| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 09/10/2002 | US6446486 Micromachine friction test apparatus |
| 09/06/2002 | WO2002068849A1 Microfluidic valve and microactuator for a microvalve |
| 09/06/2002 | WO2002068319A2 Bi-stable micro-actuator and optical switch |
| 09/06/2002 | WO2002052329A3 Triple electrode moems tunable filter and fabrication process therefor |
| 09/06/2002 | WO2002012925A3 Micromirror elements, package for the micromirror elements, and protection system therefor |
| 09/06/2002 | CA2438727A1 Bi-stable micro-actuator and optical switch |
| 09/05/2002 | US20020123033 Velocity independent analyte characterization |
| 09/05/2002 | US20020122238 Capacitively coupled micromirror |
| 09/05/2002 | US20020121951 Micro-magnetic latching switch with relaxed permanent magnet alignment requirements |
| 09/05/2002 | US20020121529 High-performance system for the parallel and selective dispensing of micro-droplets, transportable cartridge as well as dispensing kit, and applications of such a system |
| 09/05/2002 | US20020121502 Method for achieving improved selectivity in an etching process |
| 09/03/2002 | US6445488 Micro-mirror device and optical pick-up system of the same |
| 09/03/2002 | US6445053 Micro-machined absolute pressure sensor |
| 09/03/2002 | US6444543 Forming semiconductor chips surrounded by peripheral grooves for separating into individual pieces on substrate surface, pasting protecting sheet on surface so sheet is bent along and adheres to bottom walls of grooves, dicing along grooves |
| 09/03/2002 | US6444488 Comprising a fixed plate and a deformable membrane which are located opposite each other, which comprises the following depositing a first metal layer on an oxide layer, depositing a metal ribbon depositing a sacrificial resin layer generating, |
| 09/03/2002 | US6444135 Method to make gas permeable shell for MEMS devices with controlled porosity |
| 09/03/2002 | US6443901 Capacitive micromachined ultrasonic transducers |
| 08/29/2002 | WO2002067293A2 Microelectromechanical systems (mems) device including an analog or a digital |
| 08/29/2002 | WO2002043163A3 Strain/electrical potential transducer |
| 08/29/2002 | WO2002041622A3 Method and apparatus for micro-machined sensors using enhanced modulated integrative differential optical sensing |
| 08/29/2002 | WO2000067063A9 Moveable microelectromechanical mirror structures |
| 08/29/2002 | US20020119589 Method of manufacturing a micromechanical component |
| 08/29/2002 | US20020118850 Micromachine directional microphone and associated method |
| 08/29/2002 | US20020118429 Mirror rocking member for optical deflector |
| 08/29/2002 | US20020117728 Bonded wafer optical MEMS process |
| 08/29/2002 | US20020117643 Microfluidic valve and microactuator for a microvalve |
| 08/28/2002 | EP1234799A2 Tiltable-body apparatus and method of fabricating the same |
| 08/28/2002 | EP1233927A1 Apparatus and method for forming a membrane with nanometer scale pores |
| 08/27/2002 | US6442307 Solder-packaged optical MEMs device and method for making the same |
| 08/27/2002 | US6441449 MEMS variable capacitor with stabilized electrostatic drive and method therefor |
| 08/27/2002 | US6441405 Micro-mechanical elements |
| 08/27/2002 | US6441360 MEMS optical isolators |
| 08/27/2002 | US6440820 Process flow for ARS mover using selenidation wafer bonding after processing a media side of a rotor wafer |
| 08/27/2002 | US6440767 Monolithic single pole double throw RF MEMS switch |
| 08/27/2002 | US6440766 Microfabrication using germanium-based release masks |
| 08/27/2002 | US6439728 Multimirror stack for vertical integration of MEMS devices in two-position retroreflectors |
| 08/27/2002 | US6439693 Thermal bend actuator |
| 08/27/2002 | US6438954 Multi-directional thermal actuator |
| 08/22/2002 | WO2002065187A2 Method for making an optical micromirror and micromirror or array of micromirrors obtained by said method |
| 08/22/2002 | WO2002065186A2 Pivoting optical micromirror, array for such micromirrors and method for making same |
| 08/22/2002 | WO2002064497A1 Gyroscope and fabrication method thereof |
| 08/22/2002 | WO2002064496A2 Method for forming microelectronic spring structures on a substrate |
| 08/22/2002 | WO2002064495A2 Enhanced sacrificial layer etching technique for microstructure release |
| 08/22/2002 | WO2002017364A3 Micromechanical multichip module and method of making same |
| 08/22/2002 | US20020115198 Microfabricated ultrasound array for use as resonant sensors |
| 08/22/2002 | US20020114058 Light-transmissive substrate for an optical MEMS device |
| 08/22/2002 | US20020114053 Tiltable-body apparatus, and method of fabricating the same |
| 08/22/2002 | US20020113281 MEMS device having an actuator with curved electrodes |
| 08/22/2002 | US20020112538 Micromechanical component |
| 08/22/2002 | DE10106715A1 Mikromechanisches Bauelement und Verfahren zu seiner Herstellung Micromechanical component and process for its preparation |
