665230A Micro-electro-mechanical systems (mems) package and method for forming the mems package |
| 03/04/2010 | WO2010025046A2 Micro-fluidic device |
| 03/04/2010 | WO2010024779A1 Microfluidic continuous flow device for culturing biological material |
| 03/04/2010 | DE102009038706A1 Sensorbauelement Sensor device |
| 03/04/2010 | DE102008041550A1 Im Diepadbereich strukuiertes Leadframe, dieses Leadframe umfassende mikrostruktuierte Bauteilanordnung und Verfahren zu deren Herstellung In strukuiertes leadframe die pad area, this lead frame comprehensive mikrostruktuierte component assembly and process for their preparation |
| 03/04/2010 | DE102008041542A1 Mikropumpe Micropump |
| 03/03/2010 | CN101659388A Bidirectional out-of-plane moving electro-thermal microactuator |
| 03/02/2010 | US7671428 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 02/25/2010 | WO2010021216A1 Drive device |
| 02/25/2010 | WO2010020225A1 Device for liquid display and corresponding method |
| 02/25/2010 | WO2009095856A3 A mems structure and a method of manufacturing the same |
| 02/25/2010 | US20100044147 Microelectromechanical system diaphragm and fabricating method thereof |
| 02/25/2010 | DE102009035358A1 Elektronikbauelement und Verfahren zu dessen Herstellung An electronics device and process for its preparation |
| 02/24/2010 | EP2156198A1 Operation method and switch arrangement for a capacitive micromechanical sensor with analog reset |
| 02/24/2010 | CN101654216A Arc MEMS compliant bistable mechanism |
| 02/24/2010 | CN100591613C Carbon nano-tube composite material and preparation method thereof |
| 02/18/2010 | WO2010019684A2 Induced-charge electro-osmotic microfluidic devices |
| 02/18/2010 | WO2010019665A2 Microvalve device with improved fluid routing |
| 02/18/2010 | WO2010019329A2 Improved microvalve device |
| 02/18/2010 | WO2009147268A3 Device for the real-time kinematic measurement of living beings in motion or objects moved thereby |
| 02/18/2010 | WO2009134786A3 Quality control method and micro/nano-channeled devices |
| 02/17/2010 | EP2153178A1 Hot film-type air flow meter and production method thereof |
| 02/17/2010 | EP1437036B1 Latching micro magnetic relay packages and methods of packaging |
| 02/11/2010 | WO2010016807A1 Contactless conductivity detector |
| 02/11/2010 | US20100033826 Brightness enhancing film comprising nanocomposite structure having improved crack resistance |
| 02/11/2010 | DE102008040970A1 Mikromechanische Vorrichtung mit Kavernen mit unterschiedlichem atmosphärischen Innendruck Micromechanical device with caverns with different internal atmospheric pressure |
| 02/11/2010 | DE102008034546A1 Product, has substrate including number of molecular chains with hydrophilic group, hydrophobic segment and photoreversible cross linking agent, where molecular chains are linked with substrate |
| 02/10/2010 | EP2150487A2 Method for producing a micromechanical component having a trench structure for backside contact |
| 02/10/2010 | CN201400567Y Cantilever beam piezoelectric structure utilizing actual material compensation method to control damping |
| 02/10/2010 | CN201400566Y Sealing structure of microcomputer electric microphone |
| 02/10/2010 | CN101643193A Micromechanical device which has cavities having different internal atmospheric pressures |
| 02/04/2010 | WO2010014261A2 Polycrystalline complex-shaped mesoscale components |
| 02/04/2010 | WO2010012966A2 Method and device for encapsulating microstructures |
| 02/04/2010 | US20100024525 Method of checking the hermeticity of a closed cavity of a micrometric component and micrometric component for the implementation of the same |
| 02/04/2010 | DE102008040852A1 Herstellungsverfahren für ein mikromechanisches Bauteil und Mikromechanisches Bauteil Manufacturing method for a micromechanical component and Micromechanical element |
| 02/04/2010 | DE102008040851A1 Verfahren zum Verkappen eines MEMS-Wafers sowie MEMS-Wafer A method for capping a MEMS wafer and MEMS wafer |
| 02/04/2010 | DE102008040775A1 Verkapselung, MEMS sowie Verfahren zum selektiven Verkapseln Encapsulation, MEMS and method for selectively encapsulate |
| 02/03/2010 | CN101638212A Wafer-level vacuum encapsulation wire interconnecting structure of micro electro mechanical system and manufacturing method thereof |
| 02/03/2010 | CN101638211A Integrated three-dimensional stacked package structure and manufacturing method thereof |
| 02/02/2010 | US7655492 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 02/02/2010 | US7654643 Inkjet printhead nozzle assembly having a raised rim to support an ink meniscus |
| 01/28/2010 | US20100020843 Thermal Bend Actuator Material Selection |
| 01/28/2010 | US20100020524 Protective package for an electromechanical micro-system comprising a wiring relay |
| 01/28/2010 | US20100018584 Microfluidic system and method for manufacturing the same |
| 01/28/2010 | DE102009030281A1 Aktive Abschirmung von Leitern in MEMS-Vorrichtungen Active shielding conductors in MEMS devices |
| 01/28/2010 | DE102008040597A1 Mikromechanisches Bauelement mit Rückvolumen Micromechanical component with back volume |
| 01/28/2010 | DE102008040564A1 Micromechanical sensor component, particularly acceleration sensor component, has substrate and seismic mass having primary extension plane |
| 01/28/2010 | DE102008030842A1 Integrated module for use in micro-electro-mechanical system, comprises plastic body made of thermoplastic with even lower surface, and recess is provided in lower surface of plastic body |
| 01/27/2010 | EP2147893A2 MEMS die to bump alignment |
