Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
05/2003
05/20/2003US6565526 Bistable microvalve and microcatheter system
05/15/2003WO2003041133A2 Electrothermal self-latching mems switch and method
05/15/2003WO2003040801A1 Digital optical switch apparatus and process for manufacturing same
05/15/2003WO2003040338A2 Micro-scale interconnect device with internal heat spreader and method for fabricating same
05/15/2003WO2003039859A1 Fibre-reinforced microactuator
05/15/2003WO2003028212A3 Microbridge structures for ultra-high frequency mem resonator
05/15/2003WO2002063657A3 Microelectronic mechanical system (mems) switch and method of fabrication
05/15/2003WO2002036485A8 Valve integrally associated with microfluidic liquid transport assembly
05/15/2003US20030092016 Microfluidics apparatus and methods for use thereof
05/15/2003US20030090543 Printhead chip having a plurality of nozzle arrangements that each incorporate a motion transmitting structure
05/15/2003US20030090172 Micro-electro-mechanical-system (mems) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same
05/15/2003US20030089182 Flexible structure with integrated sensor/actuator
05/14/2003EP1310808A2 Monolithic reconfigurable optical multiplexer systems and methods
05/14/2003EP1310380A1 A micro-mechanical device and method for producing the same
05/14/2003CN1417826A Electrostatic driver and electrostatic micro relay and other device with the driver
05/14/2003CN1417615A Optical scanning head and its making process
05/14/2003CN1417105A Micromechanism and its manufacture
05/13/2003US6563238 Comb structure using magnetic force and actuator and inertia sensor both using the comb structure
05/13/2003US6563184 Single crystal tunneling sensor or switch with silicon beam structure and a method of making same
05/13/2003US6563106 Micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same
05/13/2003US6561627 Thermal actuator
05/13/2003US6561224 Microfluidic valve and system therefor
05/13/2003US6560861 Microspring with conductive coating deposited on tip after release
05/08/2003WO2003038920A2 Curved electro-active actuators
05/08/2003WO2003037782A2 Micromechanical component and method for producing same
05/08/2003WO2002082096A3 Sensor
05/08/2003WO2002051742A3 Micromechanical component and corresponding production method
05/08/2003US20030087468 Membrane structures for micro-devices, micro-devices including same and methods for making same
05/08/2003US20030086641 Monolithic reconfigurable optical multiplexer systems and methods
05/08/2003US20030085450 For use in telecommunications equipment by radio relay channels; for producing resonant filters that one wishes to tune to different frequencies; capacitors
05/08/2003US20030085438 Micro-mechanical device and method for producing the same
05/08/2003US20030085109 MEMS switch having hexsil beam and method of integrating MEMS switch with a chip
05/07/2003EP1308977A2 Electrostatic actuator, and electrostatic microrelay and other devices using the same
05/07/2003EP1308972A1 Variable capacity device and method of manufacturing
05/07/2003EP1307904A2 Methods for reducing the curvature in boron-doped silicon micromachined structures
05/07/2003EP1307750A1 Micromechanical component
05/07/2003EP1307398A1 Assembly having a variable capacitance
05/06/2003US6560002 Optical switch
05/06/2003US6559487 Signal processing circuitry connected with flip chip; detecting inertial angular velocity
05/06/2003US6557414 Inertia sensor and method of fabricating the same
05/06/2003US6557413 Micromechanical structure
05/02/2003EP1306869A1 Electrostatic actuator
05/02/2003EP1306704A1 Piezoelectrically driven, liquid-actuated optical cross-bar switch
05/02/2003EP1306350A2 Microelectrical mechanical system with improved beam suspension
05/02/2003EP1306349A1 Method of manufacture of an array of membrane sensors and array of membrane sensors
05/02/2003EP1306348A1 Method for the manufacture of a membran sensor unit and membran sensor unit
05/02/2003EP1305640A2 A mem sensor and a method of making same
05/02/2003EP1305586A2 Micro-machined absolute pressure sensor
05/02/2003EP1305570A2 Three-axes sensor and a method of making same
05/02/2003EP1305258A2 Ceramic microelectromechanical structure
