| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 04/03/2002 | EP1193529A2 Mirror structure |
| 04/03/2002 | EP1193528A2 Method of manufacturing a mirror structure |
| 04/03/2002 | EP1193527A2 Method of manufacturing a mirror structure |
| 04/03/2002 | EP1193526A1 Mirror structure |
| 04/03/2002 | EP1193523A2 Micro-electro-mechanical mirror structure |
| 04/03/2002 | EP1193522A2 Micro-electro-mechanical mirror structure manufacture |
| 04/03/2002 | EP1193216A1 Nanotweezers and nanomanipulator |
| 04/03/2002 | EP1193215A2 Micromechanical structure |
| 04/03/2002 | CN1343369A IC-compatible parylene MEMS Technology and its application of integrated sensors |
| 04/03/2002 | CN1343318A Cantilevered microstructure methods used apparatus |
| 04/02/2002 | US6366414 Micro-electro-mechanical optical device |
| 04/02/2002 | US6365442 Efficient method of making micro-miniature switch device |
| 04/02/2002 | US6365229 Surface treatment material deposition and recapture |
| 04/02/2002 | US6364453 Thermal actuator |
| 04/02/2002 | US6363712 Gas-driven microturbine |
| 03/28/2002 | WO2002025630A2 Microfabricated ultrasound array for use as resonant sensors |
| 03/28/2002 | WO2002025358A2 Variable transmission multi-channel optical switch |
| 03/28/2002 | WO2002025349A2 Multi-axis magnetically actuated device |
| 03/28/2002 | WO2002024570A1 Micro electro-mechanical systems |
| 03/28/2002 | WO2002024466A1 Freestanding polymer mems structures with anti stiction |
| 03/28/2002 | WO2001077640A3 Methods and devices for storing and dispensing liquids |
| 03/28/2002 | WO2001056919A3 Micro-electro-mechanical-system (mems) mirror device and methods for fabricating the same |
| 03/28/2002 | WO2001045120A3 Variable capacitor and associated fabrication method |
| 03/28/2002 | US20020037601 Production method of a micromachine |
| 03/28/2002 | US20020037221 Thermally activated polymer device |
| 03/28/2002 | US20020035873 Semiconductor dynamic quantity sensor |
| 03/28/2002 | DE10042945A1 Bauelement für Sensoren mit integrierter Elektronik und Verfahren zu seiner Herstellung, sowie Sensor mit integrierter Elektronik Component for sensors with integrated electronics and method for its production, as well as the sensor with integrated electronics |
| 03/27/2002 | EP1191557A2 Integrated adjustable capacitor |
| 03/27/2002 | EP1191382A2 Stacked micromirror structures |
| 03/26/2002 | US6363183 Reconfigurable and scalable intergrated optic waveguide add/drop multiplexing element using micro-opto-electro-mechanical systems and methods of fabricating thereof |
| 03/26/2002 | US6362556 Electrically actuated optical switch having a surface pivotable Mirror |
| 03/26/2002 | US6362512 Microelectromechanical structures defined from silicon on insulator wafers |
| 03/26/2002 | US6362083 Method for fabricating locally reinforced metallic microfeature |
| 03/26/2002 | US6362018 Method for fabricating MEMS variable capacitor with stabilized electrostatic drive |
| 03/26/2002 | US6361331 Spring structure with self-aligned release material |
| 03/26/2002 | US6360605 Micromechanical device |
| 03/21/2002 | WO2002023606A1 Dual position linear displacement micromechanism |
| 03/21/2002 | WO2002023574A1 Direct acting vertical thermal actuator |
| 03/21/2002 | WO2002022496A1 Sensor component comprising an electrically conductive longish element, which is held inside a channel while insulated and in a manner that permits electricity to flow therearound, and a production method therefor |
| 03/21/2002 | WO2002022495A1 Sensor component and method for the production thereof |
| 03/21/2002 | WO2002022494A2 Thin film mems sensors employing electrical sensing and force feedback |
| 03/21/2002 | WO2002022493A2 Direct acting vertical thermal actuator with controlled bending |
| 03/21/2002 | WO2002022492A2 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
| 03/21/2002 | US20020034024 Stacked micromirror structures |
| 03/21/2002 | CA2422007A1 Direct acting vertical thermal actuator |
| 03/21/2002 | CA2421755A1 Dual position linear displacement micromechanism |
| 03/21/2002 | CA2419137A1 Direct acting vertical thermal actuator with controlled bending |
| 03/20/2002 | EP1189092A2 Electrostatically operated optical switch |
| 03/20/2002 | EP1187789A1 Precisely defined microelectromechanical structures and associated fabrication methods |
| 03/19/2002 | US6360036 MEMS optical switch and method of manufacture |
| 03/19/2002 | US6360033 Optical switch incorporating therein shallow arch leaf springs |
| 03/19/2002 | US6358021 Electrostatic actuators for active surfaces |
