| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 05/02/2002 | WO2001089695A3 Valve for use in microfluidic structures |
| 05/02/2002 | US20020050880 Electronically switching latching micro-magnetic relay and method of operating same |
| 05/02/2002 | US20020050763 Slider displacement direction conversion mechanism in electrostatic actuator |
| 05/02/2002 | US20020050744 Magnetically actuated micro-electro-mechanical apparatus and method of manufacture |
| 05/02/2002 | EP1201602A2 Thermal out-of-plane buckle-beam actuator |
| 05/02/2002 | EP1200865A1 Micro-machined mirror device |
| 05/02/2002 | EP1200198A1 Actuator component for a microspray and its production process |
| 05/02/2002 | EP1171378A4 A method of manufacturing a thermal bend actuator |
| 05/02/2002 | EP0875010B1 Method and apparatus for using an array of grating light valves to produce multicolor optical images |
| 05/02/2002 | DE10051973A1 Micromechanical component has seismic mass sprung-mounted by double U spring to be deflectable by external acceleration, stop(s) protrusion for limiting deflection of double U spring |
| 05/01/2002 | CN1347387A Thermal actuator shaped for more uniform temp. profile |
| 05/01/2002 | CN1347386A Actuator element |
| 05/01/2002 | CN1347369A Actuator control in micro electromechanical liquid injection device |
| 04/30/2002 | US6380600 Micro-electromechanical arrangement |
| 04/30/2002 | US6379990 Method of fabricating a micromechanical semiconductor configuration |
| 04/30/2002 | US6379510 Thin film deposition and mirror light beams |
| 04/25/2002 | WO2002033458A2 Process for integrating dielectric optical coatings into microelectromechanical devices |
| 04/25/2002 | WO2002032806A1 Thermoelastic actuator design |
| 04/25/2002 | WO2002012114A3 Ceramic microelectromechanical structure |
| 04/25/2002 | WO2002010684A3 Three-axes sensor and a method of making same |
| 04/25/2002 | WO2002010064A3 A MEM gyroscope and a method of making same |
| 04/25/2002 | WO2001094920A3 3d array of integrated cells for the sampling and detection of air bound chemical and biological species |
| 04/25/2002 | US20020048839 Process for integrating dielectric optical coatings into micro-electromechanical devices |
| 04/25/2002 | US20020048531 Deposited thin films and their use in detection, attachment, and bio-medical applications |
| 04/25/2002 | US20020048426 MEMS optical switches having obliquely angled inputs and outputs relative to a face thereof and moveable reflectors with parallel positions therein and methods of forming same |
| 04/25/2002 | US20020048344 Method of manufacturing a window transparent to electron rays, and window transparent to electron rays |
| 04/25/2002 | US20020047564 Display with micro light modulator |
| 04/25/2002 | US20020047490 Electrically actuated optical switch having a surface pivotable mirror |
| 04/25/2002 | US20020047172 Transition metal dielectric alloy materials for MEMS |
| 04/25/2002 | US20020046985 Process for creating an electrically isolated electrode on a sidewall of a cavity in a base |
| 04/25/2002 | US20020046605 Micromachined devices and connections over a substrate |
| 04/25/2002 | US20020046603 Micromachined devices with anti-levitation devices |
| 04/25/2002 | US20020046602 Micromachined devices with stop members |
| 04/25/2002 | DE10151376A1 Dynamic semiconductor acceleration sensor for automotive airbag release has two movable electrodes in cruciform arrangement to form condensers |
| 04/24/2002 | EP1199174A1 Electrostatically actuated devices |
| 04/24/2002 | EP1198695A1 Method for producing a torsion spring |
| 04/24/2002 | CN1346503A Electronic devices including micromechanical switches |
| 04/24/2002 | CN1083569C Device for measuring volume of flowing medium |
| 04/23/2002 | US6377438 Hybrid microelectromechanical system tunable capacitor and associated fabrication methods |
| 04/23/2002 | US6375901 Chemico-mechanical microvalve and devices comprising the same |
| 04/18/2002 | WO2002030809A2 Micromachined component and method of manufacture |
| 04/18/2002 | WO2002007482A3 Micro electro mechanical system controlled organic led and pixel arrays and method of using and of manufacturing same |
| 04/18/2002 | WO2001097562A3 Capacitive micromachined ultrasonic transducers |
| 04/18/2002 | WO2001097559A3 Capacitive micromachined ultrasonic transducers. |
| 04/18/2002 | WO2000074932A9 Deposited thin film void-column network materials |
| 04/18/2002 | US20020045297 Membrane 3D IC fabrication |
| 04/18/2002 | US20020045287 Production of diaphragms |
| 04/18/2002 | US20020045272 Device for detecting particles in fluid |
| 04/18/2002 | US20020044814 Keyboard |
| 04/18/2002 | US20020044327 Optical scanner |
| 04/18/2002 | US20020043895 Piezoelectric micro-transducers, methods of use and manufacturing methods for the same |
| 04/18/2002 | US20020042985 Thermal bend actuator |
| 04/18/2002 | DE10146574A1 Herstellungsverfahren eines Mikromaterialstücks Process for manufacturing a micro-patch |
