| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 07/21/2010 | CN101782594A Cantilever beam type accelerometer based on photonic crystal microcavity |
| 07/21/2010 | CN101782410A Thermal flow meter of micro electro mechanical system |
| 07/21/2010 | CN101780941A Mems device and method for manufacturing the same |
| 07/21/2010 | CN101324473B Piezoresistance sensor chip and machining process thereof |
| 07/21/2010 | CN101281071B Double-resonance girder type micro mechanical pressure sensor |
| 07/15/2010 | WO2010080229A1 Microelectromechanical device with isolated microstructures and method of producing same |
| 07/15/2010 | WO2010042502A3 Active fixturing for micro/mesoscale machine tool systems |
| 07/15/2010 | US20100178208 Optical sensor array system for parallel processing of chemical and biochemical information |
| 07/15/2010 | US20100175767 Microfabricated Elastomeric Valve and Pump Systems |
| 07/15/2010 | DE102009047665A1 MEMS-Sensor mit eingebautem Selbsttest MEMS sensor with built-in self-test |
| 07/15/2010 | DE102009000116A1 Micromechanical structure e.g. acceleration sensor, has substrate with main extension plane, and insulation layer arranged between another insulation layer and conductive layer along vertical direction and consisting of silicon carbide |
| 07/14/2010 | EP1356514B1 Use of infrared radiation in molding of protective caps |
| 07/14/2010 | CN201528422U Capacitance microphone |
| 07/14/2010 | CN201528409U Micro-electro-mechanical microphone |
| 07/14/2010 | CN201525748U Wafer level encapsulation mechanism for a radio-frequency micro electromechanical system |
| 07/14/2010 | CN101777882A X-band three-digital MEMS(Micro Electric Mechanical System) tunable band-pass filter |
| 07/14/2010 | CN101777677A Tunable bandpass filter based on MEMS (microelectronics mechanical system) technology |
| 07/14/2010 | CN101776638A Preparation method of cell biological sensor based on titanium dioxide nanometer interface |
| 07/14/2010 | CN101776501A MEMS presser sensor chip and manufacturing method thereof |
| 07/14/2010 | CN101776495A Micro/nano fiber structure-based touch sensor and preparation method thereof |
| 07/14/2010 | CN101776483A Non-refrigerant thermopile infrared detector and manufacturing method thereof |
| 07/14/2010 | CN101776476A Systems, gyroscope sensors, and fabrication methods for forming structures for the gyroscope sensors. |
| 07/14/2010 | CN101774530A Microbolometer and preparation method thereof |
| 07/14/2010 | CN101774529A MEMS atom cavity chip and preparation method thereof |
| 07/14/2010 | CN101774528A Cross-scale biomimetic micro-nano branch structure array and preparation method thereof |
| 07/13/2010 | US7754537 Manufacture of mountable capped chips |
| 07/08/2010 | WO2010056435A3 Transducer with decoupled sensing in mutually orthogonal directions |
| 07/08/2010 | DE102009000056A1 Sensorelement zur kapazitiven Differenzdruckerfassung Sensor element for capacitive differential pressure sensing |
| 07/08/2010 | DE102009000053A1 Bauelement mit einer mikromechanischen Mikrofonstruktur Component having a micromechanical microphone structure |
| 07/08/2010 | DE102009000048A1 Mikrotechnisches System und Verfahren zur Herstellung eines mikrotechnischen Systems Technical micro system and method for producing a micro technical system |
| 07/08/2010 | DE102007019031B4 Optoelektronische Baugruppe und Verfahren zur Herstellung einer optoelektronischen Baugruppe The optoelectronic assembly and method for producing an optoelectronic assembly |
| 07/07/2010 | EP2204347A1 Structure comprising a gettering layer and a sublayer for adjusting the activation temperature and manufacturing method |
| 07/07/2010 | EP2204346A1 Thermal fluid flow sensor and method of manufacturing the same |
| 07/07/2010 | EP1512176B1 Die connected with integrated circuit component |
| 07/07/2010 | CN201522985U Sensor for quantitatively testing force-electricity property and microstructure |
| 07/07/2010 | CN201522458U Sensor measuring force-electricity properties and microstructure of transmission electron microscope |
| 07/07/2010 | CN101772467A Mems device and interconnects for same |
| 07/07/2010 | CN101767820A Multi-facet spherical micro-nano-structure titanium dioxide and preparation method thereof |
| 07/07/2010 | CN101767765A Micro electromechanical element with protective ring and manufacture method thereof |
| 07/06/2010 | US7750462 Microelectromechanical systems using thermocompression bonding |
| 07/06/2010 | US7749792 Self-assembling MEMS devices having thermal actuation |
| 07/06/2010 | US7749365 Optimized sample injection structures in microfluidic separations |
| 07/06/2010 | CA2460765C Mems optical latching switch |
| 07/01/2010 | WO2010075550A2 Method and apparatus for chemical detection and release |
| 07/01/2010 | WO2010072455A1 Device and method for producing a device |
| 07/01/2010 | WO2010042784A3 Method of hydrolytically stable bonding of elastomers to substrates |
| 07/01/2010 | US20100167414 Self-sealing microreactor and method for carrying out a reaction |
| 07/01/2010 | DE102009051342A1 Mikroelektronisches Gehäuse und Verfahren zum Anordnen in einem Gehäuse Microelectronic package and method for arranging in a housing |
| 06/30/2010 | EP2202559A2 Method and system for packaging a MEMS device |
| 06/30/2010 | CN101762714A Shrinking valve in microfluidic chip |
| 06/30/2010 | CN101762623A Semiconductor-type gas sensor with A1N heat isolation panel double-side micro structure and manufacturing method thereof |
