| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 06/09/2010 | CN1866007B Ultra trace detection sensor with integrated piezoresistance SiO2 cantilever, making method and application thereof |
| 06/09/2010 | CN101729966A Micro-electro-mechanical microphone packaging structure |
| 06/09/2010 | CN101726661A Device for detecting micro-electro mechanical microwave frequency response compensate-type microwave power |
| 06/09/2010 | CN101726629A Micro-electro-mechanical element, out-plane sensor and manufacturing method of micro-electro-mechanical element |
| 06/09/2010 | CN101726526A Solid electrolyte SO2 gas sensor and manufacturing method thereof |
| 06/09/2010 | CN101723304A Microstructure with flexible circuit board and manufacturing method thereof |
| 06/09/2010 | CN101285845B Cantilever beam type optical fibre grating accelerometer |
| 06/09/2010 | CN101216358B Grid pressure sensing chip and preparation method, pressure distributed sensor |
| 06/09/2010 | CN101183675B Method and system for wafer-stage package of chip having a number of pieces |
| 06/03/2010 | WO2010061311A1 Electrical contact configuration of micro-electromechanical component and fabrication method |
| 06/03/2010 | WO2010027466A3 Displacement actuation and sensing for an electrostatic drive |
| 06/03/2010 | WO2010019665A3 Microvalve device with improved fluid routing |
| 06/03/2010 | US20100133104 Fluid processing device including size-changing barrier |
| 06/03/2010 | US20100132801 Devices and methods for microreactor fluid distribution |
| 06/03/2010 | US20100132466 Operating method and circuit arrangement for a capacitive micromechanical sensor with analog reset |
| 06/02/2010 | EP2191500A1 A mems package |
| 06/02/2010 | EP2190988A1 Integrated microfluidic device for gene synthesis |
| 06/02/2010 | DE19817310B4 Verfahren zur Herstellung von mikromechanischen Bauelementen A process for preparing micromechanical components |
| 06/02/2010 | DE102008059634A1 Mikromechanischer Aktuator mit elektrostatischem Kamm-Antrieb The micromechanical actuator with electrostatic comb-drive |
| 06/02/2010 | DE102008044177A1 Verfahren zur Herstellung eines mikromechanischen Bauelements sowie mit dem Verfahren hergestelltes Bauelement bzw. dessen Verwendung A process for producing a micromechanical component, and produced with the method component or use thereof |
| 06/02/2010 | DE102008044098A1 Sensor arrangement for differential pressure measurement, has micro-mechanical sensor element, where volume between separation membrane and measuring diaphragm is filled by incompressible transmission medium |
| 06/02/2010 | CN201497775U Microwave power-detecting device |
| 06/02/2010 | CN101719575A Electrothermal-driven in-plane bistable radio frequency microswitch |
| 06/02/2010 | CN101718667A Density sensor chip based on micro electro mechanical system technology and preparation method thereof |
| 06/02/2010 | CN101718587A Non-cooling type ultrared micrometering kampometer |
| 06/02/2010 | CN101718556A Micro-mechanical tuning fork gyroscope of horizontal shaft |
| 06/02/2010 | CN101717066A Method and nano balance for weighing viruses |
| 06/02/2010 | CN101717065A Microelectromechanical device provided with an anti-stiction structure, and corresponding anti-stiction method |
| 06/02/2010 | CN101717064A Bionic telescopic matrix unit |
| 06/02/2010 | CN101249936B Packaging conformation for micro electromechanical systems and method for manufacturing same |
| 06/02/2010 | CN101216309B Circular and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro gyroscope |
| 06/02/2010 | CN101202272B Sealing structure for MEMS devices and method of the same |
| 05/27/2010 | WO2010059118A1 Functional capping |
| 05/27/2010 | WO2010059026A1 System based on microactuators for programmed automation of sampling and distribution of fluids in variable microvolumes |
| 05/27/2010 | WO2010019684A3 Induced-charge electro-osmotic microfluidic devices |
| 05/27/2010 | US20100132076 Fluid Delivery for Scanning Probe Microscopy |
| 05/27/2010 | US20100126857 Analysis instrument |
