Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
06/2003
06/26/2003US20030116552 Heating element for microfluidic and micromechanical applications
06/26/2003US20030116528 Metal alloy elements in micromachined devices
06/26/2003US20030116417 MEMS device having contact and standoff bumps and related methods
06/26/2003US20030115960 Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same
06/24/2003US6583921 Micromechanical device and method for non-contacting edge-coupled operation
06/24/2003US6583920 Method of manufacturing a microstructure
06/24/2003US6583374 Thermal expansion resistant; suitable for variety of binary signals; compatibility with integrated circuit components; low cost
06/24/2003US6583031 Method of making a MEMS element having perpendicular portion formed from substrate
06/24/2003US6582985 SOI/glass process for forming thin silicon micromachined structures
06/24/2003US6582059 Discrete air and nozzle chambers in a printhead chip for an inkjet printhead
06/19/2003WO2003050854A2 Chemical reactor templates: sacrificial layer fabrication and template use
06/19/2003WO2003050852A2 Complex microdevices and appparatus and methods for fabricating such devices
06/19/2003US20030111603 Infrared light detection array and method of producing the same
06/19/2003US20030110867 Method for producing diaphragm sensor unit and diaphragm sensor unit
06/18/2003EP1318870A1 Positioning device for microtiter plates
06/18/2003CN1112085C Method and device for positioning and retaining micro-building-blocks
06/17/2003US6580781 Method of manufacturing a window transparent to electron rays, and window transparent to electron rays
06/17/2003US6580138 Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same
06/17/2003US6578816 Active micromechanical air valve for pressure control and method for making same
06/12/2003WO2003049514A2 Miniature rf and microwave components and methods for fabricating such components
06/12/2003WO2003048032A1 Production of microscopic and nanoscopic coils, transformers and capacitors by rolling or folding back conductive layers during the removal of auxiliary layers from a substrate
06/12/2003WO2002060045A3 High frequency pulse width modulation driver particularly useful for electrostatically actuated mems array
06/12/2003US20030107794 Micro mirror array
06/12/2003US20030107296 Lever mechanism for increasing displacement of micro-actuating device
06/12/2003US20030107034 Semiconductor optoelectronic device with electrically adjustable transfer function
06/11/2003EP1317762A1 Direct acting vertical thermal actuator
06/11/2003EP1317625A1 Micro-fluidic system
06/11/2003EP1317399A2 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
06/11/2003EP1317398A2 Thin film mems sensors employing electrical sensing and force feedback
06/11/2003EP1317397A2 Direct acting vertical thermal actuator with controlled bending
06/11/2003EP0929746B1 Micro-machined device for fluids and method of manufacture
06/11/2003CN1423755A MEMS optical switch and method of manufacture
06/11/2003CN1423141A 光学开关 Optical Switch
06/10/2003US6577431 System of angular displacement control for micro-mirrors
06/10/2003US6576489 Methods of forming microstructure devices
06/05/2003WO2003046508A2 High surface area substrates for microarrays and methods to make same
06/05/2003WO2003046473A1 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
06/05/2003WO2003045837A2 Stress control of semiconductor microstructures for thin film growth
06/05/2003WO2003045836A1 Differential stress reduction in thin films
06/05/2003WO2003045539A1 Thin film membrane structure
06/05/2003WO2002064495A3 Enhanced sacrificial layer etching technique for microstructure release
06/05/2003WO2002059678A3 Mems reconfigurable optical grating
06/05/2003WO2002051741A3 Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method
06/05/2003US20030104649 Method for making CMOS-based monolithic micro electromechanical system (MEMS) integrated circuits and integrated circuits made thereby
06/05/2003US20030104648 Micromechanical component and method of manufacturing a micromechanical component
06/05/2003US20030103717 Electrostatically actuated micro-electro-mechanical system (mems) device
06/05/2003US20030103109 Ink ejection mechanism having a thermal actuator that undergoes rectilinear motion
