| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 04/27/2010 | US7704772 Method of manufacture for microelectromechanical devices |
| 04/22/2010 | WO2010044741A1 Method for making via interconnection |
| 04/22/2010 | WO2010042969A1 Inkjet printhead with titanium aluminium alloy heater |
| 04/22/2010 | WO2010002445A3 Micro-posts having improved uniformity and a method of manufacture thereof |
| 04/22/2010 | US20100098594 Modular and Reconfigurable Multi-Stage Microreactor Cartridge Apparatus |
| 04/22/2010 | US20100097681 Micromechanical element and sensor for monitoring a micromechanical element |
| 04/22/2010 | US20100097430 Inkjet Printhead Nozzle Assembly Having A Raised Rim To Support An Ink Meniscus |
| 04/22/2010 | DE102008042967A1 Kaskadierte mikromechanische Aktuatorstruktur Cascaded micromechanical actuator structure |
| 04/20/2010 | US7700457 Method and zone for sealing between two microstructure substrates |
| 04/15/2010 | WO2010042784A2 Method of hydrolytically stable bonding of elastomers to substrates |
| 04/15/2010 | WO2010042502A2 Active fixturing for micro/mesoscale machine tool systems |
| 04/15/2010 | WO2010040227A1 Hybrid digital and channel microfluidic devices and methods of use thereof |
| 04/15/2010 | WO2010040214A1 Digital microfluidic method for protein extraction by precipitation from heterogeneous mixtures |
| 04/15/2010 | WO2010014261A3 Polycrystalline complex-shaped mesoscale components |
| 04/15/2010 | US20100092339 Microfluidic system, sample analysis device, and target substance detection/measurement method |
| 04/15/2010 | CA2740113A1 Hybrid digital and channel microfluidic devices and methods of use thereof |
| 04/15/2010 | CA2740106A1 Digital microfluidic method for protein extraction by precipitation from heterogeneous mixtures |
| 04/14/2010 | EP2174907A2 System and methods for implementing a wafer level hermetic interface chip |
| 04/14/2010 | CN101694989A Monolithic filter component based on acoustic interface waves and integrated with MEMS switches and manufacture method thereof |
| 04/14/2010 | CN101694896A Five-bit radio-frequency MEMS phase shifter |
| 04/14/2010 | CN101694895A Series radio-frequency micro-electromechanical switch amplified on basis of heat driving and preparation method of same |
| 04/14/2010 | CN101694829A Sensor of electromechanical performance and microscopic structure for transmission electronic microscope and manufacturing method thereof |
| 04/14/2010 | CN101694494A Method for manufacturing micro-cantilever modified with antibody |
| 04/14/2010 | CN101693512A Compound cantilever beam needle point used for micro-nano microtechnique and manufacturing method thereof |
| 04/08/2010 | WO2010039855A2 Vertical mount package for mems sensors |
| 04/08/2010 | DE102009038713A1 Elektronikbauelement und Verfahren zu dessen Herstellung An electronics device and process for its preparation |
| 04/08/2010 | DE102008049647A1 Mikromechanisches Element und Sensor zur Überwachung eines mikromechanischen Elements Micromechanical element and sensor for monitoring a micromechanical element |
| 04/08/2010 | DE102008048064A1 Mikrofluidisches Ventil, mikrofluidische Pumpe, mikrofluidisches System und ein Herstellungsverfahren The microfluidic valve, microfluidic pump microfluidic system and a production method |
| 04/07/2010 | EP2172755A1 Infrared sensor with front side bandpass filter and vacuum cavity |
| 04/07/2010 | EP2172754A1 Infrared sensor with back side infrared filter |
| 04/07/2010 | EP2172753A1 A method for manufacturing infrared sensor on a wafer basis |
| 04/07/2010 | EP2171538A1 A method of making a secondary imprint on an imprinted polymer |
| 04/07/2010 | EP2170763A2 Method for the production of a component, and component |
