| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 09/02/2010 | DE102005015584B4 Verfahren zur Herstellung eines mikromechanischen Bauteils A process for producing a micro mechanical component |
| 09/02/2010 | CA2753617A1 Digital microfluidic liquid-liquid extraction device and method of use thereof |
| 09/01/2010 | EP2223055A1 Airflow sensor with pitot tube for pressure drop reduction |
| 09/01/2010 | CN201569671U Folding beam type bi-directional micro-inertial sensor |
| 09/01/2010 | CN201569670U Folded-beam type bidirectional micro-inertia sensor |
| 09/01/2010 | CN1618722B Mems having a three-wafer structure |
| 09/01/2010 | CN101819215A Micro-mechanical finger gate capacitor accelerometer with adjustable elastic coefficients |
| 09/01/2010 | CN101819214A Integrated anemograph based on ceramics wafer level package and preparation method thereof |
| 09/01/2010 | CN101817496A Micro-electro-mechanical systems interconnection pins and method for forming the same |
| 09/01/2010 | CN101817495A Micro fluid control chip and preparation method and application thereof |
| 08/31/2010 | US7785422 Self-cleaning adhesive structure and methods |
| 08/26/2010 | WO2010096786A2 Optical tomography system with high-speed scanner |
| 08/26/2010 | WO2010096081A1 Mems-based ftir spectrometer |
| 08/26/2010 | WO2010096020A1 Miniaturized piezoelectric accelerometers |
| 08/26/2010 | WO2010094102A1 Device for grasping and active release of micro and nano objects |
| 08/26/2010 | WO2010035035A3 Microtube arrays |
| 08/26/2010 | US20100216126 Microfluidic device |
| 08/26/2010 | US20100214643 Mems device with integrated via and spacer |
| 08/26/2010 | CA2752878A1 Optical tomography system with high-speed scanner |
| 08/26/2010 | CA2750918A1 Device for grasping and active release of micro and nano objects |
| 08/25/2010 | EP2220486A2 System and method of assessing a property of a flowing fluid |
| 08/25/2010 | EP1255642B1 Method for attaching a micromechanical device to a manifold, and fluid control system produced thereby |
| 08/25/2010 | CN201563214U microphone |
| 08/25/2010 | CN201561986U Full-decoupling dual-axis capacitive micromechanical accelerometer |
| 08/25/2010 | CN201561985U Piezoresistive monolithic integrated tri-axial acceleration transducer |
| 08/25/2010 | CN201561801U Full hollow type light modulation thermal imaging focal planar array having silicon support frame |
| 08/25/2010 | CN101815235A Miniature MEMS condenser microphone packages and fabrication method thereof |
| 08/25/2010 | CN101811657A Micro-electromechanical sensor and manufacturing method |
| 08/25/2010 | CN101811656A MEMS element and method of manufacturing the same |
| 08/25/2010 | CN101392403B Method for preparing gold electrode pair |
| 08/25/2010 | CN101285847B Temperature insensitive optical fibre grating acceleration sensor |
| 08/25/2010 | CN101095239B High temperature electronic device |
| 08/19/2010 | WO2010093261A1 Mechano-sensitive actuator array |
| 08/19/2010 | US20100207411 Mems-based micro and nano grippers with two-axis force sensors |
| 08/19/2010 | DE102009007837A1 Sensormodul und Verfahren zum Herstellen von Sensormodulen Sensor module and method of manufacturing of sensor modules |
| 08/19/2010 | DE102009000529A1 Mikrofluidischer Chip mit Druckmesseinrichtung Microfluidic chip with pressure gauge |
| 08/18/2010 | EP2218677A1 Electrode configuration for pivotable MEMS micromirror |
| 08/18/2010 | EP1499500B1 Translation to rotation conversion in an inkjet printhead |
| 08/18/2010 | CN1764595B Micro-electro-mechanical systems (MEMS) device and system and method of producing the same |
| 08/18/2010 | CN101804960A Ultra-fine cone electrode array and method for manufacturing same |
| 08/18/2010 | CN101804959A Semiconductor package and manufacturing method thereof |
| 08/18/2010 | CN101170002B RF micro-inductance with suspending structure and its making method |
| 08/12/2010 | WO2010090798A2 Substrate bonding with metal germanium silicon material |
| 08/12/2010 | WO2010088761A1 Method and apparatus for manipulating and detecting analytes |
| 08/12/2010 | WO2010057068A3 Method and apparatus for wafer bonding with enhanced wafer mating |
| 08/12/2010 | US20100204830 Self-cleaning adhesive structure and methods |
| 08/12/2010 | US20100202037 System for On-Chip Actuation |
| 08/12/2010 | US20100200782 Microfabricated Elastomeric Valve And Pump Systems |
| 08/12/2010 | DE102008019692B4 Verfahren zur Integration eines Polymer-Funktionsbauteils in ein Silizium-Mikrosystem Method for integrating a polymer-functional component in a silicon microsystems |
| 08/11/2010 | EP2215655A1 Wafer level packaging using flip chip mounting |
| 08/11/2010 | EP2215005A1 Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas |
| 08/11/2010 | CN201550275U Mems microphone |
| 08/11/2010 | CN101801837A Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics |
| 08/11/2010 | CN101798429A Solid electrolyte polymer, actuator using polymer and manufacturing method of the same |
| 08/11/2010 | CN101320081B Micro electro-mechanical system magnetic field sensor and measuring method |
| 08/05/2010 | WO2010088111A2 Bonded microelectromechanical assemblies |
| 08/05/2010 | US20100197522 Microfluidic Chaotic Mixing Systems And Methods |
| 08/05/2010 | US20100196205 Fluidic configuration for flow injection analysis |
| 08/05/2010 | US20100193884 Method of Fabricating High Aspect Ratio Transducer Using Metal Compression Bonding |
