Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
04/2003
04/17/2003US20030071015 Etch process for etching microstructures
04/17/2003US20030070677 Compositions and methods for liquid metering in microchannels
04/16/2003EP1301346A1 Buckle resistant thermal bend actuators
04/16/2003EP1003973B1 Micro pump comprising an inlet control member for its self-priming
04/16/2003EP0912883B1 Vane-type micromachined silicon micro-flow meter
04/16/2003CN1410346A Electrostatic actuating micro-holder
04/15/2003US6548322 Micromachined gas-filled chambers and method of microfabrication
04/15/2003US6548321 Method of anodically bonding a multilayer device with a free mass
04/15/2003US6546801 Micro-machined mechanical structure and device incorporating the structure
04/10/2003WO2003029012A1 A keyboard
04/10/2003WO2003029009A1 High-density inkjet nozzle array for an inkjet printhead
04/10/2003WO2003009318A8 Support with getter-material for microelectronic, microoptoelectronic or micromechanical device
04/10/2003WO2002093122A3 Sensor arrangement, in particular micro-mechanical sensor arrangement
04/10/2003US20030068838 Silicon pressure micro-sensing device and the fabrication process
04/10/2003US20030068655 Microcantilever apparatus and methods for detection of enzymes
04/10/2003US20030066351 Tuning fork gyroscope
04/09/2003EP1299939A2 Mems actuator with lower power consumption and lower cost simplified fabrication
04/09/2003EP1299761A2 Optical mems switching array with embedded beam-confining channels and method of operating same
04/09/2003CN1409118A Acceleration transducer
04/08/2003US6545796 Article comprising a freestanding micro-tube and method therefor
04/08/2003US6545385 Microelectromechanical apparatus for elevating and tilting a platform
04/08/2003US6544811 Micromachined device having electrically isolated components and a method for making the same
04/08/2003US6544810 Capacitively sensed micromachined component and method of manufacturing
04/08/2003US6544655 Semiconductors reduced; silicon wafer having reduced out-of-plane curvature
04/08/2003US6543286 High frequency pulse width modulation driver, particularly useful for electrostatically actuated MEMS array
04/08/2003US6543087 Micro-electromechanical hinged flap structure
04/03/2003WO2003028212A2 Microbridge structures for ultra-high frequency mem resonator
04/03/2003WO2003028058A1 A micromechanical switch and method of manufacturing the same
04/03/2003WO2003027750A1 Micro-actuator for mirror
04/03/2003WO2003027643A1 Armor coated mems devices
04/03/2003WO2003027508A1 Low power integrated pumping and valving arrays for microfluidic systems
04/03/2003WO2003027003A2 Methods of nanotube films and articles
04/03/2003WO2003027002A2 Method for the production of a micromechanical structure
04/03/2003WO2002059977A3 Monolithic switch
04/03/2003WO2002025630A9 Microfabricated ultrasound array for use as resonant sensors
04/03/2003US20030064422 Method and system for collecting and transmitting chemical information
04/03/2003US20030064149 Dissolving a coating material in carbon dioxide(CO2); depositing the dissolved material on at least one exposed surface of the device
04/03/2003US20030062961 Center-mass-reduced microbridge structures for ultra-high frequency MEM resonator
04/03/2003US20030062807 Ceramic device
04/03/2003US20030062579 Micromechanical diaphragm
04/03/2003US20030062480 Infrared ray detector having a vacuum encapsulation structure
04/03/2003US20030062193 Flexible structure with integrated sensor/actuator
04/03/2003US20030061687 Simultaneously introducing target solution at a known concentration into the chambers of a microfluidic device; solvent concentration is varied in each of the chambers to provide a large number of crystallization environments
04/03/2003CA2454895A1 Methods of nanotube films and articles
04/02/2003EP1298442A1 Acceleration sensor
04/02/2003EP1296886A2 Micromechanical component and method for producing the same
04/02/2003EP1204842A4 Apparatus and method for visually identifying micro-forces with a palette of cantilever array blocks
04/02/2003CN1408120A Variable capacitor and associated fabrication method
04/02/2003CN1408073A Semiconductor optoelectronic device with electrically adjustable transfer function