| 03/19/2002 | US6357299 Micromechanical sensor and method for producing the same |
| 03/14/2002 | WO2002021086A1 Thermal displacement element and radiation detector using the element |
| 03/14/2002 | WO2001087766A3 Apparatus and method for controlled cantilever motion through torsional beams and a counterweight |
| 03/14/2002 | WO2001073934A3 Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods |
| 03/14/2002 | WO2001058804A3 Micromechanical component and corresponding production method |
| 03/14/2002 | WO2001058803A3 Method for producing a micromechanical component, and a component produced according to said method |
| 03/14/2002 | WO2001024228A3 Temporary bridge for micro machined structures |
| 03/14/2002 | US20020030566 Microelecto-mechanical system actuator device and reconfigurable circuits utilizing same |
| 03/14/2002 | US20020029814 Microfabricated elastomeric valve and pump systems |
| 03/14/2002 | DE10042999A1 Positioning device, used for glass microtiter plates for analyzing chemical and biological samples, comprises a holding frame, a support surface partially surrounded by lateral protrusions |
| 03/13/2002 | EP1186214A2 Conservatively printed displays and methods relating to same |
| 03/13/2002 | EP1186011A1 Controlled-stress stable metallization for electronic and electromechanical devices |
| 03/13/2002 | EP1186002A1 Ic-compatible parylene mems technology and its application in integrated sensors |
| 03/13/2002 | EP1185865A2 Micromechanical antibody sensor |
| 03/13/2002 | EP1185482A1 Thermal actuator shaped for more uniform temperature profile |
| 03/12/2002 | US6356524 Method of recording/reproducing an information signal |
| 03/12/2002 | US6355964 Microelectronic integrated sensor |
| 03/12/2002 | US6355498 Thin film resonators fabricated on membranes created by front side releasing |
| 03/12/2002 | US6355181 Method and apparatus for manufacturing a micromechanical device |
| 03/12/2002 | US6354697 Electrostatic typeinkjet head having a vent passage and a manufacturing method thereof |
| 03/07/2002 | WO2002019509A2 Comb drive assembly having comb drive fingers with varying cross-sections and methods of making same |
| 03/07/2002 | WO2002019011A2 Micromechanical optical switch and method of manufacture |
| 03/07/2002 | WO2002018979A2 Magnetically actuated micro-electro-mechanical apparatus and method of manufacture |
| 03/07/2002 | WO2002018785A1 Micro-fluidic system |
| 03/07/2002 | WO2002018756A1 Micro-fluidic actuator |
| 03/07/2002 | WO2002018052A1 Positioning device for microtiter plates |
| 03/07/2002 | US20020028529 Method for manufacturing semiconductor pressure sensor having reference pressure chamber |
| 03/07/2002 | US20020028036 Optical switch |
| 03/07/2002 | US20020027487 Microswitch and method of fabricating the microswitch |
| 03/07/2002 | US20020026830 Electrostatic capacitance type acceleration sensor, electrostatic capacitance type angular acceleration sensor and electrostatic actuator |
| 03/07/2002 | CA2420682A1 Micro-fluidic system |
| 03/06/2002 | EP1184335A2 Device for sensors with integrated electronics and its method of manufacture, and sensor with integrated electronics |
| 03/06/2002 | EP1183566A1 Micromachined electrostatic actuator with air gap |
| 03/06/2002 | EP1183516A1 Platform for chemical or biological analysis with microbalances, analysis device and method using same |
| 02/28/2002 | WO2002017482A2 Micromechanical resonator and filter using the same |
| 02/28/2002 | WO2002017481A2 Micromechanical resonator device |
| 02/28/2002 | WO2002017364A2 Micromechanical multichip module and method of making same |
| 02/28/2002 | WO2002016256A2 Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby |
| 02/28/2002 | WO2002016150A1 Transition metal dielectric alloy materials for mems |
| 02/28/2002 | WO2002016089A2 Fabrication and application of nano-manipulators with induced growth |
| 02/28/2002 | US20020025595 MEMS variable capacitor with stabilized electrostatic drive and method therefor |
| 02/28/2002 | US20020025582 Methods and devices for storing and dispensing liquids |
| 02/28/2002 | US20020025277 For polymer characterization, particularly that of various nucleic acids such as DNA; accuracy |
| 02/28/2002 | US20020024641 Projection system and mirror elements for improved contrast ratio in spatial light modulators |
| 02/28/2002 | US20020023999 Optically controlled MEM switches |
| 02/28/2002 | DE10131645A1 Beschleunigungsschalter Inertia switch |
| 02/28/2002 | CA2420498A1 Micromechanical resonator and filter using the same |
| 02/27/2002 | CN1338116A Micro-relay |