| 04/07/2010 | EP2170762A2 Corrosion-resistant mems component, and method for the production thereof |
| 04/07/2010 | CN101692123A Micro-electromechanical microwave loss compensating microwave power detector |
| 04/07/2010 | CN101692099A Piezoresistive double-shaft micro-accelerometer with on-chip zero offset compensation and manufacturing method thereof |
| 04/07/2010 | CN101692016A Atmospheric pressure sensor compatible with CMOS process and preparation process thereof |
| 04/07/2010 | CN101691201A Novel power device for generating electric energy and thrust based on micro-combustion |
| 04/07/2010 | CN101691200A Low temperature vacuum encapsulation structure of non-refrigeration infrared detector and manufacturing method thereof |
| 04/07/2010 | CN101013197B Method for forming alignment on a transparent substrate |
| 04/06/2010 | US7692317 Apparatus for housing a micromechanical structure |
| 04/06/2010 | US7692127 MEMS type thermally actuated out-of-plane lever |
| 04/01/2010 | WO2010034050A1 Efficient inkjet nozzle assembly |
| 04/01/2010 | DE102008049459A1 Smartcard for medical diagnostics, has micro-fluidic channel for filling cavity, and photodetector is provided, which comprises semi-transparent electrode layer, organic-based optically active layer and counter electrode layer |
| 04/01/2010 | DE102008042432A1 Verfahren zur Herstellung eines Halbleiterbauelements A process for producing a semiconductor device |
| 04/01/2010 | DE102008042382A1 Kontaktanordnung zur Herstellung einer beabstandeten, elektrisch leitfähigen Verbindung zwischen mikrostrukturierten Bauteilen Contact arrangement for producing a spaced, electrically conductive connection between microstructured components |
| 04/01/2010 | DE102008042350A1 Mikromechanisches Bauelement und Verfahren zu dessen Herstellung Micromechanical component and method for its production |
| 04/01/2010 | DE102008042346A1 Magnetjoch, mikromechanisches Bauteil und Herstellungsverfahren für ein Magnetjoch und ein mikromechanisches Bauteil Magnetic yoke micromechanical component and manufacturing method for a magnetic yoke and a micromechanical component |
| 04/01/2010 | DE102008042258A1 Verfahren zur Herstellung eines mikromechanischen Chips sowie ein Bauelement mit einem derartigen Chip Process for producing a micromechanical chips and a chip component having such a |
| 04/01/2010 | CA2732738A1 Efficient inkjet nozzle assembly |
| 03/31/2010 | EP2167419A2 Integrated motion processing unit (mpu) with mems inertial sensing and embedded digital electronics |
| 03/31/2010 | EP2167418A1 Premold housing having integrated vibration damping |
| 03/31/2010 | CN101687630A Micro-electro-mechanical systems and photonic interconnects employing the same |
| 03/31/2010 | CN101687629A Method for the production of a component, and component |
| 03/31/2010 | CN101685119A Resonance miniature electric field sensor |
| 03/31/2010 | CN101683967A Wafer level capsulation mechanism and wafer level capsulation method used for radio-frequency micro electromechanical system |
| 03/31/2010 | CN101683966A Anti-static accumulation packaging structure for miniature electric field sensor |
| 03/31/2010 | CN101683965A Micromechanical sensor with symmetrical surface structure under asymmetric mass distribution |
| 03/30/2010 | US7687298 Microelectromechanical device with integrated conductive shield |
| 03/30/2010 | US7685877 Semiconductor mechanical sensor |
| 03/25/2010 | WO2010033002A2 Micro-composite pattern lens, and method for manufacturing same |
| 03/25/2010 | WO2010032822A1 Mems sensor |
| 03/25/2010 | WO2010032821A1 Mems sensor |
| 03/25/2010 | WO2010031987A2 Encapsulation method |
| 03/25/2010 | WO2010005502A3 Electromechanical actuators |
| 03/25/2010 | WO2009092361A3 Mems component, method for producing a mems component, and method for handling a mems component |