| 08/05/2010 | DE102009000950A1 Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zum Betreiben eines solchen Mikrofonbauelements Component having a micromechanical microphone structure and method of operating such a device microphone |
| 08/05/2010 | DE102009000606A1 Mikromechanische Strukturen Micromechanical structures |
| 08/05/2010 | DE102009000599A1 Elektrostatischer Antrieb, Verfahren zum Betreiben eines mikromechanischen Bauteils mit einem elektrostatischen Antrieb und Herstellungsverfahren für einen elektrostatischen Antrieb An electrostatic drive method for operating a micromechanical component with an electrostatic actuator and a manufacturing method for the electrostatic drive |
| 08/05/2010 | DE102009000583A1 Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zum Betreiben eines solchen Bauelements Component having a micromechanical microphone structure and method of operating such a device |
| 08/05/2010 | DE102009000574A1 Sensorvorrichtung Sensor device |
| 08/05/2010 | DE102009000571A1 Sensor device for use with a housing, has housing base body with contact elements, elastic base part connected with housing base body and chip structure arranged on base part |
| 08/04/2010 | CN201540938U Five-bit radio frequency micro-electro-mechanical phase shifter |
| 08/04/2010 | CN101792113A Method and apparatus for protecting wiring and integrated circuit device |
| 08/04/2010 | CN101792112A Micro fluid control detection device based on surface-enhanced Raman scattering active substrate |
| 08/04/2010 | CN101792110A Mems传感器 Mems Sensor |
| 08/04/2010 | CN101792109A Micro inertial sensor with transversely movable electrodes embedded and manufacturing method thereof |
| 08/04/2010 | CN101792108A Large capacitance micro inertial sensor based on slide-film damping and manufacturing method thereof |
| 08/04/2010 | CN101792107A Variable capacitance electronic device and microelectromechanical device incorporating such electronic device |
| 08/03/2010 | US7766459 Multi-coloured printhead nozzle array with rows of nozzle assemblies |
| 08/03/2010 | US7765681 Fabrication method of an RF MEMS switch |
| 07/29/2010 | WO2010083919A2 Integrated circuit and production method therefor |
| 07/29/2010 | US20100187115 Electroosmotic pump with improved gas management |
| 07/29/2010 | US20100186841 Microfluidic dispensing assembly |
| 07/29/2010 | DE102009004725A1 Halbleiterschaltung mit Durchkontaktierung und Verfahren zur Herstellung vertikal integrierter Schaltungen A semiconductor circuit with plated through-hole and methods for making vertically integrated circuits |
| 07/29/2010 | DE102009000429A1 Micro-mechanical device, e.g. for an acceleration sensor for releasing an airbag on a motor vehicle, has a moving element, limiting surfaces and restricting knobs |
| 07/29/2010 | DE102009000416A1 Mikromechanischer Drucksensor mit vertikaler Membranaufhängung The micromechanical pressure sensor with vertical diaphragm suspension |
| 07/29/2010 | DE102009000407A1 Sensorvorrichtung und Herstellungsverfahren für eine Sensorvorrichtung Sensor device and manufacturing method for a sensor device |
| 07/29/2010 | DE102009000389A1 Integrierter Schaltkreis und Herstellungsverfahren hierfür Integrated circuit and manufacturing method thereof |
| 07/29/2010 | DE102004030380B4 Mikromechanischer Drucksensor und Verfahren zum Selbsttest eines solchen The micromechanical pressure sensor and method for self-testing of such |
| 07/29/2010 | DE10004964B4 Mikromechanische Kappenstruktur Micromechanical cap structure |
| 07/28/2010 | EP2211141A2 Optical module with an optical semiconductor element and a movable mirror |
| 07/28/2010 | CN101788605A Wireless-receiving system for detecting microelectronic mechanical microwave frequency and preparation method thereof |
| 07/28/2010 | CN101788569A Optical fiber acceleration transducer probe and acceleration transducer system |
| 07/28/2010 | CN101788567A Multi-axis mems gyroscope having detection directions inclined with respect to the reference axes, and its reading circuit |
| 07/28/2010 | CN101786594A Electronic device package and fabrication method thereo |
| 07/28/2010 | CN101786593A Processing method of differential type high-precision accelerometer |
| 07/28/2010 | CN101786592A Optical module |
| 07/28/2010 | CN101226850B Silicon micro mechanical pressure switch, preparation method and uses thereof |
| 07/27/2010 | US7763975 Flip-chip assembly of protected micromechanical devices |
| 07/27/2010 | US7763211 Method and apparatus for generating large pressures on a microfluidic chip |
| 07/22/2010 | WO2010054216A3 Mems-based capacitive sensor for use in a seismic acquisition system |
| 07/22/2010 | US20100183482 Microfluidics System for Mixing at Least Two Starting Materials |
| 07/22/2010 | DE102009000352A1 Sensor device has housing, sensor chip and evaluation chip, where housing has inner chamber, in which sensor chip and evaluation chip are arranged, and sensor chip is arranged on bottom area of housing |
| 07/22/2010 | DE102009000168A1 Micromechanical structure for rotary sensors, has substrate provided with main extending level, and seismic mass that moves relative to substrate |
| 07/21/2010 | EP1890803B1 Microfluidic circulating device for determining parameters of a physical and/or chemical transformation, and use thereof |
| 07/21/2010 | CN101785103A Low resistance through-wafer via |