| 01/27/2010 | CN101636344A MEMS cavity-coating layers and methods |
| 01/27/2010 | CN101633489A Induction component and microphone component of micro-electromechanical system |
| 01/27/2010 | CN100585407C Optical fibre grating accelerometer based on cantilever beam deflection |
| 01/27/2010 | CN100585331C Double quality oscillatory type silicon micro-gyroscopes |
| 01/27/2010 | CN100584741C Method for assembling semiconductor chips, and corresponding semiconductor chip assembly |
| 01/26/2010 | US7652895 Electrically insulating body, and electronic device |
| 01/26/2010 | US7651669 Catalyst chamber comprising: upper and lower flow paths separated by a space; and each containing catalyst supports; preferably microstruts provide structural support in each of the flow paths |
| 01/26/2010 | CA2428218C Apparatus for parallel detection of the behaviour of mechanical micro-oscillators |
| 01/24/2010 | CA2672283A1 Low work function electrical component |
| 01/21/2010 | WO2010008789A2 Interferometric chemical sensor array |
| 01/21/2010 | WO2009131346A3 Mems probe card and manufacturing method thereof |
| 01/21/2010 | WO2009097924A3 Micromechanical component and method for producing the same |
| 01/21/2010 | DE102008040528A1 Herstellungsverfahren für ein mikromechanisches Bauteil und ein mikromechanisches Bauteil Manufacturing method for a micromechanical component and a micromechanical component |
| 01/21/2010 | DE102008040525A1 Mikromechanisches Sensorelement, Verfahren zur Herstellung eines mikromechanischen Sensorelements und Verfahren zum Betrieb eines mikromechanischen Sensorelements The micromechanical sensor element, method for producing a micromechanical sensor element and method of operating a micromechanical sensor element |
| 01/21/2010 | DE102008040522A1 Method for manufacturing micromechanical structure, involves applying sacrificial layer on substrate, applying sacrificial layer on function layer, and applying another sacrificial layer on function layer |
| 01/21/2010 | DE102008040521A1 Verfahren zur Herstellung eines Bauelements, Verfahren zur Herstellung einer Bauelementanordnung, Bauelement und Bauelementanordnung A method for manufacturing a device, method of manufacturing a component assembly, the component and component arrangement |
| 01/20/2010 | EP2146182A1 Multistage proof-mass movement deceleration within mems structures |
| 01/20/2010 | EP2145854A1 MEMS device comprising an electro-mecanical nanotube-based interface between a component and its support |
| 01/20/2010 | EP2144843A1 Pressure manifold to equalize pressure in integration pcr-ce microfluidic devices |
| 01/20/2010 | CN201387334Y High-sensitivity rainfall sensor |
| 01/20/2010 | CN101628704A Micromechanical sensor element, method for manufacturing a micromechanical sensor element and method for operating a micromechanical sensor element |
| 01/20/2010 | CN100581986C Uncooled infrared imaging focal plane array detector |
| 01/20/2010 | CN100581985C Method and system for improving alignment precision of parts in MEMs |
| 01/19/2010 | US7648859 Microcomponent comprising a hermetically-sealed microcavity and method for production of such a microcomponent |
| 01/19/2010 | US7648855 Device comprising an encapsulated microsystem and production method thereof |
| 01/18/2010 | CA2672597A1 Electromechanical device comprising electronic components and at least one nanotube-based interface, and manufacturing method |
| 01/14/2010 | WO2010006065A2 Thin-film lid mems devices and methods |
| 01/14/2010 | WO2010005502A2 Electromechanical actuators |
| 01/14/2010 | WO2010005061A1 Functional device and manufacturing method therefor |
| 01/14/2010 | WO2010004860A1 Packaging device and base member for package |
| 01/14/2010 | WO2010003228A1 Low temperature ceramic microelectromechanical structures |
| 01/14/2010 | DE102009016487A1 Sensormodul und Halbleiterchip Sensor module and semiconductor chip |
| 01/14/2010 | DE102008032319A1 Verfahren zur Herstellung eines MST Bauteils und MST Bauteil A method for producing a component and MST MST component |
| 01/14/2010 | CA2730077A1 Packaging device and base member for packaging |
| 01/13/2010 | CN201383873Y Silicon condenser microphone with enlarged back cavity |
| 01/13/2010 | CN201382956Y Integrated optical waveguide accelerometer |
| 01/13/2010 | CN101624168A Sensor and its fabrication process |
| 01/13/2010 | CN100579892C Micro-electromechanical system device and manufacturing method thereof |
| 01/13/2010 | CN100579657C Method and apparatus for controlling the flow resistance of fluid on nanostructured or microstructured surfaces |
| 01/12/2010 | CA2533643C Process for manufacturing devices which require a non evaporable getter material for their working |
| 01/12/2010 | CA2461327C Mems waveguide shuttle optical latching switch |
| 01/07/2010 | WO2010002445A2 Micro-posts having improved uniformity and a method of manufacture thereof |
| 01/07/2010 | WO2009111573A3 Optofluidic microscope device with photosensor array |
| 01/07/2010 | US20100000620 Microfluidic liquid-movement device |
| 01/06/2010 | EP2141116A2 Structure based on a suspended getter material |
| 01/06/2010 | CN201376893Y Micro inertial sensor with embedded movable electrode |
| 01/06/2010 | CN201376892Y Magnetically driven micro inertial sensor for increasing detection capacitance |
| 01/06/2010 | CN201376891Y Multi-layer circuit conducting wafer-level MEMS chip |
| 01/06/2010 | CN201376890Y Self-powered circuit for MEMS-based sensors |
| 01/06/2010 | CN101618848A Torsion-type MEMS element |
| 12/31/2009 | DE102009019029A1 Sensormodul Sensor module |