| 05/26/2010 | CN201490302U Low-voltage radio-frequency micro electro-mechanical system switch and encapsulation structure thereof |
| 05/26/2010 | CN1673723B Dynamic stress testing method for micro-electromechanical system |
| 05/26/2010 | CN101715553A Serial siphon valves for fluidic or microfluidic devices |
| 05/26/2010 | CN101715429A Pressure manifold to equalize pressure in integration PCR-CE microfluidic devices |
| 05/26/2010 | CN101713688A MEMS non-refrigerated two-band infrared detector and preparation method thereof |
| 05/26/2010 | CN101712449A Double-corrosion groove capable of realizing MEMS wafer-level airtight encapsulation of glass slurry and method |
| 05/26/2010 | CN101712448A Silicon-based microphone package |
| 05/26/2010 | CN101054157B Electronic apparatus element and manufacturing method thereof, and resonator and manufacturing method thereof |
| 05/25/2010 | US7723850 Electronic devices having air gaps |
| 05/20/2010 | WO2010057068A2 Method and apparatus for wafer bonding with enhanced wafer mating |
| 05/20/2010 | WO2010056435A2 Transducer with decoupled sensing in mutually orthogonal directions |
| 05/20/2010 | WO2010056186A1 Fluidic culture device |
| 05/20/2010 | US20100122899 Small-scale method and apparatus for separating mixtures |
| 05/20/2010 | DE102008060796A1 Verfahren zum Ausbilden einer Mikro-Oberflächenstruktur sowie zum Herstellen eines mikroelektromechanischen Bauelements, Mikro-Oberflächenstruktur sowie mikroelektromechanisches Bauelement mit einer solchen Struktur A method of forming a micro-surface structure as well as for manufacturing a microelectromechanical device, micro-structure and surface micro-electromechanical device having such a structure |
| 05/20/2010 | DE102008048759B3 Three-dimensional, optomechanical structure for use in photonic transistor, has bars connected with each other, where optical signals are processed such that deformation of structure is counteracted based on changing of shape of material |
| 05/20/2010 | DE102008043790A1 Micromechanical component i.e. acceleration sensor, for use in automotive industry, has insulating layer comprising hole structure with recesses in region, which is extended below electrode of conductive layer |
| 05/20/2010 | DE102008043788A1 Mikromechanisches Bauelement Micromechanical component |
| 05/20/2010 | DE102008043735A1 Anordnung von mindestens zwei Wafern mit einer Bondverbindung und Verfahren zur Herstellung einer solchen Anordnung Arrangement of at least two wafers with a bonding compound and method for producing such an arrangement |
| 05/19/2010 | CN1987486B Integrated optic grating interference micro mechanical acceleration sensor and its producing method |
| 05/19/2010 | CN1983582B Semiconductor device |
| 05/14/2010 | WO2010054216A2 Mems-based capacitive sensor for use in a seismic acquisition system |
| 05/14/2010 | WO2010025046A3 Micro-fluidic device |
| 05/14/2010 | CA2743088A1 Mems-based capacitive sensor |
| 05/13/2010 | US20100116656 Fluid separation structure and a method of manufacturing a fluid separation structure |
| 05/12/2010 | DE102008043598A1 Bauteil und Herstellungsverfahren für ein Bauteil Component and manufacturing method for a component |
| 05/12/2010 | DE102008043524A1 Beschleunigungssensor und Verfahren zu seiner Herstellung Acceleration sensor and method for its preparation |
| 05/12/2010 | DE102008011175B4 Mikromechanischer Aktuator und Verfahren zu seiner Herstellung Micromechanical actuator and method for its preparation |
| 05/12/2010 | DE102008002674B3 Mikroventil und Abdichteinrichtung zur Verwendung in einem Mikrofluidiksystem sowie Verfahren zu deren Herstellung Micro valve and sealing means for use in a microfluidic system, as well as processes for their preparation |
| 05/12/2010 | DE102007047010B4 Mikromechanisches Bauelement zur Modulation von elektromagnetischer Strahlung und optisches System mit demselben Micro-mechanical device for the modulation of electromagnetic radiation and an optical system with the same |
| 05/12/2010 | CN201467441U Encapsulating structure of MEMS microphone |