| 03/25/2010 | DE102009034577A1 Halbleiteranordnung und Herstellungsverfahren A semiconductor device and manufacturing method |
| 03/25/2010 | DE102009031545A1 MEMS-Substrate, -Bauelemente und Verfahren zur Herstellung derselben MEMS substrates, modules area and methods of manufacturing the same |
| 03/25/2010 | DE102008042196A1 Verfahren zum Herstellen eines mikrofluidischen Bauelementes sowie mikrofluidisches Bauelement A method for producing a microfluidic component and microfluidic device |
| 03/24/2010 | EP2165970A2 Substrate bonded mems sensor |
| 03/24/2010 | EP2165362A1 Low resistance through-wafer via |
| 03/24/2010 | EP2164801A2 Micromechanical component and method for producing a micromechanical component |
| 03/24/2010 | EP2164800A2 Micromechanical component and method for producing a micromechanical component having a thin layer cap |
| 03/24/2010 | CN101681851A connecting microsized devices using ablative films |
| 03/24/2010 | CN101680910A Operation method and switch arrangement for a capacitive micromechanical sensor with analog reset |
| 03/24/2010 | CN101680792A Hot film-type air flow meter and production method thereof |
| 03/24/2010 | CN101679019A Premold housing having integrated vibration damping |
| 03/24/2010 | CN101676729A Angular velocity sensor element, angular velocity sensor, and electronic apparatus |
| 03/24/2010 | CN100595921C High-temperature resisting one-chip integrated micro-sensor structure and system integrating method |
| 03/23/2010 | US7681306 Method of forming an assembly to house one or more micro components |
| 03/18/2010 | WO2010028884A2 Encapsulation, mems and encapsulation method |
| 03/18/2010 | WO2009150087A3 System support for electronic components and method for production thereof |
| 03/18/2010 | US20100068107 Methods of making microfluidic devices and devices resulting |
| 03/18/2010 | US20100068105 Microfluidic structures and how to make them |
| 03/18/2010 | US20100064779 Method of checking the hermeticity of a closed cavity of a micrometric component and micrometric component for the implementation of the same |
| 03/18/2010 | DE102008042106A1 Verkapselung, MEMS sowie Verfahren zum Verkapseln Encapsulation, MEMS and method for encapsulating |
| 03/18/2010 | DE102008041750A1 Thermisch entkoppeltes mikrostrukturiertes Referenzelement für Sensoren Thermally decoupled micro-structured reference element for sensors |
| 03/17/2010 | CN201423579Y Silicon chip clamping device |
| 03/17/2010 | CN101673753A Piezoelectric transistor and method of manufacturing same |
| 03/17/2010 | CN101670998A Point-plane electrode system and method for micro-fluid drive by using the system |
| 03/17/2010 | CN100594175C Optical-mechanical double-layer structural uncooled infrared imaging focal plane array detector |
| 03/11/2010 | WO2010027466A2 Displacement actuation and sensing for an electrostatic drive |
| 03/11/2010 | WO2010027400A2 Post etch reactive plasma milling to smooth through substrate via sidewalls and other deeply etched features |
| 03/11/2010 | WO2010027145A1 Mems probe card and method of manufacturing same |
| 03/11/2010 | WO2010025515A1 Method for fabricating microstructured cell culture devices |
| 03/11/2010 | WO2010008789A3 Interferometric chemical sensor array |
| 03/11/2010 | WO2009151836A3 Fabrication of microscale tooling |
| 03/11/2010 | DE102009036175A1 MEMS-Silizium-Resonatorbauelemente und Verfahren Silicon MEMS resonator devices and methods |
| 03/11/2010 | DE102009034231A1 Passive Temperaturkompensation von Silizium-Mems-Bauelementen Passive temperature compensation of silicon Mems devices |
| 03/10/2010 | CN101665231A Structure of thin film device manufactured by means of double-faced opposite-penetrated corrosion based on (100) silicon chip and method thereof |