05/02/2003EP1305257A2 A tunneling sensor or switch and a method of making same
05/02/2003EP1305256A2 A mem gyroscope and a method of making same
05/01/2003WO2003036767A2 Parallel, individually addressable probes for nanolithography
05/01/2003WO2003036737A2 Stiffened surface micromachined structures and process for fabricating the same
05/01/2003WO2003035543A1 A method of fabrication of micro-devices
05/01/2003WO2003035542A2 Method of fabricating vertical actuation comb drives
05/01/2003WO2003021842A3 Hybrid circuit having nanotube electromechanical memory
05/01/2003WO2002084732A3 Method of manufacturing an electronic device
05/01/2003WO2002059942A3 Actuator and micromirror for fast beam steering and method of fabricating the same
05/01/2003WO2002057799A3 Accelerometer whose seismic mass is shaped as whiffletree
05/01/2003WO2002037162A3 Gimbaled micro-mirror positionable by thermal actuators
05/01/2003US20030082917 Method of fabricating vertical actuation comb drives
05/01/2003US20030080839 Method for improving the power handling capacity of MEMS switches
05/01/2003US20030080650 Longitudinal piezoelectric optical latching relay
05/01/2003US20030080214 Liquid droplet spray device
05/01/2003US20030080082 Dry etch release of MEMS structures
05/01/2003CA2464582A1 A method of fabrication of micro-devices
04/2003
04/29/2003US6556766 MEMS see-saw array for dynamic gain equalization of DWDM systems
04/29/2003US6556741 MEMS optical switch with torsional hinge and method of fabrication thereof
04/29/2003US6556737 Silicon bulk-micromachined electromagnetic fiber-optics bypass microswitch
04/29/2003US6556418 Micromechanical component and process for its fabrication
04/29/2003US6555404 Method of manufacturing a dual wafer tunneling gyroscope
04/29/2003US6555201 Method for fabricating a microelectromechanical bearing
04/24/2003WO2003034452A1 Variable capacitance capacitor device
04/24/2003US20030077876 Method of anodically bonding a multilayer device with a free mass
04/24/2003US20030077023 Piezoelectrically driven, liquid-actuated optical cross-bar switch
04/24/2003US20030077020 Bi-stable micro-actuator and optical switch
04/24/2003US20030076383 Printhead chip that incorporates covering formations for actuators of the printhead chip
04/24/2003US20030076006 Electrostatic actuator
04/24/2003US20030075768 Microelectromechanical switch
04/23/2003EP1304768A2 Spring structure
04/23/2003EP1304309A2 Method for the manufacture of a micromechanical device with a moving structure
04/23/2003EP1303352A2 Methods for liquid metering in microchannels
04/23/2003EP0864094B1 Structure comprising an insulated part in a solid substrate and method for producing same
04/23/2003CN1413261A Deposited thin films and their use in detection, attachment and bio-medical application
04/22/2003US6552839 Optical switch
04/22/2003US6551851 Production of diaphragms over a cavity by grinding to reduce wafer thickness
04/17/2003WO2003032402A1 Mems hybrid structure having flipped silicon with external standoffs
04/17/2003WO2003031991A1 Tunnel mechanical vibration nanotransducer and method for producing said nanotransducer
04/17/2003WO2003031912A2 Tuning fork gyroscope
04/17/2003WO2003031321A2 Hybrid mems fabrication method and new optical mems device
04/17/2003WO2003031320A1 Thin film structural member, method of manufacturing the member, and switching element using the member
04/17/2003WO2003031319A2 Micromechanical components with reduced static friction
04/17/2003WO2003031318A2 Method for producing cavities having an optically transparent wall
04/17/2003WO2003031317A2 Micromechanical sensor having a self-test function and optimization method
04/17/2003WO2003031316A2 Mems structure with surface potential control
04/17/2003WO2001088594A3 A mems mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabrication
04/17/2003US20030073261 Self-aligned vertical combdrive actuator and method of fabrication
04/17/2003US20030071330 Strength and durability of a spring structure is increased by providing a stress-balancing pad formed on the unlifted anchor portion of the spring metal finger
04/17/2003US20030071235 Passive microvalve
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