| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
|---|
| 08/08/2002 | US20020104379 Accelerometer with re-entrant grooves |
| 08/08/2002 | US20020104378 Micromachined silicon gyro using tuned accelerometer |
| 08/08/2002 | US20020104377 Dynamic sensor having capacitance varying according to dynamic force applied thereto |
| 08/08/2002 | DE10200873A1 Dynamischer Sensor mit einer sich in Übereinstimmung mit einer darauf ausgeübten dynamischen Kraft ändernden Kapazität Dynamic sensor with a capacity varying in accordance with a dynamic force exerted thereon |
| 08/08/2002 | DE10105187A1 Verfahren zum Erzeugen von Oberflächenmikromechanikstrukturen und Sensor A process for producing surface micromechanical structures and sensor |
| 08/07/2002 | EP1228998A2 Micromechanical device and process for the manufacture of a micromechanical device |
| 08/06/2002 | US6429458 Method of making a micromechanical device from a single crystal semiconductor substrate and monolithic sensor formed thereby |
| 08/06/2002 | US6429034 Method of making high aspect ratio features during surface micromachining |
| 08/06/2002 | US6429033 Process for manufacturing mirror devices using semiconductor technology |
| 08/06/2002 | US6428713 MEMS sensor structure and microfabrication process therefor |
| 08/06/2002 | US6428173 Moveable microelectromechanical mirror structures and associated methods |
| 08/01/2002 | WO2002060045A2 High frequency pulse width modulation driver particularly useful for electrostatically actuated mems array |
| 08/01/2002 | WO2002059977A2 Monolithic switch |
| 08/01/2002 | WO2002059942A2 Actuator and micromirror for fast beam steering and method of fabricating the same |
| 08/01/2002 | WO2002059939A2 Method for fabricating a semiconductor device |
| 08/01/2002 | WO2002059921A1 High-$i(q) micromechanical device and method of tuning same |
| 08/01/2002 | WO2002059678A2 Mems reconfigurable optical grating |
| 08/01/2002 | WO2002059548A1 Filter-based method and system for measuring angular speed of an object |
| 08/01/2002 | WO2002022493A3 Direct acting vertical thermal actuator with controlled bending |
| 08/01/2002 | WO2002022492A3 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
| 08/01/2002 | US20020102743 Apparatus and method for visually identifying micro-forces with a palette of cantilever array blocks |
| 08/01/2002 | US20020102047 Micromechanical optical switch |
| 08/01/2002 | US20020101769 High frequency pulse width modulation driver, particularly useful for electrostatically actuated MEMS array |
| 08/01/2002 | US20020101129 Damped micromechanical device and method for making same |
| 08/01/2002 | US20020100316 Fluid flow sensor |
| 08/01/2002 | CA2403052A1 High-q micromechanical device and method of tuning same |
| 07/31/2002 | EP1227534A1 Small-sized phase shifter and method of manufacture thereof |
| 07/31/2002 | EP1227326A2 Fluid flow sensor |
| 07/31/2002 | EP1227307A1 Thermal displacement element and radiation detector using the element |
| 07/31/2002 | EP1227061A2 Process for the manufacture of a micromechanical device |
| 07/31/2002 | EP1226944A1 Fabrication method |
| 07/31/2002 | EP1226595A1 Optically controlled mem switches |
| 07/31/2002 | EP1226437A1 Cantilever sensors and transducers |
| 07/31/2002 | EP1226090A1 Gas sensor and fabrication method thereof |
| 07/31/2002 | EP1226089A1 Electromechanical component and method for producing said component |
| 07/30/2002 | US6426582 Micromechanical, capacitative ultrasound transducer and method for the manufacture thereof |
| 07/30/2002 | US6426538 Suspended micromachined structure |
| 07/30/2002 | US6426014 Method of manufacturing a thermal bend actuator |
| 07/30/2002 | US6425651 High-density inkjet nozzle array for an inkjet printhead |
| 07/25/2002 | WO2002058137A2 Composite microelectronic spring structure and method for making same |
| 07/25/2002 | WO2002058092A1 Micro-magnetic latching switch with relaxed permanent magnet alignment requirements |
| 07/25/2002 | WO2002058089A1 Bistable actuation techniques, mechanisms, and applications |
| 07/25/2002 | WO2002057824A2 Across-wafer optical mems device and protective lid having across-wafer light-transmissive portions |
| 07/25/2002 | WO2002057799A2 Accelerometer whose seismic mass is shaped as whiffletree |
| 07/25/2002 | WO2002057715A2 Suspended mircomachined structure |
| 07/25/2002 | WO2002057180A2 Soi/glass process for forming thin silicon micromachined structures |
| 07/25/2002 | WO2002057179A2 Fabrication of silicon micro mechanical structures |
| 07/25/2002 | WO2001001025A9 Microfabricated elastomeric valve and pump systems |
| 07/25/2002 | WO2001000523A9 Micro-electromechanical devices and methods of manufacture |