| 08/22/2002 | DE10104868A1 Mikromechanisches Bauelement sowie ein Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component as well as a process for producing a micromechanical component |
| 08/22/2002 | CA2437817A1 Method for making an optical micromirror and micromirror or array of micromirrors obtained by said method |
| 08/22/2002 | CA2437816A1 Pivoting optical micromirror, array for such micromirrors and method for making same |
| 08/21/2002 | EP1233444A2 Membrane dielectric isolation ic fabrication |
| 08/21/2002 | EP1232996A2 Micromechanical device and process for its manufacture |
| 08/21/2002 | EP1232866A1 Fluid ejection systems and methods with secondary dielectric fluid |
| 08/21/2002 | EP1232563A1 Time base comprising an integrated micromechanical ring resonator |
| 08/21/2002 | CN1365504A Microelectromechanical relay and method for production thereof |
| 08/21/2002 | CN1365009A Method for producing micro structure |
| 08/20/2002 | US6437965 Electronic device including multiple capacitance value MEMS capacitor and associated methods |
| 08/20/2002 | US6437902 Optical beam steering switching system |
| 08/20/2002 | US6436821 Method for producing a micromechanical structure and a micromechanical structure |
| 08/20/2002 | US6436794 Process flow for ARS mover using selenidation wafer bonding before processing a media side of a rotor wafer |
| 08/20/2002 | US6435664 Nozzle arrangement that includes a thermal actuator for an ink jet printhead |
| 08/15/2002 | WO2002063657A2 Microelectronic mechanical system (mems) switch and method of fabrication |
| 08/15/2002 | WO2002063242A1 Micromachined silicon gyro using tuned accelerometer |
| 08/15/2002 | WO2002062699A1 Microelectromechanical mirror and mirror array |
| 08/15/2002 | WO2002062698A2 Method for producing surface micromechanical structures, and sensor |
| 08/15/2002 | WO2002007884A3 Methods for liquid metering in microchannels |
| 08/15/2002 | WO2001082476A3 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus |
| 08/15/2002 | WO2001035484A9 Minute electromechanical actuation and fluid control devices and integrated systems based on low temperature co-fired ceramic (ltcc) tape technology |
| 08/15/2002 | US20020111031 Deep reactive ion etching process and microelectromechanical devices formed thereby |
| 08/15/2002 | US20020110948 Defined sacrifical region via ion implantation for micro-opto-electro-mechanical system (MOEMS) applications |
| 08/15/2002 | US20020110761 Photolithography patterns |
| 08/15/2002 | US20020110758 Overcoating elastic material onto substrate; forming stress profiles; photolithographical patterning |
| 08/15/2002 | US20020110757 Low cost integrated out-of-plane micro-device structures and method of making |
| 08/15/2002 | US20020109419 Method for manufacturing a microintegrated structure with buried connections, in particular an integrated microactuator for a hard-disk drive unit |
| 08/15/2002 | US20020108442 Micromechanical structure |
| 08/15/2002 | CA2435817A1 Micromachined silicon gyro using tuned accelerometer |
| 08/14/2002 | EP1231617A1 Out-of-plane micro-device structures |
| 08/14/2002 | EP1231616A1 Out-of-plane micro-device structures |
| 08/14/2002 | EP1231182A2 Out-of-plane micro-device structures |
| 08/14/2002 | EP1230689A1 Piezoelectric macro-fiber composite actuator and manufacturing method |
| 08/14/2002 | EP1230681A2 Micro electro mechanical system controlled organic led and pixel arrays and method of manufacturing same |
| 08/14/2002 | EP1230660A2 Cmos-compatible mem switches and method of making |
| 08/14/2002 | EP1230574A1 A deflectable spatial light modulator having superimposed hinge and deflectable element |
| 08/14/2002 | CN1364141A Nanotweezers and nanomanipulator |
| 08/14/2002 | CN1364140A Thermal bend actuator for micro-electro-mechanical device |
| 08/13/2002 | US6433463 Method and apparatus for stress pulsed release and actuation of micromechanical structures |
| 08/13/2002 | US6433401 Microfabricated structures with trench-isolation using bonded-substrates and cavities |
| 08/13/2002 | US6433390 Bonded substrate structures and method for fabricating bonded substrate structures |
| 08/13/2002 | US6431212 Valve for use in microfluidic structures |
| 08/08/2002 | WO2002061487A2 Optical switch based on rotating vertical micro-mirror |
| 08/08/2002 | WO2002061486A1 Bulk micromachining process for fabricating an optical mems device with integrated optical aperture |
| 08/08/2002 | WO2002006152B1 System and method for constraining totally released microcomponents |
| 08/08/2002 | US20020106834 Method of fabricating micromachined devices |
| 08/08/2002 | US20020105396 Microelectromechanical micro-relay with liquid metal contacts |
| 08/08/2002 | US20020105393 Micromechanical resonator device and micromechanical device utilizing same |
| 08/08/2002 | US20020104990 Across-wafer optical MEMS device and protective lid having across-wafer light-transmissive portions |
| 08/08/2002 | US20020104823 Fabrication integration of micro-components |