| 04/18/2002 | DE10051315A1 Micromechanical component used as an acceleration or rotation sensor in vehicles has functional components hanging above a substrate in a functional layer |
| 04/18/2002 | DE10050810A1 Verfahren zur Herstellung eines elektronenstrahltransparenten Fensters sowie elektronenstrahltransparentes Fenster A process for producing an electron transparent window, and electron transparent window |
| 04/18/2002 | DE10046510A1 Sensorbauteil mit einem in einem Kanal isoliert, umströmbar gelagerten, elektrisch leitenden, länglichen Element und Herstellverfahren hierfür Sensor component having a isolated in a channel flow around mounted, electrically conductive, elongated element and manufacturing method thereof |
| 04/17/2002 | EP1197778A2 Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor |
| 04/17/2002 | EP1197470A2 Method for the manufacture of windows transparent to electron beams and windows transparent to electron beams |
| 04/17/2002 | EP1196935A1 High voltage micromachined electrostatic switch |
| 04/17/2002 | EP1196932A1 Arc resistant high voltage micromachined electrostatic switch |
| 04/17/2002 | EP1196788A1 Merged-mask micro-machining process |
| 04/17/2002 | EP1196349A1 Micro-electromechanical devices and methods of manufacture |
| 04/17/2002 | CN1344670A MIniature machinery structure |
| 04/16/2002 | US6373682 Electrostatically controlled variable capacitor |
| 04/16/2002 | US6373115 Micromechanical structure, sensor and method for manufacturing the same |
| 04/16/2002 | US6370954 Semiconductor integrated inertial sensor with calibration microactuator |
| 04/16/2002 | CA2253672C Semiconductor bridge device and method of making the same |
| 04/11/2002 | WO2002029106A2 Microfluidic devices and methods of use |
| 04/11/2002 | WO2002028766A2 Method of trimming micro-machined electromechanical sensors (mems) devices |
| 04/11/2002 | WO2001087767A3 Micro-electrocmechamical sensor (mems) resonator |
| 04/11/2002 | WO2001082479A3 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus |
| 04/11/2002 | WO2001082478A3 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices |
| 04/11/2002 | WO2001082477A3 Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator |
| 04/11/2002 | WO2001082467A3 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices |
| 04/11/2002 | US20020041729 Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly |
| 04/11/2002 | DE10047500A1 Micromechanical membrane used in the production of micromechanical pressure sensors comprises a partially n-doped p-substrate on its surface, and n-epitaxial layers which are p-doped in the membrane region and are arranged on the substrate |
| 04/10/2002 | EP1195887A2 Electrostatic actuator driven slider displacement direction conversion mechanism |
| 04/10/2002 | EP1194994A1 Assembly for the wireless supply of electric energy to a number of sensors and/or actuators, the sensors and/or actuators therefor and a system for a machine which has a number of sensors and/or actuators |
| 04/10/2002 | EP1194829A1 Electrical device |
| 04/10/2002 | EP1194693A2 Microfabricated elastomeric valve and pump systems |
| 04/10/2002 | EP1194369A1 Thermal bend actuator for a micro electro-mechanical device |
| 04/10/2002 | EP0897523B1 Semiconductor bridge device and method of making the same |
| 04/10/2002 | CN1343895A Light switch |
| 04/09/2002 | US6369931 Method for manufacturing a micromechanical device |
| 04/09/2002 | US6369379 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 04/09/2002 | US6369374 Filter including a micro-mechanical resonator |
| 04/09/2002 | US6368885 Method for manufacturing a micromechanical component |
| 04/09/2002 | US6368079 Piezoelectric micropump |
| 04/09/2002 | US6367252 Microelectromechanical actuators including sinuous beam structures |
| 04/04/2002 | WO2002012116A3 Bonded wafer optical mems process |
| 04/04/2002 | WO2002005413A3 Mems actuator with lower power consumption and lower cost simplified fabrication |
| 04/04/2002 | WO2001094253A3 Bulk silicon structures with thin film flexible elements |
| 04/04/2002 | WO2001078096A3 Magnetically actuated microelectromechanical systems actuator |
| 04/04/2002 | WO2001046066A3 Sensor with at least one micromechanical structure and method for the production thereof |
| 04/04/2002 | US20020039060 Actuator |
| 04/04/2002 | DE10143968A1 A method of producing a vacuum container with an internal vacuum cavity |
| 04/04/2002 | DE10046622A1 Making semiconductor-based, thermally-insulated membrane sensor unit, defines porous regions between sensor structures, with further porosity or void below them |
| 04/04/2002 | DE10046621A1 Membrane sensor array involves masking locations for thermal decoupling bridges, making unprotected semiconductor porous and producing membrane region |
| 04/04/2002 | DE10046509A1 Sensorbauteil und Verfahren zu seiner Herstellung Sensor component and method for its preparation |
| 04/03/2002 | EP1193530A2 Method of manufacturing a mirror structure |