| 05/12/2010 | CN201467440U Encapsulating structure of MEMS microphone |
| 05/12/2010 | CN201458723U Wafer level airtightness sealing structure with reverse Y-shaped through hole |
| 05/12/2010 | CN101704498A Static actuator and preparation method and instantaneous perturbation resistance method thereof |
| 05/12/2010 | CN101704497A Structure of single-etch tank hermetically packaged by MEMS in wafer level and method thereof |
| 05/12/2010 | CN101704496A Silicon material substrate and construction method thereof |
| 05/12/2010 | CN101000800B XY stage module, method for fabricating the XY stage module, and storage system employing the same |
| 05/11/2010 | CA2550777C Inkjet printer system with removable cartridge |
| 05/06/2010 | WO2010049837A2 An integrated component and a method of manufacturing an integrated component |
| 05/06/2010 | WO2010048911A1 Apparatus having an emitter contact, a collector contact and a gap, and method for the production thereof |
| 05/06/2010 | WO2010019329A3 Improved microvalve device |
| 05/06/2010 | WO2010006065A3 Thin-film lid mems devices and methods |
| 05/06/2010 | WO2009112138A3 Cover for microsystems and method for producing a cover |
| 05/06/2010 | US20100112723 Microfluidic apparatus and methods for performing blood typing and crossmatching |
| 05/06/2010 | US20100112681 Microchip fluid control mechanism |
| 05/06/2010 | DE112008001648T5 Mikroelektromechanische Systeme und photonische Zwischenverbindungen, die dieselben einsetzen Microelectromechanical systems and photonic interconnects, which use the same |
| 05/06/2010 | DE102009052075A1 Winkelgeschwindigkeitserfassungsverfahren Angular velocity detection method |
| 05/06/2010 | DE102009051237A1 Akustisches Mehrfachblendenhorn Acoustic multiple diaphragm horn |
| 05/06/2010 | DE102009030224A1 Vorrichtung mit einem Emitter-Kontakt, einem Kollektor-Kontakt und einem Spalt und Verfahren zu ihrer Herstellung Device with an emitter contact, a collector contact and a gap, and processes for their preparation |
| 05/06/2010 | DE102008043447A1 Single crystalline gold or palladium nanowire useful in electrical-, optical- or magnetic device or sensors, comprises a vertical or horizontal orientation to a surface of a single crystalline semi-conductive- or non-conductive substrate |
| 05/06/2010 | DE102008043416A1 Mikromechanisches Bauteil und Verfahren zum Betreiben eines mikromechanischen Bauteils Micromechanical element and method for operating a micromechanical component |
| 05/06/2010 | DE102008043271A1 Sensoranordnung zur Differenzdruckmessung Sensor arrangement for measuring the differential pressure |
| 05/05/2010 | CN1801399B Probe for scanning magnetic microscope and manufacturing method thereof, method for forming iron-magnetic alloy film on carbon nanopipe |
| 05/04/2010 | US7709964 Structure of a micro electro mechanical system and the manufacturing method thereof |
| 05/04/2010 | CA2400768C Semiconductor optoelectronic device with electrically adjustable transfer function |
| 05/04/2010 | CA2384889C Temporary bridge for micro machined structures |
| 04/29/2010 | WO2010047648A1 Pressure relief valve |
| 04/29/2010 | WO2010027400A3 Post etch reactive plasma milling to smooth through substrate via sidewalls and other deeply etched features |
| 04/29/2010 | US20100104480 Method for improving the bonding properties of microstructured substrates, and devices prepared with this method |
| 04/29/2010 | DE102009042319A1 Sensorknoten-Modul Sensor node module |
| 04/29/2010 | DE102008053327A1 Microphone arrangement for use in communication technology, has cased microphone, and acoustic channel connecting sound entry opening and environment above interconnect device on side of interconnect device |
| 04/28/2010 | CN1716091B Transfer printing device and method for micro-nano structure pattern |
| 04/27/2010 | US7706044 Optical interference display cell and method of making the same |
| 04/27/2010 | US7706039 Scanner apparatus having electromagnetic radiation devices coupled to MEMS actuators |