B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
12/2002
12/12/2002	US20020186444 Polysilicon microelectronic reflectors and beams and methods of fabricating same
12/12/2002	US20020186108 Micro electromechanical switches
12/12/2002	US20020185947 Micro ion pump for a low-pressure microdevice microenclosure
12/12/2002	US20020185699 MEMS with flexible portions made of novel materials
12/11/2002	EP1263675A1 Three-dimensional suspended integrated microstructure and method for making same
12/11/2002	CN1384042A Method of making suspended microstructure
12/05/2002	WO2002097767A2 Fabrication integration of micro-components
12/05/2002	WO2002096796A2 Membrane for micro-electro-mechanical switch, and methods of making and using it
12/05/2002	WO2002096795A1 Device for light modulation by reflection and method for the production thereof
12/05/2002	US20020182872 Material removal method for forming a structure
12/05/2002	US20020182816 Material removal method for forming a structure
12/05/2002	US20020181847 MEMS device
12/05/2002	US20020181838 Optical MEMS device and package having a light-transmissive opening or window
12/05/2002	US20020181110 Device having a barrier layer located therein and a method of manufacture therefor
12/05/2002	US20020180834 Wide format pagewidth inkjet printer
12/05/2002	US20020180563 Tapered structures for generating a set of resonators with systematic resonant frequencies
12/05/2002	US20020180311 Micro-electromechanical hinged flap structure
12/05/2002	US20020179984 Silicon-based ferroelectric cantilever structure
12/05/2002	US20020179983 Flexure coupling block for motion sensor
12/05/2002	US20020179563 Application of a strain-compensated heavily doped etch stop for silicon structure formation
12/05/2002	US20020179162 Microfluidic actuation method and apparatus
12/05/2002	US20020178818 Acceleration sensor and manufacturing method thereof
12/05/2002	US20020178817 Accelerometer with folded beams
12/05/2002	US20020178800 Apparatus for evaluating electrical characteristics
12/05/2002	DE10122765A1 Elektroakustischer Wandler zur Erzeugung oder Erfassung von Ultraschall, Wandler-Array und Verfahren zur Herstellung der Wandler bzw. der Wandler-Arrays An electroacoustic transducer for generating or detecting ultrasound transducer array and method of manufacturing the transducer or the transducer array
12/05/2002	DE10119073A1 Resonant scanner has drive formed from stator electrode and coil, for exerting force directly onto drive plate, with periodic function adapted to resonant frequency of mirror
12/04/2002	EP1263123A2 Mems block with flexure coupling
12/04/2002	EP1263056A2 Method of controlling stress in a polycrystalline SiGe layer deposited on a substrate
12/03/2002	US6490147 High-Q micromechanical device and method of tuning same
12/03/2002	US6489857 Multiposition micro electromechanical switch
12/03/2002	US6489629 Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same
12/03/2002	US6487908 Micromachined devices with stop members
12/03/2002	US6487864 Cyrogenic inertial micro-electro-mechanical system (MEMS) device
11/2002
11/28/2002	WO2002095800A2 A method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants
11/28/2002	US20020177252 Method of manufacturing semiconductor device capable of sensing dynamic quantity
11/28/2002	US20020176145 Electromechanical conformal grating device with improved optical efficiency and contrast
11/28/2002	US20020174891 Proportional micromechanical valve
11/28/2002	US20020174727 Contact type micro piezoresistive shear-stress sensor
11/28/2002	US20020174724 Micromechanical component
11/27/2002	EP1261023A2 Atomic resolution storage system
11/27/2002	EP1260481A2 Atomic resolution storage system
11/27/2002	EP1259847A1 Semiconductor optoelectronic device with electrically adjustable transfer function
11/27/2002	CN1381397A Frequency output type combined microbeam resonator with self temp ecompensation function
11/26/2002	US6487001 Article comprising wedge-shaped electrodes
11/26/2002	US6487000 Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly
11/26/2002	US6484578 Vibrating beam accelerometer
11/21/2002	WO2002093180A1 Accelerometer strain relief structure
11/21/2002	WO2002093122A2 Sensor arrangement, in particular micro-mechanical sensor arrangement
11/21/2002	WO2002092496A2 High-performance fully-compliant micro-mechanisms for force/displacement amplification
11/21/2002	WO2002082101A8 Micromechanical capacitive acceleration sensor
11/21/2002	WO2002058089A9 Bistable actuation techniques, mechanisms, and applications