06/05/2003US20030102936 Lateral motion MEMS switch
06/05/2003US20030102771 Electrostatic actuator, and electrostatic microrelay and other devices using the same
06/05/2003US20030102552 In-situ cap and method of fabricating same for an integrated circuit device
06/05/2003US20030101818 Micromechanical component
06/05/2003US20030101792 Microgyro tuning using focused ion beams
06/05/2003US20030101721 MEMS actuators
06/04/2003EP1316977A2 Micromechanical actuator
06/04/2003EP1315993A2 Micromirror elements, package for the micromirror elements, and protection system therefor
06/04/2003EP1007873A4 Thermal microvalves
06/04/2003CN1422433A Microelectromechanical micro-relay with liquid metal contacts
06/03/2003US6574130 Hybrid circuit having nanotube electromechanical memory
06/03/2003US6574033 Microelectromechanical systems device and method for fabricating same
06/03/2003US6574026 Magnetically-packaged optical MEMs device
06/03/2003US6571630 Dynamically balanced microelectromechanical devices
06/03/2003US6571629 Micromechanical spring structure, in particular, for a rotation rate sensor
06/03/2003US6571628 Z-axis accelerometer
05/2003
05/30/2003CA2413387A1 Mems actuators
05/29/2003US20030100136 Thin film membrane structure
05/29/2003US20030099081 Micro-switching device actuated by low voltage
05/29/2003US20030099028 Micro-mechanical device having anti-stiction layer and method of manufacturing the device
05/29/2003US20030098618 Micro-electromechanical switch having a conductive compressible electrode
05/29/2003US20030098612 Proportional micromechanical device
05/28/2003EP1315016A2 Yokeless hidden hinge digital micromirror device
05/28/2003EP1314986A1 Electrostatic drive for accelerometer
05/28/2003EP1314687A2 Micro-switching device actuated by low voltage
05/27/2003US6570336 Display with micro light modulator
05/27/2003US6569754 Method for making a module including a microplatform
05/27/2003US6569702 Triple layer isolation for silicon microstructure and structures formed using the same
05/27/2003US6568286 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
05/27/2003US6568269 Thin polyimide membrane and silicon nitride membranes provided respectively on a pair of main surfaces
05/22/2003WO2003043189A2 Method for gap adjustment of two mechanical elements of a substantially planar micro-mechanical structure and corresponding electromechanical resonator
05/22/2003WO2003043095A2 Anchors for micro-electro-mechanical systems (mems) devices
05/22/2003WO2003043044A1 Mems device having a trilayered beam and related methods
05/22/2003WO2003043042A1 Mems device having electrothermal actuation and release and method for fabricating
05/22/2003WO2003043038A2 Mems device having contact and standoff bumps and related methods
05/22/2003WO2003042721A2 Trilayered beam mems device and related methods
05/22/2003WO2002061487A3 Optical switch based on rotating vertical micro-mirror
05/22/2003WO2002051743A3 Thin silicon micromachined structures
05/22/2003US20030096519 Microspring with conductive coating deposited on tip after release
05/22/2003US20030096310 Microfluidic free interface diffusion techniques
05/22/2003US20030095318 Yokeless hidden hinge digital micromirror device
05/22/2003US20030094047 Method of manufacturing a membrane sensor
05/22/2003US20030093895 Connecting member, a micro-switch, a method for manufacturing a connecting member, and a method for manufacturing a micro-switch
05/21/2003EP1313216A2 Temperature compensation mechanism for a micromechanical ring resonator
05/21/2003EP1313215A2 Temperature compensation mechanism for a micromechanical ring resonator
05/21/2003EP1312163A2 Micromechanical resonator and filter using the same
05/21/2003EP1311863A1 Accelerometer with folded beams
05/21/2003EP1311455A2 Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby
05/21/2003CN1419702A Electronically switching latching micro-magnetic relay and method of operating same
05/20/2003US6567448 Scanning III-V compound light emitters integrated with Si-based actuators
05/20/2003US6566725 Thermal isolation using vertical structures
05/20/2003US6566617 Micromachine switch and its production method
05/20/2003US6565765 Method for manufacturing a sensor having a membrane
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