04/01/2003US6542829 Characterization of microelectromechanical structures
04/01/2003US6541892 Actuator with a flexure arrangement to accommodate a long range of motion
04/01/2003US6541834 Silicon pressure micro-sensing device and the fabrication process
04/01/2003US6541833 Micromechanical component with sealed membrane openings and method of fabricating a micromechanical component
04/01/2003US6540332 Motion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead
04/01/2003US6540331 Actuating mechanism which includes a thermal bend actuator
03/2003
03/27/2003WO2003025628A2 Enhance thermal stability through optical segmentation
03/27/2003WO2003024864A1 Micro-actuator, micro-actuator device, optical switch and optical switch array
03/27/2003WO2002052592A3 Mems-switched stepped variable capacitor and method of making game
03/27/2003WO2002010684A9 Three-axes sensor and a method of making same
03/27/2003US20030059973 Micromechanical switch and method of manufacturing the same
03/27/2003US20030058514 Electro-mechanical grating device having a continuously controllable diffraction efficiency
03/27/2003US20030057533 Amorphous silicon sensor with micro-spring interconnects for achieving high uniformity in integrated light-emitting sources
03/27/2003US20030057513 Membrane IC fabrication
03/27/2003US20030057451 Aggregate of Semicnductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same
03/27/2003US20030057447 Acceleration sensor
03/27/2003US20030057412 Armor coated MEMS devices
03/27/2003US20030057391 Low power integrated pumping and valving arrays for microfluidic systems
03/27/2003US20030057350 Large tilt angle MEM platform
03/27/2003US20030056589 Micromachined devices
03/27/2003US20030056351 Piezoelectric macro-fiber composite actuator and method for making same
03/26/2003EP1296171A2 Electro-mechanical grating device having a continuously controllable diffraction efficiency
03/26/2003EP1296067A2 Passive microvalve
03/26/2003EP1295389A1 Nano-electromechanical filter
03/26/2003EP1295384A1 Electronic microcomponent, sensor and actuator incorporating same
03/26/2003EP1294635A1 Improved thermal bend actuator
03/26/2003EP1294494A2 Capacitive micromachined ultrasonic transducers
03/26/2003EP1294493A2 Capacitive micromachined ultrasonic transducers.
03/26/2003CN1405847A Anti-adsorption method for drying crystal wafer using centrifugal force and apparatus thereof
03/25/2003US6538816 Micro-electro mechanical based optical attenuator
03/25/2003US6538798 Process for fabricating stiction control bumps on optical membrane via conformal coating of etch holes
03/25/2003US6538296 Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore
03/25/2003US6538233 Laser release process for micromechanical devices
03/25/2003US6537437 Surface-micromachined microfluidic devices
03/25/2003US6536682 Actuator component for a microspray and its production process
03/25/2003US6536280 Thin film MEMS sensors employing electrical sensing and force feedback
03/25/2003US6536213 Micromachined parylene membrane valve and pump
03/20/2003WO2003023849A1 Microelectronic mechanical system and methods
03/20/2003WO2003023818A2 Electromechanical memory having cell selection circuitry constructed with nanotube technology
03/20/2003WO2003023414A1 Microstructure with movable mass
03/20/2003WO2003023363A2 Microcantilever apparatus and methods for detection of enzymes
03/20/2003WO2003022733A2 Nanotube films and articles
03/20/2003WO2003022732A2 Method for the production of a membrane
03/20/2003WO2003022731A1 Flexible structure with integrated sensor/actuator
03/20/2003US20030054588 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
03/20/2003US20030053227 Variable geometry mirror having high-precision, high geometry controllability
03/20/2003US20030052392 Support for microelectronic, microoptoelectronic or micromechanical devices
03/20/2003US20030051550 Mechanical resonator device having phenomena-dependent electrical stiffness
03/20/2003US20030051473 Microactuator arrangement
03/20/2003CA2459462A1 Microcantilever apparatus and methods for detection of enzymes
03/20/2003CA2454898A1 Electromechanical memory having cell selection circuitry constructed with nanotube technology
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