| 06/30/2010 | CN101762356A Vacuum micro-electronics pressure sensor |
| 06/30/2010 | CN101759136A Fully-decoupled vibrating micromechanical gyroscope |
| 06/30/2010 | CN101759135A Sensor and manufacture method thereof |
| 06/30/2010 | CN101216500B Circular and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer |
| 06/30/2010 | CN101216307B Circular and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope |
| 06/24/2010 | WO2010068962A1 Digital micro-mirror device |
| 06/24/2010 | WO2010039855A3 Vertical mount package for mems sensors |
| 06/24/2010 | WO2010033002A3 Micro-composite pattern lens, and method for manufacturing same |
| 06/24/2010 | WO2010031987A3 Encapsulation method |
| 06/24/2010 | WO2010020225A9 Device for liquid display and corresponding method |
| 06/24/2010 | US20100160181 Cooling, condensation and freezing of atmospheric water or a microfluidic working-material in or on microfluidic devices |
| 06/24/2010 | DE102009055283A1 Halbleitervorrichtung und Verfahren zu ihrer Herstellung Semiconductor device and process for their preparation |
| 06/24/2010 | DE102008054784A1 Micro-mirror, has electrostatic drive for adjusting two mirror elements with respect to holder, light window and reflective surface around two rotational axes, respectively, where axes are aligned parallel to each other |
| 06/24/2010 | CA2742310A1 Digital micro-mirror device |
| 06/23/2010 | EP2198168A1 A system, apparatus and method for applying mechanical force to a material |
| 06/23/2010 | EP2197780A1 Structure comprising a getter layer and an adjusting sublayer, and fabrication process |
| 06/23/2010 | CN201514283U Light modulation thermal imaging focal plane array with self-supporting frame and complete hollow structure |
| 06/23/2010 | CN101746712A Phase-change material for compositing VO2 sheet and porous nanometer structure on silicon wafer and preparation method thereof |
| 06/23/2010 | CN101746708A Complete coupling capacitance type micromachined gyroscope |
| 06/23/2010 | CN101746707A Capacitive type micromachined ultrasonic transducer |
| 06/23/2010 | CN101746706A Micro-electromechanical system (MEMS) wafer-level vacuum packaging transverse interconnection structure and manufacture method thereof |
| 06/23/2010 | CN101746705A Phase-change material for compositing VO2 nanometer flower structure on silicon wafer and preparation method thereof |
| 06/23/2010 | CN101746704A MEMS (micro electro mechanical system) element with function of dust prevention and manufacturing method thereof |
| 06/23/2010 | CN101470131B Comb structure micro-mechanical accelerometer based on carbon nano-tube field emission |
| 06/23/2010 | CN101373156B Sub- and micro- Newton level force measuring system |
| 06/22/2010 | US7741105 Micro-Electro-Mechanical Systems (MEMS) technology; comprising a substrate and biomolecules immobilized on the substrate; surface treatment |
| 06/22/2010 | CA2688117A1 Micro-electromechanical system switch |
| 06/17/2010 | DE102008054735A1 Leadless-Gehäusepackung Leadless package housing |
| 06/17/2010 | DE102008054481A1 Sensor und Verfahren zu dessen Herstellung Sensor and method for its production |
| 06/16/2010 | EP2195090A1 Implantable device, system including same, and method utilizing same |
| 06/16/2010 | CN101742389A Integrated circuit structure and forming method thereo |
| 06/16/2010 | CN101738512A Probe assembly arrangement |
| 06/16/2010 | CN101738355A Micro electro mechanical system (MEMS) technology-based viscosity transducer chip and preparation method thereof |
| 06/16/2010 | CN101738280A Mems pressure sensor and manufacturing method thereof |
| 06/16/2010 | CN101734610A Multilayer film for low load working condition of micro electro mechanical system and preparation method thereof |
| 06/16/2010 | CN101734609A Semiconductor nano material and device |
| 06/16/2010 | CN101734608A Micro-electromechanical structure and manufacturing method thereof |
| 06/16/2010 | CN101734607A Packaging structure of micro-electromechanical system |
| 06/16/2010 | CN101734606A Sensing film and micro-electromechanical system device applying same |
| 06/16/2010 | CN101387496B Micro-displacement sensor based on ring micro-chamber and cantilever beam of integration plane |
| 06/16/2010 | CN101041292B Methods for producing piezoelectric actuator, ink-jet head, and ink-jet printer |
| 06/10/2010 | WO2010065804A2 Fluid flow control assembly |
| 06/10/2010 | WO2010063797A1 Miniature transducer assembly with integrated de-coupling coils |
| 06/10/2010 | US20100140110 Microfluidic-based lab-on-a-test card for a point-of-care analyzer |
| 06/10/2010 | US20100139797 Magnetically actuated microfluidic mixers |
| 06/10/2010 | DE102008052477A1 Electrical field strength measuring sensor for use as microelectromechanical system sensor, has electrode arrangement including electrode strips located in spaces between electrode strips of another electrode arrangement |
| 06/10/2010 | DE102008044371A1 Sensor arrangement e.g. micromechanical sensor, has cavern provided perpendicular to main extension plane between movable element and substrate, where cavern is formed between intermediate layer and substrate |
| 06/10/2010 | DE102008044270A1 Micromechanical component i.e. micromirror, manufacturing method for use in e.g. mini-projector, involves aligning movable part at angle that is not equal to zero degree and one hundred and eighty degree with respect to base substrate |
| 06/09/2010 | CN201503268U Continuous inclinometer measuring module |