| 07/25/2002 | US20020098613 Monolithic single pole double throw rf mems switch |
| 07/25/2002 | US20020098611 Micro-electromechanical process for fabrication of integrated multi-frequency communication passive components |
| 07/25/2002 | US20020097133 Micro-device with thermal actuator |
| 07/25/2002 | US20020096972 Piezoelectric/electrostrictive device and method of manufacturing same |
| 07/25/2002 | US20020096727 Micromechanical component and method of manufacturing a micromechanical component |
| 07/25/2002 | US20020096488 Method for fabricating a micro-electro-mechanical fluid ejector |
| 07/25/2002 | US20020096421 MEMS device with integral packaging |
| 07/25/2002 | US20020096018 Surface-micromachined rotatable member having a low-contact-area hub |
| 07/25/2002 | DE10102993A1 Production of a micromechanical component comprises preparing a substrate, structuring the front side and partially covering the structured front side with a protective layer |
| 07/24/2002 | EP1225469A2 Integrated micro-opto-electro-mechanical laser scanner |
| 07/24/2002 | EP1225468A2 Optical Routers |
| 07/24/2002 | CN1360521A Sensor for microfluid handling system |
| 07/23/2002 | US6424504 Microactuator, magnetic head device, and magnetic recording apparatus |
| 07/23/2002 | US6424466 Dual cavity MEMS tunable Fabry-Perot filter |
| 07/23/2002 | US6423563 Method for manufacturing semiconductor dynamic quantity sensor |
| 07/23/2002 | US6422011 Thermal out-of-plane buckle-beam actuator |
| 07/18/2002 | WO2002056061A2 Optical mems device and package having a light-transmissive opening or window |
| 07/18/2002 | WO2002055967A1 Micromechanical flow sensor with a tensile coating |
| 07/18/2002 | WO2002055198A2 Microfluidic flow control devices |
| 07/18/2002 | US20020093722 Driver and method of operating a micro-electromechanical system device |
| 07/18/2002 | US20020093548 Thermal actuator |
| 07/18/2002 | US20020093251 Actuator with a flexure arrangement to accommodate a long range of motion |
| 07/18/2002 | US20020093067 Suspended micromachined structure |
| 07/18/2002 | US20020092352 Whiffletree accelerometer |
| 07/18/2002 | DE10100438A1 Manufacturing semiconductor sensor, especially a pressure or acceleration sensor using two single crystal semiconductors to reduce production costs and increase reliability |
| 07/17/2002 | EP1223665A1 Improvements in or relating to micro-machines |
| 07/17/2002 | EP1223664A2 Actuator with a flexure arrangement to accomodate a long range of motion |
| 07/17/2002 | EP1223453A2 Electrostatically actuated micro-electro-mechanical system (MEMS) device |
| 07/17/2002 | EP1222143A1 Method for production of a semiconductor component and a semiconductor component produced by said method |
| 07/17/2002 | EP1222142A1 Electro-mechanical component and method for producing the same |
| 07/17/2002 | EP1178888A4 Actuator control in a micro electro-mechanical liquid ejection device |
| 07/11/2002 | WO2002053290A2 Valves and pumps for microfluidic systems and method for making microfluidic systems |
| 07/11/2002 | WO2002029106A3 Microfluidic devices and methods of use |
| 07/11/2002 | WO2002006152A3 System and method for constraining totally released microcomponents |
| 07/11/2002 | US20020088224 Resonant thermal out-of-plane buckle-beam actuator |
| 07/11/2002 | CA2431237A1 Valves and pumps for microfluidic systems and method for making microfluidic systems |
| 07/10/2002 | EP1221179A1 Strongly textured atomic ridges and dots |
| 07/10/2002 | EP1008161B1 Thermal arched beam microelectromechanical devices and associated fabrication methods |
| 07/09/2002 | US6418006 Wide tuning range variable MEMs capacitor |
| 07/09/2002 | US6417757 Buckle resistant thermal bend actuators |
| 07/09/2002 | US6417021 Method of fabricating a piezoresistive pressure sensor |
| 07/09/2002 | US6415653 Cantilever for use in a scanning probe microscope |
| 07/04/2002 | WO2002052592A2 Mems-switched stepped variable capacitor and method of making game |
| 07/04/2002 | WO2002052329A2 Triple electrode moems tunable filter and fabrication process therefor |
| 07/04/2002 | WO2002051743A2 Thin silicon micromachined structures |
| 07/04/2002 | WO2002051742A2 Micromechanical component and corresponding production method |
| 07/04/2002 | WO2002051741A2 Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method |
| 07/04/2002 | WO2002022494A3 Thin film mems sensors employing electrical sensing and force feedback |
| 07/04/2002 | WO2001099098A3 Thermomechanical in-plane microactuator |
| 07/04/2002 | WO2001077001A3 Microelectromechanical apparatus for elevating and tilting a platform |
| 07/04/2002 | WO2001036321A9 Apparatus and method for forming a membrane with nanometer scale pores |