11/21/2002	WO2002025630A3 Microfabricated ultrasound array for use as resonant sensors
11/21/2002	WO2001071409A3 Apparatus and method for two-dimensional steered-beam nxm optical switch using single-axis mirror arrays and relay optics
11/21/2002	US20020171909 Mems reflectors having tail portions that extend inside a recess and head portions that extend outside the recess and methods of forming same
11/21/2002	US20020171901 Multi-axis magnetically actuated device
11/21/2002	US20020171327 Microelectromechanical apparatus for elevating and tilting a platform
11/21/2002	US20020171150 Method for producing a micromechanical structure and a micromechanical structure
11/21/2002	US20020171121 Integrated electromechanical switch and tunable capacitor and method of making the same
11/21/2002	US20020170875 Method for production of a semiconductor component and a semiconductor component produced by said method
11/21/2002	US20020170355 Accelerometer strain isolator
11/21/2002	US20020170290 Multi-dimensional micro-electromechanical assemblies and method of making same
11/21/2002	US20020170175 Method for producing micromechanical structures
11/21/2002	DE10123039A1 Sensor arrangement used as a micromechanical sensor comprises a sensor section to deliver sensor signals, and a covering section arranged on the sensor section to form a hermetically sealed sensor inner chamber
11/20/2002	EP1258035A1 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor
11/20/2002	EP1258034A1 A METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE OF SiC
11/20/2002	EP1257496A2 Method for producing a micromechanical component, and a component produced according to said method
11/19/2002	US6483395 Micro-machine (MEMS) switch with electrical insulator
11/19/2002	US6481984 Pump and method of driving the same
11/19/2002	US6481284 Micromachined devices with anti-levitation devices
11/14/2002	WO2002091556A1 Electrostatic actuator
11/14/2002	WO2002091464A1 Optical cross-connect system
11/14/2002	WO2002091402A2 Bistable magnetic actuator
11/14/2002	WO2002090245A2 Methods of forming microstructure devices
11/14/2002	WO2002090244A2 Microstructure devices, methods of forming a microstructure device and a method of forming a mems device
11/14/2002	WO2002090243A2 Thick sandwich wafer for mems fabrication
11/14/2002	WO2002090242A2 Electroacoustic transducer for generating or detecting ultrasound, transducer array and method for the production of the transducer or the transducer array
11/14/2002	WO2002075794A3 A method for making a micromechanical device by using a sacrificial substrate
11/14/2002	WO2002010702A3 Micro-machined absolute pressure sensor
11/14/2002	US20020168278 Valves and pumps for microfluidic systems and method for making microfluidic systems
11/14/2002	US20020167380 Micro-electro mechanical system having single anchor
11/14/2002	US20020167245 Methods and apparatus for diffractive optical processing using an actuatable structure
11/14/2002	US20020167072 Electrostatically actuated micro-electro-mechanical devices and method of manufacture
11/14/2002	US20020166585 Microfluidic regulating device
11/13/2002	EP1256970A1 Micro-electro mechanical system having single anchor
11/13/2002	EP1255980A1 Portable sensor array system
11/13/2002	EP1082740B1 Micro-mechanical elements
11/13/2002	CN1379731A Gas sensor and fabrication method thereof
11/13/2002	CN1379712A Deposited thin film void-column network materials
11/13/2002	CN1379266A Electromechanical conformal optical grating device having improved optical efficiency and contrast
11/13/2002	CN1094204C 可变形反射镜器件及其加工方法 The deformable mirror device and processing method
11/12/2002	US6480320 Microelectromechanical mirror and mirror array
11/12/2002	US6480319 Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays
11/12/2002	US6479315 Process for manufacturing micromechanical and microoptomechanical structures with single crystal silicon exposure step
11/12/2002	US6479314 Method of producing vacuum container
11/12/2002	US6479311 Process for manufacturing micromechanical and microoptomechanical structures with pre-applied patterning
11/12/2002	US6477903 Force detector and acceleration detector and method of manufacturing the same
11/07/2002	WO2002088822A1 Method of fabricating micromachined devices
11/07/2002	WO2002088804A1 Silicon micromachined optical device
11/07/2002	WO2002088631A2 Non-resonant four degrees-of-freedom micromachined gyroscope
11/07/2002	WO2002088551A1 Pyrotechnic microactuators for microsystems

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